JPH0412632U - - Google Patents
Info
- Publication number
- JPH0412632U JPH0412632U JP5228190U JP5228190U JPH0412632U JP H0412632 U JPH0412632 U JP H0412632U JP 5228190 U JP5228190 U JP 5228190U JP 5228190 U JP5228190 U JP 5228190U JP H0412632 U JPH0412632 U JP H0412632U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rotating shaft
- terminal
- holder
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図及び第２図はそれぞれ本考案の薄膜形成
装置の実施例の切断正面図、第３図は従来例の切
断正面図である。
８……回転軸、１１……端子、１４……基板ホ
ルダ、１５……基板、１８……密閉体、２５……
端子、２８……ばね。
1 and 2 are respectively cutaway front views of an embodiment of the thin film forming apparatus of the present invention, and FIG. 3 is a cutaway front view of a conventional example. 8... Rotating shaft, 11... Terminal, 14... Board holder, 15... Board, 18... Sealing body, 25...
Terminal, 28...spring.
Claims (1)
着し駆動機構により回転される回転軸と、該回転
軸に当接した前記基板の電流側定用の端子と、該
端子と前記回転軸の当接部を密閉した密閉体とを
備えた薄膜形成装置。 基板を保持した基板ホルダと、該ホルダを固
着し駆動機構により回転される回転軸と、該回転
軸の端面の軸中心にばねにより先端が当接した前
記基板の電流測定用ピン状端子とを備えた薄膜形
成装置。[Claims for Utility Model Registration] A substrate holder holding a substrate, a rotating shaft to which the holder is fixed and rotated by a drive mechanism, a terminal for determining the current side of the substrate that is in contact with the rotating shaft, A thin film forming apparatus comprising a terminal and a sealed body that seals a contact portion of the rotating shaft. A substrate holder holding a substrate, a rotating shaft to which the holder is fixed and rotated by a drive mechanism, and a pin-shaped terminal for current measurement of the substrate whose tip is brought into contact with the center of the end surface of the rotating shaft by a spring. Equipped with thin film forming equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5228190U JPH085548Y2 (en) | 1990-05-18 | 1990-05-18 | Thin film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5228190U JPH085548Y2 (en) | 1990-05-18 | 1990-05-18 | Thin film forming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0412632U true JPH0412632U (en) | 1992-01-31 |
| JPH085548Y2 JPH085548Y2 (en) | 1996-02-14 |
Family
ID=31572454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5228190U Expired - Fee Related JPH085548Y2 (en) | 1990-05-18 | 1990-05-18 | Thin film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085548Y2 (en) |
-
1990
- 1990-05-18 JP JP5228190U patent/JPH085548Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH085548Y2 (en) | 1996-02-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |