JPH0389162U - - Google Patents

Info

Publication number
JPH0389162U
JPH0389162U JP14840889U JP14840889U JPH0389162U JP H0389162 U JPH0389162 U JP H0389162U JP 14840889 U JP14840889 U JP 14840889U JP 14840889 U JP14840889 U JP 14840889U JP H0389162 U JPH0389162 U JP H0389162U
Authority
JP
Japan
Prior art keywords
rotating shaft
high frequency
bearing
member provided
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14840889U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14840889U priority Critical patent/JPH0389162U/ja
Publication of JPH0389162U publication Critical patent/JPH0389162U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第１の実施例における高周波
用摺動接点部材を示す説明図、第２図は本考案の
第２の実施例における高周波用摺動接点部材を示
す説明図、第３図ａ，ｂは従来例における直流用
摺動接点部材を示す説明図である。 １……モーター、６……回転軸、７……ベアリ
ング、１１……基材、１３……バネ材。

Claims (1)

    【実用新案登録請求の範囲】
  1. 一端に薄膜形成を行う基材及び他端に反応室壁
    に設ける絶縁部材に固定する回転軸と、該回転軸
    のほぼ中央部に設けるベアリングと、該ベアリン
    グを前記回転軸に固定するための固定部材と、前
    記ベアリングの外周部に設けかつ高周波電源の高
    周波電圧を印加する引出し部材と、前記回転軸を
    回転させるためのモーターとを有することを特徴
    とする高周波用摺動接点部材。
JP14840889U 1989-12-22 1989-12-22 Pending JPH0389162U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14840889U JPH0389162U (ja) 1989-12-22 1989-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14840889U JPH0389162U (ja) 1989-12-22 1989-12-22

Publications (1)

Publication Number Publication Date
JPH0389162U true JPH0389162U (ja) 1991-09-11

Family

ID=31694857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14840889U Pending JPH0389162U (ja) 1989-12-22 1989-12-22

Country Status (1)

Country Link
JP (1) JPH0389162U (ja)

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