JPH04155107A - Low nox burner - Google Patents

Low nox burner

Info

Publication number
JPH04155107A
JPH04155107A JP2279123A JP27912390A JPH04155107A JP H04155107 A JPH04155107 A JP H04155107A JP 2279123 A JP2279123 A JP 2279123A JP 27912390 A JP27912390 A JP 27912390A JP H04155107 A JPH04155107 A JP H04155107A
Authority
JP
Japan
Prior art keywords
combustion
cylinder
tube
vaporization
reduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2279123A
Other languages
Japanese (ja)
Other versions
JP2561382B2 (en
Inventor
Isamu Koyama
勇 小山
Tasaburo Eto
江藤 太三郎
Kazuhiko Koizumi
和彦 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corona Corp
Original Assignee
Corona Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corona Corp filed Critical Corona Corp
Priority to JP2279123A priority Critical patent/JP2561382B2/en
Publication of JPH04155107A publication Critical patent/JPH04155107A/en
Application granted granted Critical
Publication of JP2561382B2 publication Critical patent/JP2561382B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23CMETHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C9/00Combustion apparatus characterised by arrangements for returning combustion products or flue gases to the combustion chamber
    • F23C9/006Combustion apparatus characterised by arrangements for returning combustion products or flue gases to the combustion chamber the recirculation taking place in the combustion chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)

Abstract

PURPOSE:To suppress the generation of NOx in a great measure by constituting a stable reduction combustion area by evaporation and vaporization combustion by means of combustion gas recirclulation created by an annular air between a vaporization cylinder and a combustion cylinder and oxidizing and burning in a very short time the reduction combustion flame in a reduction combustion area. CONSTITUTION:The combustion gas in a combustion cylinder 14 expands, and, further, it is influenced by the throttling section 15 at the tip end of the combustion cylinder 14 and it flows back in an annular space 16 between a vaporization cylinder 7 and the combustion cylinder 14 and returns by flowing to the outside section 17 of a conical partition wall 5 which constitutes a nozzle blow-out section 6. And, the reduction combustion flame that blows out into the furnace from the throttling section 15 at the tip end of the combustion cylinder 14 goes through an annular gap 23 between an outer cylinder 22 and the combustion cylinder 14, and, while it absorbs the heat of the combustion cylinder 14, is mixed quickly with the air flow that blows out from an annular gap 24 and burns completely. In this case the annular gap 24 is made so that, for theoretical air 100%, 30-50% of which may blow from a nozzle blow-out section 6, 10-30% from the passage 19, and 20-50% from the annular gap 24, and an air flow having a high speed and directivity reaches the inside of the reduction combustion flame from the throttle section 15 at the tip end, and the reduction combustion flame is oxidized in a short time and the combustion is completed.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は低NOxバーナに関するものである。[Detailed description of the invention] (Industrial application field) The present invention relates to a low NOx burner.

(従来技術) 液体燃料を蒸発させ、気体燃料として空気と混合させて
燃焼させると、燃焼ガス中の有害物質(臭気・煤・N 
Ox)などを極めてすくなくできることは以前より知ら
れており、我国でもある種の小型バーナで実用化されて
いる。
(Prior art) When liquid fuel is evaporated and mixed with air as gaseous fuel and burned, harmful substances (odors, soot, N
It has been known for some time that it can significantly reduce emissions such as Ox), and it has been put to practical use in some types of small burners in Japan.

このような燃焼装置には蒸発混合帯と燃焼帯が必要であ
る。蒸発の方法としては油の加熱が多用されているが、
煤の発生や火災の危険がある。
Such a combustion device requires an evaporative mixing zone and a combustion zone. Heating oil is often used as a method for evaporation, but
There is a risk of soot generation and fire.

又ガンタイプバーナもしられているが、これは液体燃料
を圧力噴霧型ノズルから高圧で噴震し、ファンよりの空
気と混合して燃焼させており1通常は特別な蒸発帯を設
けていない、ll化した油粒子は表面積が著しく増大し
ているため、蒸発しやすい条件が整っている。このよう
な圧力噴霧型ノズルを使用した蒸発燃焼装置では、燃焼
ガスの再循環により高温ガスを還流させ、その熱エネル
ギーで微粒状の液体燃料を蒸発させる方法が考案されて
いる。圧力噴震型において一つのノズルからの燃焼量を
可変にする場合、ターンタウンの領域が広くなると再循
環ガス量が変ることになる。
There are also gun-type burners, which spray liquid fuel at high pressure from a pressure spray nozzle, mix it with air from a fan, and combust it.Normally, no special evaporation zone is provided. Since the surface area of the ll-formed oil particles has increased significantly, conditions have been established for easy evaporation. In an evaporative combustion device using such a pressure spray nozzle, a method has been devised in which high-temperature gas is recirculated by recirculating the combustion gas, and the resulting thermal energy is used to evaporate particulate liquid fuel. When making the combustion amount from one nozzle variable in a pressure injection type, the amount of recirculated gas will change as the turntown area becomes wider.

このような再循環方式を取入れ、さらに燃焼空気を予熱
して積極的に液体燃料の蒸発を促進させ広範囲にわたり
安定した蒸発燃焼を行なわせるバーナが特公平2−32
531号公報に開示されている(第5図参照)。
A burner that incorporates such a recirculation system and further preheats the combustion air to actively promote the evaporation of liquid fuel and perform stable evaporative combustion over a wide range is disclosed in Japanese Patent Publication No. 2-32.
It is disclosed in Japanese Patent No. 531 (see FIG. 5).

(発明が解決しようとする課題) 前記公知技術では燃焼空気を高温の燃焼ガスとの間で熱
交換して予熱し、これを蒸発筒の小径部近傍に穿設した
複数個の噴出ノズルに向は噴出させ、その吸引作用によ
り燃焼ガスの再循環を行なわせるようにしたので、燃焼
量の変化にともなう再循環ガス量の変動による影響を受
けることがすくなく、広い範囲で蒸発燃焼が行なわれる
こと、また、燃焼筒内は1300℃と比較的高温である
ため金属材料は熱ヒズミを生じやすいが、構造が比較的
簡単でかつ燃焼用空気による冷却作用のため、このよう
なトラブルの発生がさけられること。
(Problems to be Solved by the Invention) In the above-mentioned known technology, combustion air is preheated by heat exchange with high-temperature combustion gas, and then directed to a plurality of jet nozzles drilled near the small diameter part of the evaporator tube. Since the combustion gas is ejected and its suction action recirculates the combustion gas, it is less affected by fluctuations in the amount of recirculated gas due to changes in the amount of combustion, and evaporative combustion can occur over a wide range. Also, since the temperature inside the combustion cylinder is relatively high at 1,300°C, metal materials are prone to thermal distortion, but because the structure is relatively simple and the combustion air has a cooling effect, such troubles can be avoided. To be able to do it.

あるいは又還元燃焼でも煤の発生がないこと等の効果が
ある。
Alternatively, reduction combustion also has the effect of not producing soot.

本発明はこれをさらに改良し、低NOxのバーナを提供
することを目的とする。
The present invention aims to further improve this and provide a low NOx burner.

(課題を解決するための手段) 送風機に通ずるウィンドボックス内にこれと同心で先端
をノズル吹出部とした先細円錐状の仕切壁を設け、該仕
切壁の中心部に液体燃料の霧化ノズル及び点火電極を配
し、又前記仕切壁のノズル吹出部を囲繞して気化筒を、
さらに該気化筒の外側に燃焼筒を、さらにその外側に外
筒を夫々同心状に配設し、前記燃焼筒と気化筒はノズル
吹出部の近傍で接線方向通路を設けて燃焼空気の一部を
導入可能とし、又前記気化筒と燃焼筒間の環状空間をノ
ズル吹出部の外側に連通させ、かつ前記燃焼筒の先端部
を縮径して(縮径比は特公平2−32531よりも少く
し燃焼ガスの炉内圧を下げ燃焼ガスの燃焼筒内の滞留時
間を短くして滞留時間を少<L、NOxの生成を少くし
た)先端絞り部を形成して燃焼ガスを還流可能とし、燃
焼筒の端部と外筒の端部間に環状間隙を形成して燃焼空
気の一部を吹出可能とした。
(Means for solving the problem) A tapered conical partition wall with a nozzle outlet at the tip is provided concentrically with the wind box leading to the blower, and a liquid fuel atomizing nozzle and a liquid fuel atomizing nozzle are installed in the center of the partition wall. An ignition electrode is arranged, and a vaporizing cylinder is arranged surrounding the nozzle outlet of the partition wall,
Furthermore, a combustion tube is arranged concentrically outside the vaporization tube, and an outer tube is arranged concentrically outside the vaporization tube, and the combustion tube and the vaporization tube are provided with a tangential passage in the vicinity of the nozzle outlet so that a part of the combustion air can be absorbed. In addition, the annular space between the vaporization tube and the combustion tube is communicated with the outside of the nozzle outlet, and the diameter of the tip of the combustion tube is reduced (the diameter reduction ratio is lower than that of Japanese Patent Publication No. 2-32531). (lower the furnace pressure of the combustion gas, shorten the residence time of the combustion gas in the combustion cylinder, reduce the residence time <L, reduce the generation of NOx), form a tip constriction part to enable the combustion gas to recirculate, An annular gap was formed between the end of the combustion tube and the end of the outer tube to allow some of the combustion air to be blown out.

(実施例) 図に基いて説明する。第1図で燃焼空気は送風機1から
ウィンドボックス2に送り込まれる。この燃焼空気の一
部は調節可能なダンパー3で先細円錐形に形成された仕
切壁5の外側と仕切壁5の内側のノズル室4とに分流さ
れる。ダンパー3よりノズル室4内に流入した空気はノ
ズル室4先端のノズル吹出部6から気化筒7内に吹出す
(Example) This will be explained based on the drawings. In FIG. 1, combustion air is sent from a blower 1 to a wind box 2. A part of this combustion air is divided by an adjustable damper 3 into the outside of the partition wall 5 formed in the shape of a tapered cone and into the nozzle chamber 4 inside the partition wall 5. The air flowing into the nozzle chamber 4 from the damper 3 is blown out into the vaporizing cylinder 7 from the nozzle blowing part 6 at the tip of the nozzle chamber 4.

一方燃料油は油圧ポンプ8によって昇圧され、送油管9
を通り、ノズルアダプタ10の先端に装着されたノズル
11から気化筒7内に噴霧され。
On the other hand, the pressure of fuel oil is increased by the hydraulic pump 8, and the fuel oil is increased in pressure by the hydraulic pump 8.
and is sprayed into the vaporizing tube 7 from the nozzle 11 attached to the tip of the nozzle adapter 10.

前記ノズル吹出部6から吹出された空気と混合し燃焼を
開始する。
It mixes with the air blown out from the nozzle blowing part 6 and starts combustion.

12は点火電極で、点火トランス13で発生した高圧電
気をスパークさせ、前記ノズル吹出部6から吹出された
燃料油と空気の混合した霧化混合気流に点火し燃焼させ
る。
Reference numeral 12 denotes an ignition electrode that sparks high-voltage electricity generated by the ignition transformer 13 to ignite and burn the atomized air mixture of fuel oil and air blown out from the nozzle outlet 6.

霧化混合気流は円筒状をした気化筒7を通過し、急速に
蒸発・気化し、気化筒7と同心でこれを取巻く燃焼筒1
4内で燃焼する。この燃焼ガスは膨張し、さらに燃焼筒
14の先端絞り部15の存在に影響されて、気化筒7と
燃焼筒14間の環状空間16を逆流しく矢印18)、ノ
ズル吹出部6を構成する円錐状の仕切壁5の外側部17
へ還流する。その還流量は略70%である。
The atomized mixture air flow passes through the cylindrical vaporization tube 7, where it rapidly evaporates and vaporizes, and then passes through the combustion tube 1, which is concentric with the vaporization tube 7 and surrounds it.
Burns within 4. This combustion gas expands, and is further influenced by the presence of the end constriction part 15 of the combustion tube 14, and flows backward through the annular space 16 between the vaporization tube 7 and the combustion tube 14 (arrow 18), and the conical gas constituting the nozzle outlet 6. The outer part 17 of the partition wall 5
Reflux to. The amount of reflux is approximately 70%.

この還流ガスは環状空間16を逆流するとき、気化筒7
を外側から加熱するので、気化筒7は燃焼開始後的0.
5秒で約600℃となり、霧化混合気流の蒸発気化をさ
らに促進し、約3秒以内に1150℃となり、定常燃焼
状態となる。
When this reflux gas flows back through the annular space 16, it
Since the gas is heated from the outside, the vaporizer cylinder 7 is heated to 0.000 mA after the start of combustion.
The temperature reaches approximately 600° C. in 5 seconds, further promoting evaporation of the atomized air mixture, and the temperature reaches 1150° C. within approximately 3 seconds, resulting in a steady combustion state.

燃焼空気の一部は第2図に示す如く燃焼筒14から気化
筒7に向けて切線方向に設けた通路19から流入しく符
号20)、気化筒7の内周縁に薄、膜の高速旋回流21
を形成する。この高速旋回流21はノズル吹出部6から
噴出する噴霧混合気流が気化筒7の内面に衝突して気化
筒7の温度が低いスタート時には液滴となるのを防止す
ると共に、ダンパー3よりノズル吹出部6に流入する空
気流速を確実安定した点火条件である15m/s以下に
する為燃焼に必要な空気量を通路19より追加する為の
ものである。
As shown in FIG. 2, a part of the combustion air flows in from the passage 19 provided in the tangential direction from the combustion tube 14 to the vaporization tube 7 (reference numeral 20), and forms a thin, high-speed swirling flow of a film on the inner peripheral edge of the vaporization tube 7. 21
form. This high-speed swirling flow 21 prevents the atomized mixed air flow ejected from the nozzle blowout section 6 from colliding with the inner surface of the vaporization tube 7 and turning into droplets at the start when the temperature of the vaporization tube 7 is low, and also prevents the nozzle blowout from the damper 3. This is to add the amount of air necessary for combustion from the passage 19 in order to keep the air flow velocity flowing into the section 6 below 15 m/s, which is a stable ignition condition.

なお、燃焼f1114内での燃焼は還元燃焼(酸欠燃焼
)で、空気比即ち。
Note that the combustion in the combustion f1114 is reduction combustion (oxygen-deficient combustion), and the air ratio is.

は0.8で、燃焼筒14内は煤の発生し易い状態にある
。この煤の発生を抑制する為、蒸発・気化によって混合
気流内の油粒子の微粒化(5〜20μ)を促進し、青炎
燃焼↓こよって燃焼筒14内の温度を1250℃以下に
保ってNOxの発生を防止している。
is 0.8, and the inside of the combustion tube 14 is in a state where soot is likely to be generated. In order to suppress the generation of soot, evaporation and vaporization promote the atomization of oil particles (5 to 20μ) in the air mixture flow, resulting in blue flame combustion↓, thus keeping the temperature inside the combustion tube 14 below 1250℃. Prevents the generation of NOx.

又燃焼筒14の先端絞り部15より炉内に噴出する還元
燃焼炎は外筒22と燃焼筒14の環状間隙23を通過し
て燃焼筒14の熱を吸収し乍ら外筒22と燃焼筒14間
の環状間隙24より噴出する空気流と急速に混合し完全
に燃焼する。この場合環状間隙24は理論燃焼空気10
0%として、最少限ノズル吹出部6より60%、通路1
9より20%、環状間隙24より30%になるよう作ら
れ、高速度で方向性のある空気流が、先端絞り部15よ
りの還元燃焼炎の内部まで到達するようになっている。
Further, the reducing combustion flame ejected into the furnace from the end constriction part 15 of the combustion tube 14 passes through the annular gap 23 between the outer tube 22 and the combustion tube 14 and absorbs the heat of the combustion tube 14. It mixes rapidly with the air flow ejected from the annular gap 24 between the fuel cells 14 and burns completely. In this case, the annular gap 24 is filled with theoretical combustion air 10
0%, the minimum is 60% from the nozzle blowing part 6, passage 1
9 and 30% from the annular gap 24, so that a high-velocity, directional air flow reaches the inside of the reducing combustion flame from the tip constriction part 15.

このため、還元燃焼炎は極めて短時間で酸化され燃焼を
完結する。
Therefore, the reduction combustion flame is oxidized and combustion is completed in an extremely short time.

なお燃焼量がIOQ/h以下の小型バーナでは接線方向
通路19の加工は至難であるため、第3図及び第4図に
示すようにノズル吹出部6の周辺に直径1.51程度の
小孔25を8ヶ以上設け、こ1から空気を噴出するよう
にした。この場合には気化筒7の内面に旋回流は出来な
いが、油粒子の液滴化、カーボン(煤)の生成を防ぐこ
とができる。
In addition, since it is extremely difficult to form the tangential passage 19 in a small burner with a combustion rate of less than IOQ/h, a small hole with a diameter of about 1.51 mm is formed around the nozzle outlet 6 as shown in FIGS. 3 and 4. Eight or more units 25 were installed, and air was blown out from each unit. In this case, although a swirling flow cannot be generated on the inner surface of the vaporizing cylinder 7, it is possible to prevent oil particles from turning into droplets and from generating carbon (soot).

(効果) 気化筒と燃焼筒間の環状空間よりの燃焼ガス再循環によ
る蒸発気化燃焼によって安定した還元燃焼域を構成し、
該還元燃焼域での還元燃焼炎を極めて短時間に酸化燃焼
することができるようにしたので、NOxの発生を大巾
に抑制することが可能となった。
(Effect) Constructs a stable reduction combustion zone through evaporative combustion due to recirculation of combustion gas from the annular space between the vaporization tube and the combustion tube,
Since the reductive combustion flame in the reductive combustion zone can be oxidized and burned in an extremely short time, it has become possible to greatly suppress the generation of NOx.

又気化筒と燃焼筒間に接線方向通路を設け、ここから渦
巻空気流を気化筒内に送入できるようにしたので、気化
筒内面に空気流の薄膜を構成して混合気流の液滴化、カ
ーボン生成を防止することが可能となり、還元燃焼域で
も安定した燃焼の可能な2段燃焼方式の低N Oxバー
ナを提供できる。
In addition, a tangential passage is provided between the vaporization cylinder and the combustion cylinder, from which a swirling air flow can be sent into the vaporization cylinder, so that a thin film of air flow is formed on the inner surface of the vaporization cylinder, and the mixture flow is reduced to droplets. This makes it possible to prevent carbon generation and to provide a two-stage combustion type low NOx burner that is capable of stable combustion even in the reductive combustion range.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の低NOxバーナの断面図。 第2図は第1図の■−■部縮少断面図。 第3図は小型バーナにおけるノズル吹出部周辺の構成を
示す断面図。 第4図は第3図のrV−IV矢視断面図。 第5図は公知バーナの断面図。 図において; 1 送風機     2 ウィンドボックス3 ダンパ
ー     4 ノズル室 5 仕切壁     6 ノズル吹出部7 気化筒  
    8 油圧ポンプ9 送油管     10  
ノズルアダプタ11  ノズル     12  点火
電極13  点火トランス  14  燃焼筒15  
先端絞り部   16  環状空間17(仕切壁の)外
側部19  通路 21  高速旋回流   22  外筒23  間隙 
     24  環状間隙25  小孔 以上
FIG. 1 is a sectional view of the low NOx burner of the present invention. FIG. 2 is a reduced cross-sectional view of the section ■-■ in FIG. 1. FIG. 3 is a sectional view showing the configuration around the nozzle blowing part in a small burner. FIG. 4 is a sectional view taken along the line rV-IV in FIG. 3. FIG. 5 is a sectional view of a known burner. In the figure: 1 blower 2 wind box 3 damper 4 nozzle chamber 5 partition wall 6 nozzle outlet 7 vaporizer tube
8 Hydraulic pump 9 Oil feed pipe 10
Nozzle adapter 11 Nozzle 12 Ignition electrode 13 Ignition transformer 14 Combustion tube 15
Tip throttle part 16 Annular space 17 (partition wall) outer part 19 Passage 21 High-speed swirling flow 22 Outer cylinder 23 Gap
24 Annular gap 25 Small hole or more

Claims (1)

【特許請求の範囲】[Claims]  送風機(1)に通ずるウインドボックス(2)内にこ
れと同心で先端をノズル吹出部(6)とした先細円錐状
の仕切壁(5)を設け、該仕切壁(5)の中心部に液体
燃料の霧化ノズル(11)及び点火電極(12)を配し
、又前記仕切壁(5)のノズル吹出部(6)を囲繞して
気化筒(7)を、さらに該気化筒の外側に燃焼筒(14
)を、さらにその外側に外筒(22)を夫々同心状に配
設し、前記燃焼筒(14)と気化筒(7)はノズル吹出
部(6)の近傍で接線方向通路(19)を設けて燃焼空
気の一部を導入可能とし、又前記気化筒(7)と燃焼筒
(14)間の環状空間(16)をノズル吹出部(6)の
外側に連通させ、かつ前記燃焼筒(14)の先端部を縮
径して先端絞り部(15)を形成して燃焼ガスを還流可
能とし、燃焼筒(14)の端部と外筒(22)の端部間
に環状間隙(24)を形成して燃焼空気の一部を吹出可
能としたことを特徴とする低NO_xバーナ。
A tapered conical partition wall (5) with a nozzle outlet (6) at the tip is installed concentrically within the wind box (2) leading to the blower (1), and the liquid is placed in the center of the partition wall (5). A fuel atomizing nozzle (11) and an ignition electrode (12) are disposed, and a vaporizing tube (7) is provided surrounding the nozzle blowout part (6) of the partition wall (5), and a vaporizing tube (7) is provided outside the vaporizing tube. Combustion cylinder (14
), and an outer cylinder (22) is arranged concentrically on the outside thereof, and the combustion cylinder (14) and the vaporization cylinder (7) have a tangential passage (19) in the vicinity of the nozzle outlet (6). The annular space (16) between the vaporization tube (7) and the combustion tube (14) is communicated with the outside of the nozzle outlet (6), and the combustion tube ( The diameter of the tip of the combustion tube (14) is reduced to form a tip constriction (15) to enable combustion gas to be recirculated, and an annular gap (24) is formed between the end of the combustion tube (14) and the end of the outer tube (22). ) so that part of the combustion air can be blown out.
JP2279123A 1990-10-19 1990-10-19 Low NOx burner Expired - Fee Related JP2561382B2 (en)

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Application Number Priority Date Filing Date Title
JP2279123A JP2561382B2 (en) 1990-10-19 1990-10-19 Low NOx burner

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JPH04155107A true JPH04155107A (en) 1992-05-28
JP2561382B2 JP2561382B2 (en) 1996-12-04

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07103426A (en) * 1993-10-05 1995-04-18 Natl Aerospace Lab Burner capable of reducing emission of air contamination components
CN112696657A (en) * 2020-12-01 2021-04-23 北方联合电力有限责任公司包头第一热电厂 Boiler blowing-out control system
WO2023053605A1 (en) * 2021-09-30 2023-04-06 三菱重工パワーインダストリー株式会社 Gas burner and combustion facility

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200116A (en) * 1983-04-27 1984-11-13 Sanyo Electric Co Ltd Liquid fuel combustion device
JPH0232531A (en) * 1988-07-22 1990-02-02 Mitsubishi Electric Corp Semiconductor processing equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200116A (en) * 1983-04-27 1984-11-13 Sanyo Electric Co Ltd Liquid fuel combustion device
JPH0232531A (en) * 1988-07-22 1990-02-02 Mitsubishi Electric Corp Semiconductor processing equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07103426A (en) * 1993-10-05 1995-04-18 Natl Aerospace Lab Burner capable of reducing emission of air contamination components
CN112696657A (en) * 2020-12-01 2021-04-23 北方联合电力有限责任公司包头第一热电厂 Boiler blowing-out control system
WO2023053605A1 (en) * 2021-09-30 2023-04-06 三菱重工パワーインダストリー株式会社 Gas burner and combustion facility
JP2023050605A (en) * 2021-09-30 2023-04-11 三菱重工パワーインダストリー株式会社 Gas burner and combustion facility

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