JPH0418654U - - Google Patents

Info

Publication number
JPH0418654U
JPH0418654U JP6052290U JP6052290U JPH0418654U JP H0418654 U JPH0418654 U JP H0418654U JP 6052290 U JP6052290 U JP 6052290U JP 6052290 U JP6052290 U JP 6052290U JP H0418654 U JPH0418654 U JP H0418654U
Authority
JP
Japan
Prior art keywords
heating filament
electrode
vacuum evaporation
flat part
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6052290U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6052290U priority Critical patent/JPH0418654U/ja
Publication of JPH0418654U publication Critical patent/JPH0418654U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案の加熱フイラメントの一実施例
を示す側面図、第２図は本考案の加熱フイラメン
トの別の実施例を示す斜視図、第３〜５図はいず
れも従来例を示し、第３図は真空蒸着装置に従来
の加熱フイラメントを取付けた状態を示す正面図
、第４図は同側面図、第５図ａ，ｂはそれぞれ従
来の加熱フイラメントを示す斜視図である。 図中、１は電極、２は加熱フイラメント、３は
平坦部である。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空蒸着装置の電極に取付けて蒸着物を加熱す
    る加熱フイラメントであつて、加熱フイラメント
    の電極への取付箇所に平坦部を形成したことを特
    徴とする真空蒸着用加熱フイラメント。
JP6052290U 1990-06-07 1990-06-07 Pending JPH0418654U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6052290U JPH0418654U (ja) 1990-06-07 1990-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6052290U JPH0418654U (ja) 1990-06-07 1990-06-07

Publications (1)

Publication Number Publication Date
JPH0418654U true JPH0418654U (ja) 1992-02-17

Family

ID=31587958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6052290U Pending JPH0418654U (ja) 1990-06-07 1990-06-07

Country Status (1)

Country Link
JP (1) JPH0418654U (ja)

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