JPH0389969U - - Google Patents
Info
- Publication number
- JPH0389969U JPH0389969U JP15184389U JP15184389U JPH0389969U JP H0389969 U JPH0389969 U JP H0389969U JP 15184389 U JP15184389 U JP 15184389U JP 15184389 U JP15184389 U JP 15184389U JP H0389969 U JPH0389969 U JP H0389969U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- activated carbon
- atmosphere
- container
- communicates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 238000010926 purge Methods 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15184389U JPH0389969U (2) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15184389U JPH0389969U (2) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0389969U true JPH0389969U (2) | 1991-09-12 |
Family
ID=31698130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15184389U Pending JPH0389969U (2) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0389969U (2) |
-
1989
- 1989-12-28 JP JP15184389U patent/JPH0389969U/ja active Pending
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