JPH0419164B2 - - Google Patents

Info

Publication number: JPH0419164B2
Authority: JP; Japan
Prior art keywords: ozone generator; refrigerant; ozone; drum; gas
Prior art date: 1987-10-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP25595087A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0196001A (ja

Inventor

Tsuneo Tsueda

Hitonobu Shotani

Tetsuji Horie

Tetsusuke Yokomi

Jiro Kobayashi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Precision Products Co Ltd

Original Assignee

Sumitomo Precision Products Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-10-07

Filing date

1987-10-07

Publication date

1992-03-30

1987-10-07 Application filed by Sumitomo Precision Products Co Ltd filed Critical Sumitomo Precision Products Co Ltd

1987-10-07 Priority to JP25595087A priority Critical patent/JPH0196001A/ja

1989-04-14 Publication of JPH0196001A publication Critical patent/JPH0196001A/ja

1992-03-30 Publication of JPH0419164B2 publication Critical patent/JPH0419164B2/ja

Status Granted legal-status Critical Current

Links

CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 79
239000003507 refrigerant Substances 0.000 claims description 52
238000001816 cooling Methods 0.000 claims description 43
239000007788 liquid Substances 0.000 claims description 35
238000000926 separation method Methods 0.000 claims description 18
238000011144 upstream manufacturing Methods 0.000 claims description 5
239000003989 dielectric material Substances 0.000 claims description 4
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
238000000034 method Methods 0.000 description 8
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
229910052782 aluminium Inorganic materials 0.000 description 6
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 6
239000007789 gas Substances 0.000 description 6
239000001301 oxygen Substances 0.000 description 6
229910052760 oxygen Inorganic materials 0.000 description 6
230000000694 effects Effects 0.000 description 4
238000009835 boiling Methods 0.000 description 3
239000000645 desinfectant Substances 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
230000003647 oxidation Effects 0.000 description 3
238000007254 oxidation reaction Methods 0.000 description 3
230000005514 two-phase flow Effects 0.000 description 3
238000005260 corrosion Methods 0.000 description 2
230000007797 corrosion Effects 0.000 description 2
238000010586 diagram Methods 0.000 description 2
230000017525 heat dissipation Effects 0.000 description 2
239000011810 insulating material Substances 0.000 description 2
238000009413 insulation Methods 0.000 description 2
230000001590 oxidative effect Effects 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
238000005219 brazing Methods 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
238000011109 contamination Methods 0.000 description 1
239000002826 coolant Substances 0.000 description 1
239000000498 cooling water Substances 0.000 description 1
238000003912 environmental pollution Methods 0.000 description 1
239000011521 glass Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
239000010800 human waste Substances 0.000 description 1
239000012212 insulator Substances 0.000 description 1
239000000203 mixture Substances 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
239000007800 oxidant agent Substances 0.000 description 1
230000002265 prevention Effects 0.000 description 1
239000002994 raw material Substances 0.000 description 1
238000005057 refrigeration Methods 0.000 description 1
230000000630 rising effect Effects 0.000 description 1
239000010865 sewage Substances 0.000 description 1
229910001220 stainless steel Inorganic materials 0.000 description 1
239000010935 stainless steel Substances 0.000 description 1
239000000126 substance Substances 0.000 description 1

Landscapes

Oxygen, Ozone, And Oxides In General (AREA)
Devices That Are Associated With Refrigeration Equipment (AREA)

JP25595087A 1987-10-07 1987-10-07 オゾン発生器用冷却装置 Granted JPH0196001A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP25595087A JPH0196001A (ja)	1987-10-07	1987-10-07	オゾン発生器用冷却装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP25595087A JPH0196001A (ja)	1987-10-07	1987-10-07	オゾン発生器用冷却装置

Publications (2)

Publication Number	Publication Date
JPH0196001A JPH0196001A (ja)	1989-04-14
JPH0419164B2 true JPH0419164B2 (de)	1992-03-30

Family

ID=17285830

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP25595087A Granted JPH0196001A (ja)	1987-10-07	1987-10-07	オゾン発生器用冷却装置

Country Status (1)

Country	Link
JP (1)	JPH0196001A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH07100602B2 (ja) *	1987-10-28	1995-11-01	東京エレクトロン九州株式会社	オゾン発生装置
JP2564715B2 (ja) *	1991-08-08	1996-12-18	住友精密工業株式会社	プレート型オゾン発生機
JPH05306106A (ja) *	1992-04-30	1993-11-19	Sumitomo Precision Prod Co Ltd	板型オゾン発生装置
JPH0859212A (ja) *	1994-08-10	1996-03-05	Kawasaki Heavy Ind Ltd	オゾン発生装置及びその運転方法
DE10254049A1 (de) *	2002-11-19	2004-06-03	Wedeco Gesellschaft Für Umwelttechnologie Mbh	Direktgekühlter Ozongenerator

1987
- 1987-10-07 JP JP25595087A patent/JPH0196001A/ja active Granted

Also Published As

Publication number	Publication date
JPH0196001A (ja)	1989-04-14

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