JPH0367135A - Radiation thermometer - Google Patents

Radiation thermometer

Info

Publication number
JPH0367135A
JPH0367135A JP20353489A JP20353489A JPH0367135A JP H0367135 A JPH0367135 A JP H0367135A JP 20353489 A JP20353489 A JP 20353489A JP 20353489 A JP20353489 A JP 20353489A JP H0367135 A JPH0367135 A JP H0367135A
Authority
JP
Japan
Prior art keywords
measurement
temp
measured
wavelength side
emissivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20353489A
Other languages
Japanese (ja)
Inventor
Isao Hishikari
功 菱刈
Yukio Matsui
幸雄 松井
Kazuo Noda
野田 一生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP20353489A priority Critical patent/JPH0367135A/en
Publication of JPH0367135A publication Critical patent/JPH0367135A/en
Pending legal-status Critical Current

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  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To allow correct temp. measurement even in the process of oxidation of a material to be measured of fluctuating emissivities by making temp. measurement in accordance with the max. output among the outputs corresponding to the wavelengths of detectors with a measuring means. CONSTITUTION:The measuring means 7 decides, computes and outputs the signal for the wavelength to provide the max. output with which the emissivity is nearly 1 and which is high in indicated value and is approximate to the true temp. among the outputs of the detectors 41, 42 with respect to the plural wavelengths separated by a separating means 3, such as rotating sector as a temp. signal. The correct temp. measurement is possible even in the process of the oxidation of the material to be measured by such multiwavelength measurement. The measurement is first carried out on the short wavelength side and the measuring wavelength is successively switched to the long wavelength side and the measurement is made when the indication on the short wavelength side comes to change even if the indication on the long wavelength side by the growth of the oxide film is slightly low and remains stable. The stable temp. measurement in the process of the oxidation of a steel sheet, etc., is then executed.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、被測定物の温度を非接触で測定する放射温
度計に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a radiation thermometer that measures the temperature of an object in a non-contact manner.

[従来の技術] 従来、温度計として、非接触で被測定物の温度を測定す
る放射温度計が知られている。
[Prior Art] Conventionally, radiation thermometers that measure the temperature of a measured object in a non-contact manner are known as thermometers.

[この発明が解決しようとする課題] しかしながら、被測定物の放射率が未知の場合、正しい
測温が困難で、特に、鋼板等の酸化過程での測温では酸
化膜の成長により酸化膜厚が変化し放射率が大きく変動
し、測温か困難であった。
[Problems to be Solved by the Invention] However, if the emissivity of the object to be measured is unknown, it is difficult to accurately measure the temperature. Particularly when measuring the temperature during the oxidation process of steel plates, etc., the oxide film thickness may increase due to the growth of the oxide film. The temperature changed and the emissivity fluctuated greatly, making it difficult to measure the temperature.

この発明の目的は、以上の点に鑑み、被測定物の酸化過
程で、酸化膜厚の変化による放射率の変動があったとし
ても、十分精度良く測温することができる放射温度計を
提供することである。
In view of the above points, an object of the present invention is to provide a radiation thermometer that can measure temperature with sufficient accuracy even if there is a fluctuation in emissivity due to changes in oxide film thickness during the oxidation process of the object to be measured. It is to be.

[課題を解決するための手段] この発明は、被測定物からの放射エネルギーを分離手段
で複数の波長に分離し、この分離された各波長について
の放射エネルギーを検出器で検出し、測定手段でこの検
出器の波長に対応した出力のうち最大の出力に基いて温
度測定を行うようにした放射温度計である。
[Means for Solving the Problems] The present invention separates radiant energy from an object to be measured into a plurality of wavelengths using a separating means, detects the radiant energy for each separated wavelength with a detector, and uses a measuring means to detect the radiant energy of each separated wavelength. This is a radiation thermometer that measures temperature based on the maximum output among the outputs corresponding to the wavelength of this detector.

[実施例] 第1図は、この発明の一実施例を示す構成説明図である
[Embodiment] FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention.

図において、1は被測定物からの放射エネルギーを集光
するレンズ等の光学系、21.22は光学系■からの光
を分岐する分岐手段としてのハーフミラ−またはミラー
、3は、分岐手段21.22からの光を異った透過波長
をもつ複数のフィルター31.32.33.34により
複数の波長についての光を分離して取り出す回転セクタ
のような分離手段、41.42は、分離手段3により分
離された各波長の放射エネルギーを検出して電気信号と
する検出器、6は、検出器41.42の出力信号を、分
離手段3の各波長に対応した同期信号を発生する同期検
出手段5の出力により分離し増幅し、各波長に対応した
出力信号を取り出す分離増幅手段、7は分離増幅手段6
の出力から最大値(ピーク値)を選択して温度値として
出力する等の処理を行い温度測定を行う測定手段である
In the figure, 1 is an optical system such as a lens that condenses the radiant energy from the object to be measured, 21 and 22 are half mirrors or mirrors as a branching means for branching the light from the optical system (2), and 3 is a branching means 21 .22 is a separating means such as a rotating sector for separating and extracting light of a plurality of wavelengths through a plurality of filters 31, 32, 33, and 34 having different transmission wavelengths; 41.42 is a separating means; Detector 3 detects the radiant energy of each wavelength separated and converts it into an electric signal; 6 is a synchronous detector that converts the output signals of the detectors 41 and 42 into a synchronous signal corresponding to each wavelength of the separating means 3; Separation and amplification means 7 separates and amplifies the output of the means 5 and extracts output signals corresponding to each wavelength; 7 is a separation and amplification means 6;
It is a measuring means that performs processing such as selecting the maximum value (peak value) from the output of and outputting it as a temperature value to measure the temperature.

また、測定手段7の出力は、指示計8等に指示される。Further, the output of the measuring means 7 is indicated to an indicator 8 or the like.

なお、検出器41の1個のみの場合は、分岐手段のハー
フミラ−21、ミラー22は省略できる。
In addition, in the case of only one detector 41, the half mirror 21 and mirror 22 of the branching means can be omitted.

ところで、鋼板等の酸化過程では、鋼板の表面に酸化膜
が成長し、その成長に伴い酸化膜が変化し、分光放射率
が激しく変化することが知られている。
By the way, it is known that during the oxidation process of steel plates and the like, an oxide film grows on the surface of the steel plate, and as the oxide film grows, the oxide film changes, causing a drastic change in the spectral emissivity.

たとえば、第2図で鉄Feについての測定波長λと分光
放射率εの関係から分るように、酸化膜厚d=oのとき
は、放射率は長波長側になるにしたがって単調に減少し
て行くような変化を示すが、酸化膜が成長するにしたが
って急激に短波長側の放射率εが上昇し、長波長側に向
って振動的に変化して減少し一定値に近づく。
For example, as can be seen from the relationship between the measured wavelength λ and the spectral emissivity ε for iron Fe in Figure 2, when the oxide film thickness d=o, the emissivity monotonically decreases as the wavelength increases. However, as the oxide film grows, the emissivity ε on the short wavelength side increases rapidly, and changes oscillatorily and decreases toward the long wavelength side, approaching a constant value.

一般に、放射温度計では、放射率の影響を受けるため、
実際に正しい温度を熱電対等で測定し、放射率を測定し
、放射率補正をして測定を行うが、上記のような酸化過
程では、放射率が激しく変化するため補正は困難で、安
定した測定は困難である。
In general, radiation thermometers are affected by emissivity, so
In practice, the correct temperature is measured with a thermocouple, etc., the emissivity is measured, and the emissivity is corrected. However, in the oxidation process described above, the emissivity changes drastically, making correction difficult, and it is difficult to make a stable measurement. Difficult to measure.

そこで、第2図で短波長λ1、長波長λ2の測定波長を
選んで被測定物の酸化過程での測定を行った場合、酸化
が進むにつれ第3図のような測定、指示が得られる。
Therefore, if the measurement wavelengths of short wavelength λ1 and long wavelength λ2 are selected in FIG. 2 and measurements are made during the oxidation process of the object to be measured, as the oxidation progresses, measurements and instructions as shown in FIG. 3 are obtained.

つまり、酸化膜の成長に伴い、まず短波長λ。In other words, as the oxide film grows, the short wavelength λ first.

側の指示が急激に上昇してピーク値を経て、減衰振動的
動きをして一定値に落ち着くが、この時点では長波長λ
2開の指示の変化はない(BがらDの過程)、なお、被
測定物の温度Tが変化すれば、短波長λ1、長波長λ2
いずれも同時に指示が変化する(Aの過程)、また、短
波長λ1での指示のピーク時点(C)では、放射率は、
はぼ1で、真温度を示している。
The indication on the side rises rapidly, passes through the peak value, moves like a damped oscillation, and settles down to a constant value, but at this point, the long wavelength λ
There is no change in the 2-open instruction (process from B to D). Furthermore, if the temperature T of the object to be measured changes, the short wavelength λ1 and the long wavelength λ2
In both cases, the indication changes simultaneously (process A), and at the peak point of indication at short wavelength λ1 (C), the emissivity is
Point 1 indicates the true temperature.

以上のことから、第1図において、回転セクタのような
分離手段3により分離された複数の波長についての検出
器41.42の出力のうち、第2図では放射率εが1に
近く、第3図では指示値が高く真温に近い最大(ピーク
)の出力となる波長についての信号を温度信号として測
定手Pi6は判断し演算して出力する。この多波長測定
により、被測定物の酸化過程においても正しい測温が可
能となる。
From the above, in FIG. 1, among the outputs of the detectors 41 and 42 for a plurality of wavelengths separated by the separating means 3 such as a rotating sector, the emissivity ε is close to 1 in FIG. In FIG. 3, the measuring hand Pi6 determines, calculates, and outputs a signal for a wavelength having a high indicated value and a maximum (peak) output close to the true temperature as a temperature signal. This multi-wavelength measurement enables accurate temperature measurement even during the oxidation process of the object to be measured.

また、一般に放射率の影響は、測定波長が短波長になる
ほど、いわゆるn値が高くなり、その影響を軽減できる
ので、短波長側で測定する方が精度の高い測定ができる
(温度計測、188/189、計測自動制御学会(19
81)等を参照)。
In addition, in general, the effect of emissivity is that the shorter the measurement wavelength, the higher the so-called n value, and the effect can be reduced, so measurements with higher accuracy can be achieved by measuring at shorter wavelengths (Temperature Measurement, 188 /189, Society of Instrument and Control Engineers (19
81) etc.).

そこで、まず短波長側で測定を行い、酸化膜の成長によ
り、長波長側の指示が低目で安定していいるにもかかわ
らず、短波長側の指示が変化するようになったら、測定
波長を長波長側に順次切換えて測定するようにすると、
鋼板等の酸化過程での安定した測温が行える。
Therefore, first measure at the short wavelength side, and if the indication at the short wavelength side starts to change due to the growth of the oxide film, even though the indication at the long wavelength side is low and stable, then the measurement wavelength If you measure by sequentially switching to the long wavelength side,
Stable temperature measurement can be performed during the oxidation process of steel plates, etc.

この場合、短波長側の指示のピーク時点ではほぼ真温を
示すので、このときの短波長の指示値と長波長側の指示
値の比から放射率を求め、この放射率に基き、長波長側
の測定値に放射率補正を行えば正しい測定値か得られる
ことになる。
In this case, at the peak of the indication on the short wavelength side, it indicates almost the true temperature, so the emissivity is determined from the ratio of the indication value on the short wavelength side and the indication value on the long wavelength side at this time, and based on this emissivity, If you apply emissivity correction to the measured value on the side, you will get the correct measured value.

第4図は、この発明の他の第2の一実施例の要部を示し
被測定物からの放射エネルギーはプリズム、回折格子の
ような分光手段よりなる分離手段30で多波長の光とし
、多素子よりなるイメージセンサのような検出器40で
多波長の光を同時に検出し、測定手段7で上記所定の測
定・演算を行って測温する。
FIG. 4 shows the main part of another second embodiment of the present invention. The radiation energy from the object to be measured is converted into multi-wavelength light by a separating means 30 consisting of a spectroscopic means such as a prism or a diffraction grating. A detector 40 such as an image sensor including multiple elements simultaneously detects light of multiple wavelengths, and a measuring means 7 performs the above-mentioned predetermined measurements and calculations to measure the temperature.

第5図は、この発明の他の第3の一実施例の要部を示し
、被測定物からの放射エネルギーは、多数のミラー21
.22からなる分岐手段により分岐され、異った透過波
長をもつフィルタ31.32.33.34からなる分離
手段で分離された多波長の各光は検出器41.42..
43.44に入射し、その各出力信号から測定手段7で
上記所定の測定、演算を行って測温する。
FIG. 5 shows a main part of another third embodiment of the present invention, in which the radiant energy from the object to be measured is transmitted through a large number of mirrors 21.
.. 22, and separated by a separating means consisting of filters 31, 32, 33, 34 having different transmission wavelengths, the multi-wavelength lights are sent to detectors 41, 42, . ..
43 and 44, and the measuring means 7 performs the above-mentioned predetermined measurements and calculations based on each output signal to measure the temperature.

[発明の効果」 以上述べたように、この発明は、多波長の光に基いて最
大値等から測温するようにしているので、放射率の変動
する被測定物の酸化過程等においても、正しい測温が可
能となる。
[Effects of the Invention] As described above, the present invention measures temperature from the maximum value based on light of multiple wavelengths, so even in the oxidation process of the object to be measured whose emissivity fluctuates, Accurate temperature measurement becomes possible.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第4図、第5図は、この発明の一実施例を示す
構成説明図、第2図、第3図は動作説明用の関係図であ
る。 1・・・光学系、21.22・・・ミラー(分岐手段)
、3.30・・・分離手段、31〜34・・・フィルタ
、41〜44.40・・・検出器、5・・・同期検出手
段、6・・・分離増幅手段、7・・・測定手段、8・・
・指示計や4図
1, 4 and 5 are configuration explanatory diagrams showing one embodiment of the present invention, and FIGS. 2 and 3 are relationship diagrams for explaining the operation. 1...Optical system, 21.22...Mirror (branching means)
, 3.30...Separation means, 31-34...Filter, 41-44.40...Detector, 5...Synchronization detection means, 6...Separation amplification means, 7...Measurement Means, 8...
・Indicator and 4 figures

Claims (1)

【特許請求の範囲】[Claims] 1、被測定物からの放射エネルギーを複数の波長に分離
する分離手段と、この分離手段による複数の波長につい
ての放射エネルギーを検出する検出器と、この検出器の
波長に対応した出力のうち最大の出力に基いて温度測定
を行う測定手段とを備えた放射温度計。
1. A separating means that separates the radiant energy from the object to be measured into multiple wavelengths, a detector that detects the radiant energy of the multiple wavelengths by this separating means, and a maximum output of this detector corresponding to the wavelength. A radiation thermometer comprising a measuring means for measuring temperature based on the output of the radiation thermometer.
JP20353489A 1989-08-04 1989-08-04 Radiation thermometer Pending JPH0367135A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20353489A JPH0367135A (en) 1989-08-04 1989-08-04 Radiation thermometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20353489A JPH0367135A (en) 1989-08-04 1989-08-04 Radiation thermometer

Publications (1)

Publication Number Publication Date
JPH0367135A true JPH0367135A (en) 1991-03-22

Family

ID=16475745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20353489A Pending JPH0367135A (en) 1989-08-04 1989-08-04 Radiation thermometer

Country Status (1)

Country Link
JP (1) JPH0367135A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6035229A (en) * 1983-08-08 1985-02-23 Chino Works Ltd Radiation thermometer
JPS61241629A (en) * 1985-04-19 1986-10-27 Mitsubishi Electric Corp infrared radiation thermometer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6035229A (en) * 1983-08-08 1985-02-23 Chino Works Ltd Radiation thermometer
JPS61241629A (en) * 1985-04-19 1986-10-27 Mitsubishi Electric Corp infrared radiation thermometer

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