JPH0369546A - Sintered ceramic body and production therefor - Google Patents
Sintered ceramic body and production thereforInfo
- Publication number
- JPH0369546A JPH0369546A JP1206330A JP20633089A JPH0369546A JP H0369546 A JPH0369546 A JP H0369546A JP 1206330 A JP1206330 A JP 1206330A JP 20633089 A JP20633089 A JP 20633089A JP H0369546 A JPH0369546 A JP H0369546A
- Authority
- JP
- Japan
- Prior art keywords
- nitrate
- ceramic
- oxide
- powder
- sintered body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ceramic Products (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、粒界相が均一な酸化物で形成されているセラ
ミック焼結体とその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a ceramic sintered body in which the grain boundary phase is formed of a uniform oxide, and a method for manufacturing the same.
(従来の技術)
従来のセラミック焼結体、例えば窒化珪素(以下5i3
N4)の製造方法は、焼結母材である5i5N4の粉末
に焼結助剤として作用する酸化アルミニウム(以下Aj
22 o3)や酸化イツトリウムC以下Y20g )の
粉末と少量のバインダとを混合し、乾燥造粒して混合粉
末を生成し、該混合粉末を成形した後、焼結炉内にて加
熱焼成している。(Prior art) Conventional ceramic sintered bodies, such as silicon nitride (hereinafter 5i3
The manufacturing method of N4) is to add aluminum oxide (hereinafter referred to as Aj
22 o3) or yttrium oxide (C or less Y20g) powder is mixed with a small amount of binder, dried and granulated to produce a mixed powder, and after the mixed powder is molded, it is heated and fired in a sintering furnace. There is.
(発明が解決しようとする課題)
このような従来の製造方法により製造されるセラミック
焼結体は、焼成前の混合時に、各粉末の粒径や比重が異
なるため完全に均一には混合されず焼結助剤が偏在する
。すると、焼成時において、焼結体内部が均一に焼成さ
れず、Si3N4粒子同志が直接固溶し粒子が異常成長
する。そして気孔も偏析し、かつ粒界相も不均一となる
。(Problems to be Solved by the Invention) Ceramic sintered bodies manufactured by such conventional manufacturing methods are not mixed completely uniformly during mixing before firing because each powder has a different particle size and specific gravity. Sintering aids are unevenly distributed. Then, during firing, the inside of the sintered body is not fired uniformly, and the Si3N4 particles directly form a solid solution with each other, resulting in abnormal particle growth. The pores also become segregated and the grain boundary phase also becomes non-uniform.
よって、外部からの応力が均等に分散されず集中するた
め、セラミック焼結体の強度が低下し、かつ該強度のバ
ラツキも増大する。Therefore, the stress from the outside is not evenly distributed but concentrated, which reduces the strength of the ceramic sintered body and increases the variation in the strength.
(課題を解決するための手段)
本発明は、上記の点に鑑みてなされたもので、粒子の異
常成長及び気孔の偏析を防止し、粒界相を均一にするこ
とにより、高強度であり、かつ強度のバラツキを抑えた
セラミック焼結体とその製造方法を提供しようとするも
のである。(Means for Solving the Problems) The present invention has been made in view of the above points, and has high strength by preventing abnormal growth of particles and segregation of pores and making the grain boundary phase uniform. It is an object of the present invention to provide a ceramic sintered body and a method for manufacturing the same, which also suppresses variations in strength.
本発明によれば、酸化物が焼結助剤として作用する金属
元素の硝酸塩水溶液中に焼結母材のセラミック粉末を入
れる。そして、該水溶液中にセラミック粉末を分散させ
た後にスプレードライヤーで加熱し噴霧乾燥させ、セラ
ミック粉末の粒子表面を均一に被覆している硝酸塩を焼
結助剤の酸化物に熱分解する。該熱分解により、酸化物
が表面に均一に被覆しているセラミック粉末を生成する
。そして、表面が酸化物で被覆されているセラミック粉
末を加熱しセラミック粒子表面に酸化物を固着させる。According to the invention, ceramic powder as a sintering base material is placed in an aqueous solution of a nitrate of a metal element in which the oxide acts as a sintering aid. After the ceramic powder is dispersed in the aqueous solution, it is heated and spray-dried using a spray dryer to thermally decompose the nitrates uniformly covering the surfaces of the ceramic powder particles into sintering aid oxides. The pyrolysis produces a ceramic powder whose surface is uniformly coated with oxides. Then, the ceramic powder whose surface is coated with oxide is heated to fix the oxide to the surface of the ceramic particle.
次に、表面に酸化物が固着されたセラミックをボールミ
ルにて粉砕し粉末化した後、該セラミック粉末を成形し
、焼結炉内にて加熱して焼成する。Next, the ceramic having the oxide fixed to its surface is ground into powder using a ball mill, and then the ceramic powder is shaped and fired by heating in a sintering furnace.
(作用)
本発明の製造方法により製造されるセラミック焼結体は
、セラミック焼結体内部に粒子の異常成長や気孔の偏析
が無く、粒界相が均一であるため、従来の製造方法によ
り製造されたセラミック焼結体に対して高強度であり、
かつ強度のバラツキが小である。(Function) The ceramic sintered body manufactured by the manufacturing method of the present invention has no abnormal growth of particles or segregation of pores inside the ceramic sintered body, and the grain boundary phase is uniform, so it can be manufactured using the conventional manufacturing method. It has high strength compared to the ceramic sintered body,
Moreover, the variation in strength is small.
(実施例)
本発明のセラミック焼結体の製造工程について説明する
。(Example) The manufacturing process of the ceramic sintered body of the present invention will be explained.
図は、本発明の製造工程を示すフロー図である。The figure is a flow diagram showing the manufacturing process of the present invention.
Si5N4粉末90wt%と、硝酸イツトリウム(Y(
NOg)g)をY2O3換算で5twt%と、硝酸アル
ミニウム(AI!、(NO3)a )をAl2O3換算
で5wt%と、少量の水とを混合し、窒化珪素からなる
ボールを使用したボールミルで凝集粉を解砕してスラリ
ーとする。90wt% Si5N4 powder and yttrium nitrate (Y(
NOg)g) was mixed with 5 twt% in terms of Y2O3, aluminum nitrate (AI!, (NO3)a) was mixed with 5 wt% in terms of Al2O3, and a small amount of water, and agglomerated in a ball mill using balls made of silicon nitride. The powder is crushed to make a slurry.
次に、該スラリーを入口温度が180℃に設定されたス
プレードライヤーにて噴霧乾燥すると共に、Si5N4
粉末粒子表面を被覆しているY (NO3)3及びAu
(NOg)gをy2 o5及びAj220.に熱分解す
る。Next, the slurry was spray-dried using a spray dryer whose inlet temperature was set to 180°C, and Si5N4
Y (NO3)3 and Au coating the powder particle surface
(NOg)g to y2 o5 and Aj220. thermally decomposes into
次に、表面がY203及びAJ120i5で覆われてい
るSi3N4粉末を1400℃に加熱された炉内部で2
旧間仮焼成し、Y2O3及びAJ1203をSi3N4
粒子表面に固着させる。Next, Si3N4 powder whose surface is covered with Y203 and AJ120i5 is heated to 1400°C for 2 hours.
Temporarily calcined and converted Y2O3 and AJ1203 to Si3N4
Fix to particle surface.
次に、粒子表面にY2O3及びAJZ203が固着して
いる5t5N4にアルコールを添加して再びボールミル
にて粉砕する。そして、1%のバインダーを添加して混
練した後、スプレードライヤーにて50μm径の粉末に
造粒する。そして、該造粒粉を2 ton/c rri
″の圧力で冷間等方圧プレス法(CIP)にて成形する
。Next, alcohol is added to the 5t5N4 to which Y2O3 and AJZ203 are adhered to the particle surface, and the powder is ground again in a ball mill. Then, after adding 1% binder and kneading, the mixture is granulated into powder with a diameter of 50 μm using a spray dryer. Then, the granulated powder was added at 2 ton/c rri
It is molded by cold isostatic pressing (CIP) at a pressure of
最後に、該成形物を焼結炉内に配置し、窒素ガス雰囲気
中で1800℃に加熱し5時間保持して焼成し、本発明
による焼結体である試料Aを作成する。Finally, the molded product is placed in a sintering furnace, heated to 1800° C. in a nitrogen gas atmosphere, held for 5 hours, and fired to produce Sample A, which is a sintered body according to the present invention.
上記試料Aと比較するため、上記従来の技術に示したご
とく、Si3N4粉末90wt%、Y2O3粉末5wt
%及びAu203粉末5wt%を混合し、実施例と同様
に成形焼成して試料Bを作成する。In order to compare with the above sample A, as shown in the above conventional technology, 90 wt% of Si3N4 powder and 5 wt% of Y2O3 powder were used.
Sample B is prepared by mixing 5 wt % of Au203 powder and molding and firing in the same manner as in the example.
更に、実施例のY(NOg)a及びA、e(No3)i
5をY2O3及びAj220i5に熱分解した後、仮焼
成することなく成形焼成して試料Cを作成する。Furthermore, Y(NOg)a and A, e(No3)i of Example
Sample C was prepared by thermally decomposing 5 into Y2O3 and Aj220i5, and then shaping and firing without pre-firing.
上記試料A、B及びCの各々をJISに定められた試験
片に整形し、4点曲げ強度試験を行なった。Each of the above samples A, B, and C was shaped into a test piece specified by JIS, and a four-point bending strength test was conducted.
該強度試験の結果及びワイブル係数を表1に示す。Table 1 shows the results of the strength test and the Weibull coefficient.
表 1
表1より明らかなように、本発明による焼結体である試
料Aは、従来の焼結体である試料Bと比較して、高強度
であり、またワイブル係数が大であるため品質が安定し
ている。Table 1 As is clear from Table 1, Sample A, which is a sintered body according to the present invention, has higher strength and has a larger Weibull coefficient than Sample B, which is a conventional sintered body, so it has poor quality. is stable.
これは、S i3 N4の焼結時に必要な液相を提供す
る酸化物助剤が、Si3N4粒子表面に均一に分散され
ているために、焼結体内部にて焼結が均一に行なわれ異
常粒の成長や異常空孔の生成が抑制され、かつ均一な粒
界相が形成されたことに起因するものと考えられる。This is because the oxide auxiliary agent that provides the liquid phase necessary during sintering of Si3N4 is uniformly dispersed on the surface of the Si3N4 particles, so sintering occurs uniformly inside the sintered body, resulting in abnormal This is thought to be due to the fact that grain growth and abnormal pore formation were suppressed and a uniform grain boundary phase was formed.
また、試料Aの製造工程に対し仮焼成工程を省略して作
成された試料Cは、試料Bに対しては強度及びワイブル
係数の向上が認められるものの、試料Aに対しては劣る
。In addition, Sample C, which was created by omitting the pre-firing step in the manufacturing process of Sample A, is inferior to Sample A, although it is recognized that the strength and Weibull coefficient are improved compared to Sample B.
これは、Y2O3及びAu203がS i3 N4表面
に固着していないため、仮焼成後に行なうボールミル工
程にてY2O3及びAu203がSi3N4表面から!
!J 離したものと考えられる。This is because Y2O3 and Au203 are not fixed to the Si3N4 surface, so Y2O3 and Au203 are removed from the Si3N4 surface during the ball milling process after pre-firing.
! J It is thought that it was released.
以上、本発明の実施例について説明したが、本発明の精
神から逸れないかきりで、種々の異なる実施例は容易に
構成できるから、本発明は前記特許請求の範囲において
記載した限定以外、特定の実施例に制約されるものでは
ない。Although the embodiments of the present invention have been described above, various different embodiments can be easily constructed without departing from the spirit of the invention. The present invention is not limited to the embodiments.
(発明の効果)
以上説明したように、本発明によれば、セラミック焼結
体内部に粒子の異常成長や気孔の偏析が無く、粒界相が
灼−であるため、従来の製造方法により製造されたセラ
ミック焼結体に対して高強度であり、かつ強度のバラツ
キが小であるセラミック焼結体とその製造方法を提供で
きる。(Effects of the Invention) As explained above, according to the present invention, there is no abnormal growth of particles or segregation of pores inside the ceramic sintered body, and the grain boundary phase is charred, so it can be manufactured using the conventional manufacturing method. It is possible to provide a ceramic sintered body that has high strength and small variation in strength, and a method for manufacturing the same.
図は、本発明の製造工程を示すフロー図である。 The figure is a flow diagram showing the manufacturing process of the present invention.
Claims (7)
する元素の硝酸塩溶液とを混練するステップと、該混練
物を噴霧乾燥しセラミック粉末粒子に均一に付着した硝
酸塩を酸化物に熱分解するステップと、酸化物が均一に
付着したセラミック粉末を仮焼成しセラミック粒子表面
に酸化物を固着させるステップと、該仮焼成物を粉砕し
た後成形するステップと、該成形物を焼成するステップ
とを有することを特徴とするセラミック焼結体の製造方
法。(1) A step of kneading ceramic powder and an elemental nitrate solution in which the oxide acts as a sintering aid, and spray-drying the kneaded product to thermally decompose the nitrate uniformly attached to the ceramic powder particles into an oxide. a step of pre-firing the ceramic powder to which the oxide is evenly adhered to fix the oxide to the surface of the ceramic particles; a step of pulverizing the pre-fired product and then molding it; and a step of firing the molded product. A method for producing a ceramic sintered body, comprising:
を特徴とする請求項(1)記載のセラミック焼結体の製
造方法。(2) The method for manufacturing a ceramic sintered body according to claim (1), wherein the ceramic powder is silicon nitride powder.
ウム及び硝酸マグネシウムの内の少なくとも1種である
ことを特徴とする請求項(2)記載のセラミック焼結体
の製造方法。(3) The method for producing a ceramic sintered body according to claim (2), wherein the nitrate is at least one of yttrium nitrate, aluminum nitrate, and magnesium nitrate.
する請求項(3)記載のセラミック焼結体の製造方法。(4) The method for producing a ceramic sintered body according to claim (3), wherein the solvent of the nitrate solution is water.
生成された酸化物で均一に被覆されていることを特徴と
するセラミック焼結体。(5) A ceramic sintered body characterized in that the surface of the ceramic particles is uniformly coated with an oxide produced by thermal decomposition of nitrate.
を特徴とする請求項(5)記載のセラミック焼結体。(6) The ceramic sintered body according to claim (5), wherein the ceramic particles are silicon nitride particles.
ウム及び硝酸マグネシウムの内の少なくとも1種である
ことを特徴とする請求項(5)記載のセラミック焼結体
。(7) The ceramic sintered body according to claim (5), wherein the nitrate is at least one of yttrium nitrate, aluminum nitrate, and magnesium nitrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1206330A JPH0369546A (en) | 1989-08-09 | 1989-08-09 | Sintered ceramic body and production therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1206330A JPH0369546A (en) | 1989-08-09 | 1989-08-09 | Sintered ceramic body and production therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0369546A true JPH0369546A (en) | 1991-03-25 |
Family
ID=16521515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1206330A Pending JPH0369546A (en) | 1989-08-09 | 1989-08-09 | Sintered ceramic body and production therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0369546A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009298655A (en) * | 2008-06-13 | 2009-12-24 | Ube Material Industries Ltd | Magnesium oxide vapor deposition material and method for producing the same |
| JP2019064841A (en) * | 2017-09-28 | 2019-04-25 | 株式会社フジミインコーポレーテッド | Method of producing coated particle powder, and method of producing dispersion containing coated particle powder and dispersion medium |
| CN112723327A (en) * | 2021-03-16 | 2021-04-30 | 福建臻璟新材料科技有限公司 | Preparation method of doped silicon nitride powder |
-
1989
- 1989-08-09 JP JP1206330A patent/JPH0369546A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009298655A (en) * | 2008-06-13 | 2009-12-24 | Ube Material Industries Ltd | Magnesium oxide vapor deposition material and method for producing the same |
| JP2019064841A (en) * | 2017-09-28 | 2019-04-25 | 株式会社フジミインコーポレーテッド | Method of producing coated particle powder, and method of producing dispersion containing coated particle powder and dispersion medium |
| CN112723327A (en) * | 2021-03-16 | 2021-04-30 | 福建臻璟新材料科技有限公司 | Preparation method of doped silicon nitride powder |
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