JPH04186B2 - - Google Patents

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Publication number
JPH04186B2
JPH04186B2 JP59158713A JP15871384A JPH04186B2 JP H04186 B2 JPH04186 B2 JP H04186B2 JP 59158713 A JP59158713 A JP 59158713A JP 15871384 A JP15871384 A JP 15871384A JP H04186 B2 JPH04186 B2 JP H04186B2
Authority
JP
Japan
Prior art keywords
heat exchanger
helium gas
pressure
helium
condenser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59158713A
Other languages
Japanese (ja)
Other versions
JPS6138363A (en
Inventor
Norimoto Matsuda
Norihide Saho
Minoru Imamura
Nobuyuki Hosomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15871384A priority Critical patent/JPS6138363A/en
Publication of JPS6138363A publication Critical patent/JPS6138363A/en
Publication of JPH04186B2 publication Critical patent/JPH04186B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明はヘリウム冷凍装置に係り、特にクライ
オスタツトに凝縮器を設け該凝縮器を冷却して成
るものに好適なヘリウム冷凍装置に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a helium refrigeration system, and particularly to a helium refrigeration system suitable for a cryostat equipped with a condenser to cool the condenser.

〔発明の背景〕[Background of the invention]

従来のヘリウム冷凍装置は、例えば実開昭55−
126168号公報に記載のように、クライオスタツト
のノズルに凝縮熱交換器を取付け、該熱交換器を
ヘリウム移送管を介して冷凍機によつて冷却する
ようになつていた。
Conventional helium refrigeration equipment, for example,
As described in Japanese Patent No. 126168, a condensing heat exchanger was attached to the nozzle of a cryostat, and the heat exchanger was cooled by a refrigerator via a helium transfer tube.

従来の装置は、凝縮熱交換器を着脱自在に設け
る点について配慮されていなかつた。すなわち、
液体ヘリウムをノズルから供給し内部の液体ヘリ
ウムが少なくなると再度ノズルから供給するよう
な一般的なクライオスタツトのノズルに凝縮熱交
換器を取り付けて用いる場合には、クライオスタ
ツト内の蒸発ガスを再凝縮し液化させるようにし
ても、気密性に問題があり、内部の液体ヘリウム
は徐々に減少するので、凝縮熱交換器を外して液
体ヘリウムを供給する必要がある。このため、凝
縮熱交換器を容易に着脱させる必要がある。
Conventional devices do not take into consideration the fact that the condensing heat exchanger is detachably provided. That is,
When using a condensing heat exchanger attached to the nozzle of a general cryostat, which supplies liquid helium from the nozzle and then supplies it again from the nozzle when the liquid helium inside becomes low, it is possible to re-condense the evaporated gas inside the cryostat. Even if it is liquefied, there is a problem with airtightness and the liquid helium inside gradually decreases, so it is necessary to remove the condensing heat exchanger and supply liquid helium. Therefore, it is necessary to easily attach and detach the condensing heat exchanger.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、凝縮器を冷却する冷凍機とク
ライオスタツトとを別々に配置し、クライオスタ
ツトに取り付けた凝縮器と冷凍機との間をトラン
スフアーチユーブでつないだものにおいて、クラ
イオスタツトに取り付けた凝縮器の着脱を容易に
できるヘリウム冷凍装置を提供することにある。
An object of the present invention is to install a refrigerator that cools a condenser and a cryostat separately, and to connect the condenser and refrigerator attached to the cryostat with a transfer tube. An object of the present invention is to provide a helium refrigeration system in which a condenser can be easily attached and detached.

〔発明の概要〕[Summary of the invention]

本発明は、中間温度域の高圧ヘリウムガス配管
で温度レベルの高い凝縮器を冷却し、ジユールト
ムソン弁後方の配管で温度レベルの低い凝縮器を
冷却するようにして、トランスフアーチユーブ内
に通す配管を小さいものとし可撓性を良くして、
凝縮器を冷却する冷凍機とクライオスタツトとを
別々に配置しクライオスタツトに取りけた凝縮器
と冷凍機との間をトランスフアーチユーブでつな
いだヘリウム冷凍装置においても、クライオスタ
ツトに取り付けた凝縮器の着脱を容易にできるよ
うにしたものである。
In the present invention, a high-temperature condenser is cooled by a high-pressure helium gas pipe in an intermediate temperature range, and a low-temperature condenser is cooled by a pipe behind the Joel-Thomson valve, and the condenser is passed through the transfer tube. By making the piping smaller and making it more flexible,
Even in a helium refrigeration system in which a refrigerator that cools the condenser and a cryostat are placed separately and a transfer tube is used to connect the condenser attached to the cryostat and the refrigerator, the condenser attached to the cryostat is It is designed to be easily attached and detached.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第1図によつて説明
する。
An embodiment of the present invention will be described below with reference to FIG.

第1段圧縮機1、第2段圧縮機2によつて圧縮
された高圧のヘリウムガスは一部が膨張機3に供
給され、第1段膨張機4、第2段膨張機5で断熱
膨張して寒冷を発生し、中圧のヘリウムガスとな
つて第1段圧縮機1と第2段圧縮機2の間にもど
る。
A portion of the high-pressure helium gas compressed by the first-stage compressor 1 and the second-stage compressor 2 is supplied to the expander 3, where it is adiabatically expanded in the first-stage expander 4 and second-stage expander 5. This generates refrigeration, which returns to medium-pressure helium gas between the first-stage compressor 1 and the second-stage compressor 2.

残りの高圧ヘリウムガスは第1熱交換器6に入
り、ここで、対向して流れる低圧のヘリウムガス
で冷却される。冷却された高圧ヘリウムガスは配
管7を経て凝縮コイル8に入る。凝縮コイル8を
通る過程でクライオスタツト24のふく射シール
ド用液体窒素槽25から蒸発ガスを凝縮器18の
中で再液化する。凝縮コイル8を出た高圧ヘリウ
ムガスは配管9を通つて第1冷却コイル10に入
り、ここで第1段膨張機4によつてさらに冷却さ
れる。その後、第2熱交換器11に入り、対向し
て流れる低圧のヘリウムガスで冷却される。
The remaining high-pressure helium gas enters the first heat exchanger 6, where it is cooled by counter-flowing low-pressure helium gas. The cooled high-pressure helium gas enters the condensing coil 8 via the pipe 7. In the process of passing through the condensing coil 8, the evaporated gas from the liquid nitrogen tank 25 for the radiation shield of the cryostat 24 is reliquefied in the condenser 18. The high pressure helium gas leaving the condensing coil 8 passes through a pipe 9 and enters the first cooling coil 10, where it is further cooled by the first stage expander 4. Thereafter, it enters the second heat exchanger 11 and is cooled by low-pressure helium gas flowing oppositely.

第2熱交換器11を出てから第2冷却コイル1
2に入り、ここで第2段膨張機5によつてさらに
冷却されて第3熱交換器13に入る。第3熱交換
器13でも、第1熱交換器6、第2熱交換器11
の場合と同様に対向して流れる低圧のヘリウムガ
スで冷却されて、最終的には10K以下の高圧ヘリ
ウムガスとなつてジユールトムソン弁14に入
る。ジユールトムソン弁14を通る過程で高圧、
低温のヘリウムガスは断熱膨張してジユールトム
ソン効果により、一部のガスが液化する。液化し
たガスを含んだ低圧、低温ガスは配管15を経て
他の凝縮コイル16に入る。他の凝縮コイル16
を通る過程でクライオスタツト24の中の液体ヘ
リウム槽26からの蒸発ガスを他の凝縮器19の
中で再液化する。他の凝縮コイル16を出た低
圧、低温のヘリウムガスは配管17を通つて第3
熱交換器13に戻り、以下、第2熱交換器11、
第1熱交換器6を経て第1段圧縮機1の吸込側に
もどる。
After exiting the second heat exchanger 11, the second cooling coil 1
2, where it is further cooled by the second stage expander 5 and enters the third heat exchanger 13. Even in the third heat exchanger 13, the first heat exchanger 6, the second heat exchanger 11
As in the case of , it is cooled by the low-pressure helium gas flowing oppositely, and finally enters the Joel-Thompson valve 14 as high-pressure helium gas of 10K or less. High pressure in the process of passing through the Joel-Thomson valve 14,
Low-temperature helium gas expands adiabatically and some of the gas liquefies due to the Joel-Thomson effect. The low-pressure, low-temperature gas containing liquefied gas enters another condensing coil 16 via a pipe 15. Other condensing coils 16
During the process, the vaporized gas from the liquid helium tank 26 in the cryostat 24 is reliquefied in another condenser 19. The low-pressure, low-temperature helium gas coming out of the other condensing coil 16 passes through the pipe 17 to the third
Returning to the heat exchanger 13, hereafter, the second heat exchanger 11,
It returns to the suction side of the first stage compressor 1 via the first heat exchanger 6.

膨張機、熱交換器等々は真空保冷槽22の中に
収納され、比較的低温になる第2段膨張機5、お
よび、第2熱交換器11、第3熱交換器13のま
わりにふく射シールド板21を配している。
The expander, heat exchanger, etc. are housed in a vacuum cold storage tank 22, and a radiation shield is placed around the second stage expander 5, which is at a relatively low temperature, the second heat exchanger 11, and the third heat exchanger 13. A board 21 is arranged.

そして真空保冷槽22と凝縮器18,19の間
を連絡する配管7,9,15,17は可撓性のト
ランスフアチユーブ20の中に収納されていて、
相互の空間はすべて真空になつていて、外部から
の侵入熱ができるだけ少くなるように配慮されて
いる。
Pipes 7, 9, 15, 17 connecting between the vacuum cold storage tank 22 and the condensers 18, 19 are housed in a flexible transfer tube 20,
All spaces between the two are vacuumed to minimize heat intrusion from the outside.

凝縮器18,19の先端部23,32は、それ
ぞれ液体窒素槽5への液体窒素の注入口である蒸
発管27、および液体ヘリウム槽26への液体ヘ
リウムの注入口である蒸発管29に挿入されてい
る。
The tips 23 and 32 of the condensers 18 and 19 are inserted into an evaporation tube 27 that is an inlet for injecting liquid nitrogen into the liquid nitrogen tank 5 and an evaporation tube 29 that is an inlet for injecting liquid helium into a liquid helium tank 26, respectively. has been done.

蒸発管27,29はそこを通つて侵入する熱量
を少するために長くし、それらの支持管28,3
0,31も長くしている。
The evaporator tubes 27, 29 are made long to reduce the amount of heat that enters therethrough, and their support tubes 28, 3
0.31 is also longer.

また、クライオスタツト24の内部も液体ヘリ
ウム槽26、液体窒素槽25への熱侵入を低減さ
せるために真空断熱されているのが一般である。
Further, the inside of the cryostat 24 is also generally vacuum insulated to reduce heat intrusion into the liquid helium tank 26 and liquid nitrogen tank 25.

本実施例によれば、第1熱交換器の後の高圧ヘ
リウムガスで液体窒素槽に取り付けた凝縮器を冷
却し、ジユールトムソン弁を出た低温ガスで液体
ヘリウム槽に取り付けた凝縮器を冷却するように
しているので、高圧ヘリウムガス移送する配管は
圧損が少なく径の細い配管が使用でき、また低温
ガスを移送する配管も移送量が少なく径の細い配
管が使用できる。これにより、トランスフアーチ
ユーブ内に通す配管を小さいものにでき、可撓性
を良くすることができるので、クライオスタツト
に取り付けた凝縮器を容易に着脱できるという効
果がある。
According to this embodiment, the high-pressure helium gas after the first heat exchanger cools the condenser attached to the liquid nitrogen tank, and the low-temperature gas exiting the Joel-Thompson valve cools the condenser attached to the liquid helium tank. Since the system is cooled, pipes with a small diameter can be used for transferring high-pressure helium gas with little pressure loss, and pipes with a small diameter can also be used for transferring low-temperature gas because the amount transferred is small. As a result, the piping that passes through the transfer tube can be made smaller and has better flexibility, which has the effect that the condenser attached to the cryostat can be easily attached and detached.

第2図は、第1図のクライオスタツト24に取
り付けた凝縮器18,19の他の実施例を示すも
ので凝縮器19,18ならびに先端部32,23
の周囲を気密構造の外箱33,33′で覆い、そ
の間を真空層34,34′で断熱した構造なつて
いる。
FIG. 2 shows another embodiment of the condensers 18 and 19 attached to the cryostat 24 of FIG.
The outer casings 33, 33' have an airtight structure, and the space between them is insulated with vacuum layers 34, 34'.

本実施例によれば、凝縮器19,18への熱侵
入が低減され、熱損失の縮減さらに冷凍機容量の
低減が図れるという効果がある。
According to this embodiment, there is an effect that heat intrusion into the condensers 19 and 18 is reduced, and heat loss and refrigerator capacity can be reduced.

第3図はさらに別の凝縮器の実施例を示すもの
で凝縮コイル16,8で凝縮した液化ガスを液体
ヘリウム槽26または液体窒素槽25にもどすた
めの受液皿36ならびに一端が前記受液皿36に
つながり、他端が液体ヘリウム槽26または液体
窒素槽25に開放された導管35より構成され
る。37はシール用カバーを示す。本実施例のよ
うな構成によれば蒸発ガスは外へもれることはな
く凝縮器19,18の先端部32,23と導管3
5の間の〓間を通つて上昇し、凝縮器コイル1
6,8で冷却されて再液化する。再液化した液化
ガスは液滴になつて受液皿36の上に落下して中
央の低くなつた場所に集められ、導管35の中を
通つて液体ヘリウム槽26または液体窒素槽25
に戻つていく。
FIG. 3 shows yet another embodiment of a condenser, in which a liquid receiving tray 36 for returning the liquefied gas condensed in the condensing coils 16, 8 to the liquid helium tank 26 or the liquid nitrogen tank 25, and one end of the liquid receiving plate 36 are shown. It is composed of a conduit 35 connected to the dish 36 and opened at the other end to the liquid helium tank 26 or the liquid nitrogen tank 25. 37 indicates a sealing cover. According to the configuration of this embodiment, evaporated gas does not leak to the outside, and the evaporative gas is connected to the tips 32, 23 of the condensers 19, 18 and the conduit 3.
5 and rises through the condenser coil 1
It is cooled and reliquefied at steps 6 and 8. The re-liquefied liquefied gas becomes droplets and falls onto the liquid receiving pan 36 and is collected in a low central area, and passes through the conduit 35 to the liquid helium tank 26 or the liquid nitrogen tank 25.
I'm going back to.

本実施例によれば、蒸発ガスと再凝縮した液化
ガスの流路が別々になつているので、液化ガスの
降下が蒸発ガスの上昇によつて阻害される(いわ
ゆるベーパーロツク現象の影響をうける)ことが
なくなるという効果がある。
According to this embodiment, since the flow paths for the evaporated gas and the recondensed liquefied gas are separate, the descent of the liquefied gas is inhibited by the rise of the evaporated gas (affected by the so-called vapor lock phenomenon). It has the effect of eliminating things.

第4図は第1図の蒸発管27,29の他の実施
例を示すもので、第3図で示すように凝縮器1
6,8の先端部32,23と蒸発管29,27の
間をシール用カバー37で気密に覆うと何かの理
由で(例えばクライオスタツト24の真空が急激
に悪化したりして)液体ヘリウムや液体窒素の蒸
発ガス量が異常に増加したときには凝縮コイル1
6,8の凝縮能力をオーバーしてしまい、液体ヘ
リウム槽26、液体窒素槽25の内圧が異常に上
昇する危険性がある。
FIG. 4 shows another embodiment of the evaporator tubes 27 and 29 of FIG. 1, and as shown in FIG.
If the sealing cover 37 is airtightly covered between the tips 32 and 23 of the evaporators 6 and 8 and the evaporation tubes 29 and 27, liquid helium may leak out for some reason (for example, if the vacuum of the cryostat 24 suddenly deteriorates). or when the amount of evaporated gas from liquid nitrogen increases abnormally, the condenser coil 1
There is a risk that the condensing capacity of the tanks 6 and 8 will be exceeded, and the internal pressures of the liquid helium tank 26 and the liquid nitrogen tank 25 will rise abnormally.

そこで、第4図のように蒸発管29,27の常
温部に大気開放ラインを配し、その先端に破壊安
全弁38ならびに絞り39を設けることにより、
危険性を解消した。すなわち、本実施例によれば
通常時は蒸発ガスのうちの極く少量を絞り39を
介して放出しながら液体ヘリウム槽26および液
体窒素槽25の内圧をほぼ大気圧に保持し、内圧
の異常上昇時には破壊安全弁38から放出して液
体ヘリウム槽26および液体窒素槽25の破損を
防ぐことができるという効果がある。
Therefore, as shown in FIG. 4, by arranging an air release line in the normal temperature part of the evaporation tubes 29 and 27, and providing a break safety valve 38 and a throttle 39 at the tip of the line,
Eliminated the danger. That is, according to this embodiment, under normal conditions, the internal pressures of the liquid helium tank 26 and the liquid nitrogen tank 25 are maintained at approximately atmospheric pressure while releasing a very small amount of the evaporated gas through the throttle 39, thereby preventing abnormalities in the internal pressures. When ascending, the liquid helium tank 26 and liquid nitrogen tank 25 can be prevented from being damaged by being released from the safety valve 38.

第1図の実施例では膨張機として蓄冷器式の往
復動形のもので構成した冷凍機を示したが、ここ
に回転形の膨張タービンで構成した冷凍機を用い
ても同じ効果が得られることは明らかである。
Although the embodiment shown in Fig. 1 shows a refrigerator configured with a regenerator-type reciprocating type expander, the same effect can be obtained by using a refrigerator configured with a rotary expansion turbine. That is clear.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、凝縮器を冷却する冷凍機とク
ライオスタツトとを別々に配置し、クライオスタ
ツトに取り付けた凝縮器と冷凍機との間をトラン
スフアーチユーブでつないだものにおいて、クラ
イオスタツトに取り付けた凝縮器の着脱を容易に
できるという効果がある。
According to the present invention, a refrigerator for cooling a condenser and a cryostat are arranged separately, and a transfer tube connects the condenser and the refrigerator attached to the cryostat. This has the effect of making it easier to attach and detach the condenser.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例であるヘリウム冷凍
装置の全体構成を示す系統図、第2図は第1図の
凝縮器の他の実施例を示す部分断面図、第3図は
凝縮器のさらに別の実施例を示す部分断面図、第
4図は第1図のクライオスタツトの蒸発管部分の
他の実施例を示す部分断面図である。 1……第1段圧縮機、2……第2段圧縮機、3
……膨張機、6……第1熱交換器、7,15……
配管、8……凝縮コイル、11……第2熱交換
器、13……第3熱交換器、14……ジユールト
ムソン弁、16……他の凝縮コイル、18……凝
縮器、19……他の凝縮器、23,32……先端
部、24……クライオスタツト、25……液体窒
素槽、26……液体ヘリウム槽。
Fig. 1 is a system diagram showing the overall configuration of a helium refrigeration system that is an embodiment of the present invention, Fig. 2 is a partial sectional view showing another embodiment of the condenser shown in Fig. 1, and Fig. 3 is a condenser. FIG. 4 is a partial sectional view showing another embodiment of the evaporation tube portion of the cryostat shown in FIG. 1...First stage compressor, 2...Second stage compressor, 3
... Expander, 6... First heat exchanger, 7,15...
Piping, 8...Condensing coil, 11...Second heat exchanger, 13...Third heat exchanger, 14...Joule-Thomson valve, 16...Other condensing coil, 18...Condenser, 19... ...other condensers, 23, 32... tip, 24... cryostat, 25... liquid nitrogen tank, 26... liquid helium tank.

Claims (1)

【特許請求の範囲】 1 ヘリウムガスを圧縮して高圧にする圧縮機
と、該圧縮された高圧ヘリウムガスを断熱膨張さ
せて寒冷を発生させる膨張機と、高圧ヘリウムガ
スと低圧の戻りヘリウムガスとを熱交換させるて
高圧ヘリウムガスを冷却する熱交換器群と、最終
段の熱交換器を出た高圧・低温のヘリウムガスを
断熱膨張させるジユールトムソン弁と、前記膨張
機の寒冷発生部、前記熱交換器群および前記ジユ
ールトムソン弁を収納した真空保冷槽と、クライ
オスタツト内の液体窒素槽および液体ヘリウム槽
のそれぞれの注入口に設けた第1および第2の凝
縮器と、前記真空保冷槽と前記第1および第2の
凝縮器とをつなぐトランスフアーチユーブとを有
し、 前記熱交換器群の中間温度域の高圧ヘリウムガ
スを流通させる配管を、前記トランスフアーチユ
ーブ内を前記第1の凝縮器を介して往復させて戻
し、前記膨張機の寒冷発生部に接触させて次の段
の熱交換器につなげ、前記ジユールトムソン弁を
出た液化ガスを含んだ低温のヘリウムガスを流通
させる配管を、前記トランスフアーチユーブ内を
第2の凝縮器を介して往復させて戻し、前記熱交
換器群の最終段の低圧の戻りヘリウムガスライン
に接続したことを特徴とするヘリウム冷凍装置。
[Claims] 1. A compressor that compresses helium gas to high pressure, an expander that adiabatically expands the compressed high-pressure helium gas to generate cold air, and high-pressure helium gas and low-pressure return helium gas. a heat exchanger group that cools high-pressure helium gas by exchanging heat with the heat exchanger, a Joel-Thomson valve that adiabatically expands the high-pressure and low-temperature helium gas that exits the final stage heat exchanger, and a cold generation section of the expander; A vacuum cold storage tank housing the heat exchanger group and the Joel-Thompson valve, first and second condensers provided at the respective injection ports of the liquid nitrogen tank and the liquid helium tank in the cryostat, and the vacuum a transfer tube connecting the cold storage tank and the first and second condensers, and a pipe for flowing high-pressure helium gas in an intermediate temperature range of the heat exchanger group is connected inside the transfer tube to the first and second condensers; The low-temperature helium gas containing the liquefied gas that has exited the Joule-Thomson valve is returned by reciprocating through the condenser of No. A helium refrigeration system characterized in that a pipe for circulating the is reciprocated through the transfer tube and returned through the second condenser, and is connected to a low-pressure return helium gas line at the final stage of the heat exchanger group. Device.
JP15871384A 1984-07-31 1984-07-31 helium refrigeration equipment Granted JPS6138363A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15871384A JPS6138363A (en) 1984-07-31 1984-07-31 helium refrigeration equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15871384A JPS6138363A (en) 1984-07-31 1984-07-31 helium refrigeration equipment

Publications (2)

Publication Number Publication Date
JPS6138363A JPS6138363A (en) 1986-02-24
JPH04186B2 true JPH04186B2 (en) 1992-01-06

Family

ID=15677725

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15871384A Granted JPS6138363A (en) 1984-07-31 1984-07-31 helium refrigeration equipment

Country Status (1)

Country Link
JP (1) JPS6138363A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762202A (en) * 1986-07-18 1988-08-09 Toyota Jidosha Kabushiki Kaisha Elastic energy storing device
JPS63140275A (en) * 1986-12-02 1988-06-11 株式会社東芝 Cryogenic refrigerator
DE102004037173B3 (en) * 2004-07-30 2005-12-15 Bruker Biospin Ag Cryogenic cooler for workpiece incorporates cold head attached to two-stage cooler with attachments to sealed cryostat and with radiation shield inside vacuum-tight housing
JP4641297B2 (en) * 2006-09-19 2011-03-02 株式会社日立製作所 Cryogenic cooling system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55126168U (en) * 1979-03-02 1980-09-06
JPS5986870A (en) * 1982-11-10 1984-05-19 株式会社日立製作所 Double shield cryostat with helium refrigerator

Also Published As

Publication number Publication date
JPS6138363A (en) 1986-02-24

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