JPH0413663U - - Google Patents
Info
- Publication number
- JPH0413663U JPH0413663U JP5435990U JP5435990U JPH0413663U JP H0413663 U JPH0413663 U JP H0413663U JP 5435990 U JP5435990 U JP 5435990U JP 5435990 U JP5435990 U JP 5435990U JP H0413663 U JPH0413663 U JP H0413663U
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- quartz boat
- single crystal
- semiconductor single
- ppma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 238000002425 crystallisation Methods 0.000 claims 1
- 230000008025 crystallization Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000003708 ampul Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5435990U JPH0413663U (2) | 1990-05-24 | 1990-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5435990U JPH0413663U (2) | 1990-05-24 | 1990-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0413663U true JPH0413663U (2) | 1992-02-04 |
Family
ID=31576356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5435990U Pending JPH0413663U (2) | 1990-05-24 | 1990-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413663U (2) |
-
1990
- 1990-05-24 JP JP5435990U patent/JPH0413663U/ja active Pending
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