JPH04155160A - liquid helium depressurizer - Google Patents

liquid helium depressurizer

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Publication number
JPH04155160A
JPH04155160A JP27632990A JP27632990A JPH04155160A JP H04155160 A JPH04155160 A JP H04155160A JP 27632990 A JP27632990 A JP 27632990A JP 27632990 A JP27632990 A JP 27632990A JP H04155160 A JPH04155160 A JP H04155160A
Authority
JP
Japan
Prior art keywords
helium
liquid helium
liquid
liquefied
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27632990A
Other languages
Japanese (ja)
Inventor
Susumu Harada
進 原田
Hironobu Ueda
博信 上田
Kozo Matsumoto
松本 孝三
Kazuo Okamoto
和夫 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP27632990A priority Critical patent/JPH04155160A/en
Publication of JPH04155160A publication Critical patent/JPH04155160A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent the entrainment of liquefied helium on the suction side of a pressure-reducing pump, by a method wherein for vaporized helium gas, a baffle plate is provided at the outlet of a liquid helium reserver. CONSTITUTION:Herium gas in low temperature and high pressure, which is fully cooled in a herium-refrigerating machine 1, passes a liquefing line 2 and expands through a valve 3 for Joule-Thomson cooling effect. After that, a part thereof is turned into liquefied helium, is decelerated through a divergent pipe 4 and is stored as liquid helium 5. On the other hand, helium gas evaporated by the heat load of a superconductive magnet 7 placed in a liquid helium reserver 6, passes a cylindrical baffle plate 8, is properly compressed by a pressure-reducing pump 9 and is returned to the suction side of the helium-refrigerating machine 1. When a liquid level is low in the time of the supply of the liquid helium, the helium gas in low temperature entrains the liquefied helium and they are scattered. In this case, since a divergent pipe 4 is provided at the outlet part of the liquefying line 2, the liquefied helium is not directly entrained on the suction side of the pressure-reducing pump 9. In the case where the liquid helium is sufficiently exists, since the liquefied helium is interrupted by the baffle plate 8, such a matter as the liquefied helium directly enters the suction side of the pressure-reducing pump 9 does not occur.

Description

【発明の詳細な説明】 〔j!業上の利用分野〕 本発明は液体ヘリウム減圧装置に係り、特にへリウム液
に冷凍装置によって生成した液体ヘリ=ムを減圧するの
に好適な液体ヘリウム減圧1i11+:関するものであ
る。
[Detailed description of the invention] [j! TECHNICAL FIELD The present invention relates to a liquid helium decompression device, and particularly to a liquid helium depressurization device 1i11+ suitable for depressurizing a liquid helium generated by a refrigeration device in a helium liquid.

〔従来の技術〕[Conventional technology]

従来の装置は、低温工学、Mol 24.Al (19
89)のP29〜P35に記載されているフC−シート
のように、液体ヘリウム槽の入口に火元ヘリウム冷凍機
からの液体ヘリウム供給配管、−兄ヘリウムガス出口に
減圧ポンプが取付けられた構成となっている。
Conventional equipment is cryogenic, Mol 24. Al (19
As shown in the FuC-sheet described on pages 29 to 35 of 89), there is a configuration in which liquid helium supply piping from the helium refrigerator at the source is installed at the inlet of the liquid helium tank, and a decompression pump is installed at the helium gas outlet. It becomes.

〔発明が解決しようとするms〕[MS that the invention attempts to solve]

上記従来技術は液化ヘリウムの液体ヘリウムIへの供給
方法について配慮されておらず、また、減圧ポンプの吸
込側に液化ヘリウムが混入して、吸込圧力が変動する問
題があった。
The above-mentioned conventional technology does not take into account the method of supplying liquefied helium to liquid helium I, and there is also the problem that liquefied helium gets mixed into the suction side of the pressure reducing pump, causing the suction pressure to fluctuate.

本父明の目的は、減圧ポンプの吸込側に液化ヘリウムが
混入しない構4な提供することであり、減圧ポンプの信
頼性を向上するものである。
An object of the present invention is to provide a structure in which liquefied helium does not get mixed into the suction side of a vacuum pump, thereby improving the reliability of the vacuum pump.

〔課題を解決するための手段〕 上記目的を達成するために、液化ヘリウムが濡ン   
圧ポンプの吸込側に飛散しても、減圧°ボ/ブの吸込口
に円筒状のバブフル板を設置して、[Wc液化ヘリウム
が吸込まれないようにしたものである。
[Means for solving the problem] In order to achieve the above purpose, liquefied helium is
A cylindrical bubble plate is installed at the suction port of the depressurizing valve to prevent liquefied helium from being sucked in even if it is scattered on the suction side of the pressure pump.

また、上記目的を達成するために、液化ヘリウムのヘリ
ウム槽入口部に拡がり管を設けて減圧ポンプの吸込側に
液化ヘリウムが飛散するのを防止したものである。
Furthermore, in order to achieve the above object, an expansion pipe is provided at the inlet of the helium tank for liquefied helium to prevent the liquefied helium from scattering to the suction side of the pressure reducing pump.

〔作   用〕[For production]

液体ヘリウム槽の減圧ポンプ吸込口に円筒状のバブフル
板が設置されているので、液体ヘリウムが飛散しても液
化ヘリウムの混入を防止すること1  ができ、減圧ポ
ンプの吸込圧力は変動することがない。
Since a cylindrical bubble plate is installed at the vacuum pump suction port of the liquid helium tank, it is possible to prevent liquefied helium from getting mixed in even if liquid helium scatters, and the suction pressure of the vacuum pump can be prevented from fluctuating. do not have.

また、液化ヘリウムが液体ヘリウム槽に供給されるとき
に液体ヘリウム入口には拡がり管を設けであるので液化
ヘリウムはゆるやかに減圧されながら液体ヘリウム槽に
貯えられていく。したがって減圧ポンプの吸込側に液化
ヘリウムが飛散することがないので、減圧ポンプの吸込
圧力に変動は生じず、減圧ポンプの軸受等に負荷変動は
生じず安定した回転を行うことができる。
Further, when liquefied helium is supplied to the liquid helium tank, since a expansion tube is provided at the liquid helium inlet, the liquefied helium is stored in the liquid helium tank while being gradually depressurized. Therefore, since liquefied helium is not scattered on the suction side of the decompression pump, the suction pressure of the decompression pump does not fluctuate, and the bearings of the decompression pump do not suffer from load fluctuations, allowing stable rotation.

〔実 施 例〕〔Example〕

以下1本発明の一実施例を第1図により説明する。 An embodiment of the present invention will be described below with reference to FIG.

定常状態では、ヘリウム冷凍!!11は圧縮機と複数の
熱交換器および複数の寒冷発生手段(例えば膨張ターピ
ノ)から構成(図示省略)されており、ヘリウム冷fi
efで十分冷却された低温・高圧のヘリウムガスは液化
ライノ2を通ってジュール・トムツノ弁3でI11侵し
て一部は液化ヘリウムになり、液体ヘリウム槽6に設け
た拡がり管4でゆるやかに#C通され液体ヘリウム5と
して貯蔵される。
In steady state, helium refrigeration! ! Reference numeral 11 is composed of a compressor, a plurality of heat exchangers, and a plurality of cold generating means (for example, an expansion terpino) (not shown).
The low-temperature, high-pressure helium gas that has been sufficiently cooled by the ef passes through the liquefaction rhino 2 and erodes into I11 at the Joule-Tomtsuno valve 3, and a portion of it becomes liquefied helium. C and stored as liquid helium 5.

一方、液体ヘリウム槽6に設置された超電導マグネブト
7の熱負荷により蒸発したヘリウムガスは円筒状のパブ
フルプレート8を通り、遠心式の減圧ポンプ9(構造は
第2凶で説明する。)により適当に圧縮されてヘリウム
冷r:JJL機1の吸込側に戻るサイクルをs&:して
いる。
On the other hand, helium gas evaporated by the heat load of the superconducting magnet 7 installed in the liquid helium tank 6 passes through a cylindrical pub full plate 8 and is pumped by a centrifugal pressure reducing pump 9 (the structure of which will be explained in the second section). The helium is appropriately compressed and returned to the suction side of the JJL machine 1 in a cycle of s&:.

以上の説明は熱負荷が定常状態の場合であるが、液体ヘ
リウム供給時の場合(液面が低いとき)は、液体ヘリウ
ム槽6内は液化ヘリウムと低温ヘリウムガスが同伴し飛
散している状態である。この場合、本実施例では液化ラ
イノ2の出口部に拡がり管4が設けであるので、1!接
液化ヘリウムが減圧ポンプ9の吸込側に同伴されること
がない。また、液体ヘリウムが十分4こある場合に、超
電導マグネットフの熱負荷が大き啜なり、液面から液化
ヘリウムを同伴して減圧ポンプ9の吸込側Iこ混入する
ような状!1番こおいても円筒状のバッフルプレート8
で邪魔されて、!接液化ヘリウムが減圧ポンプ9の吸込
側に入る二とがない。
The above explanation is for the case where the heat load is in a steady state, but when liquid helium is being supplied (when the liquid level is low), the liquid helium tank 6 is in a state where liquefied helium and low-temperature helium gas are entrained and scattered. It is. In this case, in this embodiment, the expansion pipe 4 is provided at the outlet of the liquefier rhino 2, so 1! Wetted helium is not entrained into the suction side of the vacuum pump 9. Also, when there is enough liquid helium, the heat load on the superconducting magnet becomes large, and liquefied helium is entrained from the liquid surface and mixed into the suction side of the decompression pump 9! The most cylindrical baffle plate 8
I was disturbed by that! There is no way for wetted helium to enter the suction side of the vacuum pump 9.

本実施例によれば、液体ヘリウム供給時あるいはヘリウ
ム槽への熱負荷が大き呪なった場合でも、液化ヘリウム
が減圧ポンプの吸込側に混入することがない。したがっ
て、減圧ポンプの吸入側の圧力は変動することがなく、
減圧ポンプの軸受に負荷変動は発生せず安定回転を行う
効果があり、ひいては冷凍機を含め全体ンステムの傷顆
性向上を図れる効果がある。
According to this embodiment, even when liquid helium is supplied or when the heat load on the helium tank becomes large, liquefied helium will not be mixed into the suction side of the pressure reducing pump. Therefore, the pressure on the suction side of the decompression pump does not fluctuate.
This has the effect of stably rotating the bearings of the decompression pump without causing load fluctuations, which in turn has the effect of improving the damage resistance of the entire system, including the refrigerator.

第2図は第1図の減圧ポンプの構造を示したものである
。高周波モータ(モータロータ14およびモータステー
タ15)を収納した軸受部(ジャーナル軸受13.スラ
スト軸受12)は常温側に配置し、インペラー16が低
温側にある。■は動カケープルのコネクターであり通常
インバータに接続されている。本実施役では動圧の気体
軸受を採用しているので油などによるヘリウムの汚染は
ない。ガスの流れはインペラー16が高速回転すると、
減圧ポンプの吸込部分17より低温のヘリウムガスが吸
込まれ、イノベラ−で断熱圧縮されて吐出部分用より他
の構成要素へ導かれる。
FIG. 2 shows the structure of the pressure reducing pump shown in FIG. 1. The bearings (journal bearing 13, thrust bearing 12) housing the high-frequency motor (motor rotor 14 and motor stator 15) are placed on the room temperature side, and the impeller 16 is placed on the low temperature side. ■ is the connector of the dynamic cable and is usually connected to the inverter. This implementation unit uses a dynamic pressure gas bearing, so there is no helium contamination with oil or the like. When the impeller 16 rotates at high speed, the gas flow is
Low-temperature helium gas is sucked in from the suction section 17 of the vacuum pump, is adiabatically compressed by the innovator, and is led to other components from the discharge section.

したがって本実施例のような気体軸受を用いた減圧ポン
プの構造では液化ヘリウムが吸込部に混入しその途中で
気化した場合には吸込圧力は10倍(4に、  lat
mのヘリウムガスと液体ヘリウムの密度は10倍程度異
なる。)となり、ガス軸受の負荷能力を超えた圧力変動
を生じ、その結果、軸受の焼付きを生じることになる。
Therefore, in the structure of a vacuum pump using a gas bearing as in this embodiment, if liquefied helium gets into the suction part and vaporizes during the process, the suction pressure will increase by 10 times (4, lat
The densities of helium gas and liquid helium at m are about 10 times different. ), causing pressure fluctuations that exceed the load capacity of the gas bearing, resulting in seizure of the bearing.

第3図から第6図には他の実施例を示す。第1図と同じ
構成要素は同一符号で示すとともに説明を省略する。
Other embodiments are shown in FIGS. 3 to 6. Components that are the same as those in FIG. 1 are designated by the same reference numerals and their explanations will be omitted.

第3図の実施例では、円筒状のバッフルプレート8の中
に円板状のバッフルプレート8′が設けられている。し
たがって、ヘリウムガスに同伴された液化ヘリウムがパ
ブフルプレート8の開口IgA部より入ってきても第2
のバッフルプレート8′に衝突して1jul液化ヘリウ
ムが減圧ポンプ9の吸込側に入ることがない。本実施例
によれば、液体ヘリウム楕円が液化ヘリウムとヘリウム
ガスが同伴されているような状態でも減圧ポンプの吸込
側に入ることがない。それゆえ減圧ポンプの吸込側の圧
力は変動することがなく、安定回転を行う効果がある。
In the embodiment shown in FIG. 3, a disc-shaped baffle plate 8' is provided within a cylindrical baffle plate 8. Therefore, even if liquefied helium entrained in helium gas enters from the opening IgA of the pub full plate 8, the second
The 1 jol of liquefied helium does not collide with the baffle plate 8' and enter the suction side of the vacuum pump 9. According to this embodiment, the liquid helium ellipse does not enter the suction side of the pressure reducing pump even in a state where liquefied helium and helium gas are entrained. Therefore, the pressure on the suction side of the decompression pump does not fluctuate, resulting in stable rotation.

第4図には他の実施例を示す。本実施例では液体ヘリウ
ム槽6には液体ヘリウム4の液面を計測するための液明
計加が設けられており、設定液面よりも液面が上昇する
と制御器4から減圧ポンプ9の回転を停止できる構成と
なっている。したがって、熱負荷の減少により液体ヘリ
ウム4の量が多(なり、円筒状のバッフルプレート8が
液体へリウムに浸漬されるような状態になったときには
、減圧ポンプ9の保護のため減圧ポンプを停止するもの
である。本実施例によれば、減圧ポンプの吸込側の圧力
は変動することがなく、さらに熱負荷が減少したときに
液化ヘリウムが減圧ポンプの吸込側に入る罰に減圧ポン
プを停止することが可能であり、信頼性をさらに高める
効果がある。
FIG. 4 shows another embodiment. In this embodiment, the liquid helium tank 6 is equipped with a liquid gauge for measuring the liquid level of the liquid helium 4, and when the liquid level rises above the set liquid level, the controller 4 sends a signal to rotate the decompression pump 9. The configuration is such that it can be stopped. Therefore, when the amount of liquid helium 4 increases due to a decrease in heat load and the cylindrical baffle plate 8 becomes immersed in liquid helium, the vacuum pump is stopped to protect the vacuum pump 9. According to this embodiment, the pressure on the suction side of the decompression pump does not fluctuate, and when the heat load decreases, the decompression pump is stopped as punishment for liquefied helium entering the suction side of the decompression pump. This has the effect of further increasing reliability.

第5図に他の実施例を示す。本実施例では減圧ポンプ9
の吸込側にバッファータンク美が設けである。減圧ポン
プの吸込側に液化ヘリウムがヘリウムガスと同伴されて
混入しても、バッファータックIにより急激な圧力f動
を吸収できる。したがって、本実施例では減圧ポンプの
吸込圧力の変動を緩和できる効果があり、減圧ポンプの
信頼性を高める効果がある。
FIG. 5 shows another embodiment. In this embodiment, the pressure reducing pump 9
A buffer tank is provided on the suction side. Even if liquefied helium is entrained and mixed with helium gas on the suction side of the vacuum pump, Buffer Tac I can absorb the sudden pressure f movement. Therefore, this embodiment has the effect of alleviating fluctuations in the suction pressure of the vacuum pump, and has the effect of increasing the reliability of the vacuum pump.

第6図に他の実施例を示す。本実施例では液化ライン2
は液体ヘリウム槽6の下部に連通している。したがって
、液供給時に液化ヘリウムが直接減圧ポンプ9の吸込側
に入ることがない。本実施例によれば容易な構造で液供
給時に減圧ポンプの吸込側に液化ヘリウムが混入するの
を防止できる効果があり、減圧ポンプの吸込圧力の変動
を緩和できる効果がある。
FIG. 6 shows another embodiment. In this example, the liquefaction line 2
is in communication with the lower part of the liquid helium tank 6. Therefore, liquefied helium does not directly enter the suction side of the pressure reducing pump 9 during liquid supply. According to this embodiment, with a simple structure, it is possible to prevent liquefied helium from entering the suction side of the vacuum pump during liquid supply, and it is possible to alleviate fluctuations in the suction pressure of the vacuum pump.

〔発明の効果〕〔Effect of the invention〕

本実施例によれば、直接液化ヘリウムが減圧ポンプの吸
込側に同伴されることがない。かつ、減圧ポンプの吸込
側の圧力は変動することがなく、減圧ポンプの軸受に負
荷変動は生じることがないので、安定な回転が得られる
効果があり、ひいては冷凍機を含めて全体システムの信
頼性を向上する効果がある。
According to this embodiment, liquefied helium is not directly entrained into the suction side of the vacuum pump. In addition, the pressure on the suction side of the pressure reducing pump does not fluctuate, and there are no load fluctuations on the bearings of the pressure reducing pump, which has the effect of providing stable rotation, which in turn increases the reliability of the entire system, including the refrigerator. It has the effect of improving sex.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の液化ヘリウム減圧5kil
を示すフロー図、第2図は本発明の減圧ポンプの構造図
、第3図ないし東6図は本発明の他の実施例の液化ヘリ
ウム減圧装置を示すフロー図である。 6・・・・・・拡がり管、6・・・・・・液体ヘリウム
槽、8・・・パブフルプレート、8′・・曲ヒツフルプ
レート、9・・・・・・減圧ポンプ、I・・・・・液面
針、乙・・・・・・制御器、I・・・・・・バプファタ
ンク 代理人 弁理士  小 川 勝 男 ゝく オ1図 第5図 オ6 図
Figure 1 shows an embodiment of the present invention in which 5 kilos of liquefied helium is depressurized.
FIG. 2 is a structural diagram of a pressure reducing pump according to the present invention, and FIGS. 3 to 6 are flow diagrams showing liquefied helium pressure reducing apparatuses according to other embodiments of the present invention. 6... Expansion tube, 6... Liquid helium tank, 8... Pub full plate, 8'... Bent full plate, 9... Decompression pump, I... ...Liquid level needle, B...Controller, I...Baphwatank representative Patent attorney Masao Ogawa Figure 1 Figure 5 Figure 6

Claims (1)

【特許請求の範囲】 1、ヘリウム液化冷凍装置の高圧側の最終段に設けたヘ
リウムガスを液化させるためのジュール・トムソン膨張
弁と、前記ジュール・トムソン膨張弁の下流側に配置し
た液体ヘリウムを貯蔵する液体ヘリウム槽と、前記液体
ヘリウム槽内の熱負荷により蒸発した前記ヘリウムガス
を減圧して前記ヘリウム液化冷凍装置の低圧側戻り配置
に排気する減圧ポンプとから成る冷凍装置において、前
記蒸発ヘリウムガスの前記液体ヘリウム槽の出口にバッ
フル板を設けたことを特徴とする液体ヘリウム減圧装置
。 2、前記減圧ポンプの吸込側にバッファータンクを設け
た特許請求範囲第1項記載の液体ヘリウム減圧装置。 3、前記液体ヘリウム槽の液面計により前記減圧ポンプ
の回転を制御する特許請求範囲第1項記4、前記液体ヘ
リウム槽の液化ヘリウム入口部分に拡がり管を設けた特
許請求の範囲第1項記載の液体ヘリウム減圧装置。 5、前記液化ヘリウムの入口部分を前記液体ヘリウム槽
の下部に設けた特許請求の範囲第1項記載の液体ヘリウ
ム減圧装置。 6、ヘリウム液化冷凍装置の高圧側の最終段に設けたヘ
リウムガスを液化させるためのジュール・トムソン膨張
弁と、前記ジュール・トムソン膨張弁の下流側に配慮し
た液体ヘリウムを貯蔵する液体ヘリウム槽と、前記液体
ヘリウム槽内の熱負荷により蒸発した前記ヘリウムガス
を減圧して前記ヘリウム液化冷凍装置の低圧側戻り配管
に排気する減圧ポンプとから成る冷凍装置において、前
記液体ヘリウム槽の液化ヘリウム入口部分に拡がり管を
設けたことを特徴とする液体ヘリウム減圧装置。
[Claims] 1. A Joule-Thomson expansion valve for liquefying helium gas provided at the final stage on the high-pressure side of a helium liquefaction refrigeration system, and a liquefied helium expansion valve disposed downstream of the Joule-Thomson expansion valve. A refrigeration system comprising a liquid helium tank for storing the helium gas, and a decompression pump that reduces the pressure of the helium gas evaporated due to heat load in the liquid helium tank and exhausts it to a low-pressure side return arrangement of the helium liquefaction refrigeration system. A liquid helium decompression device characterized in that a baffle plate is provided at an outlet of the liquid helium tank for gas. 2. The liquid helium decompression device according to claim 1, wherein a buffer tank is provided on the suction side of the decompression pump. 3. The rotation of the depressurizing pump is controlled by a level gauge of the liquid helium tank, claim 1, item 4. Claim 1, wherein an expansion pipe is provided at the liquefied helium inlet of the liquid helium tank. The liquid helium decompression device described. 5. The liquid helium decompression device according to claim 1, wherein the liquefied helium inlet portion is provided at the lower part of the liquid helium tank. 6. A Joule-Thomson expansion valve for liquefying helium gas provided at the final stage on the high-pressure side of the helium liquefaction refrigeration device, and a liquid helium tank for storing liquid helium in consideration of the downstream side of the Joule-Thomson expansion valve. , a decompression pump that reduces the pressure of the helium gas evaporated due to heat load in the liquid helium tank and exhausts it to a low-pressure side return pipe of the helium liquefaction refrigeration system, the liquefied helium inlet portion of the liquid helium tank; A liquid helium decompression device characterized by having an expansion tube.
JP27632990A 1990-10-17 1990-10-17 liquid helium depressurizer Pending JPH04155160A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27632990A JPH04155160A (en) 1990-10-17 1990-10-17 liquid helium depressurizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27632990A JPH04155160A (en) 1990-10-17 1990-10-17 liquid helium depressurizer

Publications (1)

Publication Number Publication Date
JPH04155160A true JPH04155160A (en) 1992-05-28

Family

ID=17567932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27632990A Pending JPH04155160A (en) 1990-10-17 1990-10-17 liquid helium depressurizer

Country Status (1)

Country Link
JP (1) JPH04155160A (en)

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