JPH04157748A - Panel device for operation and monitoring at semiconductor treatment device - Google Patents

Abstract

PURPOSE:To enable needed items to be monitored and operated easily by constituting a panel for operation and monitoring which is placed within a control panel in a semiconductor treatment device with a plurality of separate touch panels having required information and then increasing the area of a panel information for displaying each information. CONSTITUTION:After transmitting a signal from bit terminals P1-P220 at 220 points for 220 signal lines to a computer 9 by signal lines Q1-Q220 and a total of 8 power supply lines Q221-Q228 (two for each of four touch panels), it is transmitted to a sequencer 10 in signal transmission system such as RS232 system (EIA standard), thus, achieving transmission with three lines of a signal line cable R1 and power supply lines R2 and R3. The signal line cable R1 is a three- core line min. and a nine-core signal line when confirming transmission and reception signal and the number of signal line scan be reduced to 5 lines min. and 11 lines max. including the power supply lines.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a semiconductor processing apparatus for manufacturing semiconductors from semiconductor wafers by thermal diffusion method. Operation of various mechanisms such as carrier stage, robot, lifting device, etc., N2,0
2. This invention relates to the improvement of an operation/monitoring panel device used for operating/monitoring various information such as H2 gas pressure.

[Prior Art] A conventional operation/monitoring panel device used for this type of application was constructed as shown in FIG.

That is, 1 is a semiconductor processing device, and 2 is a control panel for operating and monitoring the device.

3 is a panel for displaying gas pressure, etc., N 2.02°H,
, H(1', HP, etc.) is used to monitor whether the pressures of various gases such as HP are at predetermined values.

4 is a panel for displaying operations, which is included in various mechanisms such as carry stages and robots in semiconductor processing equipment.

This is a monitoring panel that shows which mechanism is currently operating.

Reference numeral 5 denotes a cassette lead display panel, which is an operation panel for giving instructions on how to set and operate semiconductor wafers in the semiconductor processing apparatus under what conditions.

Reference numeral 6 denotes a manual operation panel, which is primarily used for maintenance and inspection.

Reference numeral 7 denotes a sequencer, which processes necessary signals between the panels 3 to 6 described above.

In addition, 81 to S correspond to each panel 3 to 6 and the sequencer, respectively.
This is a signal transmission line provided between 7.

[Problems to be Solved by the Invention] In the conventional system, the panels provided for performing various operations and monitoring as described above are push-button type panels each provided independently of the control panel 2. Therefore, it was necessary to provide a signal line for each information item of each element, and as a result, a large number of signal lines were required.

That is, there are 40 lines on the display panel 3 for displaying gas pressure, etc.

The operation display panel 4 has 30 lines, the cassette lead display panel 5 has 50 lines, and the manual operation panel 6 has 100 lines.
This required a total of 228 signal lines, including 8 power lines.

Therefore, in the conventional system, 228 signal lines were housed in the control panel 2, which required time for wiring and assembly, and also complicated maintenance and inspection. .

In addition, in the conventional system, multiple panels were placed on the control panel at the same time, so the area of each panel was inevitably limited, and it was not possible to make it too large, making it difficult to operate and operate.
Another drawback was that it was inconvenient for monitoring.

SUMMARY OF THE INVENTION An object of the present invention is to provide a panel device for operating and monitoring a semiconductor processing device, which solves the above-mentioned problems of the conventional device.

[Means for Solving the Problems] The present invention provides an operation and monitoring system for semiconductor processing equipment in which an operation/monitoring panel disposed in a control panel of the semiconductor processing equipment is configured with a plurality of separate touch panels each having required information. -Relating to monitoring panel devices.

In this case, the signal lines and power lines of each of the touch panels are simplified and transmitted to the sequencer by a computer using the RS232C communication method, and the panel device is used for operation and monitoring in semiconductor processing equipment. is desirable.

[Example] The present invention will be specifically described below based on an example shown in FIGS. 1 to 6.

FIG. 1 shows a control panel 2 of a conventional semiconductor processing apparatus 1 shown in FIG. 7.
This is a control panel 2A of a semiconductor processing apparatus IA corresponding to the above.

In the figure, 28 is a touch panel for demonstration purposes.

The same panel includes areas 1 to 4 for switching operations to various panels to be described later.

9 is a computer (hereinafter abbreviated as CPU); 10 is a sequencer; a touch panel 11 shown in FIGS. 2 to 5;
, 12.13 and 14 are touch panels for displaying gas pressure, etc., displaying operation, 2 for displaying cassette leads, and 2 touch panels for manual operation, which have functions equivalent to the conventional panels 3, 4.5 and 6. In addition.

O in each figure is a lamp for monitoring and display.

Switching between these touch panels 11 to 14 is performed by selecting 1 to 4 on the demonstration panel 8 or the switching operation area provided on each of the touch panels 11 to 14. ing.

Here, each area K l + K 2 + K s and 4
It is assumed that the touch panels 11, 12, 13, and 14 correspond to each other.

By the way, the greatest object of the present invention is to reduce the number of signal lines as mentioned above, and for this purpose the following structural improvements have been made.

Figure 6 is a connection diagram for explaining this.

220 bit terminals P1 for 220 signal lines
P2□. The signal from the signal line Q, ~Q 22° and two for each of the four touch panels, making a total of 8 power lines Q 2
21~Q22. After transmitting to CPU9 by
By transmitting this to the sequencer 10 using a signal transmission method such as the R3232 method (EIA standard), it is possible to transmit it using three cables, the signal line cable R2 and the power line R2+R2, as shown in the figure.

In addition, the signal line cable R3 has a minimum of 3 cores, and when checking transmission and reception, it has 9 cores, so if you add the number of power supply wires, the minimum is 5 signal wires and the maximum is 11 signal wires. This means that it has been possible to reduce the number of

The reason why this is possible is as shown in FIG. 6 (b) when the R3232C communication method is applied.

The signals transmitted from each terminal P1 to P22° to the CPU 9 are read while being scanned by 220 bits built into the CPUQ, and the necessary connections are made within the CPU 9 using cross cables to connect the signal lines. This is because it is simplified and can be transmitted.

[Operation] In the above configuration, the operation/monitoring panel is operated as follows.

First, when the power switch (not shown) is turned on, the demonstration panel 8 appears on the control panel as shown in FIG.

In this state, for example, by touching area 1, a touch panel 11 for displaying gas pressure, etc. shown in FIG. 2 appears above the two control panels. .

Therefore, the operator checks whether the gas pressure is at a predetermined level for each monitoring item on this panel by checking whether the monitoring lamp is blinking.

Next, by touching the area on the same panel, the touch panel 13 for cassette read operation shown in FIG.
appears. Therefore, the operator must first touch the automatic area to set the automatic mode, and then set the semiconductor wafer transfer conditions by touching the predetermined area. Start operations in a predetermined order.

Therefore, by touching the area on the panel 13 and displaying the operation display touch panel 12 shown in FIG. 3, the operator can check the blinking of each display lamp on the panel. You can check on the panel whether the operation currently in progress is a proper operation.

Finally, by touching area 4 on the same panel, a touch panel 14 for manual operation shown in FIG. 5 appears. Therefore, the operator can perform necessary maintenance and inspection using the same panel.

By the way, in the operation/monitoring panel device for a semiconductor processing apparatus according to the present invention, each type of operation/monitoring panel is composed of a plurality of separate touch panels.

Since the display is switched on the control panel, it can be installed in a relatively large area within the control panel, making it easy to monitor and operate.

In addition, the signal lines connecting each touch panel and the sequencer are transmitted via the CPU between them using the R5232C communication method, thereby greatly reducing the number of signal lines.

[Effects of the Invention] As described above, the present invention is configured such that the panel device for operation and monitoring in a semiconductor processing device is configured using a touch panel system, and the signal transmission is configured to use the RS232C communication system via the CPU.

It has the following excellent effects.

■Since the operation/monitoring panel for semiconductor processing equipment is configured with multiple touch panels for each type of touch panel, the area of the panel board for displaying various information can now be increased, making it possible to easily display necessary items. Easier to monitor and operate.

■The signal lines connecting each touch panel and the sequencer are transmitted via the CPU in the middle using the RS232C communication method, making it possible to significantly reduce the number of signal lines. (In the case of this embodiment, the number of wires in the control panel for operation and monitoring can be reduced from 228 wires to a minimum of 8 wires and a maximum of 11 wires).

Assembly time has been significantly reduced, and maintenance and inspection have become easier.

[Brief explanation of the drawing]

Figures 11!1 to 6 show an embodiment of the present invention,
Figure 1 is a front view of the operation/monitoring panel, Figures 2 to 5 are configuration diagrams of various display and operation panels such as gas pressure, and Figures 6 (a) and (b) are R5232C. FIG. 2 is a connection diagram and a characteristic diagram for explaining a communication method. Further, FIG. 7 is a front view showing the configuration of a conventional control panel for operation and monitoring. IA: Semiconductor processing equipment 2A: Control panel for operation and monitoring 8.11 to 14: Touch panel 9: CPU (computer) 10: Sequencer Applicant Shinko Electric Co., Ltd. Agent Patent attorney Haruya Saito and 2 others Figure 4 13 :Rei, 1υ-to'lmi 1, mowing 7zuHノ〒519/5!1 1mu 14;

Claims (1)

[Scope of Claims] 1. A semiconductor characterized in that an operation/monitoring panel disposed in a control panel of a semiconductor processing device is constituted by a plurality of separate touch panels each having required information. A panel device for operating and monitoring processing equipment. 2. A panel device for operation and monitoring in a semiconductor processing device according to claim 1, wherein the signal lines and power lines of each of the touch panels are simplified and transmitted to the sequencer by a computer using an RS232C communication method. .