JPH0377353U - - Google Patents

Info

Publication number
JPH0377353U
JPH0377353U JP1989139257U JP13925789U JPH0377353U JP H0377353 U JPH0377353 U JP H0377353U JP 1989139257 U JP1989139257 U JP 1989139257U JP 13925789 U JP13925789 U JP 13925789U JP H0377353 U JPH0377353 U JP H0377353U
Authority
JP
Japan
Prior art keywords
pair
insulating tubes
filament
conductors
filament device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989139257U
Other languages
English (en)
Other versions
JPH0541491Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989139257U priority Critical patent/JPH0541491Y2/ja
Publication of JPH0377353U publication Critical patent/JPH0377353U/ja
Application granted granted Critical
Publication of JPH0541491Y2 publication Critical patent/JPH0541491Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例のフイラメント装
置の断面図、第２図はその底面図、第３図はこの
考案の一使用例を示す断面図、第４図は従来例の
断面図、第５図はその底面図である。 １……フイラメント、２……導体、３……絶縁
筒、４……台座、７……被覆材、９……プラズマ
生成容器。

Claims (1)

  1. 【実用新案登録請求の範囲】 プラズマ生成容器の開口部を閉塞する金属製の
    台座に一対の絶縁筒を貫設し、この一対の絶縁筒
    に一対の導体を貫挿し、この一対の導体の先端に
    フイラメントを接続したフイラメント装置におい
    て、 前記一対の絶縁筒の各対向部分を空〓を介して
    被覆した被覆材を、前記台座に設けたことを特徴
    とするフイラメント装置。
JP1989139257U 1989-11-29 1989-11-29 Expired - Lifetime JPH0541491Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989139257U JPH0541491Y2 (ja) 1989-11-29 1989-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989139257U JPH0541491Y2 (ja) 1989-11-29 1989-11-29

Publications (2)

Publication Number Publication Date
JPH0377353U true JPH0377353U (ja) 1991-08-02
JPH0541491Y2 JPH0541491Y2 (ja) 1993-10-20

Family

ID=31686315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989139257U Expired - Lifetime JPH0541491Y2 (ja) 1989-11-29 1989-11-29

Country Status (1)

Country Link
JP (1) JPH0541491Y2 (ja)

Also Published As

Publication number Publication date
JPH0541491Y2 (ja) 1993-10-20

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