JPH0391981U - - Google Patents
Info
- Publication number
- JPH0391981U JPH0391981U JP15190889U JP15190889U JPH0391981U JP H0391981 U JPH0391981 U JP H0391981U JP 15190889 U JP15190889 U JP 15190889U JP 15190889 U JP15190889 U JP 15190889U JP H0391981 U JPH0391981 U JP H0391981U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- sensor head
- mounting
- mounting hole
- notch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Description
第１図は本考案の一実施例を示す構成斜視図、
第２図は組立状態の説明図、第３図はベアリング
２２の詳細説明図、第４図はセンサヘツド２０を
水平に保持する状態の説明図である。第５図は従
来装置の説明図である。
１０……テスタ、２０……センサヘツド、２２
……ベアリング、２４……取付け穴、３０……ハ
ンドラ、４０……マニピユレータ、４４……取付
け枠、４５……切欠部、４８……ガイド穴部、６
０……ノブ。
FIG. 1 is a perspective view showing an embodiment of the present invention;
FIG. 2 is an explanatory diagram of the assembled state, FIG. 3 is a detailed explanatory diagram of the bearing 22, and FIG. 4 is an explanatory diagram of the state in which the sensor head 20 is held horizontally. FIG. 5 is an explanatory diagram of a conventional device. 10...Tester, 20...Sensor head, 22
... Bearing, 24 ... Mounting hole, 30 ... Handler, 40 ... Manipulator, 44 ... Mounting frame, 45 ... Notch, 48 ... Guide hole, 6
0...knob.
Claims (1)
取付け枠に取付けると共に、この取付けにより該
センサヘツドの姿勢を定める半導体テスト装置用
の支持体において、 前記センサヘツドの両側面に突出する状態で設
けられるベアリングと、この側面の少なくとも一
方の面にこのベアリングから離れた位置に設けら
れる取付け穴と、 前記取付け枠の前記センサヘツドの両側面に対
向する面に設けられ、前記ベアリングの直径より
も僅かに大きな幅であつて、少なくとも前記ベア
リングの半径以上の深さを有し、該取付け枠の床
面に対して反対側に設けられる切欠部と、この切
欠部に挿入されるベアリングの回転軸となる点を
中心にして、前記ベアリングと取付け穴との間隔
を半径として有し、少なくとも９０度以上の角度
を有する円弧状のガイド穴部と、 このガイド穴部を挟んで前記取付け穴に固定さ
れるノブと、 を具備し、前記ベアリングを前記切欠部に装着し
、前記ノブによつて前記センサヘツドの測定面を
水平若しくは垂直状態に保持することを特徴とす
る半導体テスト装置用の支持体。[Claims for Utility Model Registration] A support for a semiconductor test device in which a generally box-shaped sensor head is attached to a mounting frame of a manipulator and the attitude of the sensor head is determined by this attachment, in a state where the sensor head protrudes from both sides of the sensor head. a mounting hole provided on at least one side of the mounting frame at a position remote from the bearing; and a mounting hole provided on a surface of the mounting frame opposite to both sides of the sensor head, the mounting hole being slightly smaller than the diameter of the bearing. a notch having a large width and a depth at least equal to or greater than the radius of the bearing, and provided on the opposite side of the mounting frame with respect to the floor surface; and a rotating shaft of the bearing inserted into the notch. an arc-shaped guide hole part having a radius equal to the distance between the bearing and the mounting hole and an angle of at least 90 degrees, and fixed to the mounting hole with the guide hole part in between; A support for a semiconductor test equipment, comprising: a knob for mounting the bearing in the notch, and holding the measurement surface of the sensor head in a horizontal or vertical state by the knob.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15190889U JPH0729504Y2 (en) | 1989-12-29 | 1989-12-29 | Support for semiconductor test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15190889U JPH0729504Y2 (en) | 1989-12-29 | 1989-12-29 | Support for semiconductor test equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0391981U true JPH0391981U (en) | 1991-09-19 |
| JPH0729504Y2 JPH0729504Y2 (en) | 1995-07-05 |
Family
ID=31698192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15190889U Expired - Lifetime JPH0729504Y2 (en) | 1989-12-29 | 1989-12-29 | Support for semiconductor test equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729504Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005261588A (en) * | 2004-03-17 | 2005-09-29 | Teranishi Denki Seisakusho:Kk | Massage machine |
-
1989
- 1989-12-29 JP JP15190889U patent/JPH0729504Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005261588A (en) * | 2004-03-17 | 2005-09-29 | Teranishi Denki Seisakusho:Kk | Massage machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729504Y2 (en) | 1995-07-05 |
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