JPH0368400U - - Google Patents
Info
- Publication number
- JPH0368400U JPH0368400U JP13006489U JP13006489U JPH0368400U JP H0368400 U JPH0368400 U JP H0368400U JP 13006489 U JP13006489 U JP 13006489U JP 13006489 U JP13006489 U JP 13006489U JP H0368400 U JPH0368400 U JP H0368400U
- Authority
- JP
- Japan
- Prior art keywords
- section
- ray
- sliding switching
- filament
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 2
- 239000000284 extract Substances 0.000 claims 1
- 238000004846 x-ray emission Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- X-Ray Techniques (AREA)
Description
第１図はＸＰＳの真空チヤンバ内に本考案のＸ
線銃とモノクロメータを用いるＸ線銃とを併置し
た状態を示す構成図、第２図はＸ線銃によりＸ線
を試料に照射する状態を示す構成図である。
１…Ｘ線銃、４…フイラメント、６…ウエネル
ト、８…アノード、１０…Ｘ線発生部、１４…窓
部、１６…引出電極、１８…摺動切換部、２０…
高圧電源、２２…電源切換部。
Figure 1 shows the inventive X inside the XPS vacuum chamber.
FIG. 2 is a block diagram showing a state in which a ray gun and an X-ray gun using a monochromator are placed side by side, and FIG. 2 is a block diagram showing a state in which a sample is irradiated with X-rays by the X-ray gun. DESCRIPTION OF SYMBOLS 1... X-ray gun, 4... Filament, 6... Wehnelt, 8... Anode, 10... X-ray generation part, 14... Window part, 16... Extraction electrode, 18... Sliding switching part, 20...
High voltage power supply, 22...Power supply switching unit.
Claims (1)
いに並列配置されてなるＸ線発生部を有するヘン
ケ型のＸ線銃において、 前記Ｘ線発生部の対向位置には、前記アノード
から発生されるＸ線を通過させる窓部と前記フイ
ラメントから発生される熱電子を引き出す引出電
極とを備えた摺動切換部が該Ｘ線発生部のＸ線放
射方向に直交して摺動可能に設けられ、かつ、前
記摺動切換部に連動してアノードに対する高電圧
印加用の高圧電源をオン・オフする電源スイツチ
部を有することを特徴とするＸ線銃。[Claims for Utility Model Registration] In a Henke-type X-ray gun having an X-ray generating section in which a filament, a Wehnelt, and an anode are arranged in parallel with each other, the A sliding switching section is provided to be slidable perpendicular to the X-ray emission direction of the X-ray generating section, and the sliding switching section is provided with a window section through which X-rays pass through, and an extraction electrode that extracts thermoelectrons generated from the filament. An X-ray gun, further comprising a power switch section that turns on and off a high-voltage power source for applying high voltage to the anode in conjunction with the sliding switching section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13006489U JPH0368400U (en) | 1989-11-07 | 1989-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13006489U JPH0368400U (en) | 1989-11-07 | 1989-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0368400U true JPH0368400U (en) | 1991-07-04 |
Family
ID=31677660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13006489U Pending JPH0368400U (en) | 1989-11-07 | 1989-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0368400U (en) |
-
1989
- 1989-11-07 JP JP13006489U patent/JPH0368400U/ja active Pending
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