JPH0396035U - - Google Patents
Info
- Publication number
- JPH0396035U JPH0396035U JP1990003767U JP376790U JPH0396035U JP H0396035 U JPH0396035 U JP H0396035U JP 1990003767 U JP1990003767 U JP 1990003767U JP 376790 U JP376790 U JP 376790U JP H0396035 U JPH0396035 U JP H0396035U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- exhaust port
- disposed
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990003767U JPH0396035U (pt) | 1990-01-18 | 1990-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990003767U JPH0396035U (pt) | 1990-01-18 | 1990-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0396035U true JPH0396035U (pt) | 1991-10-01 |
Family
ID=31507571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990003767U Pending JPH0396035U (pt) | 1990-01-18 | 1990-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0396035U (pt) |
-
1990
- 1990-01-18 JP JP1990003767U patent/JPH0396035U/ja active Pending