JPH036565B2 - - Google Patents
Info
- Publication number
- JPH036565B2 JPH036565B2 JP28083185A JP28083185A JPH036565B2 JP H036565 B2 JPH036565 B2 JP H036565B2 JP 28083185 A JP28083185 A JP 28083185A JP 28083185 A JP28083185 A JP 28083185A JP H036565 B2 JPH036565 B2 JP H036565B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- yoke
- magnetic yoke
- conductor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 144
- 239000010409 thin film Substances 0.000 claims description 27
- 239000010408 film Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 23
- 239000004020 conductor Substances 0.000 claims description 20
- 230000004907 flux Effects 0.000 claims description 13
- 238000001514 detection method Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
- G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
- G11B5/3922—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure
- G11B5/3925—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure the two parts being thin films
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は強磁性薄膜からなる磁気抵抗効果素子
を用いた磁気ヘツドに係り、特に、磁気ヨークに
よつて磁気テープ上に記録された信号磁束を磁気
抵抗効果素子に導く磁気ヨーク型の磁気抵抗効果
型薄膜磁気ヘツドに関する。Detailed Description of the Invention (Industrial Application Field) The present invention relates to a magnetic head using a magnetoresistive element made of a ferromagnetic thin film, and particularly relates to a magnetic head that uses a magnetoresistive element made of a ferromagnetic thin film. The present invention relates to a magnetic yoke-type magnetoresistive thin film magnetic head that guides magnetic field to a magnetoresistive element.
（従来の技術）
従来、強磁性薄膜からなる磁気抵抗効果素子
（以下、MR素子と称す）を利用した磁気抵抗効
果型薄膜磁気ヘツド（以下、MR薄型ヘツドと称
す）は、コイルを利用した電磁誘導型薄膜磁気ヘ
ツドと比較すると、磁気テープ低速走行時におけ
る再生感度は高く、しかも、狭トラツク化が容易
なことから高密度磁気記録におけるマルチトラツ
ク磁気ヘツドとして利用されている。この種の
MR薄膜ヘツドとしては、従来、MR素子を磁気
テープ摺動面に直接露出させた、いわゆるシール
ド型及びノン・シールド型と称されるものと、磁
気ヨークを用いて磁束を内部のMR素子に導く、
いわゆるヨーク型がある。(Prior art) Conventionally, a magnetoresistive thin-film magnetic head (hereinafter referred to as MR thin head) that uses a magnetoresistive element (hereinafter referred to as MR element) made of a ferromagnetic thin film is an electromagnetic head that uses a coil. Compared to an inductive thin film magnetic head, the reproduction sensitivity when the magnetic tape runs at low speed is high, and it is easy to narrow the track, so it is used as a multi-track magnetic head in high-density magnetic recording. this kind of
Conventional MR thin-film heads include the so-called shielded and non-shielded types, in which the MR element is directly exposed on the sliding surface of the magnetic tape, and the magnetic yoke that guides the magnetic flux to the internal MR element. ,
There is a so-called yoke type.
第４図は従来のヨーク型によるMR薄膜ヘツド
の断面図を示す。同図において、１は従来のMR
薄膜ヘツドであり、２はMn−Znフエライトある
いは、Ni−Znフエライト等からなる磁性基板で、
磁気テープ摺動面となる壁面２ａとこの壁面２ａ
に対して略垂直な平面２ｂとを有している。 FIG. 4 shows a sectional view of a conventional yoke type MR thin film head. In the figure, 1 is the conventional MR
It is a thin film head, and 2 is a magnetic substrate made of Mn-Zn ferrite or Ni-Zn ferrite.
Wall surface 2a that serves as a sliding surface for the magnetic tape and this wall surface 2a
The plane 2b is substantially perpendicular to the plane 2b.
３は、例えば、SiO2等の磁気的及び電気的絶
縁膜からなる磁気ギヤツプで、既知の薄膜形成手
段によつて磁性基板２の平面２ｂの上に設けられ
る。 Reference numeral 3 denotes a magnetic gap made of a magnetically and electrically insulating film such as SiO2 , which is provided on the flat surface 2b of the magnetic substrate 2 by known thin film forming means.
４は後記するMR素子にバイアス磁界を与える
ための導体で、Al，Al−Cu，Mo等の金属から
なる。 4 is a conductor for applying a bias magnetic field to the MR element to be described later, and is made of metal such as Al, Al-Cu, Mo, etc.
５は導体４を覆う如く設けたAl2O3あるいは
SiO2からなる電気絶縁膜である。 5 is Al 2 O 3 or Al 2 O 3 provided so as to cover the conductor 4.
It is an electrical insulating film made of SiO 2 .
６はNi−Fe，Ni−Co等の薄膜からなるMR素
子で、電気絶縁膜５を介して導体４上に設けられ
る。 Reference numeral 6 denotes an MR element made of a thin film of Ni--Fe, Ni--Co, etc., which is provided on the conductor 4 with an electrical insulating film 5 interposed therebetween.
７はMR素子６を絶縁するためのAl2O3あるい
はSiO2からなる電気絶縁膜である。 Reference numeral 7 denotes an electrical insulating film made of Al 2 O 3 or SiO 2 for insulating the MR element 6 .
８は電気絶縁膜３，５，７を介して導体４上に
設けられる前方磁気ヨークであり、その一端部８
ａは磁気ギヤツプ３ａを介して磁性基板２と対峙
しており、壁面２ａと共にテープ摺動面の一部８
ｂを形成するとともに、紙面に対してほぼ垂直方
向に図示しない記録トラツク幅相当のコア幅を有
している。 8 is a front magnetic yoke provided on the conductor 4 via the electrical insulating films 3, 5, and 7;
a faces the magnetic substrate 2 through the magnetic gap 3a, and is part of the tape sliding surface 8 along with the wall surface 2a.
b, and has a core width equivalent to the width of a recording track (not shown) in a direction substantially perpendicular to the plane of the paper.
９は前方磁気ヨーク８同様、電気絶縁膜３，
５，７を介して導体４上に設けられる後方磁気ヨ
ークであり、その一端部９ａは前方磁気ヨーク８
の他端部８ｃと共にMR素子６に磁束を供給する
ためのセンサーギヤツプSGを構成するとともに、
他端部９ｂは磁性基板２の平面２ｂ上に接続され
ている。上記の構成から、前方磁気ヨーク８，セ
ンサーギヤツプSG，後方磁気ヨーク９，磁性基
板１及び磁気ギヤツプ３ａからなる１つの磁気閉
回路Ｓを考えることが出来、導体４とMR素子６
はこの磁気閉回路Ｓの中に配設されている。 Similar to the front magnetic yoke 8, 9 is an electrical insulating film 3,
It is a rear magnetic yoke provided on the conductor 4 via 5 and 7, and its one end 9a is connected to the front magnetic yoke 8.
Together with the other end 8c, it constitutes a sensor gap SG for supplying magnetic flux to the MR element 6, and
The other end 9b is connected to the flat surface 2b of the magnetic substrate 2. From the above configuration, it is possible to consider one magnetic closed circuit S consisting of the front magnetic yoke 8, sensor gap SG, rear magnetic yoke 9, magnetic substrate 1, and magnetic gap 3a, and conductor 4 and MR element 6.
is arranged in this magnetic closed circuit S.
上述の如く、前方磁気ヨーク８と後方磁気ヨー
ク９は段差を有する絶縁膜１４，１６の上に設け
られるため、これらの磁気ヨーク８，９には急勾
配を有する段差d1，d2等が生じている。 As mentioned above, since the front magnetic yoke 8 and the rear magnetic yoke 9 are provided on the insulating films 14 and 16 having steps, these magnetic yokes 8 and 9 have steps d 1 , d 2 and the like having steep slopes. It is occurring.
上記の構成において、テープ摺動面２ａ，８ｂ
上を走行する図示しない磁気テープからの信号磁
束は壁面２ａと前方磁気ヨーク８のテープ摺動面
の一部８ｂとをそれぞれ始端あるいは終端とする
磁気閉回路Ｓ内を流れるが、このとき、センサー
ギヤツプSGを通る磁束の一部が漏洩磁束となつ
てMR素子中を流れるから、磁束の変化による
MR素子の低抗値の変化は既知の電気回路を経て
出力電圧の変化、すなわち再生出力として外部に
取り出される。 In the above configuration, the tape sliding surfaces 2a, 8b
A signal magnetic flux from a magnetic tape (not shown) running above flows in a magnetic closed circuit S whose starting and ending points are the wall surface 2a and a portion 8b of the tape sliding surface of the front magnetic yoke 8, respectively. A part of the magnetic flux passing through the SG becomes leakage magnetic flux and flows through the MR element, so due to changes in magnetic flux.
A change in the low resistance value of the MR element is outputted to the outside as a change in output voltage, that is, a reproduction output, through a known electric circuit.
この時、導体４には、MR素子６の抵抗変化率
が最も大きくなるようなバイアス電界を与える電
流が与えられる。 At this time, a current is applied to the conductor 4 to provide a bias electric field that maximizes the rate of change in resistance of the MR element 6.
上述した従来のヨーク型MR薄膜ヘツドの問題
点としては、
一 前方及ビ後方磁気ヨーク８，９のパターンを
フオトエツチングによつて絶縁膜７上に形成す
る際、絶縁膜７は導体４の上に設けられている
ため凹凸部を有しており、この上に設けられる
前方及び後方磁気ヨーク８，９のパターンはこ
れにより段差d1，d2を生じる結果、上記パター
ンを精度よく形成することが出来ない。 The problems with the conventional yoke type MR thin film head described above are: 1. When forming the patterns of the front and rear magnetic yokes 8 and 9 on the insulating film 7 by photo-etching, the insulating film 7 is placed on the conductor 4; The pattern of the front and rear magnetic yokes 8 and 9 provided on the magnetic yokes 8 and 9 has an uneven part because of this, and this creates steps d 1 and d 2 , making it difficult to form the above-mentioned pattern with high precision. I can't.
二 前方及び後方磁気ヨーク８，９の段差d1，d2
等の部分は磁気特性、特に透磁率μが劣化する
傾向があり、その結果、磁気ヘツドとしての再
生効率の低下をもたらす。2. Steps d 1 and d 2 between the front and rear magnetic yokes 8 and 9
The magnetic properties, especially the magnetic permeability μ, tend to deteriorate in these parts, resulting in a reduction in the reproduction efficiency of the magnetic head.
三 図示しない平坦な保護基板を前方及び後方磁
気ヨーク８，９の表面上に接着剤を介して設
け、耐摩耗性に富んだ磁気ヘツドを構成する場
合、段差d1及びd2のために生じた接着層はテー
プの走行によつて摩耗しやすく、また摩耗によ
つて生じた凹みにはゴミが付きやすくなる結
果、スペーシングロスを引き起し、再生出力を
低下させる等の問題点があつた。3. When a flat protective substrate (not shown) is provided on the surfaces of the front and rear magnetic yokes 8, 9 with an adhesive to form a highly wear-resistant magnetic head, the difference caused by the steps d1 and d2 . The adhesive layer is easily worn out by the running of the tape, and the dents caused by the wear tend to attract dust, which causes problems such as spacing loss and reduced playback output. Ta.
（問題点を解決するための手段）
本発明は上記問題点を解決するためになされた
もので磁気テープ摺動面となる壁面と、この壁面
に対してほぼ垂直に形成した平面とを有する基板
を設け、上記壁面を含む平面上に平坦部を有する
切欠部を形成すると共に、少なくともこの平坦部
を強磁性体によつて構成し、この平坦部上に電気
絶縁膜を介して設けられたバイアス磁界を与える
ための導体と、この導体によつて第１の前方磁気
ヨーク及び第１の後方磁気ヨークとに分離された
第１の磁気ヨークとを上記基板の平面と同一平面
を構成する如く設け、更に上記導体の近傍に磁気
ギヤツプとなるべき電気絶縁膜を介して磁気抵抗
素子を設けると共に、この磁気抵抗効果素子に磁
束を与えるためのセンサーギヤツプを形成する第
２の前方及び後方磁気ヨークからなる第２の磁気
ヨークを前記第１の磁気ヨークと磁気的に接合す
る如く設けたことを特徴とする磁気抵抗効果型薄
膜磁気ヘツドを提供しようとするものである。(Means for Solving the Problems) The present invention has been made to solve the above problems, and is a substrate having a wall surface serving as a sliding surface for a magnetic tape and a flat surface formed substantially perpendicular to the wall surface. A cutout portion having a flat portion is formed on a plane including the wall surface, and at least this flat portion is made of a ferromagnetic material, and a bias is provided on the flat portion via an electrical insulating film. A conductor for applying a magnetic field and a first magnetic yoke separated by the conductor into a first front magnetic yoke and a first rear magnetic yoke are provided so as to be coplanar with the plane of the substrate. Further, a magnetoresistive element is provided near the conductor via an electrical insulating film to form a magnetic gap, and second front and rear magnetic yokes form a sensor gap for applying magnetic flux to the magnetoresistive element. It is an object of the present invention to provide a magnetoresistive thin film magnetic head characterized in that a second magnetic yoke is provided so as to be magnetically connected to the first magnetic yoke.
（実施例）
第１図は本発明になるヨーク型MR薄膜ヘツド
の第１実施例を示す一部欠截斜視図であり、MR
薄膜ヘツドを複数個設けた場合を示す。第２図は
第１図のＩ−Ｉ線に沿う要部断面図である。(Embodiment) FIG. 1 is a partially cutaway perspective view showing a first embodiment of a yoke type MR thin film head according to the present invention.
This figure shows the case where multiple thin film heads are provided. FIG. 2 is a sectional view of a main part taken along line II in FIG. 1.
以下、第１図，第２図を用いて説明する。 This will be explained below using FIGS. 1 and 2.
図中、１０は本発明になるMR薄膜ヘツドであ
る。１１は、例えばMn−Znフエライトからなる
磁性基板であり、磁気テープの摺動面１２となる
壁面１１ａとこの壁面１１ａに対してほぼ垂直に
形成した平面１１ｂとを有している。 In the figure, 10 is an MR thin film head according to the present invention. Reference numeral 11 denotes a magnetic substrate made of, for example, Mn--Zn ferrite, and has a wall surface 11a serving as the sliding surface 12 of the magnetic tape and a flat surface 11b formed substantially perpendicular to the wall surface 11a.
１３は壁面１１ａを含む平面１１ｂに設けられ
た切欠部であり、壁面１１ａに対してほぼ垂直な
長方形状の平坦面１３ａを有している。 A notch 13 is provided in a plane 11b that includes the wall surface 11a, and has a rectangular flat surface 13a that is substantially perpendicular to the wall surface 11a.
１４は、例えば、SiO2等からなる絶縁膜で、
切欠部１３の内壁上に設けられ、後記する導体１
７と切欠部１３の内壁との電気的絶縁の役割を果
すものである。 14 is an insulating film made of SiO 2 or the like, for example;
A conductor 1 provided on the inner wall of the notch 13 and described later
7 and the inner wall of the notch 13 .
１５は、例えば、パーマロイ，センダスト（登
録商標）等の軟磁性膜からなる第１の前方磁気ヨ
ークであり、記壁面１１ａと共に形成されるテー
プ摺動面１５ａと磁性基板１１の平面１１ｂと同
一高さを有する前方平面部１５ｂを有している。 Reference numeral 15 denotes a first front magnetic yoke made of a soft magnetic film such as permalloy or Sendust (registered trademark), and the tape sliding surface 15a formed together with the recording wall surface 11a is at the same height as the flat surface 11b of the magnetic substrate 11. It has a front plane part 15b having a shape.
１６は第１の後方磁気ヨークであり、第１の前
方磁気ヨーク１５と同じ材料で、しかもこれと対
向する如く切欠部１３の内部に設けられており、
第１の前方磁気ヨーク１５と同様、平面１１ｂと
同一高さの後方平面部１６ａを有している。第１
の前方及び後方磁気ヨーク１５，１６は切欠部１
３の内部に電気絶縁膜１４ａ，１４ｂ等を介して
必要な磁気ヘツドの数だけ設けられる。 Reference numeral 16 denotes a first rear magnetic yoke, which is made of the same material as the first front magnetic yoke 15 and is provided inside the notch 13 so as to face it.
Like the first front magnetic yoke 15, it has a rear plane portion 16a having the same height as the plane 11b. 1st
The front and rear magnetic yokes 15 and 16 of the notch 1
A required number of magnetic heads are provided inside the magnetic head 3 via electrical insulating films 14a, 14b, etc.
１７はMR素子１９にバイアス磁界を与えるた
めの導体で、例えばAlなどの金属からなり、第
１の前方及び後方磁気ヨーク１５，１６とは絶縁
膜１４を介して電気的及び磁気的に絶縁されて切
欠部１３の内部に設けられており、その上面１７
ａは第１の前方及び後方ヨーク１５，１６と同
様、磁性基板１１の平面１１ｂと同一高さを有し
ている。 A conductor 17 is made of a metal such as Al for applying a bias magnetic field to the MR element 19, and is electrically and magnetically insulated from the first front and rear magnetic yokes 15 and 16 via an insulating film 14. is provided inside the notch 13, and its upper surface 17
Similarly to the first front and rear yokes 15 and 16, a has the same height as the flat surface 11b of the magnetic substrate 11.
１７ａは第１の前方磁気ヨーク１５の平面部１
５ｂと第１の後方磁気ヨーク１６の平面部１６ａ
とを分離している分離導体面である。１８は
SiO2等からなる電気絶縁膜であり磁気テープ摺
動面１２上においては磁気ギヤツプ１８ａを形成
している。 17a is the flat part 1 of the first front magnetic yoke 15;
5b and the flat part 16a of the first rear magnetic yoke 16
It is a separate conductor surface that separates the 18 is
It is an electrically insulating film made of SiO 2 or the like, and forms a magnetic gap 18a on the magnetic tape sliding surface 12.
１９は前述の如くMR素子であり、例えば、Ni
−Feの薄膜からなり、幅Ｐを有する磁束検出部
１９ａとこの磁束検出部に延在して設けられる接
続部１９ｂ等からなる。磁束検出部１９ａは電気
絶縁膜１８を介して分離導体面１７ａ上に配設さ
れている。２０と２１はそれぞれ、例えばパーマ
ロイ，センダスト（登録商標）等の軟磁性膜から
なる第２の前方磁気ヨークを第２の後方磁気ヨー
クである。第２の前方磁気ヨーク２０の一端部２
０ａは磁気ギヤツプ１８ａを介して磁気テープ摺
動面１２の一部を構成する如く、また、他端部２
０ｂは電気絶縁膜２２を介してMR素子１９の磁
束検出部１９ａ上に位置する如く設けられる。第
２の後方磁気ヨーク２１の一端部２１ａは電気絶
縁膜２２を介して、第２の前方磁気ヨーク２０の
他端部２０ｂと対向する如くMR素子１９の磁束
検出部１９ａ上に設けられ、第２の前方磁気ヨー
ク２０の他端部２０ｂと共に幅ｇなるセンサーギ
ヤツプ２３を形成している。第２の後方磁気ヨー
ク２１の他端部２１ｂは第１の後方磁気ヨーク１
６の後方平面部１６ａ及び平面１１ｂ上に接続さ
れ磁気回路２４を形成している。 19 is the MR element as mentioned above, for example, Ni
-The magnetic flux detection section 19a is made of a thin film of Fe and has a width P, and the connection section 19b is provided extending from the magnetic flux detection section. The magnetic flux detection section 19a is arranged on the separated conductor surface 17a via the electrical insulating film 18. Reference numerals 20 and 21 denote a second front magnetic yoke made of a soft magnetic film such as Permalloy or Sendust (registered trademark), and a second rear magnetic yoke, respectively. One end 2 of the second front magnetic yoke 20
0a constitutes a part of the magnetic tape sliding surface 12 via the magnetic gap 18a, and the other end 2
0b is provided so as to be located above the magnetic flux detection section 19a of the MR element 19 via the electrical insulating film 22. One end portion 21a of the second rear magnetic yoke 21 is provided on the magnetic flux detection portion 19a of the MR element 19 so as to face the other end portion 20b of the second front magnetic yoke 20 via the electrical insulating film 22. Together with the other end 20b of the two front magnetic yokes 20, a sensor gap 23 having a width g is formed. The other end 21b of the second rear magnetic yoke 21 is connected to the first rear magnetic yoke 1.
The magnetic circuit 24 is connected to the rear plane portion 16a and the plane 11b of 6.
上述した本発明の構成における作用、動作は従
来例と同様のため説明は省略する。 The functions and operations of the configuration of the present invention described above are the same as those of the conventional example, and therefore the description thereof will be omitted.
また、上述の構成において第４図に示す従来例
の構成と異なる点は、第１の前方磁気ヨーク１５
と第１の後方磁気ヨーク１６及び導体１７を切換
部１３内に設けることにより、磁性基板の平面１
１ｂと同じ高さを有する平面を形成したことと、
この平面上に磁気ギヤツプ１８ａを構成する電気
絶縁膜１８を介してMR素子１９を配設し、更に
この上にセンサーギヤツプ２３を構成する第２の
前方及び後方磁気ヨーク２０，２１を設けた点で
ある。その結果、第２の前方及び後方磁気ヨーク
２０，２１を製作するためのパターンを精度よく
設けることが出来るから、これに基く磁性薄膜か
らなる前方及び後方磁気ヨーク２０，２１も精度
よく形成することが可能となり、しかも段差がほ
とんど生じないため段差による磁気特性の劣化も
生じない。 Furthermore, the above-mentioned configuration differs from the conventional configuration shown in FIG. 4 in that the first front magnetic yoke 15
By providing the first rear magnetic yoke 16 and the conductor 17 in the switching section 13, the flat surface 1 of the magnetic substrate
Forming a plane having the same height as 1b,
The MR element 19 is disposed on this plane via the electrical insulating film 18 constituting the magnetic gap 18a, and the second front and rear magnetic yokes 20 and 21 constituting the sensor gap 23 are further provided on this plane. be. As a result, the patterns for manufacturing the second front and rear magnetic yokes 20 and 21 can be provided with high precision, so that the front and rear magnetic yokes 20 and 21 made of magnetic thin films based on this pattern can also be formed with high precision. is possible, and since there are almost no steps, there is no deterioration of magnetic properties due to steps.
また、図示しない保護基板を第２の前方及び後
方磁気ヨーク２０，２１上に接着し、耐摩耗性に
富んだ磁気ヘツドを構成する場合でも段差が少な
いため接着層を薄くすることが出来、接着層の摩
耗の影響を受けないMR薄膜ヘツドの製造を可能
とする。 Furthermore, even when a protective substrate (not shown) is bonded onto the second front and rear magnetic yokes 20, 21 to form a highly wear-resistant magnetic head, the adhesive layer can be made thinner because there are fewer steps. This makes it possible to manufacture MR thin film heads that are not affected by layer wear.
第３図は本発明になる第２の実施例を示す断面
図である。 FIG. 3 is a sectional view showing a second embodiment of the present invention.
第１図及び第２図に示す本発明の第１実施例と
異なる点のみを記述するならば、磁性基板１１の
かわりに、例えば、セラミツク等の非磁性体から
なる非磁性基板３１を用いた点である。 The only difference from the first embodiment of the present invention shown in FIGS. 1 and 2 is that instead of the magnetic substrate 11, a non-magnetic substrate 31 made of a non-magnetic material such as ceramic is used. It is a point.
非磁性基板３１は磁気テープの摺動面１２とな
る壁面３１ａとこの壁面３１ａに対してほぼ垂直
方向に形成した平面３１ｂを有している。 The non-magnetic substrate 31 has a wall surface 31a serving as the sliding surface 12 of the magnetic tape and a flat surface 31b formed substantially perpendicular to the wall surface 31a.
更に、非磁性基板３１には壁面３１ａを含む平
面３１ｂに、壁面３１ａに対してほぼ垂直な長方
形状の平坦面３２ａを有する切欠部３２が形成さ
れていると共に、この切欠部３２の内壁には軟磁
性薄膜３３が設けられている点である。 Furthermore, a notch 32 having a rectangular flat surface 32a substantially perpendicular to the wall 31a is formed in the non-magnetic substrate 31 on a plane 31b including the wall 31a, and the inner wall of the notch 32 has a rectangular flat surface 32a. This is because a soft magnetic thin film 33 is provided.
非磁性基板３１の切欠部３２の内壁に軟磁性薄
膜３３を設けことにより、第２図に示した磁気回
路２４と同等の磁気回路３４を構成することが可
能となる。 By providing the soft magnetic thin film 33 on the inner wall of the notch 32 of the non-magnetic substrate 31, it becomes possible to construct a magnetic circuit 34 equivalent to the magnetic circuit 24 shown in FIG.
他の構成及び効果等は第１実施例と同様のため
説明は省略する。 Other configurations, effects, etc. are the same as those of the first embodiment, so explanations thereof will be omitted.
（発明の効果）
本発明は、上述のように構成されたものである
から、
一 磁気ヨークは段差による磁気特性の劣化を受
けず、再生効率の優れたMR薄膜ヘツドをうる
ことができる。(Effects of the Invention) Since the present invention is constructed as described above, (1) the magnetic yoke does not suffer from deterioration of magnetic properties due to differences in level, and an MR thin film head with excellent reproduction efficiency can be obtained.
二 保護基板を磁気ヨーク面に接着した磁気ヘツ
ドを構成する際、磁気ヨーク面はMR素子を除
いて同一平面となつているため、テープ摺動部
の接着層を薄くすることが出来るから、接着層
はテープ走行による摩耗の影響を受けることが
ない。2. When configuring a magnetic head in which a protective substrate is bonded to a magnetic yoke surface, since the magnetic yoke surface is on the same plane except for the MR element, the adhesive layer on the tape sliding part can be made thinner. The layer is not affected by wear due to tape running.
三 精度の良いセンサーギヤツプとMR素子との
構成を可能とし、製造上バラツキの少ないMR
素子薄膜ヘツドを製造することができる等の効
果を有するものである。3. MR with less manufacturing variation by enabling configuration of highly accurate sensor gap and MR element.
This has advantages such as being able to manufacture element thin film heads.
第１図は本発明になるヨーク型MR薄膜ヘツド
の第１実施例を示す一部欠截斜視図、第２図は第
１図のＩ−Ｉ線に沿う要部断面図、第３図は本発
明になる第２実施例の要部断面図、第４図は従来
のヨーク型による磁気抵抗効果型薄膜磁気ヘツド
の断面図である。
１１…磁性基板、１１ａ，３１ａ…壁面、１１
ｂ，３１ｂ…平面、１２…磁気テープ摺動部、１
３，３２…切欠部、１４，１８，２２…電気絶縁
膜、１８ａ…磁気ギヤツプ、１５…第１の前方磁
気ヨーク、１６…第１の後方磁気ヨーク、１７…
導体、１９…磁気抵抗効果素子（MR素子）、２
０…第２の前方磁気ヨーク、２１…第２の後方磁
気ヨーク、２３…センサーギヤツプ、３１…非磁
性基板、３３…軟磁性薄膜。
FIG. 1 is a partially cutaway perspective view showing a first embodiment of a yoke type MR thin film head according to the present invention, FIG. FIG. 4 is a cross-sectional view of a main part of a second embodiment of the present invention, and FIG. 4 is a cross-sectional view of a conventional yoke-type magnetoresistive thin film magnetic head. 11...Magnetic substrate, 11a, 31a...Wall surface, 11
b, 31b...plane, 12...magnetic tape sliding part, 1
3, 32... Notch, 14, 18, 22... Electrical insulating film, 18a... Magnetic gap, 15... First front magnetic yoke, 16... First rear magnetic yoke, 17...
Conductor, 19... Magnetoresistive element (MR element), 2
0...Second front magnetic yoke, 21...Second rear magnetic yoke, 23...Sensor gap, 31...Nonmagnetic substrate, 33...Soft magnetic thin film.
Claims (1)
対してほぼ垂直に形成した平面とを有する基板を
設け、上記壁面を含む平面上に平坦部を有する切
欠部を形成すると共に、少なくともこの平坦部を
強磁性体によつて構成し、この平坦部上に電気絶
縁膜を介して設けられたバイアス磁界を与えるた
めの導体と、この導体によつて第１の前方磁気ヨ
ーク及び第１の後方磁気ヨークとに分離された第
１の磁気ヨークとを上記基板の平面と同一平面を
構成する如く設け、更に上記導体の近傍に磁気ギ
ヤツプとなるべき電気絶縁膜を介して磁気抵抗効
果素子を設けると共に、この磁気抵抗効果素子に
磁束を与えるためのセンサーギヤツプを形成する
第２の前方及び後方磁気ヨークからなる第２の磁
気ヨークを前記第１の磁気ヨークと磁気的に接合
する如く設けたことを特徴とする磁気抵抗効果型
薄膜磁気ヘツド。1. A substrate is provided that has a wall surface that serves as a sliding surface for the magnetic tape, and a flat surface formed substantially perpendicular to the wall surface, and a cutout portion having a flat portion is formed on the flat surface that includes the wall surface, and at least this flat surface is formed. A conductor for applying a bias magnetic field is provided on the flat part through an electrical insulating film, and a first front magnetic yoke and a first rear magnetic yoke are formed by this conductor. A first magnetic yoke separated from the magnetic yoke is provided so as to be coplanar with the plane of the substrate, and a magnetoresistive element is further provided in the vicinity of the conductor via an electrical insulating film to serve as a magnetic gap. In addition, a second magnetic yoke consisting of a second front and rear magnetic yoke forming a sensor gap for applying magnetic flux to the magnetoresistive element is provided so as to be magnetically connected to the first magnetic yoke. Features a magnetoresistive thin film magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28083185A JPS62140218A (en) | 1985-12-13 | 1985-12-13 | Magneto-resistance effect type thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28083185A JPS62140218A (en) | 1985-12-13 | 1985-12-13 | Magneto-resistance effect type thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62140218A JPS62140218A (en) | 1987-06-23 |
| JPH036565B2 true JPH036565B2 (en) | 1991-01-30 |
Family
ID=17630590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28083185A Granted JPS62140218A (en) | 1985-12-13 | 1985-12-13 | Magneto-resistance effect type thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62140218A (en) |
-
1985
- 1985-12-13 JP JP28083185A patent/JPS62140218A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62140218A (en) | 1987-06-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR950003886B1 (en) | Thin film nagnetic head for perpendicular recording and reproducing | |
| EP0689196B1 (en) | Planar thin film magnetic head | |
| EP0521564B1 (en) | Thin-film magnetic head | |
| US5097372A (en) | Thin film magnetic head with wide recording area and narrow reproducing area | |
| KR930001145B1 (en) | Magnetic head for recording and reproducing and manufacturing method thereof | |
| US5241439A (en) | Combined read/write thin film magnetic head with two pairs of flux guides | |
| US5394285A (en) | Multi-track longitudinal, metal-in-gap head | |
| US4354212A (en) | Magnetic head and method of production thereof | |
| EP0204902A2 (en) | Yoke type magnetic transducer head utilizing a magnetoresistance effect | |
| EP0516022B1 (en) | Integrated thin film magnetic head | |
| JP2505465B2 (en) | Yoke type thin film magnetic head | |
| US5905610A (en) | Combined read/write magnetic head having MRE positioned between broken flux guide and non-magnetic substrate | |
| US4369477A (en) | Magnetic head and method of manufacturing the same | |
| JPH064832A (en) | Composite thin film magnetic head | |
| JPH0346884B2 (en) | ||
| JPH0291807A (en) | Composite thin-film magnetic head | |
| JPH036565B2 (en) | ||
| EP0482642B1 (en) | Composite magnetoresistive thin-film magnetic head | |
| JPH07153022A (en) | Thin-film magnetic head | |
| JPH08316547A (en) | Magneto-detecting element and manufacture thereof | |
| JPS626420A (en) | Thin film magnetic head | |
| JPH08235537A (en) | Composite thin film magnetic head | |
| JPH0689410A (en) | Magnetic head | |
| JPS63113913A (en) | Magnetoresistance effect type thin film magnetic head and its production | |
| JPH0444322B2 (en) |