JPH036832U - - Google Patents
Info
- Publication number
- JPH036832U JPH036832U JP6496089U JP6496089U JPH036832U JP H036832 U JPH036832 U JP H036832U JP 6496089 U JP6496089 U JP 6496089U JP 6496089 U JP6496089 U JP 6496089U JP H036832 U JPH036832 U JP H036832U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support rod
- side plate
- wafer cassette
- insertion groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
Description
図面は本考案の実施例を示し、第１図は斜視図
、第２図は側板と支持杆の取付部の拡大断面図、
第３図は縦断面図である。 １……側板、２……ウエハ、９……支持杆、１
３……ウエハ差込溝。
、第２図は側板と支持杆の取付部の拡大断面図、
第３図は縦断面図である。 １……側板、２……ウエハ、９……支持杆、１
３……ウエハ差込溝。
Claims (1)
- 【実用新案登録請求の範囲】 １ 実質的に非浸透性の材料で側板を形成し、該
側板を対向しその間にウエハ下部を取り囲むよう
ウエハ差込溝を有する合成樹脂材料製の支持杆を
設けたウエハカセツト。 ２ 上記側板は石英若しくはセラミツクで作られ
、支持杆はフツ素樹脂で作られている請求項１記
載のウエハカセツト。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6496089U JPH036832U (ja) | 1989-06-05 | 1989-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6496089U JPH036832U (ja) | 1989-06-05 | 1989-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH036832U true JPH036832U (ja) | 1991-01-23 |
Family
ID=31596361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6496089U Pending JPH036832U (ja) | 1989-06-05 | 1989-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036832U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61239635A (ja) * | 1985-04-16 | 1986-10-24 | Kakizaki Seisakusho:Kk | ウエハ用バスケツト |
| JPS6345830A (ja) * | 1986-08-13 | 1988-02-26 | Hitachi Tokyo Electron Co Ltd | ウエハ収容治具 |
-
1989
- 1989-06-05 JP JP6496089U patent/JPH036832U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61239635A (ja) * | 1985-04-16 | 1986-10-24 | Kakizaki Seisakusho:Kk | ウエハ用バスケツト |
| JPS6345830A (ja) * | 1986-08-13 | 1988-02-26 | Hitachi Tokyo Electron Co Ltd | ウエハ収容治具 |