JPH0375708A - Optical unit and optical coupling part thereof - Google Patents
Optical unit and optical coupling part thereofInfo
- Publication number
- JPH0375708A JPH0375708A JP1211418A JP21141889A JPH0375708A JP H0375708 A JPH0375708 A JP H0375708A JP 1211418 A JP1211418 A JP 1211418A JP 21141889 A JP21141889 A JP 21141889A JP H0375708 A JPH0375708 A JP H0375708A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- holder
- optical waveguide
- holders
- brazing metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Couplings Of Light Guides (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、光導波路のホルダと光部品のホルダとをろう
材を介してレーザ溶接した光ユニット及びその光結合部
に関し、特に低出力のレーザ光にてこれらホルダの接合
を可能としたものである。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to an optical unit in which a holder for an optical waveguide and a holder for an optical component are laser welded via a brazing material, and an optical coupling part thereof, particularly for low-power These holders can be joined using laser light.
〈従来の技術〉
近年、光通信や光情報処理等の分野における技術の進展
に伴い、単一モード伝送用光ファイバと光結合回路や光
分岐回路等を構成する光導波路とを信頼性高く実装する
ことが必要となって来ている。周知のように、単一モー
ド伝送用光ファイバのコア部の径は10μm程度しかな
く、この単一モード伝送用光ファイバと先に述べた光導
波路とを接続する場合には、これらの相対的な位置ずれ
を1μm程度以下に抑えて接続損失の増加を防止しなけ
ればならない。<Conventional technology> In recent years, with the advancement of technology in fields such as optical communication and optical information processing, it has become possible to implement highly reliable optical fibers for single mode transmission and optical waveguides that constitute optical coupling circuits, optical branching circuits, etc. It has become necessary to do so. As is well known, the diameter of the core portion of a single-mode transmission optical fiber is only about 10 μm, and when connecting this single-mode transmission optical fiber to the optical waveguide described above, the relative It is necessary to suppress the positional deviation to about 1 μm or less to prevent an increase in connection loss.
従来、光導波路と単一モード伝送用光ファイバ等の光部
品この接続に際しては、これらの接続損失が最小となる
ように、光導波路を保持するホルダと光部品を保持する
ホルダとを位置決めし、両者を接着剤により固定してい
る。Conventionally, when connecting an optical waveguide and an optical component such as an optical fiber for single mode transmission, the holder that holds the optical waveguide and the holder that holds the optical component are positioned so that the connection loss between them is minimized. Both are fixed with adhesive.
ところが、この方法では接着剤が固化するまで一対のホ
ルダを静止状態で固定しておく必要がある上、外部環境
に対する接着剤の特性に問題があるため、信頼性が高い
ものとは必ずしも云えなかった。However, this method requires the pair of holders to be fixed in a stationary state until the adhesive hardens, and there are problems with the characteristics of the adhesive against the external environment, so it cannot necessarily be said to be highly reliable. Ta.
そこで、周囲への熱的影響が少なくしかも瞬間的な接合
が可能なレーザ溶接を、これら光導波路と光部品この結
合部に応用することが考えられている。このような光結
合部を有する光ユニットの一例を表す第7図に示すよう
に、単一モード伝送用光ファイバ(以下、単一モードフ
ァイバと略称する)101の接続端部はステンレス鋼製
のフェルール102を介してステンレス鋼製のホルダ1
03に埋設されている。前記単一モードファイバ101
に一端側が接続する光導波路104は、ステンレス鋼製
のホルダ105に接着固定されており、この光導波路1
04にはセンサチップ106が組付けられている。この
光導波路104の他端側には、ステンレス鋼製のホルダ
107に保持された複数本(図では二本)の多モード伝
送用光ファイバ(以下、多モードファイバと略称する)
108の接続端部が連結されており、前記ホルダ107
はステンレス鋼製のホルダ受け109に装着されている
。そして、これらホルダ103,105゜107及びホ
ルダ受け109の突き合せ端部110はYAG (イツ
トリウム・アル電ニウム・ガーネット)レーザにより適
宜スポット溶接され、相互に一体化されている。Therefore, it is being considered to apply laser welding, which has less thermal influence on the surroundings and can perform instantaneous joining, to the joints between these optical waveguides and optical components. As shown in FIG. 7, which shows an example of an optical unit having such an optical coupling part, the connecting end of a single mode transmission optical fiber (hereinafter abbreviated as single mode fiber) 101 is made of stainless steel. Stainless steel holder 1 via ferrule 102
It is buried in 03. The single mode fiber 101
An optical waveguide 104 whose one end side is connected to is adhesively fixed to a stainless steel holder 105.
04 has a sensor chip 106 assembled therein. At the other end of this optical waveguide 104, a plurality of (two in the figure) multimode transmission optical fibers (hereinafter abbreviated as multimode fibers) are held in a stainless steel holder 107.
108 are connected, and the holder 107
is attached to a holder receiver 109 made of stainless steel. The abutting ends 110 of these holders 103, 105° 107 and holder receiver 109 are appropriately spot welded using a YAG (yttrium aluminum garnet) laser and are integrated with each other.
前記単一モードファイバ101から入射した光は光導波
路104にて二つに分岐され、センサチップ106を有
する側とそうでない側この光が二本の多モードファイバ
108にてamされる。そこで、これら二本の多モード
ファイバ108からの出力を比較することにより、セン
サチップ10Bに基づく高感度な各種測定が可能となる
。The light incident from the single mode fiber 101 is split into two by an optical waveguide 104, and the light is beamed into two multimode fibers 108, one on the side with the sensor chip 106 and the other on the other side. Therefore, by comparing the outputs from these two multimode fibers 108, various highly sensitive measurements based on the sensor chip 10B become possible.
〈発明が解決しようとする課題〉
第7図に示した従来の光ユニット及びその光結合部では
、黒点で示す溶接箇所111に充分な接合強度を得る必
要上、これら溶接箇所111の溶は込み深さを充分深く
設定しなければならない。しかも、相互に接合されるホ
ルダ103,105,107及びホルダ受け109が熱
容量の大きなブロック状をなしているため、高出力のY
AGレーザを使用する必要がある。<Problems to be Solved by the Invention> In the conventional optical unit and its optical coupling part shown in FIG. The depth must be set sufficiently deep. Moreover, since the holders 103, 105, 107 and the holder receiver 109 that are joined to each other have a block shape with a large heat capacity, a high output Y
It is necessary to use an AG laser.
ところが、高出力のYAGレーザに対して従来ガイド可
能なエネルギビーム伝送用光ファイバの伝送許容限度は
30ジユ一ル程度しかなく、これ以上の高出力のレーザ
光に対しては、反射鏡を利用した多関節型のガイド装置
を採用しなければならず、その11m等の取扱いがめん
どうとなる欠点があった。しかも、高出力のレーザ光を
溶接箇所に照射すると、この時の溶接の衝撃により、ホ
ルダ103゜105.107及びホルダ受け109の相
対位置がずれてしまい、接続損失を増大させる結果を招
く虜があった。However, the transmission tolerance limit of conventional energy beam transmission optical fibers that can guide high-power YAG lasers is only about 30 units, and for higher-power laser beams, a reflector is used. It was necessary to adopt a multi-jointed guide device, which had the disadvantage that it was troublesome to handle the 11 m long guide device. Furthermore, when a high-power laser beam is irradiated to the welding area, the impact of the welding at this time causes the relative positions of the holder 103, 105, 107 and the holder receiver 109 to shift, resulting in an increase in connection loss. there were.
く課題を解決するための手段〉
本発明による光ユニットは、光導波路と、この光導波路
に接続する光部品と、これら光導波路及び光部品をそれ
ぞれ保持する一対のホルダと、これら一対のホルダの突
き合わせ端部に相互に対向状態でそれぞれ形成されるろ
う材保持部と、これらろう材保持部にそれぞれ一体的に
埋設され且つ相互にレーザ溶接されるろう材とを具えた
ことを特徴とするものである。Means for Solving the Problems> An optical unit according to the present invention includes an optical waveguide, an optical component connected to the optical waveguide, a pair of holders that respectively hold the optical waveguide and the optical component, and a pair of holders for holding the optical waveguide and the optical component, respectively. A device characterized by comprising brazing metal holding portions formed at the butt ends facing each other, and brazing metal holding portions each integrally embedded in each of the brazing metal holding portions and laser welded to each other. It is.
又、本発明による光結合部は、光導波路を保持するホル
ダと前記光導波路に接続する光部品を保持するホルダと
を相互に突き合わせ、これらホルダの突き合せ端部を一
体的に接合する光結合部において、前記突き合わせ端部
に相互に対向状態でろう材保持部がそれぞれ形成され、
これらろう材保持部にそれぞれ一体的に埋設されたろう
材が相互にレーザ溶接されていることを特徴とするもの
である。Further, the optical coupling unit according to the present invention is an optical coupling in which a holder holding an optical waveguide and a holder holding an optical component connected to the optical waveguide are abutted against each other, and the abutted ends of these holders are integrally joined. brazing material holding portions are formed at the abutted ends in a mutually opposing state;
It is characterized in that the brazing filler metals each integrally buried in each of these brazing filler metal holding parts are laser welded to each other.
く作 用〉
光導波路や光部品を保持するホルダに対しろう材の融点
は充分低く、従ってホルダの突き合わせ端部に形成され
たろう材保持部と一体のろう材に対し、低出力のレーザ
光を用いても充分な溶は込み深さでこれらろう材が相互
に接合され、一対のホルダが一体化される。The melting point of the brazing filler metal is low enough for the holder that holds the optical waveguide or optical component, so it is not possible to use a low-power laser beam on the brazing filler metal that is integrated with the brazing filler metal holder formed at the butt end of the holder. These brazing filler metals are joined to each other with a sufficient depth of melting even when used, and the pair of holders are integrated.
く実 施 例〉
本発明による光結合部を有する光ユニットの一実施例の
外観を表す第1図及びその断面構造を表す第2図に示す
ように、単一モードファイバ11の接am部には、ステ
ンレス鋼等の金属製のガイドスリーブ12aに一端部を
嵌め込んだシルコニ1等のセラミックスや金属等で形成
されるフェルール12bが一体的に嵌着され、これらガ
イドスリーブ12aの一部及びフェルール12bは、後
述するろう材この接合性の良好なコバール等の金属製の
ホルダ13に貫通状態で接合されている。Embodiment As shown in FIG. 1 showing the appearance of an embodiment of an optical unit having an optical coupling part according to the present invention, and FIG. 2 showing its cross-sectional structure, a A ferrule 12b made of ceramics, metal, etc., such as Silconi 1, whose one end is fitted into a guide sleeve 12a made of metal such as stainless steel, is integrally fitted, and a part of the guide sleeve 12a and the ferrule 12b is joined in a penetrating state to a metal holder 13 made of Kovar or the like which has good joining properties with a brazing filler metal to be described later.
そして、このホルダ13には一端が単一モードファイバ
11に接続する光導波路14を形成した金属製のホルダ
15が接合されている。A metal holder 15 having an optical waveguide 14 connected to the single mode fiber 11 at one end is bonded to the holder 13 .
光導波路14の構造を表す第3図に示すように、本実施
例の光導波路14は単一モードファイバ11に接続し且
っY分岐回路によって八本に分岐したコア部14aと、
これらコア部14mを囲むクラッド部14b1このクラ
ッド部14bを保持する基板14cとからなり、図示し
ない接着剤にて光導波1114の基板14cの部分がホ
ルダ15と一体化されている。なお、この光導波路14
とホルダ15この接合方法として、ホルダ15に対する
光導波路14の接合端面に蒸着法等で金属膜を形成し、
この金属膜を介して光導波路14とホルダ15とをろう
付けすることも可能である。又、余談ではあるがこの薄
膜状をなす光導波路14は特公昭61−39645号公
報等に開示された方法等で形成することができ、多成分
系ガラスやニオブ酸リチウムや石英ガラス或いは各種半
導体等でこの光導波路14を構成する。As shown in FIG. 3 showing the structure of the optical waveguide 14, the optical waveguide 14 of this embodiment includes a core portion 14a connected to the single mode fiber 11 and branched into eight pieces by a Y branch circuit;
It consists of a cladding part 14b surrounding the core part 14m and a substrate 14c holding the cladding part 14b, and the substrate 14c part of the optical waveguide 1114 is integrated with the holder 15 with an adhesive (not shown). Note that this optical waveguide 14
and the holder 15. As a bonding method, a metal film is formed on the bonding end surface of the optical waveguide 14 to the holder 15 by vapor deposition or the like,
It is also possible to braze the optical waveguide 14 and the holder 15 via this metal film. As an aside, this thin film optical waveguide 14 can be formed by the method disclosed in Japanese Patent Publication No. 61-39645, etc., and can be formed using multicomponent glass, lithium niobate, quartz glass, or various semiconductors. This optical waveguide 14 is constructed by the following.
このように、本実施例ではY分岐回路を利用した光導波
1114を採用したが、第4図に示す如き方向性結合回
路を利用した光導波路14や第5図に示す如き波長無依
存性回路を利用した光導波路14を採用することも可能
であり、要するに、光信号の入射端と射出端とがそれぞ
れ一つ以上あるような光導波路でありさえすれば良い。As described above, in this embodiment, the optical waveguide 1114 using a Y branch circuit is employed, but the optical waveguide 14 using a directional coupling circuit as shown in FIG. 4 or a wavelength-independent circuit as shown in FIG. It is also possible to employ an optical waveguide 14 that utilizes the optical waveguide 14, and in short, it is sufficient as long as the optical waveguide has one or more input ends and one or more output ends for the optical signal.
なお、これら第4図及び第5図において第3図に示した
部材と同一機能の部材には、これと同一の符号を記しで
ある。In addition, in these FIGS. 4 and 5, members having the same functions as those shown in FIG. 3 are designated by the same reference numerals.
前記光導波路14の他端に接続端部がそれぞれ接続する
本実施例では八本の単一モードファイバ16は、これら
の接続端部を一定間隔で保持するファイバ受け17とフ
ァイバ押え18とで固定されており、これらが更に接着
剤を介して金属製のホルダ19に接合されている。In this embodiment, the eight single mode fibers 16 whose connection ends are respectively connected to the other end of the optical waveguide 14 are fixed by a fiber receiver 17 and a fiber presser 18 that hold these connection ends at regular intervals. These are further bonded to a metal holder 19 via an adhesive.
ホルダ15,19はホルダ13と同材質のコバール等で
形成されており、これらの突き合せ端部20の接合箇所
には、共晶はんだ等の低融点はんだ21が充填された状
態となっている。これら低融点はんだ21をYAGレー
ザ等でスポット溶接するが、ここの部分の熱容量が小さ
いことから5ジユ一ル程度のエネルギを1〜10ミリ秒
のパルスで照射すれば、充分な溶は込み深さが得られる
。The holders 15 and 19 are made of Kovar or the like, which is the same material as the holder 13, and the joints of their abutted ends 20 are filled with low melting point solder 21 such as eutectic solder. . These low melting point solders 21 are spot welded using a YAG laser or the like, but since the heat capacity of these parts is small, if the energy of about 5 units is irradiated with pulses of 1 to 10 milliseconds, sufficient weld penetration depth can be achieved. You can get the feeling.
ちなみに、ホルダ13,15,19の突き合わせ端部2
0を直接レーザ溶接して本実施例と同様な溶は込み深さ
を得るためには、30ジユ一ル以上のエネルギを1〜1
0ミリ秒のパルスで照射する必要があり、本実施例の構
造を採用することによって、低出力のYAGレーザを利
用可能となる。By the way, the butt ends 2 of the holders 13, 15, 19
In order to directly laser weld 0 and obtain the same penetration depth as in this example, an energy of 30 units or more must be applied to 1~1
It is necessary to irradiate with a pulse of 0 milliseconds, and by adopting the structure of this embodiment, it becomes possible to use a low-output YAG laser.
低融点はんだ21に対するレーザ光の照射方法としては
、単一モードファイバ11.16及び光導波路14のコ
ア部14mを挾んで180度隔T1三箇所から同時にこ
れら単一モードファイバ11,16及び光導波路14へ
向けて二本のレーザ光を照射し、溶接時の衝撃により°
ホルダ13,15,19の相対位置がずれないように配
慮することが望ましい。As a method of irradiating the low melting point solder 21 with laser light, the single mode fibers 11, 16 and the optical waveguide 14 are simultaneously irradiated from three locations T1 at 180 degree intervals, sandwiching the single mode fibers 11, 16 and the core portion 14m of the optical waveguide 14. Two laser beams are irradiated towards 14, and the impact during welding causes the
It is desirable to take care so that the relative positions of the holders 13, 15, and 19 do not shift.
この低融点はんだ21をホルダ13,15゜19の突き
合わせ端部20に充填するに際しては、まずホルダ13
,15..19を仮組みし、この状態にて低融点はんだ
21を充填すべき突き合わせ端部20の部分にドリル等
で穿孔作業を施し、丸穴状をなするう材保持部22をホ
ルダ13,15,19の突き合わせ端部20に形成する
。次に、ホルダ13,15゜19を分解し、これらの突
き合わせ端部22に形成された半円形の溝状をなするう
材保持部22に低融点はんt!21を盛金したのち、こ
れら低融点はんだ21の表面を研摩してホルダ13,1
5,19の突き合わせ端部22の表面と同一平面状をな
すようにする。そして、これらホルダ13,15,19
を再び組立て、半円柱状をなす低融点はんだ21の接合
端面を相互にレーザ溶接することにより、ホルダ13,
15,19を一体化するのである。When filling the butt ends 20 of the holders 13 and 15° 19 with this low melting point solder 21, first
,15. .. 19 are temporarily assembled, and in this state, a hole is made with a drill or the like at the butt end portion 20 where the low melting point solder 21 is to be filled. 19 at the abutting end 20. Next, the holders 13 and 15° 19 are disassembled, and a low melting point solder is applied to the semicircular groove-shaped filler holding portion 22 formed at the butt end portions 22 of these holders. 21, the surface of these low melting point solders 21 is polished to form the holders 13, 1.
It is made to be flush with the surface of the abutting end portion 22 of Nos. 5 and 19. And these holders 13, 15, 19
The holder 13,
15 and 19 are integrated.
本実施例では、ろう材として機械的強度の余り高くない
低融点はんt!21を用いているため、大きな外力が負
荷する虞があるような使用条件では適当ではない。この
ような場合には、第1図におけるホルダ15.19の突
き合わせ端部20の部分を拡大した第6図に示すように
、低融点はんだ21による接合箇所の中間にホルダ15
.19の突き合わせ端部20を直接レーザ溶接する直付
は部23を形成したり、或いは高強度の硬ろう材等を使
用してホルダ13,15,19の接合強度を向上させる
ことができる。In this example, a low melting point solder t! which does not have very high mechanical strength was used as the brazing material. 21, it is not suitable under usage conditions where there is a risk of being subjected to a large external force. In such a case, as shown in FIG. 6, which is an enlarged view of the abutting ends 20 of the holders 15 and 19 in FIG.
.. The joining strength of the holders 13, 15, and 19 can be improved by directly laser welding the abutting ends 20 of the holders 19 to form the portion 23, or by using a high-strength hard brazing material or the like.
〈発明の効果〉
本発明の光ユニット及びその光結合部によると、相互に
突き合わされる一対のホルダの突き合わせ端部に埋設さ
れるろう材を介してこれらをレーザ溶接するようにした
ので、低出力のレーザ光にても充分な溶は込み深さが得
られ、設備コストを下げることが可能である。又、レー
ザ光を照射した際の衝撃を軽減できるため、低損失の光
結合部を有する光ユニットを容易に実現可能である。更
に、ろう材のレーザ溶接後に接続損失の増加が認められ
た場合、ろう材を再度加熱してホルダを分解し、ホルダ
を組立て直してこれらを接合することが容易に行えるた
め、−枚のウニへ当り一つの光回路しかできないような
歩留りの悪い回路を実装するような場合の救済手段とし
て非常に有効である。<Effects of the Invention> According to the optical unit and the optical coupling portion thereof of the present invention, since the pair of holders that are butted against each other are laser welded through the brazing material embedded in the butted ends, the cost is low. Sufficient penetration depth can be obtained even with high output laser light, and equipment costs can be reduced. Furthermore, since the impact when irradiated with laser light can be reduced, it is possible to easily realize an optical unit having a low-loss optical coupling section. Furthermore, if an increase in splice loss is observed after laser welding the filler metal, it is easy to heat the filler metal again, disassemble the holder, reassemble the holder, and join them together. This is very effective as a relief measure when implementing circuits with poor yields where only one optical circuit can be fabricated per unit.
第1図は本発明による光結合部を具えた光ユニットの一
実施例を表す外観斜視図、第2図はその断面図、第3図
〜第5図はその光導波路の構造の一例をそれぞれ表す概
念図、第6図は本発明の他の一実施例をそれぞれ表す部
分拡大斜視図、第7図は従来の光結合部を有する光ユニ
ットの一例を表す外観斜視図である。
又、図中の符号で11.16は単一モードファイバ、1
2bはフェルール、13,15.19はホルダ、14は
光導波路、14aはコア部、14bはクラッド部、14
cは基板、17はファイバ受け、18はファイバ押え、
20は突き合せ端部、21は低融点はんだ、22はろう
材保持部、23は直付は部である。
第
直
図
第
図
第
図
+4b
第
図
第
図
40FIG. 1 is an external perspective view showing an embodiment of an optical unit equipped with an optical coupling section according to the present invention, FIG. 2 is a sectional view thereof, and FIGS. 3 to 5 are examples of the structure of the optical waveguide. FIG. 6 is a partially enlarged perspective view showing another embodiment of the present invention, and FIG. 7 is an external perspective view showing an example of an optical unit having a conventional optical coupling portion. Also, in the figure, 11.16 is a single mode fiber, 1
2b is a ferrule, 13, 15.19 is a holder, 14 is an optical waveguide, 14a is a core portion, 14b is a cladding portion, 14
c is a substrate, 17 is a fiber receiver, 18 is a fiber holder,
20 is a butting end, 21 is a low melting point solder, 22 is a brazing material holding part, and 23 is a direct attachment part. Figure +4b Figure 40
Claims (4)
これら光導波路及び光部品をそれぞれ保持する一対のホ
ルダと、これら一対のホルダの突き合わせ端部に相互に
対向状態でそれぞれ形成されるろう材保持部と、これら
ろう材保持部にそれぞれ一体的に埋設され且つ相互にレ
ーザ溶接されるろう材とを具えたことを特徴とする光ユ
ニット。(1) An optical waveguide, an optical component connected to this optical waveguide,
A pair of holders that hold these optical waveguides and optical components, a brazing metal holding part formed at the butt ends of these pair of holders in a mutually opposing state, and a brazing metal holding part integrally embedded in each of these brazing metal holding parts. and a brazing material that is laser-welded to each other.
する光部品を保持するホルダとを相互に突き合わせ、こ
れらホルダの突き合せ端部を一体的に接合する光結合部
において、前記突き合わせ端部に相互に対向状態でろう
材保持部がそれぞれ形成され、これらろう材保持部にそ
れぞれ一体的に埋設されたろう材が相互にレーザ溶接さ
れていることを特徴とする光結合部。(2) In an optical coupling section in which a holder holding an optical waveguide and a holder holding an optical component connected to the optical waveguide are abutted against each other and the abutted ends of these holders are integrally joined, the abutted end 1. An optical coupling unit characterized in that brazing metal holding portions are formed in such a manner that they face each other, and the brazing metal holding portions are integrally embedded in the brazing metal holding portions and are laser welded to each other.
れら突き合わせ端部を直接レーザ溶接する直付け部を具
えた請求項(1)に記載の光ユニット。(3) The optical unit according to claim (1), further comprising a direct attachment portion formed at the abutting ends of the pair of holders and directly laser welding the abutting ends.
付け部が形成された請求項(2)に記載の光結合部。(4) The optical coupling part according to claim (2), further comprising a direct attachment part for directly laser welding the abutted ends of the holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1211418A JPH0375708A (en) | 1989-08-18 | 1989-08-18 | Optical unit and optical coupling part thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1211418A JPH0375708A (en) | 1989-08-18 | 1989-08-18 | Optical unit and optical coupling part thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0375708A true JPH0375708A (en) | 1991-03-29 |
Family
ID=16605630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1211418A Pending JPH0375708A (en) | 1989-08-18 | 1989-08-18 | Optical unit and optical coupling part thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0375708A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0735390A3 (en) * | 1995-03-31 | 1997-03-19 | Nec Corp | Device for optically connecting an optical waveguide and an optical fibre |
| JP2003255180A (en) * | 2002-03-06 | 2003-09-10 | Yamaha Corp | Microlens array coupling system, and microlens array and its manufacturing method |
| JP2018141975A (en) * | 2017-02-28 | 2018-09-13 | 新科實業有限公司SAE Magnetics(H.K.)Ltd. | Optical component connection structure and connection method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01133009A (en) * | 1987-11-18 | 1989-05-25 | Hitachi Ltd | Optical element module |
| JPH01191105A (en) * | 1988-01-27 | 1989-08-01 | Mitsubishi Gas Chem Co Inc | Optical waveguide device and optical waveguide element connection method |
-
1989
- 1989-08-18 JP JP1211418A patent/JPH0375708A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01133009A (en) * | 1987-11-18 | 1989-05-25 | Hitachi Ltd | Optical element module |
| JPH01191105A (en) * | 1988-01-27 | 1989-08-01 | Mitsubishi Gas Chem Co Inc | Optical waveguide device and optical waveguide element connection method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0735390A3 (en) * | 1995-03-31 | 1997-03-19 | Nec Corp | Device for optically connecting an optical waveguide and an optical fibre |
| JP2003255180A (en) * | 2002-03-06 | 2003-09-10 | Yamaha Corp | Microlens array coupling system, and microlens array and its manufacturing method |
| JP2018141975A (en) * | 2017-02-28 | 2018-09-13 | 新科實業有限公司SAE Magnetics(H.K.)Ltd. | Optical component connection structure and connection method thereof |
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