JPH0371194B2 - - Google Patents

Info

Publication number
JPH0371194B2
JPH0371194B2 JP60237405A JP23740585A JPH0371194B2 JP H0371194 B2 JPH0371194 B2 JP H0371194B2 JP 60237405 A JP60237405 A JP 60237405A JP 23740585 A JP23740585 A JP 23740585A JP H0371194 B2 JPH0371194 B2 JP H0371194B2
Authority
JP
Japan
Prior art keywords
ultrapure water
pure water
production system
primary pure
water production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60237405A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6297687A (ja
Inventor
Michihiko Asai
Tsukasa Sakai
Keishiro Tsuda
Kazunari Takemoto
Makoto Kito
Minoru Kuroiwa
Takashi Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Hitachi Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP60237405A priority Critical patent/JPS6297687A/ja
Publication of JPS6297687A publication Critical patent/JPS6297687A/ja
Publication of JPH0371194B2 publication Critical patent/JPH0371194B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Physical Water Treatments (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP60237405A 1985-10-25 1985-10-25 超純水製造システム Granted JPS6297687A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60237405A JPS6297687A (ja) 1985-10-25 1985-10-25 超純水製造システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60237405A JPS6297687A (ja) 1985-10-25 1985-10-25 超純水製造システム

Publications (2)

Publication Number Publication Date
JPS6297687A JPS6297687A (ja) 1987-05-07
JPH0371194B2 true JPH0371194B2 (2) 1991-11-12

Family

ID=17014900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60237405A Granted JPS6297687A (ja) 1985-10-25 1985-10-25 超純水製造システム

Country Status (1)

Country Link
JP (1) JPS6297687A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014014456A1 (en) 2012-07-18 2014-01-23 Otis Elevator Company Fire-retardant belt

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014014456A1 (en) 2012-07-18 2014-01-23 Otis Elevator Company Fire-retardant belt

Also Published As

Publication number Publication date
JPS6297687A (ja) 1987-05-07

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