JPH0378982U - - Google Patents
Info
- Publication number
- JPH0378982U JPH0378982U JP13976289U JP13976289U JPH0378982U JP H0378982 U JPH0378982 U JP H0378982U JP 13976289 U JP13976289 U JP 13976289U JP 13976289 U JP13976289 U JP 13976289U JP H0378982 U JPH0378982 U JP H0378982U
- Authority
- JP
- Japan
- Prior art keywords
- roughing
- vacuum
- valve
- chamber
- vacuum device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13976289U JPH0378982U (bg) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13976289U JPH0378982U (bg) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378982U true JPH0378982U (bg) | 1991-08-12 |
Family
ID=31686788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13976289U Pending JPH0378982U (bg) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378982U (bg) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001295761A (ja) * | 2000-04-11 | 2001-10-26 | Ebara Corp | 真空排気システム |
-
1989
- 1989-11-30 JP JP13976289U patent/JPH0378982U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001295761A (ja) * | 2000-04-11 | 2001-10-26 | Ebara Corp | 真空排気システム |
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