JPH03772B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a switching device that can be used to open and close a heating furnace that can be opened and closed by dividing the furnace body, and particularly relates to a switching device that can be used to open and close a heating furnace that can be opened and closed by dividing the furnace body. Regarding what made it possible to stop.

[Conventional technology]

Generally, a heating furnace used in the manufacture of semiconductor devices has a configuration that covers the circumferential surface of a cylindrical reaction tube that houses a semiconductor wafer, and is designed to uniformly heat the circumferential surface of the reaction tube. It is equipped with a heating element.

The heat treatment of the semiconductor wafer is performed by inserting the reaction tube containing the semiconductor wafer into the end opening of the heating furnace, and the semiconductor wafer that has undergone heat treatment is carried out by pulling out the reaction tube from the end opening of the heating furnace. It is said that

By the way, moving the reaction tube in and out of the heating furnace in the longitudinal direction requires a space larger than the length of the reaction tube on the end face side of the heating furnace, and it takes a long time to move the reaction tube in and out. In particular, when the reaction tube is pulled out of the heating furnace for cooling, residual heat from the heating furnace acts on the semiconductor wafer inside the reaction tube, and there is a limit to the cooling rate.

For this reason, with regard to cooling semiconductor wafers, the effect of rapid cooling may directly affect the characteristics of some semiconductor devices, and the demand for rapid cooling is increasing.

[Problem that the invention seeks to solve]

In order to meet these demands, the furnace body is divided into parts that can be opened and closed, and by opening and closing the furnace body, the reaction tube containing the semiconductor wafer can be attached and detached, thereby achieving rapid heating and cooling of the semiconductor wafer. A furnace is proposed.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an opening/closing device that can easily open/close opening/closing members such as divided furnace bodies.

[Means for solving problems]

That is, in the opening/closing device of the present invention, the first rotating shaft 6
A, a first opening/closing member (container 2A) rotatably provided around this first rotation axis, and this first
a second opening/closing member (container 2B) disposed opposite to the opening/closing member; a second rotating shaft 6B provided at the rotational movement center of the second opening/closing member; and the first and second opening/closing members. first and second link arms 14A, 1 whose one ends are rotatably provided at symmetrical positions with respect to the first and second rotation axes of the
4B, and one slider 1 in which the other end sides of the first and second link arms are rotatably provided.
2, a rail 10 provided so as to regulate the moving direction of the slider, and a mechanism (drive shaft 20) for moving the slider along the rail, and a mechanism (drive shaft 20) for moving the slider along the rail. The weight for opening and closing is offset on the slider via the link arm.

[Effect]

In the opening/closing device of the present invention, by moving the slider in a linear direction, the linear movement is
and the second link arm acts on the first and second opening/closing members at positions spaced apart from the first and second rotational axes, and the first and second opening/closing members act on the first and second rotational axes. Rotates around the shaft to open and close.

In the opening/closing device of the present invention, the first and second link arms with respect to the first and second opening/closing members have one end at a position orthogonal to the moving direction of the movable body around the support shaft, for example. If it is rotatably mounted, the linear movement of the slider can be efficiently transmitted to the first and second opening/closing members, and the desired opening/closing angle can be obtained by moving the movable body. Since the load of the opening/closing drive is small, the drive mechanism such as a motor can be easily driven with a small output.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the switching device of the present invention.

As shown in FIG. 1, containers 2A and 2B used for heating, etc., which divide a cylindrical body into two in the diametrical direction, are installed as first and second opening/closing members arranged oppositely, and each end face of the containers 2A, 2B is A support plate 4 is attached as a support member. Figure 1 shows
The containers 2A and 2B are shown in a closed state, and objects to be heated are housed inside the containers 2A and 2B. The support plate 4 supporting each container 2A, 2B is rotatably supported by first and second rotation shafts 6A, 6B attached to its movable portion.

The support column 8 has a T-shape, and a slider 12 as a moving body is attached to a rail 10 disposed on the inner surface thereof so as to be movable in a linear direction. The slider 12 of this embodiment is installed so as to be movable in the horizontal direction by a rail 10 that regulates the direction of movement, and between the slider 12 and the support plate 4,
A first transmission member having one end rotatably provided at a symmetrical position with respect to the rotation axis of the containers 2A and 2B, respectively.
And second link arms 14A, 14B are attached via pins 16, 18. In the case of this embodiment, the rotation axes 6A, 6B are perpendicular to the moving direction of the slider 12, and the rotation axes 6A, 6B are the centers.
One end of the link arms 14A, 14B is attached at a position spaced apart from 6B by a certain distance, and the other end is attached to approximately the center of the slider 12.

A drive shaft 20 is attached between the pillars 8 as a mechanism for moving the slider 12 along the rail 10, and is rotated by a rotary drive means such as a motor, and an arm that transmits rotational force to the circumferential surface of the drive shaft 20. 22, and this arm 22 is attached to the slider 1.
The engagement shafts 24a and 24b are attached to the wall surfaces of 2 at a constant interval.

Therefore, when the drive shaft 20 is rotated in the directions of arrows a and b, the arm 22 is rotationally displaced in the directions of arrows c and d in accordance with the direction of rotation.
The slider 12 is moved horizontally, and as a result,
Containers 2A and 2B can be opened and closed.

Moreover, each container 2A, 2B has each rotating shaft 6A, 6B.
The slider 12 and link arms 14A, 14B rotate around the rotating shafts 6A,
Since the containers 2A and 2B are arranged in a symmetrical position with respect to 6B, the weight due to the rotation of the containers 2A and 2B is canceled out on the slider 12 via the link arms 14A and 14B, so that the movement of the slider 12 is stopped. The containers 2A and 2B can be opened and fixed at any angle with just a single touch. Furthermore, due to such weight balance, opening and closing operations can be performed with a small driving force, which has the advantage of not imposing a large load on a rotational drive mechanism such as a motor.

FIG. 2 shows a heating furnace in which the switchgear of the present invention is implemented.

In this heating furnace, the furnace body is vertically divided into two furnace bodies 30A, 30B, and each furnace body 30A, 30
B is configured to be openable and closable, and a cylindrical reaction tube containing a semiconductor wafer as an object to be heated is installed in a housing section 32 formed inside.

Inside each furnace body 30A, 30B, a heat insulating material 34 is provided.
A heating element 36 is installed between the furnace bodies 30A and 30B, and a support plate 4 is fixed to the end surface side of each furnace body 30A, 30B. Each furnace body 30A, 30B is rotatably supported by a column 8 of a support base 38 with a rotating shaft 6A, 6B passing through a corner on the joining side of each support plate 4.

Link arms 14A, 14B for opening and closing the furnace bodies 30A, 30B are attached to each support plate 4 at the upper or lower corners of the rotating shafts 6A, 6B, and the other end of each link arm 14A, 14B is ,
The slider 12 is rotatably attached to a slider 12 which is horizontally movable on a rail 10 horizontally disposed on the support column 8 via rotating shafts 6A and 6B. Therefore, the furnace bodies 30A and 30B can be opened and closed by moving the slider 12 in the horizontal direction and rotating about the rotation shafts 6A and 6B.

When performing heat treatment using such a heating furnace, after preheating the furnace bodies 30A and 30B by driving the heating element 36, when the drive shaft 20 is rotated in the direction of arrow a, the third As shown in A in the figure, the slider 12 is moved in the direction of arrow e, and the furnace body 30
A, 30B can be opened.

At the position where a predetermined opening degree is obtained, the rotation of the drive shaft 20 is stopped, and the reaction tube 42 containing the semiconductor wafer 40 is moved in the direction of the arrow f to open the furnace bodies 30A, 3.
After installing the slider 12 in the housing part 32 of 0B, rotate the drive shaft 20 in the direction of arrow b to move the slider 12 in the direction of arrow g.
As shown in B of Fig. 3,
Close the furnace bodies 30A and 30B. Closed furnace body 30
A, 30B heats rapidly, maintains the heating temperature at a desired value, and performs a predetermined heat treatment, then rotates the drive shaft 20 again in the direction of arrow a, and moves the slider 12 in the direction of arrow e. As shown in A of FIG. 3, the furnace bodies 30A and 30B are opened, the reaction tube 42 is carried out in the direction of the arrow h, and the semiconductor wafer 40 is cooled.

Therefore, the heating treatment of the semiconductor wafer 40 and its cooling treatment can be performed instantly by opening and closing the furnace bodies 30A and 30B, and in particular, the time for attaching and detaching the reaction tube 42 is shortened, and its operation is easy. Thus, the semiconductor wafer 40 can be rapidly heated and cooled.

Although the embodiments have been described using examples of opening and closing containers and heating furnaces, the present invention can be applied to devices other than such devices that require opening and closing.

〔Effect of the invention〕

As explained above, according to the present invention, the opening/closing member such as the divided furnace body can be opened and closed easily and quickly with a small driving force, and the opening/closing angle can be controlled by weight balance. It can be stopped at any opening/closing angle without requiring any fixing force.

[Brief explanation of drawings]

Fig. 1 is a perspective view showing an embodiment of the switchgear of the present invention, Fig. 2 is a perspective view showing a heating furnace which is an embodiment of the switchgear of the invention, and Fig. 3 is a diagram showing opening and closing of the furnace body. be. 2A... Container (first opening/closing member), 2B... Container (second opening/closing member), 4... Support plate, 6A...
First rotation axis, 6B...Second rotation axis, 10...
Rail, 12...Slider, 14A...First link arm, 14B...Second link arm, 2
0...Drive shaft.

Claims (1)

[Claims] 1. A first rotating shaft, a first opening/closing member rotatably provided around the first rotating shaft, and a second opening/closing member disposed opposite to the first opening/closing member. an opening/closing member; a second rotation axis provided at the rotational movement center of the second opening/closing member; and a second rotation axis provided at a rotational movement center of the second opening/closing member, and located symmetrically with respect to the first and second rotation axes of the first and second opening/closing members. First and second link arms each having one end thereof rotatable; a slider having the other end of each of the first and second link arms rotatable; and a moving direction of the slider. and a mechanism for moving the slider along the rail, the weight for opening and closing the first and second opening/closing members being transferred to the link arm via the link arm. A switching device characterized in that it is offset on a slider.