JPH038427U - - Google Patents

Info

Publication number
JPH038427U
JPH038427U JP6755189U JP6755189U JPH038427U JP H038427 U JPH038427 U JP H038427U JP 6755189 U JP6755189 U JP 6755189U JP 6755189 U JP6755189 U JP 6755189U JP H038427 U JPH038427 U JP H038427U
Authority
JP
Japan
Prior art keywords
substrate
trapezoid
recess
height
protection plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6755189U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6755189U priority Critical patent/JPH038427U/ja
Publication of JPH038427U publication Critical patent/JPH038427U/ja
Pending legal-status Critical Current

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  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図はこの考案による保護板の構成図、第２
図は保護板４の組立説明図、第３図は第２図の組
立図、第４図はコルゲーシヨンの説明図、第５図
は第４図の基板１の外観図、第６図は基板ホルダ
２の外観図、第７図は従来技術よる組立図である
。 １……基板、２……基板ホルダ、３……凹部、
４……保護板、５……台形、６……台形５の上面
、７……台形５の下面、８……保護板ホルダ、９
……保護板、１０……保護板ホルダ。

Claims (1)

  1. 【実用新案登録請求の範囲】 底面の寸法がＬ１×Ｌ２で、高さがＨ１の基板
    １と、底面の寸法がＬ３×Ｌ４で深さがＨ２の凹
    部３を設けた基板ホルダ２とを有し、Ｌ１≦Ｌ３
    ，Ｌ２≦Ｌ４、かつＨ１＞Ｈ２とし、基板１を基
    板ホルダ２の凹部３に入れ、基板１の液相結晶を
    成長させる場合において、 上面６の寸法がＬ５×Ｌ６、下面７の寸法がＬ
    ７×Ｌ８、高さがＨ３の台形５を取り付けた保護
    板４を備え、 Ｌ７＞Ｌ５，Ｌ８＞Ｌ６，Ｌ１＞Ｌ５，Ｌ２＞
    Ｌ６とし、基板ホルダ２の凹部３に入れた基板１
    の上に保護板４の台形５の上面６を対面させて載
    せたとき、上面６と基板１の上面とが接触する寸
    法に台形５の高さＨ３を設定することを特徴とす
    る液相結晶成長用基板の熱変形保護板。
JP6755189U 1989-06-09 1989-06-09 Pending JPH038427U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6755189U JPH038427U (ja) 1989-06-09 1989-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6755189U JPH038427U (ja) 1989-06-09 1989-06-09

Publications (1)

Publication Number Publication Date
JPH038427U true JPH038427U (ja) 1991-01-28

Family

ID=31601219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6755189U Pending JPH038427U (ja) 1989-06-09 1989-06-09

Country Status (1)

Country Link
JP (1) JPH038427U (ja)

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