JPH0377452B2 - - Google Patents
Info
- Publication number
- JPH0377452B2 JPH0377452B2 JP21717586A JP21717586A JPH0377452B2 JP H0377452 B2 JPH0377452 B2 JP H0377452B2 JP 21717586 A JP21717586 A JP 21717586A JP 21717586 A JP21717586 A JP 21717586A JP H0377452 B2 JPH0377452 B2 JP H0377452B2
- Authority
- JP
- Japan
- Prior art keywords
- thin
- pressure
- strain gauge
- thick
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010586 diagram Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、微圧測定用の圧力センサに関するも
のである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a pressure sensor for measuring low pressure.
従来の微圧測定用圧力センサは、第４図，第５
図に示すように裏面が台などに固定されるリング
状の固定部１と、中央にある厚肉部２と、これら
とつなぐ薄肉部３からなつており、薄肉部３の表
面にはひずみゲージ４が設けられている。
Conventional pressure sensors for measuring low pressure are shown in Figures 4 and 5.
As shown in the figure, it consists of a ring-shaped fixing part 1 whose back side is fixed to a stand etc., a thick part 2 in the center, and a thin part 3 connecting these parts, and a strain gauge is installed on the surface of the thin part 3. 4 is provided.
前記素子の表面に圧力が加わると、第６図に示
すように、薄肉部３が変形し、応力が発生する。
この応力をひずみゲージ４により検出するように
なつている。 When pressure is applied to the surface of the element, the thin portion 3 is deformed and stress is generated, as shown in FIG.
This stress is detected by a strain gauge 4.
なお、この種の圧力センサとしては、米国特許
第4570498号などがある。 Note that this type of pressure sensor includes US Pat. No. 4,570,498 and the like.
非常に低い圧力を測定するための圧力センサの
場合、必要な出力を出すためには、薄肉部３を非
常に薄くして、低い圧力で高い応力を発生させる
必要がある。しかし、薄肉部３を非常に薄くする
と、たわみが大きくなり、大たわみの影響で、圧
力に対する発生応力の関係が非線形となり、セン
サとしての精度がわるくなるという問題があつ
た。
In the case of a pressure sensor for measuring very low pressures, in order to produce the necessary output, the thin wall portion 3 needs to be very thin to generate high stresses at low pressures. However, if the thin wall portion 3 is made very thin, the deflection becomes large, and due to the influence of the large deflection, the relationship between the generated stress and the pressure becomes non-linear, resulting in a problem that the accuracy as a sensor deteriorates.
本発明は、非常に低い圧力を高い精度で測定で
きるようにした微圧測定用圧力センサを得ること
を目的とする。 SUMMARY OF THE INVENTION An object of the present invention is to obtain a pressure sensor for measuring micro-pressure that can measure extremely low pressure with high accuracy.
本発明は、リング状の固定部とその中心側に設
けた厚肉部とを連結する薄肉部にひずみゲージを
設けた構成の圧力センサにおいて、この薄肉部の
固定部寄りおよび厚肉部寄りの夫々にひずみゲー
ジを設置すると共に、この薄肉部の設置されたひ
ずみゲージ間の部分に突起部を形成したことを特
徴とする。
The present invention provides a pressure sensor having a structure in which a strain gauge is provided in a thin part that connects a ring-shaped fixed part and a thick part provided at the center of the ring-shaped fixed part. It is characterized in that a strain gauge is installed in each of the thin-walled parts, and a protrusion is formed in the portion between the installed strain gauges.
薄肉部のひずみゲージ設置位置間に、さらに突
起部を形成した構造では、応力が、突起の両側の
薄肉部に集中するため、この表面にひずみゲージ
を形成しておけば、小さなたわみで、大きな出力
が得られる。したがつて、必要な出力を確保しな
がら、大たわみによる非線形性を小さくできる。
In a structure in which a protrusion is formed between the strain gauge installation positions on a thin wall part, stress is concentrated on the thin wall part on both sides of the protrusion. Therefore, if the strain gauge is formed on this surface, a large deflection can be achieved with a small deflection. I get the output. Therefore, nonlinearity due to large deflection can be reduced while ensuring the necessary output.
以下、本発明の実施例を図面を用いて詳細に説
明する。
Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図と第２図は本発明の一実施例を示す平面
図と側面断面図である。第３図は、圧力が加わつ
た場合の薄肉部の変形と応力分布を示す図であ
る。第１図〜第３図において、第４図〜第６図と
同一符号のものは同一部分を示す。 1 and 2 are a plan view and a side sectional view showing an embodiment of the present invention. FIG. 3 is a diagram showing the deformation and stress distribution of the thin wall portion when pressure is applied. 1 to 3, the same reference numerals as in FIGS. 4 to 6 indicate the same parts.
本発明の一実施例は、第１図，第２図に示すよ
うに、裏面がダイなどに固定されるリング状の固
定部１と、中央にある厚肉部２と、これらをつな
ぐ薄肉部３からなつており、さらに薄肉部３の中
には、突起５と５′が形成されている。突起５の
両側の薄肉部の部分６と６′には、前記ひずみゲ
ージ４が形成されている。 As shown in FIGS. 1 and 2, one embodiment of the present invention comprises a ring-shaped fixing part 1 whose back surface is fixed to a die etc., a thick part 2 in the center, and a thin part connecting these parts. 3, and projections 5 and 5' are formed in the thin portion 3. The strain gauges 4 are formed in thin-walled portions 6 and 6' on both sides of the projection 5.
この素子の表面に圧力が加わると、第３図に示
すように、薄肉部６，６′が変形し、応力が発生
する。この応力はひずみゲージ４で検出する。 When pressure is applied to the surface of this element, the thin portions 6, 6' are deformed and stress is generated, as shown in FIG. This stress is detected by a strain gauge 4.
第３図の本発明の場合の変形を、第６図の従来
技術の場合の変形と比較すると、本発明の場合、
突起５，５′の剛性が大きいため、ここでは、ほ
とんど曲げが生じず、薄肉部の部分６と６′に曲
げが集中することがわかる。 Comparing the deformation in the case of the present invention shown in FIG. 3 with the deformation in the case of the prior art shown in FIG. 6, in the case of the present invention,
It can be seen that since the projections 5 and 5' have high rigidity, almost no bending occurs here, and the bending is concentrated in the thin-walled portions 6 and 6'.
したがつて、発生応力を同じにすれば、従来技
術と比較して、たわみは小さくてすむ。 Therefore, if the stress generated is the same, the deflection can be smaller compared to the conventional technology.
このため、大たわみによる非線形性を小さくす
ることができる。 Therefore, nonlinearity due to large deflection can be reduced.
本発明の別の実施例を、第７図，第８図と、第
９図，第１０図に示す。これは、加工の容易さを
考慮して、突起をリング状としたものと、矩形と
したものである。 Other embodiments of the invention are shown in FIGS. 7, 8, and 9 and 10. In consideration of ease of processing, the protrusions are ring-shaped and rectangular.
本発明によれば、非常に小さな圧力を測定する
場合にも、出力の非線形性を小さくすることがで
きる。したがつて、正確な圧力測定を実現でき
る。
According to the present invention, output nonlinearity can be reduced even when measuring a very small pressure. Therefore, accurate pressure measurement can be achieved.
第１図と第２図は夫々本発明の一実施例におけ
る平面図と側面断面図、第３図は圧力が加わつた
場合の薄肉部の変形と応力分布の関係を示す図、
第４図と第５図は夫々従来の圧力センサの平面図
と側面断面図、第６図は圧力が加わつた場合の薄
肉部の変形と応力分布の関係を示す図、第７図と
第８図は夫々本発明の他の実施例における平面図
と側面断面図、第９図と第１０図は夫々本発明の
更に他の実施例における平面図と側面断面図であ
る。
１…固定部、２…厚肉部、３…薄肉部、４…ひ
ずみゲージ、５，５′…突起、６，６′…突起の両
わきの薄肉部の部分。
1 and 2 are respectively a plan view and a side sectional view of an embodiment of the present invention, and FIG. 3 is a diagram showing the relationship between deformation of a thin wall portion and stress distribution when pressure is applied.
Figures 4 and 5 are a plan view and a side sectional view of a conventional pressure sensor, respectively, Figure 6 is a diagram showing the relationship between deformation of a thin wall part and stress distribution when pressure is applied, and Figures 7 and 8. The figures are a plan view and a side sectional view of another embodiment of the invention, respectively, and FIGS. 9 and 10 are a plan view and a side sectional view of still another embodiment of the invention, respectively. DESCRIPTION OF SYMBOLS 1... Fixed part, 2... Thick wall part, 3... Thin wall part, 4... Strain gauge, 5, 5'... Protrusion, 6, 6'... Thin wall part on both sides of the protrusion.
Claims (1)
部の中央にある厚肉部と、該固定部と該厚肉部間
をつなぐ薄肉部と、該薄肉部に設けられるひずみ
ゲージとを備えた微圧測定用圧力センサにおい
て、 前記ひずみゲージは、前記薄肉部の前記固定部
寄りと前記厚肉部寄りとに夫々設置すると共に、 前記薄肉部の前記固定部寄りに設置した該ひず
みゲージと前記厚肉部寄りに設置した該ひずみゲ
ージ間に突起部を形成したことを特徴とする微圧
測定用圧力センサ。[Scope of Claims] 1. A fixing part consisting of a ring-shaped protrusion, a thick part in the center of the fixing part, a thin part connecting the fixing part and the thick part, and a part provided in the thin part. In the pressure sensor for measuring micro-pressure, the strain gauge is installed near the fixed part and the thick part of the thin wall part, respectively, and the strain gauge is installed near the fixed part of the thin wall part. A pressure sensor for measuring micro-pressure, characterized in that a protrusion is formed between the installed strain gauge and the strain gauge installed near the thick wall portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21717586A JPS6263829A (en) | 1986-09-17 | 1986-09-17 | Pressure sensor for measuring micropressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21717586A JPS6263829A (en) | 1986-09-17 | 1986-09-17 | Pressure sensor for measuring micropressure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6263829A JPS6263829A (en) | 1987-03-20 |
| JPH0377452B2 true JPH0377452B2 (en) | 1991-12-10 |
Family
ID=16700036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21717586A Granted JPS6263829A (en) | 1986-09-17 | 1986-09-17 | Pressure sensor for measuring micropressure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6263829A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE58906655D1 (en) * | 1989-07-22 | 1994-02-17 | Hottinger Messtechnik Baldwin | Pressure transducers and methods for calibrating pressure transducers. |
| US5156052A (en) * | 1990-12-20 | 1992-10-20 | Honeywell Inc. | Ribbed and bossed pressure transducer |
-
1986
- 1986-09-17 JP JP21717586A patent/JPS6263829A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6263829A (en) | 1987-03-20 |
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