JPH0416308U - - Google Patents
Info
- Publication number
- JPH0416308U JPH0416308U JP5775490U JP5775490U JPH0416308U JP H0416308 U JPH0416308 U JP H0416308U JP 5775490 U JP5775490 U JP 5775490U JP 5775490 U JP5775490 U JP 5775490U JP H0416308 U JPH0416308 U JP H0416308U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- holding member
- current sensor
- eddy current
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
第１図は本考案の実施例１における装置全体を
示す要部概略図、第２図は保持部材の一部を示す
側断面図、第３図は実施例２を示す要部概略図で
ある。
１……表面凹凸測定装置、２……板状体、３…
…ハウジング、４……渦電流センサー、３……開
口部、６……金属片、７……測定子、８……保持
部材。
FIG. 1 is a schematic view of the main parts showing the entire device in Example 1 of the present invention, FIG. 2 is a side sectional view showing a part of the holding member, and FIG. 3 is a schematic view of the main parts showing Example 2. . 1...Surface unevenness measuring device, 2...Plate-shaped body, 3...
... Housing, 4 ... Eddy current sensor, 3 ... Opening, 6 ... Metal piece, 7 ... Measuring head, 8 ... Holding member.
Claims (1)
あつて、ハウジングに渦電流センサーを固定し、
ハンジング下部に開口部を形成し、該開口部に保
持部材を摺動自在に設けるとともに、保持部材の
一端には渦電流センサーに近接する金属片を、他
端には絶縁性板状体に接触する測定子を設けたこ
とを特徴とする表面凹凸測定装置。 (2) ハウジングを二重構造にして管路を接続す
るとともに、該部に冷却水を通水するようにした
ことを特徴とする請求項１記載の表面凹凸測定装
置。[Claims for Utility Model Registration] (1) A device for measuring surface irregularities of an insulating plate-like body, which includes an eddy current sensor fixed to a housing,
An opening is formed in the lower part of the hanging, and a holding member is slidably provided in the opening, and a metal piece close to the eddy current sensor is placed at one end of the holding member, and a metal piece is placed in contact with an insulating plate-like member at the other end. A surface unevenness measuring device characterized by being provided with a measuring element. (2) The surface unevenness measuring device according to claim 1, wherein the housing has a double structure to which a pipe is connected and cooling water is passed through the housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5775490U JPH0416308U (en) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5775490U JPH0416308U (en) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0416308U true JPH0416308U (en) | 1992-02-10 |
Family
ID=31582755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5775490U Pending JPH0416308U (en) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416308U (en) |
-
1990
- 1990-05-31 JP JP5775490U patent/JPH0416308U/ja active Pending