JPH0384805U - - Google Patents

Info

Publication number
JPH0384805U
JPH0384805U JP14635489U JP14635489U JPH0384805U JP H0384805 U JPH0384805 U JP H0384805U JP 14635489 U JP14635489 U JP 14635489U JP 14635489 U JP14635489 U JP 14635489U JP H0384805 U JPH0384805 U JP H0384805U
Authority
JP
Japan
Prior art keywords
optical deflector
fixed
crystal optical
crystal
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14635489U
Other languages
Japanese (ja)
Other versions
JP2504666Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14635489U priority Critical patent/JP2504666Y2/en
Publication of JPH0384805U publication Critical patent/JPH0384805U/ja
Application granted granted Critical
Publication of JP2504666Y2 publication Critical patent/JP2504666Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係わる制動型水晶光偏向器の
一実施例を示す構成図、第２図は従来の水晶光偏
向器（第４図に示す構成のもの）と本考案の制動
型水晶光偏向器に外部振動を周波数を変化させて
与えていつた時の可動部の前後の揺れの測定結果
を示す図、第３図及び第４図は従来の水晶光偏向
器の一例を示す構成図、第５図は振動周波数と可
動部の揺れの関係を示す図である。 １……固定部、３……下部バネ部、４……可動
部、４１……ミラー部、４２……コイル部、４３
……支持部、５……支持枠、５１……マグネツト
、５２……ヨーク、５３……孔、６……磁性流体
。 Fig. 1 is a block diagram showing an embodiment of a brake type crystal optical deflector according to the present invention, and Fig. 2 shows a conventional crystal optical deflector (with the configuration shown in Figure 4) and a brake type crystal optical deflector according to the present invention. A diagram showing the measurement results of the back-and-forth swing of the movable part when external vibrations are applied to the optical deflector with varying frequencies. Figures 3 and 4 are configuration diagrams showing an example of a conventional crystal optical deflector. , FIG. 5 is a diagram showing the relationship between the vibration frequency and the shaking of the movable part. 1...Fixed part, 3...Lower spring part, 4...Movable part, 41...Mirror part, 42...Coil part, 43
... Support part, 5 ... Support frame, 51 ... Magnet, 52 ... Yoke, 53 ... Hole, 6 ... Magnetic fluid.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 水晶基板上にバネ部と、このバネ部を介して固
定端に支持されるミラー部、コイル部及び支持部
から成る可動部とを異方性エツチング及びフオト
リソグラフイ技術により形成した水晶光偏向器と
、磁場により固定され前記水晶偏向器の支持部の
軸径に対して３倍以上の径を有すると共に磁性流
体が注入された孔を備えた支持枠とを設け、前記
水晶光偏向器の重心より上部に位置する前記支持
部を磁場により固定された前記磁性流体中に支持
するような構成としたことを特徴とする制動型水
晶光偏向器。 A crystal optical deflector in which a spring part and a movable part consisting of a mirror part, a coil part and a support part supported by a fixed end via the spring part are formed on a crystal substrate by anisotropic etching and photolithography techniques. and a support frame fixed by a magnetic field and having a diameter three times or more larger than the axial diameter of the support part of the crystal deflector, and having a hole into which a magnetic fluid is injected, the center of gravity of the crystal optical deflector is fixed. 1. A brake type crystal optical deflector, characterized in that said supporting portion located at an upper portion is supported in said magnetic fluid fixed by a magnetic field.
JP14635489U 1989-12-19 1989-12-19 Braking type crystal light deflector Expired - Lifetime JP2504666Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14635489U JP2504666Y2 (en) 1989-12-19 1989-12-19 Braking type crystal light deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14635489U JP2504666Y2 (en) 1989-12-19 1989-12-19 Braking type crystal light deflector

Publications (2)

Publication Number Publication Date
JPH0384805U true JPH0384805U (en) 1991-08-28
JP2504666Y2 JP2504666Y2 (en) 1996-07-10

Family

ID=31692948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14635489U Expired - Lifetime JP2504666Y2 (en) 1989-12-19 1989-12-19 Braking type crystal light deflector

Country Status (1)

Country Link
JP (1) JP2504666Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018106059A (en) * 2016-12-27 2018-07-05 三菱電機株式会社 Galvano scanner and laser processing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018106059A (en) * 2016-12-27 2018-07-05 三菱電機株式会社 Galvano scanner and laser processing device

Also Published As

Publication number Publication date
JP2504666Y2 (en) 1996-07-10

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