JPH0368764U - - Google Patents
Info
- Publication number
- JPH0368764U JPH0368764U JP12833689U JP12833689U JPH0368764U JP H0368764 U JPH0368764 U JP H0368764U JP 12833689 U JP12833689 U JP 12833689U JP 12833689 U JP12833689 U JP 12833689U JP H0368764 U JPH0368764 U JP H0368764U
- Authority
- JP
- Japan
- Prior art keywords
- pressure head
- workpiece
- surface plate
- attached
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Description
第１図は本考案の一実施例を示す側面図、第２
図はその要部拡大断面図である。
１１……定盤、１２……加圧プレート、１４…
…ブロツク、１５……ワーク、１８……シヤワー
ノズル。
Figure 1 is a side view showing one embodiment of the present invention;
The figure is an enlarged sectional view of the main part. 11...surface plate, 12...pressure plate, 14...
...Block, 15...Work, 18...Shower nozzle.
Claims (1)
を備え、該加圧ヘツドに取り付けたブロツクにワ
ークを貼着し、該ワークを回転する定盤に押し付
けて研磨するようにしたものにおいて、 加圧ヘツドの上昇位置よりも斜め下方に、該加
圧ヘツドの上昇に連動してリンス液をワークに噴
射するシヤワーノズルを配設したことを特徴とす
る洗浄機構を備えた平面研磨装置。[Scope of Claim for Utility Model Registration] Equipped with a surface plate that can be driven and rotated freely and a pressure head that can be raised and lowered, a workpiece is attached to a block attached to the pressure head, and the workpiece is pressed against the rotating surface plate. A cleaning mechanism for polishing, characterized in that a shower nozzle is disposed diagonally below the elevated position of the pressure head and sprays a rinsing liquid onto the work in conjunction with the rise of the pressure head. Surface polishing equipment equipped with
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12833689U JPH0368764U (en) | 1989-11-01 | 1989-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12833689U JPH0368764U (en) | 1989-11-01 | 1989-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0368764U true JPH0368764U (en) | 1991-07-08 |
Family
ID=31676048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12833689U Pending JPH0368764U (en) | 1989-11-01 | 1989-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0368764U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007257672A (en) * | 2002-04-25 | 2007-10-04 | Sanyo Electric Co Ltd | Data processor and data processing system |
-
1989
- 1989-11-01 JP JP12833689U patent/JPH0368764U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007257672A (en) * | 2002-04-25 | 2007-10-04 | Sanyo Electric Co Ltd | Data processor and data processing system |