JPH0377448U - - Google Patents
Info
- Publication number
- JPH0377448U JPH0377448U JP13924489U JP13924489U JPH0377448U JP H0377448 U JPH0377448 U JP H0377448U JP 13924489 U JP13924489 U JP 13924489U JP 13924489 U JP13924489 U JP 13924489U JP H0377448 U JPH0377448 U JP H0377448U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film semiconductor
- semiconductor device
- glass substrate
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 1
Description
第1図は本考案に係る薄膜半導体装置の一実施
例を示す断面図である。
1……ガラス基板、2……下地層、3……半導
体薄膜、4……保持基板。
FIG. 1 is a sectional view showing an embodiment of a thin film semiconductor device according to the present invention. 1...Glass substrate, 2...Underlayer, 3...Semiconductor thin film, 4...Holding substrate.
Claims (1)
膜半導体層にレーザ光を照射して溶融・固化させ
ることにより単結晶化した薄膜半導体装置におい
て、 前記絶縁基板を厚みが1mm以下のガラス基板で
構成すると共に、このガラス基板の裏面側に保持
基板を貼着したことを特徴とする薄膜半導体装置
。[Claims for Utility Model Registration] A thin film semiconductor device in which a thin film semiconductor layer is formed on an insulating substrate, and the thin film semiconductor layer is irradiated with a laser beam to melt and solidify to form a single crystal, comprising: A thin film semiconductor device comprising a glass substrate having a thickness of 1 mm or less and having a holding substrate attached to the back side of the glass substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13924489U JPH0377448U (en) | 1989-11-29 | 1989-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13924489U JPH0377448U (en) | 1989-11-29 | 1989-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0377448U true JPH0377448U (en) | 1991-08-05 |
Family
ID=31686303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13924489U Pending JPH0377448U (en) | 1989-11-29 | 1989-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0377448U (en) |
-
1989
- 1989-11-29 JP JP13924489U patent/JPH0377448U/ja active Pending
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