JPH0413058U - - Google Patents
Info
- Publication number
- JPH0413058U JPH0413058U JP5003190U JP5003190U JPH0413058U JP H0413058 U JPH0413058 U JP H0413058U JP 5003190 U JP5003190 U JP 5003190U JP 5003190 U JP5003190 U JP 5003190U JP H0413058 U JPH0413058 U JP H0413058U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- flange
- heater
- cylindrical
- boundary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の実施例に係る分子線セルの縦
断面図。第２図は同じもののるつぼ彎曲部、鍔部
近傍のみの断面図。第３図は従来例に係る分子線
セルの縦断面図。
１……るつぼ、２……抵抗加熱ヒータ、３……
反射板、４……熱電対、５……キヤツプ、６……
鍔部、７……リング、８……突片。
FIG. 1 is a longitudinal sectional view of a molecular beam cell according to an embodiment of the present invention. Fig. 2 is a cross-sectional view of only the curved part and the vicinity of the flange of the same crucible. FIG. 3 is a longitudinal cross-sectional view of a conventional molecular beam cell. 1... Crucible, 2... Resistance heater, 3...
Reflector, 4... Thermocouple, 5... Cap, 6...
Tsuba, 7...ring, 8...protrusion.
Claims (1)
るつぼの周囲に設けられるつぼの内部の原料を加
熱するための抵抗加熱ヒータと、抵抗加熱ヒータ
の外周及びるつぼの底部下方に設けられる複数枚
の反射板とよりなり、抵抗加熱ヒータはるつぼの
上半部の周囲にのみ設けられたコイル状のヒータ
であつて、ヒータの１ターンはるつぼの円筒部と
鍔部の境界の彎曲部に接触し、ヒータの少なくと
も１ターン分はるつぼの鍔部の裏面に接触してい
る事を特徴とする分子線セル。 a crucible that is cylindrical with a bottom and has a flange on the opening edge;
It consists of a resistance heater installed around the crucible to heat the raw material inside the crucible, and a plurality of reflective plates installed around the outer periphery of the resistance heater and below the bottom of the crucible. It is a coil-shaped heater provided only around the half part, and one turn of the heater contacts the curved part of the boundary between the cylindrical part and the flange of the crucible, and at least one turn of the heater contacts the curved part of the boundary between the cylindrical part and the flange of the crucible. A molecular beam cell characterized by being in contact with the back surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5003190U JPH0413058U (en) | 1990-05-14 | 1990-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5003190U JPH0413058U (en) | 1990-05-14 | 1990-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0413058U true JPH0413058U (en) | 1992-02-03 |
Family
ID=31568232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5003190U Pending JPH0413058U (en) | 1990-05-14 | 1990-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413058U (en) |
-
1990
- 1990-05-14 JP JP5003190U patent/JPH0413058U/ja active Pending