JPH0369864B2 - - Google Patents
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- Publication number
- JPH0369864B2 JPH0369864B2 JP61025057A JP2505786A JPH0369864B2 JP H0369864 B2 JPH0369864 B2 JP H0369864B2 JP 61025057 A JP61025057 A JP 61025057A JP 2505786 A JP2505786 A JP 2505786A JP H0369864 B2 JPH0369864 B2 JP H0369864B2
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- JP
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- Prior art keywords
- ceramics
- metal
- silver solder
- joined
- baked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【発明の詳細な説明】
産業上の利用分野
本発明は、セラミツクスと金属との接合方法に
関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for joining ceramics and metal.
従来の技術及びその問題点
セラミツクスは、耐熱性、耐摩耗性、絶縁性等
に優れているために様々な用途に用いられてい
る。これらの用途によつてはセラミツクス部材と
金属部材とを接合することが必要となる場合があ
る。例えばセラミツクスを構造用部材として用い
る場合には、セラミツクスが耐衝撃性に劣ること
から金属との接合体として使用されることが多
い。このようにセラミツクスと金属とを接合する
ためには、予めセラミツクス表面をメタライズし
ておくことが必要となる。BACKGROUND ART Ceramics are used for various purposes because of their excellent heat resistance, wear resistance, insulation properties, etc. Depending on these uses, it may be necessary to join a ceramic member and a metal member. For example, when ceramics are used as a structural member, they are often used as a bonded body with metal because ceramics have poor impact resistance. In order to bond ceramics and metal in this way, it is necessary to metalize the surface of the ceramics in advance.
セラミツクスのメタライズ法としては、テレフ
ンケン法、活性金属法、水素化合物法、酸化物ソ
ルダー法、炭酸銀法等が知られているが、テレフ
ンケン法以外の方法は、ほとんど使用されていな
い。これは、工程が複雑であるのみならず、得ら
れたメタライズ層の接着強度、耐熱衝撃性、耐化
学薬品性等が充分でない場合が多いからである。
現在一般的に使用されているテレフンケン法にお
いては、セラミツクス表面にモリブデン−マンガ
ンを被覆し、非酸化性雰囲気中1400〜1700℃程度
の高温で焼き付け処理した後、金属メツキを行な
い、次いで再度非酸化性雰囲気中で加熱すること
により、安定化したメタライズ層を形成させてい
る。しかしながら、この方法においても、多段階
にわたる煩雑な工程が必要であり、加熱温度が高
いという欠点が存在する。 As methods for metallizing ceramics, the Telefunken method, active metal method, hydride compound method, oxide solder method, silver carbonate method, etc. are known, but methods other than the Telefunken method are rarely used. This is because not only the process is complicated, but also the adhesive strength, thermal shock resistance, chemical resistance, etc. of the obtained metallized layer are often insufficient.
In the currently commonly used Telefunken method, the ceramic surface is coated with molybdenum-manganese, baked at a high temperature of about 1400 to 1700°C in a non-oxidizing atmosphere, then metal plated, and then again non-oxidized. By heating in a neutral atmosphere, a stabilized metallized layer is formed. However, this method also requires a complicated multi-step process and has drawbacks such as high heating temperature.
問題点を解決するための手段
本発明者は、セラミツクスと金属との接合方法
において、耐熱性に優れ、接着強度が高く、かつ
品質の均一性に優れた方法を見出すべく鋭意研究
を重ねてきた。その結果、特定の酸化物をスクリ
ーンオイル等によつてペースト化した後、セラミ
ツクス上に塗布し、酸化性雰囲気中で加熱して、
セラミツクス上に焼付け層を形成させた後、この
上に銀ロウを配置し、更に金属部材をこの上に重
ね、次いで還元性雰囲気中で熱処理することによ
つて簡単な方法で該金属部材を強固にセラミツク
スに接合できることを見出した。Means for Solving the Problems The present inventor has conducted extensive research in order to find a method for bonding ceramics and metals that has excellent heat resistance, high adhesive strength, and excellent uniformity of quality. . As a result, a specific oxide was made into a paste using screen oil, etc., and then applied onto ceramics and heated in an oxidizing atmosphere.
After forming a baking layer on ceramics, silver solder is placed on top of this, a metal member is placed on top of this, and the metal member is then heat treated in a reducing atmosphere to strengthen the metal member in a simple manner. discovered that it could be bonded to ceramics.
本発明者は、更に引き続く研究により、上記方
法と同様にして焼付け層上に、銀ロウを配置し、
次いで接合対象となる金属部材とセラミツクスと
の中間の熱膨脹率を有する中間材、銀ロウ及び金
属部材を順次この上に配置した後還元性雰囲気中
で熱処理することによつて、容易に極めて耐熱性
に優れたセラミツクスと金属部材との接合体が得
られることを見出した。本発明は、これらの知見
に基づくものである。 Through further research, the present inventor placed silver solder on the baking layer in the same manner as the above method,
Next, an intermediate material having a coefficient of thermal expansion between that of the metal parts to be joined and ceramics, silver solder, and metal parts are sequentially placed on top of this, and then heat treated in a reducing atmosphere to easily achieve extremely high heat resistance. It has been discovered that a bonded body of ceramics and a metal member with excellent properties can be obtained. The present invention is based on these findings.
即ち、本発明は、以下に示すセラミツクスと金
属との接合方法を提供するものである。 That is, the present invention provides the following method for joining ceramics and metal.
NiO並びにCu2O及び/又はSiO2を含有
するペーストをセラミツクス上に塗布し、
酸化性雰囲気中で焼付けた後、
該焼付け層上に銀ロウを配置し、更にこの
上に被接合体金属を配置して、
還元性雰囲気中で600〜900℃で熱処理する
ことを特徴とするセラミツクスと金属との接合方
法(以下、本願第1発明という)。 A paste containing NiO and Cu 2 O and/or SiO 2 is applied onto ceramics and baked in an oxidizing atmosphere, then silver solder is placed on the baked layer, and the metal to be joined is placed on top of this. 1. A method for joining ceramics and metal (hereinafter referred to as the first invention of the present application), characterized in that the ceramics and metal are placed and heat treated at 600 to 900°C in a reducing atmosphere.
NiO並びにCu2O及び/又はSiO2を含有
するペーストをセラミツクス上に塗布し、
酸化性雰囲気中で焼付けた後、
該焼付け層上に銀ロウ、中間材、銀ロウ及
び被接合体金属を順次配置し、
還元性雰囲気中で600〜900℃で熱処理する
ことを特徴とするセラミツクスと金属との接合方
法(以下、本願第2発明という)。 A paste containing NiO, Cu 2 O and/or SiO 2 is applied onto ceramics and baked in an oxidizing atmosphere, then silver solder, intermediate material, silver solder and metal to be joined are sequentially applied on the baked layer. 1. A method for joining ceramics and metal (hereinafter referred to as the second invention of the present application), characterized in that the ceramics and the metal are placed and heat treated at 600 to 900°C in a reducing atmosphere.
本発明方法を適用できるセラミツクスは、特に
限定されず例えば窒化珪素、サイアロン、炭化珪
素、窒化アルミニウム等の非酸化物系セラミツク
ス、アルミナ、ジルコニア、ムライト、ベリリ
ア、マグネシア、コージライト等の酸化物系セラ
ミツクスを挙げることができる。 Ceramics to which the method of the present invention can be applied are not particularly limited, and include non-oxide ceramics such as silicon nitride, sialon, silicon carbide, and aluminum nitride, and oxide ceramics such as alumina, zirconia, mullite, beryllia, magnesia, and cordierite. can be mentioned.
本発明方法において使用するペーストは、NiO
並びにCu2O及び/又はSiO2を含有することが必
要である。具体的な酸化物の組み合わせとして
a)NiO及びCu2O、b)NiO及びSiO2、c)
NiO、Cu2O及びSiO2の3種類があり、これらの
3種類の組み合わせにおける各成分の配合比率
は、a)では、NiO80〜50重量%及びCu2O20〜
50重量%、b)では、NiO80〜95重量%及び
SiO220〜5重量%、c)では、NiO50〜80重量
%、Cu2O45〜15重量%及びSiO25〜10重量%とす
ればよい。 The paste used in the method of the present invention is NiO
It is also necessary to contain Cu 2 O and/or SiO 2 . Specific oxide combinations include a) NiO and Cu 2 O, b) NiO and SiO 2 , c)
There are three types of NiO, Cu 2 O and SiO 2 , and the blending ratio of each component in the combination of these three types is a) 80 to 50% by weight of NiO and 20 to 20% of Cu 2 O.
50% by weight, b) 80-95% by weight of NiO and
20-5% by weight of SiO2 ; in c), 50-80% by weight of NiO, 45-15% by weight of Cu2O and 5-10% by weight of SiO2.
上記した酸化物は、通常粉末として使用され
る。粒度は特に限定されないが、2〜1μm程度以
下とすることが好ましい。また、SiO2に代えて
カオリンを用いることもできる。これらをペース
ト化するには、上記各粉末の混合物に適宜バイン
ダー等を加えればよく、例えばバルサム、スクリ
ーンオイル等を適量加えればよい。 The above-mentioned oxides are usually used in powder form. Although the particle size is not particularly limited, it is preferably about 2 to 1 μm or less. Moreover, kaolin can also be used instead of SiO 2 . In order to form these into a paste, a binder or the like may be added as appropriate to the mixture of the above powders, for example, an appropriate amount of balsam, screen oil, etc. may be added.
本願第1発明では、まず、上記ペーストをセラ
ミツクスに塗布した後、酸化性雰囲気中で加熱し
て、セラミツクスにペーストを焼付ける。ペース
トの塗布厚は、5〜30μm程度とすればよい。酸
化性雰囲気としては特殊な雰囲気を必要とせず、
空気、空気と窒素との混合気等でよい。加熱条件
は、セラミツクスの形状及び寸法、ペーストの組
成及び塗布量等により変り得るが、通常1100〜
1300℃程度で5〜20分間程度加熱すればよい。加
熱により焼付けられた被覆層は、酸化物の融液の
一部がセラミツクス内に浸透してセラミツクスに
強固に接合され、また均一性や平滑性も優れたも
のとなる。 In the first aspect of the present invention, first, the paste is applied to ceramics and then heated in an oxidizing atmosphere to bake the paste onto the ceramics. The coating thickness of the paste may be approximately 5 to 30 μm. No special atmosphere is required as an oxidizing atmosphere;
Air, a mixture of air and nitrogen, etc. may be used. Heating conditions may vary depending on the shape and dimensions of the ceramic, the composition of the paste, the amount of application, etc., but are usually 1100~
It may be heated at about 1300℃ for about 5 to 20 minutes. In the coating layer baked by heating, a portion of the oxide melt permeates into the ceramic and is firmly bonded to the ceramic, and also has excellent uniformity and smoothness.
上記の如くしてセラミツクス上に焼付け層を形
成させた後は、焼付け層上に銀ロウを配置し、更
に該銀ロウ上に接合対象である金属部材を配置し
て、還元性雰囲気中で600〜900℃で熱処理する。
この熱処理によつて、焼付け層が還元されてメタ
ライズされ、それと同時に銀ロウを介して金属部
材が焼付け層に強固に接合され、非常に簡単な方
法でセラミツクスと金属部材との強固な接合を行
なうことができる。 After forming the baked layer on the ceramic as described above, silver solder is placed on the baked layer, and the metal member to be joined is placed on the silver solder, and then heated for 600 minutes in a reducing atmosphere. Heat treatment at ~900℃.
Through this heat treatment, the baked layer is reduced and metalized, and at the same time, the metal component is firmly bonded to the baked layer via the silver solder, thereby achieving a strong bond between the ceramic and the metal component in a very simple method. be able to.
還元性雰囲気としては、例えば水素雰囲気、一
酸化炭素雰囲気等でよい。加熱時間は、通常5〜
30分間程度とすればよい。銀ロウは通常知られて
いる組成のものをいずれも用いることができ、接
合対象である金属部材の種類に応じて、適宜好ま
しいものを用いればよい。銀ロウの組成の一例と
して銀72%、銅28%(重量比)からなるものを例
示できる。銀ロウの処理量は、特に限定されず、
通常のロウ付けにおける処理量と同様でよく、例
えば1〜2mg/cm2程度用いればよい。 The reducing atmosphere may be, for example, a hydrogen atmosphere, a carbon monoxide atmosphere, or the like. Heating time is usually 5~
It should be about 30 minutes. Any commonly known composition of silver solder can be used, and a suitable one may be used depending on the type of metal members to be joined. An example of the composition of silver solder is one consisting of 72% silver and 28% copper (weight ratio). The amount of silver solder processed is not particularly limited,
The processing amount may be the same as that in normal brazing, for example, about 1 to 2 mg/cm 2 .
本願第2発明では、本願第1発明と同様にして
セラミツクス上に焼付け層を形成させた後、該焼
付け層上に銀ロウを配置し、次いで接合対象とな
る金属部材とセラミツクスとの中間の熱膨脹率を
有する中間材を配置し、更にこの上に銀ロウを配
置した後、該銀ロウ上に接合対象である金属部材
を重ねる。次いで、これを還元性雰囲気中で600
〜900℃で熱処理して焼付け層を還元してメタラ
イズすると同時に、銀ロウを介して、焼付け層と
中間材、及び中間材と金属部材を強固に接合す
る。このような方法でセラミツクスと金属部材と
の間に中間材を存在させて、セラミツクスと金属
部材との接合を行なうと、得られる接合体は、高
温下での使用においても、セラミツクスと金属部
材との熱膨脹率の差が中間材によつて緩和され
て、極めて耐熱性の優れたものとなる。 In the second invention of the present application, after forming a baked layer on the ceramics in the same manner as the first invention of the present application, silver solder is placed on the baked layer, and then thermal expansion is applied between the metal member to be joined and the ceramics. After arranging an intermediate material having a certain ratio and further arranging a silver solder thereon, a metal member to be joined is placed on top of the silver solder. This was then heated for 600 min in a reducing atmosphere.
Heat treatment is performed at ~900°C to reduce and metalize the baked layer, and at the same time, the baked layer and the intermediate material, and the intermediate material and the metal member are firmly joined via silver solder. When ceramics and metal members are joined by such a method with an intermediate material present between the ceramics and the metal member, the resulting joined body will be able to maintain the bond between the ceramic and the metal member even when used at high temperatures. The difference in coefficient of thermal expansion between the two is alleviated by the intermediate material, resulting in extremely excellent heat resistance.
中間材としては、銀ロウによつて強固に接合さ
れるものであつて、熱膨脹率が被接合体である金
属部材とセラミツクスとの間にある金属を用いれ
ばよく、できるだけ両者の熱膨脹率の中間値に近
いものが好ましい。このような中間材としては、
被接合体である金属及びセラミツクスの種類に応
じて適宜選択すればよいが、一例として銀ロウに
よつて強固に接合される金属であつて、熱膨脹率
がセラミツクスに近いものとして、Fe−Ni−Co
合金、Fe−Ni−Cr合金等を例示できる。中間材
は、厚さが増す程熱膨脹率の差を緩和する作用が
大きくなるが、通常1〜2mm程度の厚さで充分に
効果を発揮することができる。 As the intermediate material, it is sufficient to use a metal that is firmly joined by silver solder and whose coefficient of thermal expansion is between that of the metal member to be joined and the ceramic, and is preferably a metal whose coefficient of thermal expansion is between the two. Preferably something close to the value. As such intermediate materials,
It may be selected as appropriate depending on the type of metal and ceramics to be joined, but as an example, Fe-Ni- Co
Examples include alloys, Fe-Ni-Cr alloys, and the like. As the thickness of the intermediate material increases, the effect of alleviating the difference in coefficient of thermal expansion becomes greater, but a thickness of about 1 to 2 mm can normally exhibit sufficient effects.
焼付け層の形成に用いるペーストの種類、量、
ペーストの焼付け条件、銀ロウの種類、量等は、
本願第1発明と同様でよい。 The type and amount of paste used to form the baked layer,
The baking conditions for the paste, the type and amount of silver solder, etc.
It may be the same as the first invention of the present application.
発明の効果
本願第1発明の方法によれば、簡単な操作
で、セラミツクスに金属部材を接合することが
でき、接合強度、耐熱性等に優れた接合体が得
られる。また、非常に簡単な方法であるため
に、熟練を要することなく、容易に均一な接合
を行なうことができる。Effects of the Invention According to the method of the first invention of the present application, a metal member can be bonded to ceramics with a simple operation, and a bonded body having excellent bonding strength, heat resistance, etc. can be obtained. Moreover, since it is a very simple method, uniform bonding can be easily performed without requiring any skill.
本願第2発明の方法によれば、簡単な方法で
接合強度、品質の均一性等に優れ、更には耐熱
性が著るしく良好な接合体が得られる。 According to the method of the second invention of the present application, a bonded body with excellent bonding strength, uniformity of quality, etc., and furthermore, extremely good heat resistance can be obtained by a simple method.
実施例
以下、実施例を示して本発明を詳細に説明す
る。Examples Hereinafter, the present invention will be explained in detail with reference to Examples.
実施例 1
Al2O3を96%含むアルミナセラミツクス(20×
20×4mm)に、NiO75重量%、Cu2O20重量%及
びSiO2重量%からなる混合物100重量部、並びに
スクリーンオイル100重量部からなるペーストを
10〜30μmの厚さに塗布し、空気中で1180℃で10
分間熱処理して、上記ペーストをセラミツクスに
焼付けた。次いで焼付け層上に15×15×0.2mmの
銀ロウ(銀72重量%、銅28重量%)及び軟鋼を該
焼付け層上に順次重ね、水素ガス雰囲気中で、
760〜840℃で10分間熱処理をした。その結果、軟
鋼はセラミツクス上に強固に接合され、その剪断
強度は5〜10Kg/mm2であつた。Example 1 Alumina ceramics containing 96% Al 2 O 3 (20×
20 x 4 mm), a paste consisting of 100 parts by weight of a mixture consisting of 75% by weight of NiO, 20% by weight of Cu 2 O and 2 % by weight of SiO, and 100 parts by weight of screen oil.
Coated to a thickness of 10-30 μm and heated at 1180 °C in air for 10
The paste was baked into ceramics by heat treatment for a minute. Next, 15 x 15 x 0.2 mm silver solder (72% silver, 28% copper) and mild steel were sequentially layered on the baked layer, and in a hydrogen gas atmosphere,
Heat treatment was performed at 760-840°C for 10 minutes. As a result, the mild steel was firmly bonded onto the ceramic, and its shear strength was 5 to 10 kg/mm 2 .
実施例 2
実施例1と同様にしてアルミナセラミツクス上
に焼付け層を形成させた後、15×15×0.2mmの銀
ロウ(銀72重量%、銅28重量%)、12×12×2mm
のコバール(Fe−Ni−Co合金)、15×15×0.2mm
の銀ロウ及び軟鋼を該焼付け層上に順次重ねた
後、水素ガス雰囲気中で、760〜840℃で10分間熱
処理した。その結果、軟鋼はセラミツクスに強固
に接合され、接合体は極めて耐熱性に優れたもの
となつた。Example 2 After forming a baked layer on alumina ceramics in the same manner as in Example 1, a 15 x 15 x 0.2 mm silver solder (72% silver, 28% copper), 12 x 12 x 2 mm
Kovar (Fe-Ni-Co alloy), 15×15×0.2mm
After sequentially layering silver solder and mild steel on the baked layer, heat treatment was performed at 760 to 840°C for 10 minutes in a hydrogen gas atmosphere. As a result, the mild steel was firmly bonded to the ceramic, resulting in a bonded body with extremely high heat resistance.
Claims (1)
するペーストをセラミツクス上に塗布し、 酸化性雰囲気中で焼付けた後、 該焼付け層上に銀ロウを配置し、更にこの上
に被接合体金属を配置して、 還元性雰囲気中で600〜900℃で熱処理する ことを特徴とするセラミツクスと金属との接合方
法。 2 NiO並びにCu2O及び/又はSiO2を含有
するペーストをセラミツクス上に塗布し、 酸化性雰囲気中で焼付けた後、 該焼付け層上に銀ロウ、中間材、銀ロウ及び
被接合体金属を順次配置し、 還元性雰囲気中で600〜900℃で熱処理する ことを特徴とするセラミツクスと金属との接合方
法。[Claims] 1 A paste containing NiO and Cu 2 O and/or SiO 2 is applied onto ceramics, baked in an oxidizing atmosphere, and then silver solder is placed on the baked layer, and this A method for joining ceramics and metal, which comprises placing a metal to be joined on top and heat-treating the metal at 600 to 900°C in a reducing atmosphere. 2 After applying a paste containing NiO, Cu 2 O and/or SiO 2 onto ceramics and baking it in an oxidizing atmosphere, silver solder, intermediate material, silver solder and metal to be joined are placed on the baked layer. A method for joining ceramics and metal, characterized by sequentially arranging them and heat-treating them at 600 to 900°C in a reducing atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2505786A JPS6330379A (en) | 1986-02-06 | 1986-02-06 | Ceramic silver-soldering treatment and method of joining ceramic to metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2505786A JPS6330379A (en) | 1986-02-06 | 1986-02-06 | Ceramic silver-soldering treatment and method of joining ceramic to metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6330379A JPS6330379A (en) | 1988-02-09 |
| JPH0369864B2 true JPH0369864B2 (en) | 1991-11-05 |
Family
ID=12155293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2505786A Granted JPS6330379A (en) | 1986-02-06 | 1986-02-06 | Ceramic silver-soldering treatment and method of joining ceramic to metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6330379A (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60251180A (en) * | 1984-05-24 | 1985-12-11 | 三菱重工業株式会社 | Method of bonding ceramic member and metal member |
-
1986
- 1986-02-06 JP JP2505786A patent/JPS6330379A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6330379A (en) | 1988-02-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |