JPH0417663A - Surface-coated hard parts for cutting tools and wear-resistant tools - Google Patents
Surface-coated hard parts for cutting tools and wear-resistant toolsInfo
- Publication number
- JPH0417663A JPH0417663A JP2119191A JP11919190A JPH0417663A JP H0417663 A JPH0417663 A JP H0417663A JP 2119191 A JP2119191 A JP 2119191A JP 11919190 A JP11919190 A JP 11919190A JP H0417663 A JPH0417663 A JP H0417663A
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- wear
- tools
- layer
- resistant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005520 cutting process Methods 0.000 title claims description 43
- 239000010410 layer Substances 0.000 claims description 34
- 239000011247 coating layer Substances 0.000 claims description 23
- 150000004767 nitrides Chemical class 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 description 17
- 238000005240 physical vapour deposition Methods 0.000 description 7
- 229910052726 zirconium Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 229910006252 ZrON Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、切削工具や耐摩工具からなる母材の表面に硬
質被覆層を設け、耐摩耗性を改善向上させた表面被覆硬
質部材に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a surface-coated hard member that has improved wear resistance by providing a hard coating layer on the surface of a base material made of a cutting tool or a wear-resistant tool.
従来、切削工具や耐摩工具は、一般に炭化タングステン
(wC)等を基とする超硬合金、炭化チタン(Tie)
糸等の各種サーメット、高速度工具鋼等の鋼や硬質合金
、炭化珪素や窒化珪素等のセラミックスから構成されて
いる。Conventionally, cutting tools and wear-resistant tools are generally made of cemented carbide based on tungsten carbide (wC) or titanium carbide (Tie).
It is composed of various cermets such as thread, steel such as high-speed tool steel, hard alloys, and ceramics such as silicon carbide and silicon nitride.
又、これら切削工具や耐摩工具の耐摩耗性を改善向上さ
せるため、その表面に硬質被覆層としてPVD法やCV
D法によりTi、 Hf、 Zr (7)炭化物、窒化
物又は炭窒化物、若しくはAlの酸化物を単層に又は複
層に形成した表面被覆硬質部材が開発され、最近では広
く実用に供されている。特にPVD法により形成した硬
質被覆層は、母材の強度を劣化させずに耐摩耗性を向上
させることが出来るので、ドリル、エンドミル、フライ
ス切削用スローアウェイチップ等の強度の要求される切
削用途に適している。In addition, in order to improve the wear resistance of these cutting tools and wear-resistant tools, a hard coating layer is applied to the surface using the PVD method or CV method.
Surface-coated hard members in which Ti, Hf, Zr (7) carbides, nitrides, carbonitrides, or oxides of Al are formed in a single layer or in multiple layers have been developed using the D method, and have recently been widely put into practical use. ing. In particular, the hard coating layer formed by the PVD method can improve wear resistance without deteriorating the strength of the base material, so it can be used in cutting applications that require strength, such as drills, end mills, and indexable inserts for milling. suitable for
しかし、PVD法が母材強度の劣化なしに硬質被覆層を
形成できる点でCVD法より優れているとは云え、PV
D法ではAlの酸化物を安定して形成することが困難で
あるため、PVD法で形成したAI酸化物からなる硬質
被覆層は実用化に至っていない。又、現状のPVD法で
形成出来るTi。However, although the PVD method is superior to the CVD method in that it can form a hard coating layer without deteriorating the strength of the base material,
Since it is difficult to stably form an oxide of Al using the D method, a hard coating layer made of an AI oxide formed using the PVD method has not been put to practical use. Also, Ti can be formed using the current PVD method.
Hf、Zrの炭化物、窒化物又は炭窒化物の硬質被積層
は、耐摩耗性が充分とは云い難く、特に高速切削におい
ては耐摩耗性の不足により、早期に寿命に至るものが多
かった。Hard laminated layers of Hf, Zr carbides, nitrides, or carbonitrides cannot be said to have sufficient wear resistance, and many of them reach the end of their service life early due to lack of wear resistance, especially in high-speed cutting.
本発明はかかる従来の事情に鑑み、切削工具や耐摩工具
の母材強度を維持しつつ、同時に従来よりも優れた耐摩
耗性を有し、特に高速切削における耐摩耗性に優れた切
削工具・耐摩工具用表面被覆硬質部材を提供することを
目的とする。In view of such conventional circumstances, the present invention provides a cutting tool and a wear-resistant tool that maintains the strength of the base material of cutting tools and wear-resistant tools, and at the same time has superior wear resistance than conventional ones, particularly in high-speed cutting. An object of the present invention is to provide a surface-coated hard member for wear-resistant tools.
上記目的を達成するため、本発明の切削工具・耐摩工具
用表面被覆硬質部材は、切削工具又は耐摩工具からなる
母材の表面に、Zrの炭化物、窒化物又は炭窒化物から
なる層とA4の炭化物、窒化物又は炭窒化物からなる層
とを、夫々0.01〜0.2μmの層厚で交互に10層
以上積層して全体の層厚を0.5〜10μmとした硬質
被覆層を有することを特徴とする。In order to achieve the above object, the surface-coated hard member for cutting tools and wear-resistant tools of the present invention has a layer made of Zr carbide, nitride, or carbonitride on the surface of a base material made of cutting tools or wear-resistant tools. A hard coating layer in which 10 or more layers of carbide, nitride, or carbonitride are laminated alternately with a layer thickness of 0.01 to 0.2 μm to give a total layer thickness of 0.5 to 10 μm. It is characterized by having the following.
尚、上記硬質被覆層は、母材である切削工具や耐摩工具
の全表面に設けても又は切刃部分の表面にのみ設けても
よい。又、硬質被覆層の形成方法としては従来公知の方
法を利用出来るが、スパッタリング法やイオンブレーテ
ィング法等のPv羽法が母材強度を容易に維持出来る点
で好ましい。The hard coating layer may be provided on the entire surface of the cutting tool or wear-resistant tool that is the base material, or may be provided only on the surface of the cutting edge portion. Further, as a method for forming the hard coating layer, conventionally known methods can be used, but a Pv wing method such as a sputtering method or an ion blasting method is preferable since the strength of the base material can be easily maintained.
本発明の表面被覆硬質部材においては、硬質被覆層が薄
いZrC!、 ZrN又はZr0Nの層と薄いAlc
。In the surface-coated hard member of the present invention, the hard coating layer is thin ZrC! , a layer of ZrN or ZrON and a thin Alc
.
A/N又はA10Nの層とを交互に積層して構成されて
いるので、切削工具や耐摩工具として使用した場合に、
優れた耐摩耗性、耐溶着性並びに耐欠損性を兼ね備え、
長期に亘り優れた切削性能を維持することが出来る。It is composed of alternating layers of A/N or A10N, so when used as a cutting tool or a wear-resistant tool,
Combines excellent wear resistance, welding resistance, and chipping resistance,
Excellent cutting performance can be maintained over a long period of time.
即ち、多層からなる硬質被覆層を構成する各層のうち、
Zrの炭化物、窒化物又は炭窒化物は母材との付着強度
を高めると共に、硬質被覆層の硬度を高める。一方、A
ノの炭化物、窒化物又は炭窒化物は硬質被覆層の耐欠損
性を改善し、同時にZrの炭化物、窒化物又は炭窒化物
の層中に固溶することによって結晶粒を微細化させる。That is, among the layers constituting the multilayer hard coating layer,
Carbide, nitride, or carbonitride of Zr increases the adhesion strength to the base material and the hardness of the hard coating layer. On the other hand, A
The carbide, nitride or carbonitride of Zr improves the fracture resistance of the hard coating layer, and at the same time refines the crystal grains by being dissolved in the layer of carbide, nitride or carbonitride of Zr.
従って、積層されたこれらの層の相乗的な作用によって
、硬質被覆層全体としての耐摩耗性、耐溶着性、耐欠損
性が改善向上される。Therefore, the synergistic action of these laminated layers improves the abrasion resistance, welding resistance, and chipping resistance of the hard coating layer as a whole.
しかも、上記硬質被覆層を備えた切削工具又は耐摩工具
としての表面被覆硬質部材は、切削時における刃先温度
の上昇により、硬質被覆層中に極めて高温硬度の高いA
/ OやZrOが微量ながら生成することが認められ、
このため高速切削においても良好な耐摩耗性を示すこと
が判った。Moreover, the surface-coated hard member used as a cutting tool or a wear-resistant tool having the above-mentioned hard coating layer has extremely high temperature hardness A in the hard coating layer due to an increase in the temperature of the cutting edge during cutting.
/O and ZrO were observed to be produced in small amounts,
Therefore, it was found that it exhibits good wear resistance even in high-speed cutting.
硬質被覆層の層厚に関しては、全体の層厚が0.5μm
未満では耐摩耗性の向上が殆ど見られず、逆に10 t
Imを超えると層中の残留応力が大きくなり、母材との
付着強度が低下するため、全体の層厚を0.5〜10μ
mの範囲とする。Regarding the layer thickness of the hard coating layer, the total layer thickness is 0.5 μm.
At less than 10 t, there is almost no improvement in wear resistance;
If it exceeds Im, the residual stress in the layer will increase and the adhesive strength with the base material will decrease, so the overall layer thickness should be reduced to 0.5 to 10μ.
The range is m.
又、交互に積層されるZrの炭化物、窒化物又は炭窒化
物からなる層とklの炭化物、窒化物又は炭窒化物から
なる層の層厚は、0.01μmより薄く形成することが
難しいうえ、0.01μm未満では積層した硬質被覆層
全体が脆くなって耐摩耗性が低下し、!!15yiが0
.2μmを超テると各々の層が厚い為に前記した層間の
固溶が生じなくなり、相乗的作用による耐摩耗性、耐溶
着性、耐欠損性の向上が得られないので、上記各層の層
厚は夫々0.01〜0.2μmの範囲とする。更に、上
記各層の層厚が0.01〜0.2μmの範囲であっても
交互に積層した層数が10層未満の場合には、やはり全
体として優れた耐摩耗性、耐溶着性、耐欠損性を兼ね備
えた硬質被覆層を構成することが困難である。In addition, it is difficult to form the layer thickness of the layer consisting of Zr carbide, nitride, or carbonitride and the layer consisting of KL carbide, nitride, or carbonitride to be thinner than 0.01 μm, which are laminated alternately. , if it is less than 0.01 μm, the entire laminated hard coating layer becomes brittle and wear resistance decreases. ! 15yi is 0
.. If the thickness exceeds 2 μm, the solid solution between the layers will not occur due to the thickness of each layer, and improvements in wear resistance, adhesion resistance, and chipping resistance due to synergistic effects will not be obtained. The thickness of each layer is in the range of 0.01 to 0.2 μm. Furthermore, even if the layer thickness of each of the above layers is in the range of 0.01 to 0.2 μm, if the number of alternately laminated layers is less than 10, the overall abrasion resistance, welding resistance, and resistance are still excellent. It is difficult to construct a hard coating layer that has defective properties.
母材として、組成がJIS規格P30 (具体的にはw
e −20wt%Ti(! −10wt%CO)、形状
がJ工S 5NG432の超硬合金製切削チップを用意
し、その表面に下記の如く公知の真空アーク放電による
イオンブレーティング法を用いて第1表に示す硬質被覆
層を形成し、本発明例の表面被覆切削チップ試料1〜4
とした。As the base material, the composition is JIS standard P30 (specifically w
A cemented carbide cutting tip with e -20 wt% Ti (! -10 wt% CO) and a shape of J Engineering S 5NG432 was prepared, and its surface was coated using the known ion blating method using vacuum arc discharge as described below. A hard coating layer shown in Table 1 was formed, and surface-coated cutting chip samples 1 to 4 of the present invention examples were prepared.
And so.
即ち、成膜装置内にZrターゲットとA!ターゲットと
を対向させて配置し、両ターゲットの中間点を中心とし
て両ターゲットの間で回転する母材保持具に上記切削チ
ップを装着し、切削チップが1分間に20回転するよう
に母材保持Vの回転速度を調整した。その後、成膜装置
内を真空度1×1O−2torrのArガス雰囲気に保
持し、切削チップに−2000vの電圧をかけて洗浄を
行ない、500C’まで加熱した後、Arガスを排気し
た。次に、成膜装置内にN ガスとCHガスの一方又は
両方を300 cc/minの割合で導入しながら、真
空アーク放電によりZrターゲットとklターゲットを
蒸発、イオン化させることにより、回転する切削チップ
がZrターゲットの近くを通過する間にZrの炭化物、
窒化物又は炭窒化物を被覆させ、A/ターゲットの近く
を通過する間にAIの炭化物、窒化物又は炭窒化物を被
覆させて、各層を交互に積層させた。交互に形成するZ
rとAlの炭化物、窒化物又は炭窒化物の各層の層厚は
照射電子ビーム量を調整することにより制御し、全体の
層厚は被覆時間により制御した。That is, a Zr target and A! The above-mentioned cutting tip is attached to a base metal holder that is placed facing the target and rotates between the two targets around the midpoint between the two targets, and holds the base metal so that the cutting tip rotates 20 times per minute. The rotation speed of V was adjusted. Thereafter, the inside of the film forming apparatus was maintained in an Ar gas atmosphere with a vacuum degree of 1×1 O −2 torr, and a voltage of −2000 V was applied to the cutting tip for cleaning. After heating to 500 C′, the Ar gas was exhausted. Next, while introducing one or both of N gas and CH gas into the film forming apparatus at a rate of 300 cc/min, the Zr target and Kl target are evaporated and ionized by vacuum arc discharge. While passing near the Zr target, Zr carbide,
The nitride or carbonitride was deposited and the carbide, nitride or carbonitride of the AI was deposited while passing near the A/target, alternating each layer. Z formed alternately
The layer thickness of each layer of r and Al carbide, nitride, or carbonitride was controlled by adjusting the amount of irradiated electron beam, and the overall layer thickness was controlled by coating time.
又、比較のために第1表に示す従来例の表面被覆切削チ
ップ試料も用意した。即ち、試料5〜9は通常の成膜装
置を使用して真空アーク放電を用いたイオンブレーティ
ング法により、上記と同じ組成と形状の切削チップの表
面にTlc、T1N及ヒT1CNを単独又は組合わせて
なる硬質被覆層を被覆して製造し、試料8及び9は通常
のCVD法により同じ組成と形状の切削チップの表面に
TiC! 。For comparison, conventional surface-coated cutting chip samples shown in Table 1 were also prepared. That is, in Samples 5 to 9, Tlc, T1N, and T1CN were deposited singly or in combination on the surface of a cutting tip having the same composition and shape as above by an ion blating method using a vacuum arc discharge using an ordinary film forming apparatus. Samples 8 and 9 were manufactured by coating the surfaces of cutting tips with the same composition and shape with TiC! by the usual CVD method. .
TiN及びAI、O,を組合わせてなる硬質被覆層を形
成することにより製造した。It was manufactured by forming a hard coating layer consisting of a combination of TiN, AI, and O.
第 1 表
(註)表中の×印は従来例である
(以下同じ)
次に、上記の如く製造した各表面被覆切削チップ試料に
ついて、下記条件による連続切削試験と断続切削試験を
行ない、切刃の逃げ面摩耗幅を測定した。Table 1 (Note) The x mark in the table indicates the conventional example (the same applies hereinafter).Next, continuous cutting tests and intermittent cutting tests were conducted under the following conditions for each surface-coated cutting chip sample manufactured as described above. The flank wear width of the blade was measured.
切削条件 第 2 表 上記の各切削試験の結果を第2表に示す。Cutting conditions Table 2 The results of each of the above cutting tests are shown in Table 2.
上記の結果から、従来の表面被覆切削チップ試料のうち
硬質被覆層をPVD法で形成した試料5〜7は耐摩耗性
に劣り、又CVD法で形成した試料8及び9は母材の靭
性劣化により刃先の耐欠損性が低下したのに対し、本発
明例の表面被覆切削チ゛;・ブ試料1〜4は連続切削及
び断続切削の両方において優れた耐摩耗性を有すると同
時に、硬質被覆層をPVD法で形成したので母材の靭性
が維持され優れた耐欠損性を備えることが判る。From the above results, among the conventional surface-coated cutting tip samples, samples 5 to 7, in which the hard coating layer was formed by the PVD method, were inferior in wear resistance, and samples 8 and 9, formed by the CVD method, had deteriorated toughness of the base material. In contrast, surface-coated cutting samples 1 to 4 of the present invention had excellent wear resistance in both continuous cutting and interrupted cutting, and at the same time had a hard coating layer. It can be seen that since it was formed by the PVD method, the toughness of the base material was maintained and it had excellent fracture resistance.
尚、交互に積層する各層は実施例に挙げたZrNとAt
Nのように全てを炭化物同士、窒化物同士、又は炭窒化
物同士とする組合せ、及びZrNとAlCNの組合せの
他、任意に組合せることができ、例えばZr系とAl系
の各層自体についても積層の途中で炭化物、窒化物及び
炭窒化物の間で適宜変更しても良い。Note that each layer alternately laminated is ZrN and At as mentioned in the example.
In addition to the combination of all carbides, nitrides, or carbonitrides like N, and the combination of ZrN and AlCN, any combination can be used. For example, each layer of Zr and Al can also be combined. The material may be appropriately changed between carbide, nitride, and carbonitride during the lamination process.
本発明によれば、切削工具や耐摩工具の母材強度を維持
しつつ、同時に従来よりも優れた耐摩耗性を有し、特に
高速切削においても切削工具や耐摩工具として長期に亘
って良好な切削性能を維持することが出来る切削工具・
耐摩工具用表面被覆硬質部材を提供出来る。According to the present invention, while maintaining the strength of the base material of cutting tools and wear-resistant tools, at the same time it has superior wear resistance than conventional ones, and it can be used as cutting tools and wear-resistant tools for a long period of time, especially in high-speed cutting. Cutting tools that can maintain cutting performance
A surface-coated hard member for wear-resistant tools can be provided.
1゜
手続補正書(自発)
事件の表示
平成 2 年 特 許 ljl第119191号3、補
正をする者
事件との関係1゜Procedural amendment (voluntary) Indication of the case 1990 Patent ljl No. 119191 3, Relationship between the person making the amendment and the case
Claims (1)
rの炭化物、窒化物又は炭窒化物からなる層とAlの炭
化物、窒化物又は炭窒化物からなる層とを、夫々0.0
1〜0.2μmの層厚で交互に10層以上積層して全体
の層厚を0.5〜10μmとした硬質被覆層を有するこ
とを特徴とする切削工具・耐摩工具用表面被覆硬質部材
。(1) Z on the surface of the base material made of cutting tools or wear-resistant tools
A layer consisting of a carbide, nitride or carbonitride of r and a layer consisting of a carbide, nitride or carbonitride of Al are each 0.0
A surface-coated hard member for cutting tools and wear-resistant tools, characterized by having a hard coating layer that is alternately laminated in 10 or more layers with a layer thickness of 1 to 0.2 μm to have a total layer thickness of 0.5 to 10 μm.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11919190A JP2867604B2 (en) | 1990-05-09 | 1990-05-09 | Surface-coated hard members for cutting tools and wear-resistant tools |
| PCT/JP1990/001258 WO1991005076A1 (en) | 1989-09-29 | 1990-09-28 | Surface-coated hard member for cutting and abrasion-resistant tools |
| EP90914429A EP0446375B1 (en) | 1989-09-29 | 1990-09-28 | Surface-coated hard member for cutting and abrasion-resistant tools |
| DE69008511T DE69008511T2 (en) | 1989-09-29 | 1990-09-28 | SURFACE-COVERED HARD MATERIALS FOR CUTTING AND WEAR-RESISTANT TOOLS. |
| US07/691,020 US5266389A (en) | 1989-09-29 | 1990-09-28 | Surface-coated hard material for cutting tools or wear resistance tools |
| KR9170538A KR940002749B1 (en) | 1989-09-29 | 1991-05-29 | Surface-coated hard member for cutting and abrasion-resistant tods |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11919190A JP2867604B2 (en) | 1990-05-09 | 1990-05-09 | Surface-coated hard members for cutting tools and wear-resistant tools |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0417663A true JPH0417663A (en) | 1992-01-22 |
| JP2867604B2 JP2867604B2 (en) | 1999-03-08 |
Family
ID=14755173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11919190A Expired - Lifetime JP2867604B2 (en) | 1989-09-29 | 1990-05-09 | Surface-coated hard members for cutting tools and wear-resistant tools |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2867604B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115584470A (en) * | 2022-10-24 | 2023-01-10 | 安徽工业大学 | A method for improving corrosion and wear resistance of titanium alloy surface through Zr/Zr2N/ZrN multilayer coating |
-
1990
- 1990-05-09 JP JP11919190A patent/JP2867604B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115584470A (en) * | 2022-10-24 | 2023-01-10 | 安徽工业大学 | A method for improving corrosion and wear resistance of titanium alloy surface through Zr/Zr2N/ZrN multilayer coating |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2867604B2 (en) | 1999-03-08 |
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