JPH0368044U - - Google Patents
Info
- Publication number
- JPH0368044U JPH0368044U JP12930389U JP12930389U JPH0368044U JP H0368044 U JPH0368044 U JP H0368044U JP 12930389 U JP12930389 U JP 12930389U JP 12930389 U JP12930389 U JP 12930389U JP H0368044 U JPH0368044 U JP H0368044U
- Authority
- JP
- Japan
- Prior art keywords
- test object
- frequency heating
- thermal cycle
- internal pressure
- cooling medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Description
第１図は本考案の一実施例に係る熱サイクル試
験装置の断面図、第２図はその温度分布図、第３
図は従来の熱サイクル試験装置の斜視図、第４図
はその制御動作説明図である。
図面中、１は試験体、２ａは第一高周波加熱コ
イル、２ｂは第二高周波加熱コイル、３ａ，３ｂ
は架台、４は圧力配管、５は内筒器、８ａ，８ｂ
は空気吹出口である。
Fig. 1 is a sectional view of a thermal cycle test device according to an embodiment of the present invention, Fig. 2 is a temperature distribution diagram thereof, and Fig. 3
The figure is a perspective view of a conventional thermal cycle testing device, and FIG. 4 is an explanatory diagram of its control operation. In the drawings, 1 is a test specimen, 2a is a first high-frequency heating coil, 2b is a second high-frequency heating coil, 3a, 3b
is a frame, 4 is a pressure pipe, 5 is an inner cylinder, 8a, 8b
is an air outlet.
Claims (1)
する複数の高周波加熱コイルと、前記被試験体に
内圧を与える加圧装置とを備えたことを特徴とす
る熱サイクル試験装置。 A thermal cycle testing device comprising: a plurality of high-frequency heating coils arranged around a test object and having cooling medium discharge ports; and a pressurizing device that applies internal pressure to the test object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12930389U JPH0368044U (en) | 1989-11-07 | 1989-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12930389U JPH0368044U (en) | 1989-11-07 | 1989-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0368044U true JPH0368044U (en) | 1991-07-03 |
Family
ID=31676942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12930389U Pending JPH0368044U (en) | 1989-11-07 | 1989-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0368044U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019049418A (en) * | 2017-09-08 | 2019-03-28 | 国立大学法人 名古屋工業大学 | Thermal cycle testing device, thermal cycle testing method, production method of semiconductor device, and program |
-
1989
- 1989-11-07 JP JP12930389U patent/JPH0368044U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019049418A (en) * | 2017-09-08 | 2019-03-28 | 国立大学法人 名古屋工業大学 | Thermal cycle testing device, thermal cycle testing method, production method of semiconductor device, and program |
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