JPH04167440A - Mold for semiconductor manufacturing apparatus - Google Patents

Mold for semiconductor manufacturing apparatus

Info

Publication number
JPH04167440A
JPH04167440A JP29381490A JP29381490A JPH04167440A JP H04167440 A JPH04167440 A JP H04167440A JP 29381490 A JP29381490 A JP 29381490A JP 29381490 A JP29381490 A JP 29381490A JP H04167440 A JPH04167440 A JP H04167440A
Authority
JP
Japan
Prior art keywords
mold
cull
resin
runner
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29381490A
Other languages
Japanese (ja)
Inventor
Yutaka Koyama
裕 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP29381490A priority Critical patent/JPH04167440A/en
Publication of JPH04167440A publication Critical patent/JPH04167440A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/37Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To prevent defective mold-releasing due to wear of a metal mold and to enhance the quality of a product by a method wherein a part which is provided with a cull exit part and a center runner part at a center block is formed as a division part and a wear-resistant material is used for the part. CONSTITUTION:A division part 15 is a part which is provided with a cull exit part 7 and a center runner part 8 at a center block 1. A material which is excellent in a wera-resistant property, e.g. cemented carbide, is used for the part. At this molding metal mold, the cull exit part 7 and the center runner part 8 are not worn out. As a result, when the metal mold is opened, a cull-part ejector pin 5 and a runner-part ejector pin 6 are actuated, and a resin 6 is pushed out uniformly. As a result, the resin 9 is not left at an upper-part mold, the resin 9 is not separated from a package, and a crack is not produced in the package. The metal mold is not destroyed when a molding operation is executed in a state that the resin 9 is left inside the metal mold.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、ICアセンブリ工程のモールド金型に間す
るものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a mold for an IC assembly process.

〔従来の技術〕[Conventional technology]

第4図〜第6図は従来のモールド金型の断面図で、この
図において、1はセンターブロック、2はチエイスブロ
ック、3はチエイスブロック2のランナ一部、4はセン
ターブロックlのカル部、5はカル部エジェクタービン
、6はランナ一部エジェクタービンである。7はカル出
口部、8はセンターランナー部、9は樹脂、10はゲー
ト部、11はパッケージ、12はセンターブロック、1
3はプランジャ一部、14はチャンバ一部である。
Figures 4 to 6 are cross-sectional views of conventional molding molds. In these figures, 1 is the center block, 2 is the chase block, 3 is a part of the runner of the chase block 2, and 4 is the center block l. 5 is a cull part eject turbine, and 6 is a runner part eject turbine. 7 is a cull outlet part, 8 is a center runner part, 9 is a resin, 10 is a gate part, 11 is a package, 12 is a center block, 1
3 is a part of the plunger, and 14 is a part of the chamber.

次に動作について説明する。チャンバ一部14に投入さ
れたモールド樹脂は、プランジャ一部13により押圧さ
れ、カル部4に充填した後、ランナー部3を通り、ゲー
ト部IOを通って、キャビティに注入される。注入され
た樹脂の硬化が完了した後、金型を型開きし、その際に
カル部エジェクタービン5及びランナ一部エジェクター
ビン6が作動して樹脂9を押し出して、金型からカル・
ランナー部及び製品を離型させる。
Next, the operation will be explained. The molding resin introduced into the chamber part 14 is pressed by the plunger part 13, fills the cull part 4, and is then injected into the cavity through the runner part 3 and the gate part IO. After the injected resin has completely hardened, the mold is opened, and at that time the cull part ejector turbine 5 and the runner part ejector turbine 6 are operated to extrude the resin 9 and remove the cull from the mold.
Release the runner part and product from the mold.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来のモールド金型は、センターブロック1が5KD−
11相当の材質の一体物であったため、第5図イ1口に
示すように、カル出口部7.センターランナー部8が樹
脂により摩耗し、その摩耗部に樹脂が入り込んで食らい
付くため、第6図に示すように、金型離型時に上金型か
らカル・ランナ一部が離型しに<<、パッケージ部11
と樹脂9部が引き剥がされて、パッケージ11にクラッ
クが入ることや、樹脂9が金型内に残り、自動機が使用
できない場合や、樹脂9が金型内に残ったまま成形を行
って金型を破損させる等の問題点があった。
In the conventional mold, the center block 1 is 5KD-
Since it was an integral part made of material equivalent to 11, the cull outlet part 7. The center runner part 8 is worn by the resin, and the resin enters and bites into the worn part, so when the mold is released, part of the cull runner is released from the upper mold, as shown in Figure 6. <, package part 11
The resin 9 may be peeled off and cracks may appear in the package 11, the resin 9 may remain in the mold and automatic machines cannot be used, or molding may be performed with the resin 9 remaining in the mold. There were problems such as damage to the mold.

この発明は上記のような問題点を解消するためになされ
たもので、金型のセンターブロック1のカル出口部7.
センターランナー部8の摩耗を防ぎ、金型離型をスムー
ズに行うことができるモールド金型を得ることを目的と
する。
This invention was made to solve the above-mentioned problems, and the cull outlet part 7 of the center block 1 of the mold.
To obtain a mold that can prevent wear of a center runner part 8 and smoothly release the mold.

〔課題を解法するための手段〕[Means for solving problems]

この発明のモールド金型は、センターブロックのカル出
口部、センターランナー部を有する部位を分割部とし、
その部位に耐摩耗性の優れた性質(例えば超硬)を用い
たものである。
In the mold of the present invention, the part having the cull outlet part and the center runner part of the center block is a divided part,
A material with excellent wear resistance (for example, carbide) is used in that part.

〔作用〕[Effect]

この発明におけるモールド金型は、センターブロックの
分割部に耐摩耗性の優れた材質(例えば超硬)を用い、
カル出口部、センターランナー部の摩耗が生じず、金型
離型時に樹脂とパッケージの離型がスムーズζなる。
The mold according to the present invention uses a material with excellent wear resistance (for example, carbide) for the divided parts of the center block,
There is no wear on the cull exit part or center runner part, and the resin and package can be released smoothly from the mold.

〔実施例〕〔Example〕

以下この発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図、第2図において、1はセンターブロック、2は
チエイスブロック、3はチエイスブロック2のランナ一
部、5はカル部エジェクタービン、6はランナ一部エジ
ェクター゛ビンである6分割部I5はセンターブロック
1において、カル出口部7、センターランナー部8を有
する部位である。そしてこの部位に耐摩耗性の優れた材
質(例えば超硬)を用いている。
In Figures 1 and 2, 1 is the center block, 2 is the chase block, 3 is a part of the runner of the chase block 2, 5 is the cull part ejector turbine, and 6 is the ejector bin part of the runner. A portion I5 is a portion of the center block 1 that includes the cull outlet portion 7 and the center runner portion 8. A material with excellent wear resistance (for example, carbide) is used for this part.

第3図に本発明のモールド金型の離型状態を示す0本発
明のモールド金型は、カル出口部7.センターランナー
部8の摩耗が生じないため、金型型開時にカル部エジェ
クタービン5、ランナ一部エジェクタービン6の作動に
より、樹脂9が均一に押し出されるため、上型に樹脂9
が残ったり、樹脂つとパッケージ11が分離することが
なく、パッケージ11にクラックが入ったりすることが
ない。
FIG. 3 shows the release state of the mold of the present invention. The mold of the present invention has a cull exit portion 7. Since the center runner part 8 does not wear out, the resin 9 is uniformly extruded by the operation of the cull part ejector turbine 5 and the runner part ejector turbine 6 when the mold is opened.
The package 11 will not be separated from the resin, and the package 11 will not be cracked.

また、金型内に樹脂9が残った状態で成形を行って金型
を破壊することもない。
Moreover, the mold is not destroyed by molding with the resin 9 remaining in the mold.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、金型摩耗による離型不
良を防止して、製品品質の向上を図るとともに、金型内
に樹脂が残ったまま成形した場合の金型破損を防止する
ことができるという効果がある。
As described above, according to the present invention, it is possible to improve product quality by preventing mold release failure due to mold wear, and to prevent mold breakage when molding is performed with resin remaining in the mold. It has the effect of being able to.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のモールド金型の断面図、第2図は本発
明のモールド金型のセンターランナー部の断面図、第3
図は本発明のモールド金型の製品離型状態を示す断面図
、第4図は従来のモールド金型の断面図、第5図イは従
来のモールド金型摩耗状態を示す断面図、第5図口は従
来のモールド金型センターランナー部断面図(摩耗状i
>−第6図は従来のモールド金型の製品離型状態を示す
断面図である。 図中、1はセンターブロック、2はチエイスブロック、
3はランナ一部、4はカル部、5はカル部エジェクター
ビン、6はランナ一部エジェクタービン、7はカル出口
部、8はセンターランナー部、9は樹脂、15は分割部
である。 なお、図中同一符号は同−又は相当部分を示す。
FIG. 1 is a cross-sectional view of the mold of the present invention, FIG. 2 is a cross-sectional view of the center runner portion of the mold of the present invention, and FIG.
The figure is a sectional view showing the product release state of the mold of the present invention, FIG. 4 is a sectional view of a conventional mold, and FIG. The figure opening is a cross-sectional view of the center runner part of a conventional mold (wear condition i).
>-FIG. 6 is a sectional view showing the product release state of a conventional mold. In the figure, 1 is the center block, 2 is the chase block,
3 is a part of the runner, 4 is a cull part, 5 is an eject turbine for the cull part, 6 is an eject turbine for a part of the runner, 7 is a cull outlet part, 8 is a center runner part, 9 is a resin, and 15 is a dividing part. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] ICリードフレームと、このリードフレームに搭載され
た半導体素子、及び上記リードフレームのインナーリー
ドと半導体素子を電気的に接続する配線材を有するIC
リードフレームを樹脂封止成形するモールド金型におい
て、そのセンターブロック部のカル出口部及びセンター
ランナー部を有する部位に耐摩耗性材料を用いたことを
特徴とする半導体製造装置のモールド金型。
An IC having an IC lead frame, a semiconductor element mounted on the lead frame, and a wiring material that electrically connects the inner lead of the lead frame and the semiconductor element.
1. A mold for semiconductor manufacturing equipment for molding a lead frame with resin, characterized in that a wear-resistant material is used in a portion of a center block portion having a cull outlet portion and a center runner portion.
JP29381490A 1990-10-30 1990-10-30 Mold for semiconductor manufacturing apparatus Pending JPH04167440A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29381490A JPH04167440A (en) 1990-10-30 1990-10-30 Mold for semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29381490A JPH04167440A (en) 1990-10-30 1990-10-30 Mold for semiconductor manufacturing apparatus

Publications (1)

Publication Number Publication Date
JPH04167440A true JPH04167440A (en) 1992-06-15

Family

ID=17799496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29381490A Pending JPH04167440A (en) 1990-10-30 1990-10-30 Mold for semiconductor manufacturing apparatus

Country Status (1)

Country Link
JP (1) JPH04167440A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629137U (en) * 1992-09-11 1994-04-15 株式会社三井ハイテック Mold for resin sealing
JPH08142123A (en) * 1994-11-15 1996-06-04 Nec Corp Mold

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629137U (en) * 1992-09-11 1994-04-15 株式会社三井ハイテック Mold for resin sealing
JPH08142123A (en) * 1994-11-15 1996-06-04 Nec Corp Mold

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