JPH0410546Y2 - - Google Patents
Info
- Publication number
- JPH0410546Y2 JPH0410546Y2 JP16542987U JP16542987U JPH0410546Y2 JP H0410546 Y2 JPH0410546 Y2 JP H0410546Y2 JP 16542987 U JP16542987 U JP 16542987U JP 16542987 U JP16542987 U JP 16542987U JP H0410546 Y2 JPH0410546 Y2 JP H0410546Y2
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen
- gas
- liquid
- column
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 90
- 229910052757 nitrogen Inorganic materials 0.000 claims description 37
- 239000007788 liquid Substances 0.000 claims description 23
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- 238000009833 condensation Methods 0.000 claims description 5
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 3
- 238000010926 purge Methods 0.000 claims description 2
- 238000010992 reflux Methods 0.000 claims 1
- 238000009835 boiling Methods 0.000 description 14
- 230000005494 condensation Effects 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 229910052754 neon Inorganic materials 0.000 description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000004821 distillation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Separation By Low-Temperature Treatments (AREA)
Description
【考案の詳細な説明】
産業上の利用分野
ネオンNe、水素H2、ヘリウムHeのような低
沸点ガスを含まない高純度窒素ガスを製造する装
置に関するものである。[Detailed Description of the Invention] Industrial Application Field This invention relates to an apparatus for producing high purity nitrogen gas that does not contain low boiling point gases such as neon Ne, hydrogen H 2 and helium He.
従来技術
空気を液化精留して窒素ガスを製造する装置と
して、水分、炭酸ガス等を除去した圧縮空気を製
品窒素ガス等の低温ガスとの熱交換で冷却し、一
部液化した状態で単式精留塔の下部に導入して、
その塔頂から製品ガスを取出す装置が一般に使用
されている。この種の装置で製造する窒素ガスは
高純度であるが、ネオン、水素、ヘリウムのよう
な低沸点ガスは除去されずに含有されており、半
導体工業用のような用途には適さないという欠点
があつた。Conventional technology As a device for producing nitrogen gas by liquefaction rectification of air, compressed air from which moisture, carbon dioxide, etc. have been removed is cooled by heat exchange with low-temperature gas such as product nitrogen gas, and is partially liquefied. Introduced into the bottom of the rectification column,
Equipment is commonly used to extract the product gas from the top of the tower. Although the nitrogen gas produced by this type of equipment is highly pure, it contains low-boiling point gases such as neon, hydrogen, and helium without being removed, making it unsuitable for applications such as the semiconductor industry. It was hot.
そこで、この欠点を除去し、低沸点成分を含ま
ない高純度の窒素ガスを製造する装置として、例
えば特開昭58−64478号公報所載のものが挙げら
れる。 An example of an apparatus for eliminating this drawback and producing high-purity nitrogen gas free of low-boiling components is the one described in Japanese Patent Application Laid-Open No. 58-64478.
前記公報記載の高純度窒素製造装置は、凝縮部
を介して上部に気化部、下部に液化部を形成した
熱交換器を設けて、単式精留塔頂部から採取する
製品ガス（高純度窒素ガス）をこの熱交換器の液
化部に導入して気化部の減圧液体窒素で冷却して
液化せしめるとともに、含有する低沸点成分を未
凝縮ガスとして凝縮部から排出させ、液化された
窒素を液化部から減圧弁を介して気化部に導入し
て気化させ、低沸点成分を含有しない製品高純度
窒素ガスとして採取するものである。 The high-purity nitrogen production apparatus described in the above publication is equipped with a heat exchanger with a vaporization section at the top and a liquefaction section at the bottom via a condensation section, and the product gas (high-purity nitrogen gas) collected from the top of the single rectification column is ) is introduced into the liquefaction section of this heat exchanger and liquefied by cooling with reduced pressure liquid nitrogen in the vaporization section, and the low-boiling components contained therein are discharged as uncondensed gas from the condensation section, and the liquefied nitrogen is transferred to the liquefaction section. The nitrogen gas is introduced into the vaporization section via a pressure reducing valve, where it is vaporized and collected as a high-purity nitrogen gas product that does not contain low-boiling components.
しかしながらこの装置では、気化して製品とな
る液体窒素は、単式精留塔の塔頂部から取出され
て熱交換器の凝縮部で凝縮されたものであり、凝
縮からパージされる低沸点成分含有ガスと平衡状
態にあるものなので、不純物である低沸点成分を
なお含有しているということができる。 However, in this device, the liquid nitrogen that is vaporized and becomes a product is taken out from the top of the single rectification column and condensed in the condensation section of the heat exchanger, and the gas containing low-boiling components is purged from the condensation. Since it is in equilibrium with the above, it can be said that it still contains low-boiling components that are impurities.
そこで本考案者等は、さらに一層低沸点成分を
除去するため、アルミニウムろう付型窒素凝縮器
において液化され、低沸点成分を除去された高純
度の液化窒素が戻される精留の精留板よりも数段
下の精留板から製品ガスを取出す高純度窒素製造
装置について実用新案登録出願した。（実願昭62
−136828号）（以下、本願明細書においては、「先
願考案」と称する。）
本考案は、先願考案の改良に関するものであ
る。 Therefore, in order to further remove low-boiling point components, the inventors of the present invention decided to use a rectification plate that is liquefied in an aluminum brazing type nitrogen condenser and returns high-purity liquefied nitrogen from which low-boiling point components have been removed. has filed a utility model registration application for a high-purity nitrogen production device that extracts product gas from a rectifier plate several stages below. (Jitsugan Showa 62
-136828) (hereinafter referred to as the "earlier invention" in the present specification) The present invention relates to an improvement of the earlier invention.
考案が解決しようとする問題点
本考案は、先願考案の装置をさらに小型化、省
エネルギー化した高純度窒素製造装置を提供する
ものである。Problems to be Solved by the Invention The present invention provides a high-purity nitrogen production device that is more compact and energy-saving than the device devised in the earlier application.
問題点を解決するための手段
本考案者等は種々検討、実験の結果本考案装置
の開発に成功したものであり、本考案の技術的構
成は前記実用新案登録請求の範囲各項に明記した
とおりであるが、本考案装置の具体例を示す添付
図面に基づいて詳細に説明する。Means for Solving the Problems The inventors of the present invention have successfully developed the device of the present invention as a result of various studies and experiments, and the technical structure of the present invention is specified in each claim of the above-mentioned utility model registration. However, a detailed explanation will be given based on the attached drawings showing a specific example of the device of the present invention.
実施例 １（第１図）
原料空気5000Nm3／hrは8.0Kg／cm2に圧縮され、
水分、炭酸ガス等を除去された後、温度20℃で管
路１から熱交換器２に入り、製品窒素ガス、廃ガ
ス等で−167℃まで冷却され、管路３により取出
され、単式精留塔４の下部に導入される。精留塔
４の塔頂からは3500Nm3／hrの窒素ガスが管路
５により取出され、アルミニウムろう付型の窒素
凝縮器６に導入されて、ここで冷却液化され、ネ
オン、ヘリウム等の不純物を含む未凝縮ガス１
Nm3／hrが管路７からパージされる。前記窒素
凝縮器６で液化された液体窒素3499Nm3／hrは、
管路８により精留塔４の塔頂部の精留板Ａに戻さ
れる。精留塔４の塔底からは3199Nm3／hrの酸
素富化液体空気（−172℃）が、管路９によつて
取出され、膨張弁１０で3.8Kg／cm2に減圧された
後窒素凝縮器６に導入されて寒冷源となる。ここ
で気化した液体空気は−173℃の冷空気（酸素リ
ツチ）として管路１１から取出され、熱交換器２
に導入されて原料空気を冷却した後−150℃まで
昇温し、管路１２で取出される。ついで膨張ター
ビン１３で0.5Kg／cm2まで膨張されて−180℃とな
り、管路１４から再度熱交換器２に取入れられて
原料空気の冷却に用いられ、常温まで加温されて
廃ガスとして管路１５から排出される。Example 1 (Figure 1) Raw air of 5000Nm 3 /hr is compressed to 8.0Kg/cm 2 ,
After moisture, carbon dioxide, etc. have been removed, the product enters the heat exchanger 2 from pipe 1 at a temperature of 20°C, is cooled to -167°C with product nitrogen gas, waste gas, etc., is taken out through pipe 3, and is transferred to a single-type refiner. It is introduced into the lower part of the distillation column 4. 3500Nm 3 /hr of nitrogen gas is taken out from the top of the rectification column 4 through a pipe 5, introduced into an aluminum brazing type nitrogen condenser 6, where it is cooled and liquefied, and impurities such as neon and helium are removed. uncondensed gas containing 1
Nm 3 /hr is purged from line 7. The liquid nitrogen liquefied in the nitrogen condenser 6 was 3499Nm 3 /hr.
It is returned to the rectification plate A at the top of the rectification column 4 through a pipe 8. 3199Nm 3 /hr of oxygen-enriched liquid air (-172°C) is taken out from the bottom of the rectification column 4 through a pipe 9, and after being reduced in pressure to 3.8Kg/cm 2 by an expansion valve 10, it is replaced with nitrogen. It is introduced into the condenser 6 and becomes a cold source. The liquid air vaporized here is taken out from the pipe 11 as cold air (oxygen rich) at -173°C, and is taken out from the heat exchanger 2.
After the feed air is cooled, the temperature is raised to -150°C, and the air is taken out through a pipe 12. It is then expanded to 0.5 kg/cm 2 in the expansion turbine 13 to -180°C, and is taken into the heat exchanger 2 again through the pipe line 14 to be used for cooling the raw material air, heated to room temperature, and discharged into the pipe as waste gas. It is discharged from channel 15.
低沸点成分を含まない高純度液体窒素
1800Nm3／hrは精留塔４の精留板Ｂ（精留板Ａの
数段下）から管路１６で取出され、膨張弁１７で
7.5Kg／cm2に膨張された後、副凝縮器１８に導入
され、精留塔４の下部から管路１９で取出された
ガス状の空気3000Nm3／hrを冷却、液化し、−
167℃の液体空気として管路２０により精留塔４
の底部液溜めに戻される。気化された高純度窒素
ガスは管路２１から取出され、ついで熱交換器２
に導入され、原料空気を冷却して自らは常温まで
昇温し、管路２２によつて製品ガスとして取出さ
れる。低沸点成分を含有していても差支えない用
途向けの高純度窒素ガスを生産又は併産するとき
は、管路５の窒素ガスの全量または一部を管路２
３に送り、熱交換器２で常温まで昇温して管路２
４から製品として取出すことができる。 High purity liquid nitrogen containing no low boiling point components
1800Nm 3 /hr is taken out from rectifying plate B of rectifying column 4 (several stages below rectifying plate A) through conduit 16, and is taken out through expansion valve 17.
After being expanded to 7.5Kg/cm 2 , 3000Nm 3 /hr of gaseous air is introduced into the sub-condenser 18 and taken out from the bottom of the rectification column 4 through the pipe 19, and is cooled and liquefied.
As liquid air at 167°C, it is sent to the rectification column 4 via pipe 20.
is returned to the bottom reservoir. The vaporized high-purity nitrogen gas is taken out from the pipe line 21 and then transferred to the heat exchanger 2.
It cools the raw material air, raises its temperature to room temperature, and takes it out as a product gas through the pipe 22. When producing or co-producing high-purity nitrogen gas for applications where it is okay to contain low boiling point components, all or part of the nitrogen gas in pipe 5 is transferred to pipe 2.
3, heated to room temperature in heat exchanger 2, and then transferred to pipe 2.
4 can be extracted as a product.
実施例（第２図）
この実施例は、低沸点成分を含む未凝縮ガスの
パージ管路が異なる以外は、第１図の実施例と同
じである。Embodiment (FIG. 2) This embodiment is the same as the embodiment of FIG. 1 except that the purge line for uncondensed gas containing low-boiling components is different.
管路５から取出され、アルミニウムろう付型窒
素凝縮器６で冷却液化された液体窒素は管路２５
で取出されて気液セパレータ２６に導かれ、ここ
で気液分離される。ガス相に凝縮された低沸点成
分は気液分離時にそのほとんどが気体中に入り、
管路２３、熱交換器２、管路２４を経て一般用高
純度窒素ガスとして取出される。気液セパレータ
ー２６底部の液体窒素は、管路８で精留塔４の精
留板Ａ上へ戻される。 The liquid nitrogen taken out from the pipe 5 and cooled and liquefied in the aluminum brazing type nitrogen condenser 6 is transferred to the pipe 25.
It is taken out and guided to the gas-liquid separator 26, where it is separated into gas and liquid. Most of the low-boiling components condensed in the gas phase enter the gas during gas-liquid separation,
It is extracted as general-use high-purity nitrogen gas through the pipe line 23, the heat exchanger 2, and the pipe line 24. The liquid nitrogen at the bottom of the gas-liquid separator 26 is returned to the rectification plate A of the rectification column 4 through the pipe 8.
一般用高純度窒素ガスを生産又は併産するとき
は、管路２３の流量を増加することにより可能と
なる。 When producing or co-producing general purpose high-purity nitrogen gas, it becomes possible by increasing the flow rate of the pipe line 23.
考案の効果
本考案の装置は、先願考案の装置と同じく、低
沸点成分含有量の非常に少い高純度の窒素ガスを
生産できるのはもちろんであるが、窒素凝縮器６
の他に副凝縮器１８を設けて空気−窒素の凝縮−
蒸発を行わせると、空気の液化温度は窒素のそれ
より高いため、次のような効果が得られる。すな
わち、窒素凝縮器６と副凝縮器１８の合計伝熱面
積を先願考案装置の窒素凝縮器の伝熱面積より小
さくでき、また原料空気の供給圧力を下げること
ができるので、省コスト、省エネルギーをはかる
ことが可能となる。Effects of the invention The device of the present invention, like the device of the earlier application, can of course produce high-purity nitrogen gas with a very low content of low-boiling components.
In addition, a sub-condenser 18 is provided to condense air-nitrogen.
When evaporation is performed, the following effects are obtained because the liquefaction temperature of air is higher than that of nitrogen. That is, the total heat transfer area of the nitrogen condenser 6 and the sub-condenser 18 can be made smaller than the heat transfer area of the nitrogen condenser of the device devised by the earlier application, and the supply pressure of raw air can be lowered, resulting in cost and energy savings. It becomes possible to measure.
さらに、精留塔の下部から取出した空気を副凝
縮器１８で液化して精留塔へ戻すため、精留塔４
へ原料空気の一部が液状で供給され、精留塔４内
を上昇するガス量が少くなるので、それに伴なつ
て精留塔４の容積を小さくできるという利点もあ
る。 Furthermore, in order to liquefy the air taken out from the lower part of the rectification column in the sub-condenser 18 and return it to the rectification column, the rectification column 4
Part of the feed air is supplied in liquid form to the rectifying column 4, and the amount of gas rising inside the rectifying column 4 is reduced, so there is an advantage that the volume of the rectifying column 4 can be reduced accordingly.
第１図は本考案装置の一例を示すフローシー
ト、第２図は第１図の装置に気液セパレーターを
設けた変形例を示すフローシートであり、図中：
１……原料空気、２……熱交換器、４……窒素精
留塔、６……窒素凝縮器、１０，１７……膨張
弁、１３……膨張タービン、１５……廃ガス、１
８……副凝縮器、２２……高純度窒素ガス、２４
……窒素ガス、２６……気液セパレーター、Ａ，
Ｂ……精留板、その他の符号は管路を示す。
FIG. 1 is a flow sheet showing an example of the device of the present invention, and FIG. 2 is a flow sheet showing a modification of the device shown in FIG. 1 with a gas-liquid separator.
1... Raw material air, 2... Heat exchanger, 4... Nitrogen rectification column, 6... Nitrogen condenser, 10, 17... Expansion valve, 13... Expansion turbine, 15... Waste gas, 1
8...Sub-condenser, 22...High purity nitrogen gas, 24
... Nitrogen gas, 26 ... Gas-liquid separator, A,
B... Rectifier plate, other symbols indicate pipes.
Claims (1)
却された原料空気を窒素精留塔４下部に導入
し、液化精留して塔頂に窒素を、下部に液体空
気をそれぞれ分離し、前記分離窒素の一部を製
品ガスとして採取するとともに、残部を前記液
体空気と熱交換して液化し、還流液とする高純
度窒素製造装置において、前記窒素精留塔４塔
頂部からの窒素ガスを塔底部からの液体空気を
膨張させたものとの熱交換により液化して前記
塔頂部へ戻すための窒素凝縮器６と、前記窒素
精留塔４下部からの空気を前記窒素精留塔４の
前記液体窒素戻り部より下方からの高純度液体
窒素を膨張させたものとの熱交換により液化し
て前記窒素精留塔下部へ戻すための副凝縮器と
を設けたことを特徴とする高純度窒素製造装
置。 (2) 前記窒素凝縮器６がパージ管路７を具備する
実用新案登録請求の範囲第１項記載の高純度窒
素製造装置。 (3) 前記窒素凝縮器６に気液セパレーター２６を
併設した実用新案登録請求の範囲第１項記載の
高純度窒素製造装置。[Scope of Claim for Utility Model Registration] (1) The raw air that has been cooled by the heat exchanger 2 after removing moisture, carbon dioxide, etc. is introduced into the lower part of the nitrogen rectification column 4, and is liquefied and rectified to produce nitrogen at the top of the column. In the high-purity nitrogen production apparatus, the liquid air is separated in the lower part, a part of the separated nitrogen is collected as a product gas, and the remaining part is liquefied by heat exchange with the liquid air to become a reflux liquid. Nitrogen rectification column 4 Nitrogen condenser 6 for liquefying nitrogen gas from the top of the column by heat exchange with expanded liquid air from the bottom of the column and returning it to the top of the column; and Nitrogen rectification column 4. Sub-condensation for liquefying the air from the lower part by heat exchange with the expanded high-purity liquid nitrogen from below the liquid nitrogen return section of the nitrogen rectification column 4 and returning it to the lower part of the nitrogen rectification column. A high-purity nitrogen production device characterized by being equipped with a container. (2) The high-purity nitrogen production apparatus according to claim 1, wherein the nitrogen condenser 6 includes a purge line 7. (3) The high-purity nitrogen production apparatus according to claim 1, wherein a gas-liquid separator 26 is attached to the nitrogen condenser 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16542987U JPH0410546Y2 (en) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16542987U JPH0410546Y2 (en) | 1987-10-30 | 1987-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0170087U JPH0170087U (en) | 1989-05-10 |
| JPH0410546Y2 true JPH0410546Y2 (en) | 1992-03-16 |
Family
ID=31451906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16542987U Expired JPH0410546Y2 (en) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410546Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5170630A (en) * | 1991-06-24 | 1992-12-15 | The Boc Group, Inc. | Process and apparatus for producing nitrogen of ultra-high purity |
-
1987
- 1987-10-30 JP JP16542987U patent/JPH0410546Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0170087U (en) | 1989-05-10 |
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