JPH0390430U - - Google Patents
Info
- Publication number
- JPH0390430U JPH0390430U JP15242889U JP15242889U JPH0390430U JP H0390430 U JPH0390430 U JP H0390430U JP 15242889 U JP15242889 U JP 15242889U JP 15242889 U JP15242889 U JP 15242889U JP H0390430 U JPH0390430 U JP H0390430U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating shaft
- opening slot
- spinner device
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15242889U JPH0390430U (2) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15242889U JPH0390430U (2) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0390430U true JPH0390430U (2) | 1991-09-13 |
Family
ID=31698694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15242889U Pending JPH0390430U (2) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0390430U (2) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4863709A (2) * | 1971-11-20 | 1973-09-04 | ||
| JPS525269A (en) * | 1975-07-02 | 1977-01-14 | Hitachi Ltd | Rotary coating device |
| JPS61176120A (ja) * | 1985-01-31 | 1986-08-07 | Nec Corp | フオトレジストの現像装置 |
-
1989
- 1989-12-28 JP JP15242889U patent/JPH0390430U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4863709A (2) * | 1971-11-20 | 1973-09-04 | ||
| JPS525269A (en) * | 1975-07-02 | 1977-01-14 | Hitachi Ltd | Rotary coating device |
| JPS61176120A (ja) * | 1985-01-31 | 1986-08-07 | Nec Corp | フオトレジストの現像装置 |
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