JPH0414351U - - Google Patents

Info

Publication number
JPH0414351U
JPH0414351U JP5429690U JP5429690U JPH0414351U JP H0414351 U JPH0414351 U JP H0414351U JP 5429690 U JP5429690 U JP 5429690U JP 5429690 U JP5429690 U JP 5429690U JP H0414351 U JPH0414351 U JP H0414351U
Authority
JP
Japan
Prior art keywords
slit
ion source
avoiding
extracting
plasma generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5429690U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5429690U priority Critical patent/JPH0414351U/ja
Publication of JPH0414351U publication Critical patent/JPH0414351U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例に係るイオン源を
示すものであり、Ａはその断面図、Ｂはその正面
図である。第２図は従来のイオン源の一例を示す
ものであり、Ａはその断面図、Ｂその正面図であ
る。 ４……プラズマ生成容器、４１……スリツト、
６ａ，６ｂ……フイラメント、１４……イオンビ
ーム、２０……実施例に係るイオン源。

Claims (1)

    【実用新案登録請求の範囲】
  1. イオンビーム引出し用のスリツトを有するプラ
    ズマ生成容器内に、そのスリツトの長手方向に沿
    つて、しかも同スリツトのま後ろを避けた所に、
    ２本の互いにほぼ平行な直線状のフイラメントを
    配置したことを特徴とするイオン源。
JP5429690U 1990-05-24 1990-05-24 Pending JPH0414351U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5429690U JPH0414351U (ja) 1990-05-24 1990-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5429690U JPH0414351U (ja) 1990-05-24 1990-05-24

Publications (1)

Publication Number Publication Date
JPH0414351U true JPH0414351U (ja) 1992-02-05

Family

ID=31576234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5429690U Pending JPH0414351U (ja) 1990-05-24 1990-05-24

Country Status (1)

Country Link
JP (1) JPH0414351U (ja)

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