JPH0383634U - - Google Patents
Info
- Publication number
- JPH0383634U JPH0383634U JP14319189U JP14319189U JPH0383634U JP H0383634 U JPH0383634 U JP H0383634U JP 14319189 U JP14319189 U JP 14319189U JP 14319189 U JP14319189 U JP 14319189U JP H0383634 U JPH0383634 U JP H0383634U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- organometallic material
- bubbling
- container
- introduction pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000002524 organometallic group Chemical group 0.000 claims description 11
- 239000007789 gas Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 230000005587 bubbling Effects 0.000 claims description 7
- 239000012159 carrier gas Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 1
- 229920006395 saturated elastomer Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Description
第１図はこの考案の一実施例による有機金属材
料用容器を示す断面図、第２図、第３図は従来の
有機金属材料用容器を示す断面図、第４図は従来
の有機金属材料用容器を用いた場合のバブリング
流量を変化させた場合に供給量がどのように変化
するかを示す図である。
１は有機金属材料用容器、２はバブリングガス
導入管、３は有機金属ガス供給管、４はキヤリア
ガス導入管、５は液体状の有機金属材料、６はバ
ブリングガスの気泡、７は恒温槽、８は保温剤、
９は導入管１でのバブリングガスの流れ、１０は
キヤリアガスの流れ、１１は供給管３でのガスの
流れである。なお、図中、同一符号は同一、又は
相当部分を示す。
FIG. 1 is a sectional view showing a container for organometallic materials according to an embodiment of this invention, FIGS. 2 and 3 are sectional views showing conventional containers for organometallic materials, and FIG. 4 is a sectional view showing a conventional container for organometallic materials. FIG. 3 is a diagram showing how the supply amount changes when the bubbling flow rate is changed when a container is used. 1 is a container for organometallic material, 2 is a bubbling gas introduction pipe, 3 is an organometallic gas supply pipe, 4 is a carrier gas introduction pipe, 5 is a liquid organometallic material, 6 is a bubble of bubbling gas, 7 is a constant temperature bath, 8 is a heat insulator,
9 is the flow of bubbling gas in the introduction pipe 1, 10 is the flow of carrier gas, and 11 is the flow of gas in the supply pipe 3. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
液体状の有機金属材料をバブリングし、バブリン
グガス中に上記有機金属材料を蒸発気化させるた
めのバブリングガス導入管と、上記有機金属材料
の容器気相部にキヤリアガスを導入するためのキ
ヤリアガス導入管と、上記有機金属材料が飽和蒸
気として含まれる容器気相部のガスを供給するた
めの供給管とを伴せ持つことを特徴とする容器。 In a container containing a liquid organometallic material,
A bubbling gas introduction pipe for bubbling a liquid organometallic material and evaporating the organometallic material into the bubbling gas; and a carrier gas introduction pipe for introducing a carrier gas into the gas phase of the container for the organometallic material. and a supply pipe for supplying a gas in the gas phase of the container containing the organometallic material as saturated vapor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14319189U JPH0383634U (en) | 1989-12-12 | 1989-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14319189U JPH0383634U (en) | 1989-12-12 | 1989-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0383634U true JPH0383634U (en) | 1991-08-26 |
Family
ID=31689986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14319189U Pending JPH0383634U (en) | 1989-12-12 | 1989-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0383634U (en) |
-
1989
- 1989-12-12 JP JP14319189U patent/JPH0383634U/ja active Pending
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