JPH04130187U - contactless chuck - Google Patents

Abstract

(57) [Summary] [Purpose] Suppresses minute movements within the guide of a non-contact chuck and responds to changes in the size of the transported object. [Structure] High-pressure air is supplied from the air supply port 1, and air is blown out from the air blow-off port A2 whose blowing direction is vertically downward and the air blow-off port B3 whose blowing direction is diagonally downward to chuck the conveyed object 6. The object to be transported 6 is pushed out in the horizontal direction by air blown out from the air outlet B3, and the object to be transported 6 is pressed against the positioning guide 4 located in front of it to position the object. The conveyed object 6 is positioned without slight movement, and even if the size changes, it is possible to cope with it without adjusting or replacing the guide.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is a non-contact chuck, especially for wafers, magnetic disks, ceramic substrates, etc. This invention relates to a non-contact chuck used for conveyance.

0002

[Conventional technology]

The conventional non-contact chuck has an air supply port 1 and The air outlet A2, which is opened vertically downward on the bottom of the chuck body, and the It includes a positioning guide 4 arranged around the entire circumference and an arm 5 that holds the chuck body. I'm here.

0003 To chuck the conveyed object 6, the arm 5 is lowered and the chuck body is chucked to the conveyed object 6. get closer to Supply high pressure air to air supply port 1, and air from air outlet A2. The transported object 6 is moved by the positioning guide 4. position. The conveyed object 6 is released by stopping the supply of high-pressure air. It will be done.

0004

[Problem that the idea aims to solve]

In the conventional non-contact chuck mentioned above, the inner diameter of the guide is adjusted to ensure reliable chucking. It is larger than the transported object, so the transported object cannot be moved inside the positioning guide when chucked. The positioning guide must be adjusted every time the conveyed object moves slightly or the size of the conveyed object changes. The disadvantage was that it required maintenance or replacement.

[0005]

[Means to solve the problem]

The non-contact chuck of this invention has an air supply port and an air blowing direction on the bottom of the chuck body. The air outlet A is opened vertically downward, and the air outlet direction is indicated on the bottom of the chuck body. Air outlet B opened diagonally downward and air outlet B opened diagonally downward. and a positioning guide fixed in the blowing direction of the air blowing outlet B. It will be done.

[0006]

【Example】

Next, the present invention will be explained in detail with reference to the drawings. Figures 1(a) and (b) are books FIG. 1 is a side view and a plan view showing an embodiment of the invention. Air supply provided on the top of the main unit. A supply port 1, an air outlet A2 formed on the bottom of the main body with the blowing direction facing vertically downward, There is an air blowing part B3 on the bottom of the main unit with the blowing direction facing diagonally downward, and Air outlet B3 opened facing downward direction Fixed positioning in the blowing direction It includes a guide 4 and an arm 5 that holds the chuck position.

[0007] To chuck the conveyed object 6, the arm 5 is lowered and the chuck body is chucked to the conveyed object 6. get closer to Supply high pressure air to air supply port 1, air outlet A, B2, 3 Air is blown out to chuck the conveyed object 6. The conveyed object 6 is diagonally below. Due to the flow of air blown out from the air outlet B3 opened in the direction of It is pushed out in the direction and is held against the positioning guide 4 in that direction. . The conveyed object is released by stopping the supply of high-pressure air.

[0008]

[Effect of the idea]

The non-contact chuck of the present invention blows air from the air outlet B facing in the diagonal direction. The conveyed object is pushed out by the flow of air, and it hits the positioning guide in that direction. It is retained by stimulating it. Therefore, it is possible to suppress the slight movement of the transported object, and Furthermore, since there are no positioning guides placed around the entire circumference of the chuck, the size of the transported object This has the advantage that there is no need to adjust or replace the guide even if the guide changes.

[Brief explanation of drawings]

FIGS. 1(a) and 1(b) are a side view and a plan view showing an embodiment of the present invention.

FIGS. 2(a) and 2(b) are a side view and a plan view showing a conventional example.

[Explanation of symbols]

1 Air supply port 2 Air outlet A 3 Air outlet B 4 Positioning guide 5 Arm 6 Object to be transported

Claims (1)

[Scope of utility model registration request] Claim 1: An air supply port, and an air outlet A opened in the bottom of the chuck body in the blowing direction or vertically downward;
The air outlet B has an air outlet B that is opened in the bottom surface so that the air outlet B is oriented diagonally downward, and a positioning guide that is attached to the air outlet B that is opened so that the air outlet B is oriented diagonally downward. A non-contact chuck featuring