JPH04102716A - Magnetic bearing device - Google Patents

Magnetic bearing device

Info

Publication number
JPH04102716A
JPH04102716A JP2219696A JP21969690A JPH04102716A JP H04102716 A JPH04102716 A JP H04102716A JP 2219696 A JP2219696 A JP 2219696A JP 21969690 A JP21969690 A JP 21969690A JP H04102716 A JPH04102716 A JP H04102716A
Authority
JP
Japan
Prior art keywords
displacement
rotor shaft
magnetic bearing
displacement sensor
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2219696A
Other languages
Japanese (ja)
Inventor
Toshiaki Kawashima
敏明 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Priority to JP2219696A priority Critical patent/JPH04102716A/en
Publication of JPH04102716A publication Critical patent/JPH04102716A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/044Active magnetic bearings
    • F16C32/0444Details of devices to control the actuation of the electromagnets
    • F16C32/0446Determination of the actual position of the moving member, e.g. details of sensors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/044Active magnetic bearings
    • F16C32/0474Active magnetic bearings for rotary movement
    • F16C32/048Active magnetic bearings for rotary movement with active support of two degrees of freedom, e.g. radial magnetic bearings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To prevent oscillation of a magnetic bearing by way of controlling a rotor shaft normally by respectively setting a displacement detection point of a displacement sensor and a working point of a force in an electromagnet on the same flat surface in a magnetic bearing device to support the rotor shaft. CONSTITUTION:A displacement sensor 8 is made with coils 11a, 11b wound around its cores 10a, 10b in the +Xa, +Ya directions of its half donut shape core main body 10, and a displacement sensor 9 is constituted in the same way. When a rotor shaft 1 is displaced on a line A2-A2, the displacement sensors 8, 9 detect displacements Xa, Xb. A displacement signal output by a sensor circuit 15 comes to be an average value Xab of each of the displacements Xa, Xb. As the average value Xab is the same as the one of the rotor shaft 1 displaced on a flat surface B, a displacement detection point of the displacement sensors 8, 9 is to equivalently exist on the flat surface B. Subsequently, working points f, f on an electromagnet 3 is set on the flat surface B, and the displacement detection point and the working points f, f of a force are sent on the same flat surface B.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、ロータ軸を支持する磁気軸受装置に関し、
特にロータ軸の振動モードにおける磁気軸受の発振を防
止する技術に関する。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a magnetic bearing device that supports a rotor shaft.
In particular, the present invention relates to a technique for preventing oscillation of a magnetic bearing in a vibration mode of a rotor shaft.

(従来の技術) 従来、この種の磁気軸受装置は例えば第7図に示す如く
、ロータ軸1の外周にラジアル方向用変位センサ2とラ
ジアル方向用電磁石3とが互いに間隔をおいて設けられ
ており、このような磁気軸受装置によれば変位センサ2
でロータ軸1の変位量を変位信号として検出し、その変
位信号に基づいて電磁石3を励磁することによりロータ
軸1を所定の位置で支持するように構成されている。
(Prior Art) Conventionally, in this type of magnetic bearing device, as shown in FIG. 7, for example, a radial displacement sensor 2 and a radial electromagnet 3 are provided on the outer periphery of a rotor shaft 1 at a distance from each other. According to such a magnetic bearing device, the displacement sensor 2
The displacement amount of the rotor shaft 1 is detected as a displacement signal, and the electromagnet 3 is excited based on the displacement signal, thereby supporting the rotor shaft 1 at a predetermined position.

また、上記変位センサ2は第8図に示す如く、コア本体
4の+x、 −x、 +y、および−Y方向にコア4a
、4b、4c、4dを設け、それらのコアにそれぞれコ
イル5を巻装したもので、一方上記電磁石3にあっては
第9図に示す如く、コア本体6に+X、−X方向用の一
対のコア6a、6bおよび+Y、−Y方向用の一対のコ
ア6c、6dを設け、それらのコアにそれぞれコイル7
が巻装されている。
Furthermore, as shown in FIG.
, 4b, 4c, and 4d, and a coil 5 is wound around each core.On the other hand, in the electromagnet 3, as shown in FIG. cores 6a and 6b and a pair of cores 6c and 6d for the +Y and -Y directions are provided, and a coil 7 is attached to each of these cores.
is wrapped.

(発明が解決しようとする課題) ところで、上記のように磁気軸受装置で支持されるロー
タ軸1にあっては、例えば第7図A1A1線で示す如く
、ロータ軸1の固有振動数で曲げ振動が生ずることは避
けられない。
(Problem to be Solved by the Invention) By the way, in the rotor shaft 1 supported by the magnetic bearing device as described above, bending vibration occurs at the natural frequency of the rotor shaft 1, as shown for example by line A1A1 in FIG. It is inevitable that this will occur.

しかしながら、従来の磁気軸受装置にあっては上記の如
く、変位センサ2と電磁石3とが互いに間隔をおいてロ
ータ軸1の外周に単に設けられているのみであるため、
これにより変位センサ2は変位検出点が平面α上に、−
刃型磁石3は力の作用点fが上記甲面αとは異なる平面
β十にそれぞれ設定されている。
However, in the conventional magnetic bearing device, as described above, the displacement sensor 2 and the electromagnet 3 are simply provided on the outer periphery of the rotor shaft 1 at a distance from each other.
As a result, the displacement sensor 2 has a displacement detection point on the plane α, -
In each of the blade-shaped magnets 3, a force application point f is set on a plane β0 different from the upper surface α.

そのため、上記磁気軸受装置において第7図に示す如く
、上述のような曲げ振動における振動モトの節01が、
七記両平面α、βの間に生ずるような構造上の制約を受
ける場合、変位検出点と力の作用点がその節01をはざ
むので、変位センサ2の変位信号と電磁石3へ出力され
る励磁電流との位相が1−80度ずれ、これによりロー
タ軸1を正常に制御することが不可能となり、磁気軸受
が発振するという問題点があった。
Therefore, in the magnetic bearing device, as shown in FIG. 7, the vibration point 01 in the above-mentioned bending vibration is
When subjected to structural constraints such as those occurring between the two planes α and β in Section 7, the displacement detection point and the point of force application sandwich the node 01, so that the displacement signal of the displacement sensor 2 and the output to the electromagnet 3 are There is a problem that the phase of the magnetic bearing is 1 to 80 degrees out of phase with the excitation current, making it impossible to control the rotor shaft 1 normally and causing the magnetic bearing to oscillate.

(課題を解決するだめの手段) この発明は一ト述の事情に鑑みてなされたもので、その
目的とするところは、ロータ軸の曲げ振動による磁気軸
受の発振を防止することにあり、上記目的を達成−4る
ためにこの発明は、ロータ軸の変位を変位信号として検
出する変位センサと、この変位センサの変位信!彊、二
基づいて出力される励磁電流で一1ユ記ロータ軸を所定
の位置へ支持する電磁石とを備える磁気軸受装置であっ
て、 上記変位センサの変位検出点と上記電磁石における力の
作用点とを等価的に同一甲面−Lにそれぞれ設定したこ
とを特徴とする。
(Means for solving the problem) This invention was made in view of the above-mentioned circumstances, and its purpose is to prevent the oscillation of the magnetic bearing due to the bending vibration of the rotor shaft. In order to achieve the objective-4, the present invention provides a displacement sensor that detects the displacement of the rotor shaft as a displacement signal, and a displacement signal of the displacement sensor. A magnetic bearing device comprising: an electromagnet that supports the rotor shaft in a predetermined position with an excitation current output based on the displacement sensor, and a displacement detection point of the displacement sensor and a force application point on the electromagnet. and are equivalently set on the same instep -L.

(作用) この発明によれば、変位センサの変位検出点と電磁石に
おける力の作用点とが等価的に同−甲面上にそれぞれ設
定されるように作用する。
(Function) According to the present invention, the displacement detection point of the displacement sensor and the point of force application in the electromagnet are set equivalently on the same instep surface.

(実施例) 以下、この発明に係る磁気軸受装置の実施例について、
第1図ないし第6図を用いて詳細に説明する。
(Example) Examples of the magnetic bearing device according to the present invention will be described below.
This will be explained in detail using FIGS. 1 to 6.

第1図に示すものは、磁気軸受装置の第1の実施例を示
すもので、ロータ軸外周にラジアル方向用の電磁石が配
設されていることは従来と同様なため、同一部材には同
一符号を付1.てその詳細説明は省略する。
The one shown in Fig. 1 shows the first embodiment of the magnetic bearing device, and since it is the same as the conventional one in that the electromagnet for the radial direction is arranged on the outer periphery of the rotor shaft, the same members are identical. Add sign 1. Therefore, detailed explanation thereof will be omitted.

この磁気軸受装置は、第1図に示す如く、電磁石3の1
−下方向にそれぞれ変位センサ8,9を備えており、そ
れらの変位センサ8,9によれば電磁石3における力の
作用点f、  fを有する平面β上の02点に関I〜、
互いに点対称となる平面aおよび平面すに配設するよう
構成されている。
This magnetic bearing device has one of the electromagnets 3 as shown in FIG.
- Displacement sensors 8 and 9 are provided in the downward direction, and according to these displacement sensors 8 and 9, points I to 02 on the plane β having the points of force f and f on the electromagnet 3,
It is configured to be disposed on planes a and s that are point symmetrical to each other.

また、上記変位センサ8は第2図(a)に示す如く、半
ドーナツ状コア本体]、0の+Xa方向および+Ya方
向にそれぞれコア10a、10bを設け、それらのコア
10a、10bにそれぞれ」−Xa方向用コイル1]−
aおよび+Ya方向用コイルllbを巻装置7たもので
、一方上記変位センサ9は第2図(1))に示す如く、
半ドーナツ状コア本体12の−xb方向および−Yb方
向にそれぞれコア12a、12bを設げ、それらのコア
12a、12bにはそれぞれ−xb方向用コイル13a
および−yb方向用コイル13bが巻装されている。
Further, as shown in FIG. 2(a), the displacement sensor 8 has a half-doughnut-shaped core body, and cores 10a and 10b are provided in the +Xa direction and +Ya direction of 0, respectively. Coil 1 for Xa direction]-
The coils llb for the a and +Ya directions are wound by a winding device 7, and the displacement sensor 9 is, as shown in FIG. 2 (1)),
Cores 12a and 12b are provided in the -xb direction and -Yb direction of the semi-doughnut-shaped core body 12, respectively, and the -xb direction coils 13a are provided in these cores 12a and 12b, respectively.
And a coil 13b for the -yb direction is wound.

次に、上記の如く構成された変位センサ8,9の電気回
路部分について、第3図を用いて説明する。
Next, the electric circuit portion of the displacement sensors 8 and 9 constructed as described above will be explained using FIG. 3.

これらの変位センサ8,9は第3図に示す如く、+ X
 a方向用コイルllaと−xb方向用コイル13aと
が直列接続されており、この各コイル11a、13aに
よれば発振器14.14から出力される高周波の電圧が
印加されるとともに、ロタ輔1が変位すると、その変位
に応じて各コイル11a、13aのインダクタンスが変
化して、−を記高周波の振幅を変調するもので、この変
調された高周波は変位信号としてコイルlla、13a
の直列接続点よりセンサ回路15へ出力されるように構
成されている。
These displacement sensors 8, 9 are connected to +X as shown in FIG.
The a-direction coil lla and the -xb-direction coil 13a are connected in series, and each coil 11a, 13a receives the high frequency voltage output from the oscillator 14, 14, and the When the coils 11a and 13a are displaced, the inductance of each coil 11a and 13a changes according to the displacement, and the amplitude of the high frequency wave is modulated.This modulated high frequency wave is transmitted as a displacement signal to the coils 11a and 13a.
It is configured to be output to the sensor circuit 15 from the series connection point of.

また、センサ回路15は上記変位信号を直流電圧に変換
して電圧信号を出力するもので、この電圧信号によれば
図示(7ない位相補償回路、及びパワーアンプを介[7
て電磁石を励磁して、これによりロータ軸1を所定の位
置で支持するように構成されている。
Further, the sensor circuit 15 converts the displacement signal into a DC voltage and outputs a voltage signal.
The rotor shaft 1 is configured to be supported at a predetermined position by exciting an electromagnet.

一方、十Ya方向用コイル]、〕bおよび−Yb方向用
コイル13bにあっては、互いに直列接続され上記と同
様にセンサ回路へ変位信号を出力するように構成されて
いる。
On the other hand, the coils 13b for the 10-Ya direction, ]b, and the -Yb direction are connected in series with each other and are configured to output a displacement signal to the sensor circuit in the same manner as described above.

したがって、このような構成によれば、第1図A2−A
2線で示すようにロータ軸1が変位して、その変位ΔX
a、 Δxbを各変位センサ8,9が検出すると、上記
の如くセンサ回路15に出力される変位信号は、式(1
)に示す如く各変位ΔXa、Δxbの平均値ΔXabと
なり、この平均値ΔXabは平面β−ヒでロータ軸1が
変位したものと同一であるから、各変位センサの変位検
出点は、等価的に平面βに存在することになる。一方、
電磁石3における力の作用点f、  fは、平面β上に
設定されているので、上記変位検出点と、上記力の作用
点f、  fは同一平面β上に設定されている。
Therefore, according to such a configuration, FIG. 1 A2-A
The rotor shaft 1 is displaced as shown by the two lines, and the displacement ΔX
When each displacement sensor 8, 9 detects a and Δxb, the displacement signal outputted to the sensor circuit 15 as described above is expressed by the equation (1
), the average value ΔXab of each displacement ΔXa, Δxb is obtained. Since this average value ΔXab is the same as the displacement of the rotor shaft 1 on the plane β-H, the displacement detection point of each displacement sensor is equivalently It will exist on the plane β. on the other hand,
Since the points of force f, f on the electromagnet 3 are set on the plane β, the displacement detection point and the points of force f, f are set on the same plane β.

(ΔXa+ΔXb)/2=ΔXab・(1)第4図に示
すものは、磁気軸受装置の第2の実施例を示すもので、
この磁気軸受装置は第1の実施例における変位センサ8
,9に代えて、第8図に示すものと同形状の変位センサ
16,17を備えており、その変位センサ16,17に
よれば電磁石3における力の作用点f、  fを有する
平面βに関し、互いに面対称となる平面aおよび平面す
上にそれぞれ配設するよう構成されている。
(ΔXa+ΔXb)/2=ΔXab・(1) What is shown in FIG. 4 shows a second embodiment of the magnetic bearing device.
This magnetic bearing device is the displacement sensor 8 in the first embodiment.
, 9 are provided with displacement sensors 16 and 17 having the same shape as shown in FIG. , are arranged on planes a and 2, respectively, which are plane symmetrical to each other.

また、上記変位センサ16は+Xa方向用コイル18a
および−Xa方向用コイル18bを、力変位センサ17
は+xb方向用コイル19aおよび−xb方向用コイル
19bを備えるもので、これらの各コイルは第5図に示
す如く、コイル18a、コイル19a、コイル18b、
コイル19bの順に直列接続されており、これらのコイ
ルによれば第1の実施例と同様に、発振器14.、.1
.4から出力される高周波の電圧が印加されるとともに
、コイル19aとコイル18bとの直列接続点より変位
信号がセンサ回路15へ出力されるように構成されてい
る。
Further, the displacement sensor 16 has a +Xa direction coil 18a.
and -Xa direction coil 18b, force displacement sensor 17
is equipped with a coil 19a for the +xb direction and a coil 19b for the -xb direction, and each of these coils, as shown in FIG. 5, includes a coil 18a, a coil 19a, a coil 18b,
The coils 19b are connected in series in this order, and according to these coils, the oscillators 14. ,.. 1
.. 4 is applied, and a displacement signal is output to the sensor circuit 15 from a series connection point between the coil 19a and the coil 18b.

さらに、上記変位センサ16にあっては、図示しない+
Ya方向用コイル及び−Ya方向用コイルを、−力変位
センサ17にあっては、+yb方向用コイル及び−yb
方向用コイルを備えており、これらの各コイルによれば
上記と同様に直列接続され、変位信号をセンサ回路へ出
力するように構成されている。
Furthermore, in the displacement sensor 16, +
In the -force displacement sensor 17, the coil for the Ya direction and the coil for the -Ya direction are replaced by the coil for the +yb direction and the coil for the -yb direction.
A direction coil is provided, and each of these coils is connected in series in the same manner as described above, and is configured to output a displacement signal to the sensor circuit.

なお、上記センサ回路は第1の実施例と同様な構成のた
め、その詳細説明は省略する。
Note that since the sensor circuit described above has the same configuration as the first embodiment, detailed explanation thereof will be omitted.

したがって、上記のような構成にあっても、第1の実施
例と同様に第4図に示す如く変位センサ16.17の変
位検出点が等価的に平面β上に存在することになり、−
刃型磁石3における力の作用点が平面β上に設定されて
いるので、その結果力の作用点f、fと上記変位検出点
とが、同一平面β上に設定されるように構成されている
Therefore, even with the above configuration, the displacement detection points of the displacement sensors 16 and 17 are equivalently located on the plane β, as shown in FIG. 4, as in the first embodiment, and -
Since the point of force application on the blade magnet 3 is set on the plane β, as a result, the force application points f, f and the displacement detection point are configured to be set on the same plane β. There is.

第6図に示すものは、磁気軸受装置の第3の実施例を示
すもので、この磁気軸受装置はロータ軸1外周に第8図
に示すものと同形状の変位センサ20が配設されており
、その変位センサ20の上下方向には、第9図に示すも
のと同形状のラジアル方向用電磁石21.22を備え、
これらの電磁石21.22によれば変位センサ20にお
ける変位検出点を有する平面αに関し、互いに面対称と
なる平面aおよび平面す上にそれぞれ配設するよう構成
されている。
What is shown in FIG. 6 shows a third embodiment of the magnetic bearing device, in which a displacement sensor 20 having the same shape as that shown in FIG. 8 is arranged around the outer periphery of the rotor shaft 1. In the vertical direction of the displacement sensor 20, radial direction electromagnets 21 and 22 having the same shape as that shown in FIG. 9 are provided.
These electromagnets 21 and 22 are arranged on planes a and 2, respectively, which are plane symmetrical to each other with respect to the plane α having the displacement detection point of the displacement sensor 20.

すなわち、上記のような構成によれば、変位センサ20
の変位検出点は平面α上に設定されており、一方各電磁
石21.22における力の作用点f  t、f  1.
  f 2.  f 2は力の合成により、等価的に平
面α上に存在することになり、その結果力の作用点と変
位検出点が同一平面α上に設定されるように構成されて
いる。
That is, according to the above configuration, the displacement sensor 20
The displacement detection points of are set on the plane α, while the points of force application f t, f 1 .
f2. Due to the combination of forces, f 2 will equivalently exist on the plane α, and as a result, the force application point and the displacement detection point are configured to be set on the same plane α.

したがって、上記のような各実施例にあっては、変位セ
ンサの変位検出点と電磁石における力の作用点とを等価
的に同一平面上にそれぞれ設定したため、曲げ振動にお
ける振動モードの節がロータ軸に生じた場合であっても
、変位センサの変位信号と電磁石へ出力される励磁電流
との位相が常時一定に保たれるので、ロータ軸を正常に
制御することができる。
Therefore, in each of the above embodiments, the displacement detection point of the displacement sensor and the point of force application in the electromagnet are set equivalently on the same plane, so that the nodes of the vibration mode in bending vibration are aligned with the rotor axis. Even if this occurs, the phase of the displacement signal from the displacement sensor and the excitation current output to the electromagnet is always kept constant, so the rotor shaft can be controlled normally.

(発明の効果) この発明に係る磁気軸受装置は、変位センサの変位検出
点と電磁石における力の作用点とを等価的に同一平面1
−にそれぞれ設定したため、曲げ振動における振動モー
ドの節がロータ軸に生じた場合であっても、変位センサ
の変位信号と電磁石へ出力される励磁電流との位相が常
時一定に保たれるので、ロータ軸は正常に制御され、磁
気軸受の発振を防止することができる。
(Effects of the Invention) The magnetic bearing device according to the present invention allows the displacement detection point of the displacement sensor and the force application point of the electromagnet to be equivalently placed on the same plane.
-, even if a vibration mode node in bending vibration occurs on the rotor shaft, the phase between the displacement signal of the displacement sensor and the excitation current output to the electromagnet is always kept constant. The rotor shaft can be controlled normally and oscillation of the magnetic bearing can be prevented.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明に係る磁気軸受装置の第1の実施例を
示す説明図、第2図(a)(b)は変位センサの平面図
、第3図は変位センサの電気回路図、第4図は磁気軸受
装置の第2の実施例を示す説明図、第5図は変位センサ
の電気回路図、第6図は磁気軸受装置の第3の実施例を
示す説明図、第7図は従来の磁気軸受装置を示す説明図
、第8図は変位センサの平面図、第9図は電磁石の平面
図である。 1・・・ロータ軸 3、2]、、 22・・・電磁石 8、 9. 16. 1−7. 20・・・変位センサ
α、β・・・平面 J−の発明り係る磁気軸受)た置の第1の実施例を示す
ぶ(明図第2 変位センサの平面図 (b) Yb 第3 図 変位センサの電気回路図 第5図 変位センサの電気回路図 第4 図 磁気軸受装置の第2の実″I5倭1を示す説明2第6 図 磁気軸受装置の第6の実施例を示す説8月図第7図 従来の磁気軸受装置を示す説明7 A。 第8 図 変位センサの工面区 ゴY
FIG. 1 is an explanatory diagram showing a first embodiment of a magnetic bearing device according to the present invention, FIGS. 2(a) and 2(b) are plan views of a displacement sensor, and FIG. 3 is an electric circuit diagram of the displacement sensor. Fig. 4 is an explanatory diagram showing a second embodiment of the magnetic bearing device, Fig. 5 is an electric circuit diagram of a displacement sensor, Fig. 6 is an explanatory diagram showing a third embodiment of the magnetic bearing device, and Fig. 7 is an explanatory diagram showing a third embodiment of the magnetic bearing device. An explanatory diagram showing a conventional magnetic bearing device, FIG. 8 is a plan view of a displacement sensor, and FIG. 9 is a plan view of an electromagnet. 1... Rotor shaft 3, 2], 22... Electromagnet 8, 9. 16. 1-7. 20... Displacement sensor α, β... Showing the first embodiment of the magnetic bearing according to the invention on the plane J- (clear figure 2 Plan view of the displacement sensor (b) Yb 3 Electrical circuit diagram of the displacement sensor Figure 5 Electrical circuit diagram of the displacement sensor Figure 4 Explanation 2 showing the second embodiment of the magnetic bearing device Figure 7: Explanation 7 showing a conventional magnetic bearing device. Figure 8: Construction of displacement sensor.

Claims (1)

【特許請求の範囲】 1、ロータ軸の変位を変位信号として検出する変位セン
サと、この変位センサの変位信号に基づいて出力される
励磁電流で上記ロータ軸を所定の位置へ支持する電磁石
とを備える磁気軸受装置であって、 上記変位センサの変位検出点と上記電磁石における力の
作用点とを等価的に同一平面上にそれぞれ設定したこと
を特徴とする磁気軸受装置。
[Claims] 1. A displacement sensor that detects the displacement of the rotor shaft as a displacement signal, and an electromagnet that supports the rotor shaft at a predetermined position using an excitation current output based on the displacement signal of the displacement sensor. What is claimed is: 1. A magnetic bearing device comprising: a displacement detection point of the displacement sensor and a point of force application in the electromagnet that are equivalently set on the same plane.
JP2219696A 1990-08-21 1990-08-21 Magnetic bearing device Pending JPH04102716A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2219696A JPH04102716A (en) 1990-08-21 1990-08-21 Magnetic bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2219696A JPH04102716A (en) 1990-08-21 1990-08-21 Magnetic bearing device

Publications (1)

Publication Number Publication Date
JPH04102716A true JPH04102716A (en) 1992-04-03

Family

ID=16739533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2219696A Pending JPH04102716A (en) 1990-08-21 1990-08-21 Magnetic bearing device

Country Status (1)

Country Link
JP (1) JPH04102716A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU225202U1 (en) * 2023-11-23 2024-04-15 Публичное Акционерное Общество "Газпром Автоматизация" Radial active magnetic bearing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596261U (en) * 1982-06-30 1984-01-14 富士通株式会社 Laser beam scanning device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596261U (en) * 1982-06-30 1984-01-14 富士通株式会社 Laser beam scanning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU225202U1 (en) * 2023-11-23 2024-04-15 Публичное Акционерное Общество "Газпром Автоматизация" Radial active magnetic bearing

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