JPH0413543Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] This invention uses two types of heat transfer methods: convection heat transfer by airflow and radiation heat transfer from the wall surface. Regarding precision constant temperature clean room equipment that prevents outbreaks.

[Conventional technology]

Horizontal laminar flow clean rooms, vertical laminar flow clean rooms, constant temperature chambers, etc. are well known as technologies for constructing constant temperature clean spaces. In such a constant temperature clean room, the principle is to create a clean and constant temperature environment by blowing air controlled to a predetermined temperature and humidity into the chamber through a HEPA filter layer and making the blown air flow into a laminar flow. The heat is transferred into the chamber using convective heat transfer using blown airflow.

[Problem that the invention attempts to solve]

A constant temperature clean room using the convection heat transfer method as described above has a problem in that even if its constant temperature control and cleanliness control are advanced, it is not suitable for application to optical system experiments and production processes. For example, when using holography using laser light interference, the vibration of the airflow itself becomes a disturbance to measurement accuracy. Therefore, when performing such measurements in a conventional constant-temperature clean room, the blower must be stopped (the airflow is stopped) and the laser oscillated.
However, since the temperature inside the room changes while the airflow is stopped, the work has to be stopped for a short period of time, and there is also the problem that the cleanliness of the room decreases during this time when the airflow is stopped. .

[Means to solve problems]

The purpose of this invention is to solve these problems, and one of the six sides that define the indoor space of a rectangular chamber is made up of a HEPA filter layer, and the side facing this HEPA filter layer is made up of an air filter. A constant temperature system that blows clean air at a predetermined temperature into the chamber from the HEPA filter layer in a laminar flow manner by supplying temperature-controlled air to the air supply plenum formed on the suction surface and behind the HEPA filter layer. In clean room equipment, the other four surfaces along this outlet airflow are constructed of temperature-controlled building materials through which temperature-controlled water flows, and the heat source equipment for obtaining this temperature-controlled water is the heat source equipment for obtaining the temperature-controlled air. It provides shared constant temperature clean room equipment. At that time, a HEPA filter unit is loaded into the square-shaped opening formed by the hollow frame to form a HEPA filter layer with a two-dimensional spread, and temperature-controlled water is also placed inside the hollow frame. It is preferable that the grill wall is formed by a temperature-controlled water pipe through which water passes and also temperature-controlled water passes through the air suction surface.

FIG. 1 shows an exploded diagram of an example of a constant temperature clean room according to the present invention, and FIG. 2 is a system diagram of the heat source equipment side. In the illustrated example, constant temperature clean room 1
In order to configure the
By supplying air at a predetermined temperature to the air supply plenum 3 formed behind the HEPA filter layer 2.
Clean air is blown out from the HEPA filter layer 2 into the chamber 1. On the other hand, a grille wall 4 for discharging air from the chamber 1 is vertically provided on the wall surface facing the HEPA filter layer 2, and an exhaust plenum 5 is formed behind the grille wall 4.
A door 6 for entering and exiting the chamber 1 is provided on the grill wall 4. The space between the HEPA filter layer 2 and the grill wall 4 is a constant temperature clean space (chamber 1), but in the present invention, substantially all the wall surfaces that come into contact with the air in this chamber 1, that is, the first Horizontal laminar flow chamber 1 in the figure
In this case, the walls on both sides, the floor, and the ceiling are constructed of temperature-controlled building materials through which temperature-controlled water passes, and the temperature-controlled water also passes through the HEPA filter layer 2 and the grill wall 4. The structure will be explained below. In FIG. 1, reference numerals 7 and 8 indicate temperature-controlled building materials for side walls, 9 indicate temperature-controlled building materials for ceilings, and 10 indicate temperature-controlled building materials for floors.

Temperature control building materials 7 and 8 for side walls and temperature control building materials 9 for ceilings
As shown in the partial sectional view of FIG. 3, the inner plate 11
A heat insulating material 13 is loaded between the outer plate 12 and the inner plate 1.
A pipe 14 is placed in contact with or in close proximity to the inner surface of 1. The inner plate 11 is made of a metal plate, such as an Al plate, a stainless steel plate, or a Zn iron plate. these are,
In some cases, it may be a punched plate. The pipe 14 also uses a metal pipe, and this pipe 14
In order to improve heat transfer between the inner plate 11 and the inner plate 11,
The pipe 14 is placed along the inner surface of the inner plate 11 and the two are joined by welding, or the two are integrally joined by filling a gap between the two with thermally conductive putty. The outer panel 12 is made of ordinary plywood or resin board. A large number of pipes 14 are arranged in parallel with each other at equal intervals, and both ends thereof are connected to a header inserted between the inner plate 11 and the outer plate 12 so as to be perpendicular to the pipes 14. For example, in the case of temperature-controlled building materials 7 and 8 for side walls, each pipe 14 is arranged vertically in parallel as shown in FIG. 1, and the lower end of each pipe 14 is placed in a lower header 16 arranged horizontally. Further, the upper end is connected to an upper header 17 arranged horizontally. Similarly, in the case of the ceiling temperature control building material 9, one end of each pipe 14 is connected to one header 16 disposed perpendicular thereto, and the other end is connected to the other header 17. In either case, the header 16 is used for supplying water to each pipe 14, and the header 17 is used for draining water from each pipe 14.
A water supply port 18 is attached to the header 17, and a drain port 19 is attached to the header 17.

In the case of the floor temperature control building material 10, the pipe 14 and headers 16 and 17 are installed in the same manner as described above (first
In this case, in order to have sufficient strength as a flooring material, a steel plate is used as the inner plate 11, and as shown in Fig. 4, a reinforcing steel frame 20 Insert. The use of the heat insulating material 13 and the connection between the pipe 14 and the inner plate 11 are the same as in the case of the temperature-controlled building materials for side walls and ceilings described above.

The HEPA filter layer 2 and the grill wall 4 also serve as wall surfaces for defining the chamber 1, but in order to more advantageously achieve the object of the present invention, it is preferable that the temperature-controlled water be allowed to flow through these as well. That is,
As for the HEPA filter layer 2, as shown in FIG. A hollow frame 22 is used as a frame used for the temperature control water pipe. In this case, the hollow frames 22 are arranged vertically and horizontally like a checkerboard so that the side facing the chamber 1 is exposed indoors, and a HEPA filter is installed in the opening of each square formed by the vertical and horizontal hollow frames 22. unit 21
Load. At that time, most preferably, the vertical hollow frame and the horizontal hollow frame are connected to each other at their cross points so that the heated water is communicated therein, and the thus formed HEPA
Temperature-controlled water is introduced into the entire hollow frame 22 from a water supply port 23a installed below one corner of the filter layer 2 (FIG. 1), and temperature-controlled water is introduced from a discharge port 23b installed above diagonally from the water supply port 23a. Discharge. In some cases, only the horizontal hollow frame or only the vertical hollow frame may be stretched between the water supply header and the drainage header to allow water to flow.

Regarding the grill wall 4, temperature-controlled water pipes 24 are arranged in parallel with equally spaced gaps other than where the entrance/exit door 6 is provided, and both ends of the pipes are connected to the water supply header 2.
5 and the drainage header 26. A water supply port 27 is attached to the water supply header 25, and a drain port 28 is attached to the drain header 26. By arranging the temperature-controlled water pipes 24 at even intervals, the temperature-controlled water pipes 24 themselves serve to regulate the airflow within the chamber sucked into the exhaust plenum 5 behind the grill wall 4. Although FIG. 1 shows an example of a horizontal laminar flow type, it goes without saying that even in the case of a vertical laminar flow type, the inside of the chamber can be surrounded with temperature-controlled building materials according to the present invention.

In this way, the entire six walls that define the indoor space of chamber 1 are surrounded by temperature-controlled building materials through which temperature-controlled water flows, and the temperature of the temperature-controlled water flowing through each temperature-controlled building material increases. Radiant heat transfer can be imparted within the chamber 1 by appropriately adjusting.

FIG. 2 shows an example of a heat source device for temperature-controlled water, and this heat source device is characterized in that it is also used as a heat source device for air to impart convective heat transfer by air current. In FIG. 2, 30 is a heat supply device such as a refrigerator, and 31 is a heat storage tank. Heat source water in the heat storage tank 31 is supplied to a coil 33 of a fan coil unit 32 to produce conditioned air. The fan coil unit 32 takes in return air (RA) and outside air (OA) from the exhaust plenum 5, and its supply air (SA) is sent to the supply air plenum 3. On the other hand, pipes 36 and 37 are provided for circulating the heat source water of the heat storage tank 31 to the heat exchanger 35, and pipes 38 and 39 for circulating temperature-controlled water are provided on the secondary side of the heat exchanger 35. Then, the outbound pipe 38 of the temperature-controlled water is led to the main header 40, and a branch pipe is taken from the main header 40 to supply the temperature-controlled water to each water supply port 18, 22, 27, etc. of the temperature-controlled building material described above. In addition, a return main header 41 is also provided in the temperature-controlled water return pipe 39, and by connecting the respective drain ports 19, 23, and 27 of the temperature-controlled building materials to this return main header 41, the return water can be mixed integrally. heat exchanger 3
Cycle to 5. The temperature of the temperature-controlled water flowing into the outgoing pipe 38 is adjusted by controlling the opening degree of an electric valve 44 installed in the primary heat source water pipe 36 in accordance with an instruction signal from a thermometer 43 installed in the outgoing pipe 38. It is done by controlling. Note that the symbols A to F and a to a are shown in the main header 40 and the return main header 41 in FIG.
f indicates that it is connected to the same reference numeral as the water supply port and drain port in FIG. With this configuration, convection heat transfer and radiant heat transfer can be imparted to the chamber 1 while the air side and the temperature controlled water side share a heat source.

That is, the indoor temperature can be controlled by convective heat transfer alone using temperature-controlled air, solely by radiant heat transfer by temperature-controlled building materials through which temperature-controlled water flows, or by a combination of convective heat transfer and radiant heat transfer.

According to the constant temperature room equipment of the present invention, this can be done with high accuracy when work involving laser oscillation is performed therein. For example, HEPA filter layer 2
The amount of convective heat transfer is suppressed by restricting the airflow from the building, and the corresponding amount of heat is supplied by radiant heat transfer from temperature-controlled building materials through the circulation of temperature-controlled water. At that time, the air temperature and the surface temperature of the temperature-controlled building material can be made substantially equal, which eliminates differences in air density due to differences in location, and also prevents turbulence in the airflow itself, making accurate Measurement becomes possible. In addition, even when the airflow is completely stopped, the inside of the chamber can be maintained at a constant temperature for a long time due to radiant heat transfer from the temperature-controlled building materials, so even if the airflow is completely stopped and work continues, it is possible to The problem described in the conventional method does not occur.

[Brief explanation of the drawing]

Figure 1 is an exploded perspective view showing an example of constant temperature room equipment according to the present invention, Figure 2 is a system diagram showing an example of the arrangement of heat source equipment for the constant temperature room equipment of Figure 1, and Figure 3 is a side wall temperature control building material. A diagram showing a partial cross section of temperature-controlled building materials for ceilings,
FIG. 4 is a partial cross-sectional view of the temperature-controlled building material for floors, and FIG. 5 is a partial cross-sectional view of the HEPA filter layer. 1...Chamber, 2...HEPA filter layer,
3...Air supply plenum, 4...Grill wall, 5...Exhaust plenum, 7 and 8...Temperature control building material for side walls, 9
...Temperature control building material for ceiling, 10...Temperature control building material for floor, 1
1...Inner plate, 12...Outer plate, 13...Insulating material, 1
4, 24... Temperature controlled water flow pipe, 16... Water supply header, 17... Drain header, 22... Frame through which temperature controlled water flows, 32... Fan coil unit, 35... Heat exchanger.

Claims (1)

[Claims for Utility Model Registration] (1) One of the six sides defining the indoor space of the rectangular chamber is constituted by a HEPA filter layer, and the surface facing this HEPA filter layer is constituted as an air suction surface, In constant temperature clean room equipment, clean air at a predetermined temperature is blown out from the HEPA filter layer into the chamber in a laminar flow manner by supplying temperature-controlled air to the air supply plenum formed behind the HEPA filter layer. The other four surfaces along the outlet airflow are constructed of temperature-controlled building materials through which temperature-controlled water flows, and the heat source equipment for obtaining this temperature-controlled water is shared with the heat source equipment for obtaining the temperature-controlled air, and the Constant-temperature clean room equipment in which the temperature in a room is adjusted by convection heat transfer alone using the temperature-controlled air, radiation heat transfer alone using the temperature-control building materials, or a combination of the convection heat transfer and the radiation heat transfer. (2) The HEPA filter layer is formed by loading a HEPA filter unit into a square-shaped opening formed by a hollow frame, and the temperature-controlled water is passed through this hollow frame.Request for Utility Model Registration Range: Constant temperature clean room equipment as described in item 1. (3) The constant-temperature clean room equipment according to claim 1 or 2, wherein the air suction surface is composed of a grill wall, and the grill wall is formed by a temperature-controlled water pipe through which temperature-controlled water flows. .