JPH0364480B2 - - Google Patents

Info

Publication number
JPH0364480B2
JPH0364480B2 JP61204940A JP20494086A JPH0364480B2 JP H0364480 B2 JPH0364480 B2 JP H0364480B2 JP 61204940 A JP61204940 A JP 61204940A JP 20494086 A JP20494086 A JP 20494086A JP H0364480 B2 JPH0364480 B2 JP H0364480B2
Authority
JP
Japan
Prior art keywords
single crystal
sic
substrate
silicon carbide
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61204940A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6360199A (ja
Inventor
Masaki Furukawa
Akira Suzuki
Mitsuhiro Shigeta
Atsuko Uemoto
Yoshihisa Fujii
Akitsugu Hatano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP61204940A priority Critical patent/JPS6360199A/ja
Publication of JPS6360199A publication Critical patent/JPS6360199A/ja
Publication of JPH0364480B2 publication Critical patent/JPH0364480B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP61204940A 1986-08-30 1986-08-30 炭化珪素単結晶の製造方法 Granted JPS6360199A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61204940A JPS6360199A (ja) 1986-08-30 1986-08-30 炭化珪素単結晶の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61204940A JPS6360199A (ja) 1986-08-30 1986-08-30 炭化珪素単結晶の製造方法

Publications (2)

Publication Number Publication Date
JPS6360199A JPS6360199A (ja) 1988-03-16
JPH0364480B2 true JPH0364480B2 (ko) 1991-10-07

Family

ID=16498865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61204940A Granted JPS6360199A (ja) 1986-08-30 1986-08-30 炭化珪素単結晶の製造方法

Country Status (1)

Country Link
JP (1) JPS6360199A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416738B1 (ko) * 1996-12-30 2004-04-21 삼성전기주식회사 기상결정성장법에의한ZnSe단결정제조장치
JP3631366B2 (ja) * 1998-03-11 2005-03-23 株式会社神戸製鋼所 単結晶ダイヤモンド合成用基板
JP5051875B2 (ja) * 2006-12-25 2012-10-17 東京エレクトロン株式会社 成膜装置および成膜方法

Also Published As

Publication number Publication date
JPS6360199A (ja) 1988-03-16

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