JPH0377901U - - Google Patents

Info

Publication number
JPH0377901U
JPH0377901U JP13833789U JP13833789U JPH0377901U JP H0377901 U JPH0377901 U JP H0377901U JP 13833789 U JP13833789 U JP 13833789U JP 13833789 U JP13833789 U JP 13833789U JP H0377901 U JPH0377901 U JP H0377901U
Authority
JP
Japan
Prior art keywords
wave generating
spherical wave
pinhole
thin film
flat plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13833789U
Other languages
English (en)
Other versions
JP2519543Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989138337U priority Critical patent/JP2519543Y2/ja
Publication of JPH0377901U publication Critical patent/JPH0377901U/ja
Application granted granted Critical
Publication of JP2519543Y2 publication Critical patent/JP2519543Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係わる光球面波発生装置の一
実施例を示す構成図、第２図は従来例である。 １……レーザ光源、２……対物レンズ、４……
球面波発生基板、４１……透明平板、４２……薄
膜、４３……ピンホール。

Claims (1)

    【実用新案登録請求の範囲】
  1. 透明平板の片面に薄膜を形成させ、この薄膜上
    に波長と同程度又はそれ以下の穴径のピンホール
    を備えた球面波発生基板を設け、レーザ光源から
    の出射光を対物レンズで集光させて前記球面波発
    生基板の透明平板側から前記ピンホールに入射さ
    せる構成としたことを特徴とする光球面波発生装
    置。
JP1989138337U 1989-11-29 1989-11-29 光球面波発生装置 Expired - Fee Related JP2519543Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989138337U JP2519543Y2 (ja) 1989-11-29 1989-11-29 光球面波発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989138337U JP2519543Y2 (ja) 1989-11-29 1989-11-29 光球面波発生装置

Publications (2)

Publication Number Publication Date
JPH0377901U true JPH0377901U (ja) 1991-08-06
JP2519543Y2 JP2519543Y2 (ja) 1996-12-04

Family

ID=31685444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989138337U Expired - Fee Related JP2519543Y2 (ja) 1989-11-29 1989-11-29 光球面波発生装置

Country Status (1)

Country Link
JP (1) JP2519543Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195739A (ja) * 2004-01-05 2005-07-21 Nikon Corp 共焦点光学系及び高さ測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60108246A (ja) * 1983-11-18 1985-06-13 Washino Koki Kk センタリングマシン
JPH02228505A (ja) * 1989-03-02 1990-09-11 Nikon Corp 干渉計

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60108246A (ja) * 1983-11-18 1985-06-13 Washino Koki Kk センタリングマシン
JPH02228505A (ja) * 1989-03-02 1990-09-11 Nikon Corp 干渉計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195739A (ja) * 2004-01-05 2005-07-21 Nikon Corp 共焦点光学系及び高さ測定装置

Also Published As

Publication number Publication date
JP2519543Y2 (ja) 1996-12-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees