JPH0391731U - - Google Patents
Info
- Publication number
- JPH0391731U JPH0391731U JP15135389U JP15135389U JPH0391731U JP H0391731 U JPH0391731 U JP H0391731U JP 15135389 U JP15135389 U JP 15135389U JP 15135389 U JP15135389 U JP 15135389U JP H0391731 U JPH0391731 U JP H0391731U
- Authority
- JP
- Japan
- Prior art keywords
- dust
- chamber
- processing chamber
- processing
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 8
- 238000005192 partition Methods 0.000 claims description 3
- 238000013459 approach Methods 0.000 claims 1
Landscapes
- Threshing Machine Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15135389U JPH0391731U (th) | 1989-12-27 | 1989-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15135389U JPH0391731U (th) | 1989-12-27 | 1989-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0391731U true JPH0391731U (th) | 1991-09-18 |
Family
ID=31697655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15135389U Pending JPH0391731U (th) | 1989-12-27 | 1989-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0391731U (th) |
-
1989
- 1989-12-27 JP JP15135389U patent/JPH0391731U/ja active Pending
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