JPH041990B2 - - Google Patents

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Publication number
JPH041990B2
JPH041990B2 JP57093665A JP9366582A JPH041990B2 JP H041990 B2 JPH041990 B2 JP H041990B2 JP 57093665 A JP57093665 A JP 57093665A JP 9366582 A JP9366582 A JP 9366582A JP H041990 B2 JPH041990 B2 JP H041990B2
Authority
JP
Japan
Prior art keywords
magnetic field
ion
orbit
radius
mass spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57093665A
Other languages
Japanese (ja)
Other versions
JPS58209855A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57093665A priority Critical patent/JPS58209855A/en
Publication of JPS58209855A publication Critical patent/JPS58209855A/en
Publication of JPH041990B2 publication Critical patent/JPH041990B2/ja
Granted legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/28Static spectrometers
    • H01J49/32Static spectrometers using double focusing

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Description

【発明の詳細な説明】 本発明は高分子量物質の分析に適する磁場先行
型二重収束質量分析計に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic field leading type double focus mass spectrometer suitable for analyzing high molecular weight substances.

最近、高分子量物質に対する質量分析の要求が
高まつて来た。所で高分子量領域の質量分析を行
う場合次式により磁場中イオン軌道半径amを大
きくする必要がある。
Recently, the demand for mass spectrometry of high molecular weight substances has increased. When performing mass spectrometry in a high molecular weight region, it is necessary to increase the ion orbital radius am in the magnetic field using the following equation.

HOam=143.9√・ こゝに、 HO:磁場強さ(ガウス) am:磁場中イオン軌道半径(cm) M:イオン質量(a,m,a) Vac:イオン加速電圧(ボルト) しかし一般的には磁場中イオン軌道半径を大き
くするためには磁場を発生させる電磁石を大きく
する必要があるから、質量分析計が全体として大
型化、大重量化する。このような状況に鑑み本発
明は高質量域二重収束型質量分析計の小型化を目
的としてなされたものである。
H O am=143.9√・ Here, H O : Magnetic field strength (Gauss) am: Radius of ion orbit in magnetic field (cm) M: Ion mass (a, m, a) Vac: Ion acceleration voltage (volts) However, Generally, in order to increase the radius of an ion's orbit in a magnetic field, it is necessary to increase the size of the electromagnet that generates the magnetic field, which increases the size and weight of the mass spectrometer as a whole. In view of this situation, the present invention has been made with the aim of downsizing a high-mass region double convergence type mass spectrometer.

従来商品化されている質量分析装置は磁場中イ
オン軌道半径am=20cm程度が標準である。この
場合イオン加速電圧1KV、磁場強さ15000ガウス
として4500a.m.uが分析し得る最高質量である。
分析質量範囲はamの二乗に比例して広くなるが、
amを大きくすると従来から用いられている90゜偏
向型の電磁石を用いていたのでは電磁石重量が甚
だ大きくなつてしまう。またトロイダル電極も
amに比例して大きくしなければならないから質
量分析計全体として大へん大型になる。本発明で
は磁場における偏向角を60゜程度にすることによ
りamを増加したにもかゝわらず電磁石の大型化
を避け、更にトロダル電場のイオン軌道半径ae
を0.65×am程度にすることにより、高質量域の
分析に適するようにamを大きくしたにもかゝわ
らず全体的に大型化することを避けるのに成功し
たものであり、amを従来程度にすれば従来装置
より小型化されるものである。
Conventional commercially available mass spectrometers have a standard ion orbit radius of about 20 cm in a magnetic field. In this case, the maximum mass that can be analyzed is 4500 a.mu with an ion acceleration voltage of 1 KV and a magnetic field strength of 15000 Gauss.
The analytical mass range increases in proportion to the square of am, but
If am is increased, the weight of the electromagnet becomes extremely large if a conventionally used 90° deflection type electromagnet is used. Also, toroidal electrodes
Since it has to be made larger in proportion to am, the mass spectrometer as a whole becomes very large. In the present invention, by setting the deflection angle in the magnetic field to about 60°, the size of the electromagnet can be avoided even though am has been increased, and the ion orbital radius ae of the trodal electric field can be reduced.
By setting the am to about 0.65 x am, we succeeded in avoiding increasing the overall size even though we increased the am to make it suitable for analysis in the high mass range. If this is done, the device will be more compact than the conventional device.

しかし単に磁場による偏向角を60゜程度にし、
ae0.65×amにしただけでは一般に相対的小型
化は可能であつても、必ずしも高分解能、高感度
は保証されない。本発明は上述したような設定条
件のもとで更に高分解能及び高感度が得られる各
部の寸法、角度、形状の関係を追求したものであ
る。既に承知のように、二重収束質量分析計の性
能(分解能R)は二次収差係数Aαα,Aαδ,
Aδδ,Ayy,Ayβ,Aββを用いて次式で評価され
る。
However, by simply setting the deflection angle by the magnetic field to about 60°,
Although it is generally possible to achieve relative miniaturization by simply setting ae to 0.65×am, high resolution and high sensitivity are not necessarily guaranteed. The present invention pursues the relationships among the dimensions, angles, and shapes of each part to obtain even higher resolution and sensitivity under the above-mentioned setting conditions. As is already known, the performance (resolution R) of a double-focusing mass spectrometer is determined by the second-order aberration coefficients Aαα, Aαδ,
It is evaluated using the following formula using Aδδ, Ayy, Ayβ, and Aββ.

R=am・Ax/XiSi+Sc+△ ……(1) こゝに Ax:質量分散係数 Xi:像倍率 Si:イオン源スリツト幅 Sc:コレクタースリツト幅 通常、分解能を上げるためにはスリツト幅Si,
Scをせまくして行く。しかしながら△が大きい
とSi,Scをせまくした効果が出ない。こゝで△
は収差と呼ばれ前記二次収差係数を用いて次式で
与えられる。
R=am・Ax/XiSi+Sc+△...(1) where Ax: Mass dispersion coefficient Xi: Image magnification Si: Ion source slit width Sc: Collector slit width Usually, in order to increase the resolution, the slit width Si,
I'm going to make the Sc narrower. However, if △ is large, the effect of narrowing Si and Sc will not be achieved. Here△
is called aberration and is given by the following equation using the second-order aberration coefficient.

△=am(|Aαα|αo2+|Aαδ|αo・δo +|Aδδ|δo2|Ayy|(yo/am)2+ |Ayβ|(yo/am)・βo+|Aββ|βo2
……(2) こゝに αo:軌道平面内でのイオン源スリツトを出たイ
オンビームの拡り角(通常は約1/200) δo:イオンビームのエネルーΔEを加速電圧Vac
で割つた量(通常は1/1000程度) yo:イオン源スリツトの縦方向(軌道面に垂直)
の幅(通常は2〜3mm) βo:イオンビームの縦方向の拡り角(通常は約
1/200) 本発明は上記(2)式によつて二次収差係数を極力
小さくなるように各部の寸法比率、角度、形状の
関係を定めたものである。
△=am(|Aαα|αo 2 +|Aαδ|αo・δo +|Aδδ|δo 2 |Ayy|(yo/am) 2 + |Ayβ|(yo/am)・βo+|Aββ|βo 2
...(2) Here, αo: Divergence angle of the ion beam that exits the ion source slit in the orbital plane (usually about 1/200) δo: Energy of the ion beam ΔE with acceleration voltage Vac
amount divided by (usually about 1/1000) yo: Vertical direction of ion source slit (perpendicular to the orbital plane)
width (usually 2 to 3 mm) βo: Vertical divergence angle of the ion beam (usually about 1/200) In the present invention, each part is It defines the relationship between the dimensional ratio, angle, and shape of.

第1図は本発明の一実施例の平面図で、Mは偏
向磁場を発生する電磁石、TEはトロイダル電極
で、形状、寸法を特徴づけるパラメータの符号を
図示のように定める。S1はイオン源スリツトで
あり、磁場のイオン入射端はイオン軌道面(図の
紙面)内で円弧になつており、イオン出射端はイ
オン軌道とE2の角をなす。電磁石Mとトロイダ
ル電極TEとの間の距離D2,トロイダル電極から
コレクタ電極までの距離D3はS1から電磁石Mの
入射端までの距離D1を定めれば決まる。第2図
はトロイダル電極TEの斜視図で、そのイオン入
射端面、出射端面は夫々第3図に示すように入出
射イオンの中心軌道を含みイオン軌道面に垂直
(第1図の図の面に垂直)な面内で円弧になつて
いる。各パラメータの符号を図のように定める。
この実施例において、 ae=0.65×am φe=90゜ ae/Re1=−0.125 ae/Re2=−0.375 ae/R=0.4375 (こゝでRは第2図に示すR) φm=60゜ am/Rm1=−1.45 E2=−22゜ D1=1.025am 以上のように定めた場合、二次収差係数は Aαα=0.002 Aαδ=0.021 Aδδ=0.166 Ayy=0.022 Ayβ=0.087 Aββ=0.399 となつた。
FIG. 1 is a plan view of an embodiment of the present invention, where M is an electromagnet that generates a deflection magnetic field, TE is a toroidal electrode, and the signs of parameters characterizing the shape and dimensions are determined as shown. S1 is an ion source slit, and the ion input end of the magnetic field forms an arc within the ion orbital plane (the paper plane of the figure), and the ion exit end forms an angle E2 with the ion orbit. The distance D2 between the electromagnet M and the toroidal electrode TE and the distance D3 from the toroidal electrode to the collector electrode are determined by determining the distance D1 from S1 to the incident end of the electromagnet M. Figure 2 is a perspective view of the toroidal electrode TE, and its ion input end face and exit end face are perpendicular to the ion orbital plane (containing the center orbit of the incoming and outgoing ions as shown in Figure 3). It forms an arc in the vertical (vertical) plane. The sign of each parameter is determined as shown in the figure.
In this example, ae=0.65×am φe=90° ae/Re1=-0.125 ae/Re2=-0.375 ae/R=0.4375 (here, R is R shown in Figure 2) φm=60° am/ Rm1=−1.45 E2=−22° D1=1.025am When determined as above, the secondary aberration coefficients were Aαα=0.002 Aαδ=0.021 Aδδ=0.166 Ayy=0.022 Ayβ=0.087 Aββ=0.399.

本発明によれば高分子量領域の分析に適する小
型かつ高分解能の磁場先行型二重収束質量分析計
を得ることができる。
According to the present invention, it is possible to obtain a compact, high-resolution magnetic field-first type double-focus mass spectrometer suitable for analysis in the high molecular weight region.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例装置の平面図、第2
図は同実施例におけるトロイダル電極の斜視図、
第3図は同じくイオン入出射端面の側面図であ
る。 M……電磁石、TE……トロイダル電極。
FIG. 1 is a plan view of an apparatus according to an embodiment of the present invention, and FIG.
The figure is a perspective view of the toroidal electrode in the same example.
FIG. 3 is a side view of the ion input/output end face. M...Electromagnet, TE...Troidal electrode.

Claims (1)

【特許請求の範囲】 1 イオンビームを偏向させる磁場と、この磁場
を通過したイオンビームを更に直角に偏向させる
トロイダル電場との直列配置よりなる磁場先行型
二重収束質量分析計の配置において、下記パラメ
ータを、 0.625ae/am0.675 85゜φe95゜ 55゜φm65゜ −20゜E2−25゜ 0.80D1/am1.20 としたことを特徴とする高質量域二重収束質量分
析計。 記 ae:電場におけるイオン軌道半径 am:磁場におけるイオン軌道半径 φe:電場によるイオン軌道の偏向角 φm:磁場におけるイオン軌道の偏向角 E2:磁場の出射端面のイオン軌道に対する傾き
角 D1:イオン源スリツトから磁場入射端面までの
距離。
[Scope of Claims] 1. In the arrangement of a magnetic field-leading double-focusing mass spectrometer consisting of a series arrangement of a magnetic field that deflects an ion beam and a toroidal electric field that further deflects the ion beam passing through this magnetic field at right angles, the following A high mass region double convergence mass spectrometer characterized in that the parameters are 0.625ae/am0.675 85゜φe95゜ 55゜φm65゜ −20゜E2−25゜ 0.80D1/am1.20. Note ae: Radius of ion orbit in electric field am: Radius of ion orbit in magnetic field φe: Deflection angle of ion orbit due to electric field φm: Deflection angle of ion orbit in magnetic field E2: Inclination angle of magnetic field exit end face with respect to ion orbit D1: Ion source slit Distance from to the magnetic field incidence end face.
JP57093665A 1982-05-31 1982-05-31 High-mass-range double-focused mass spectrometer Granted JPS58209855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57093665A JPS58209855A (en) 1982-05-31 1982-05-31 High-mass-range double-focused mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57093665A JPS58209855A (en) 1982-05-31 1982-05-31 High-mass-range double-focused mass spectrometer

Publications (2)

Publication Number Publication Date
JPS58209855A JPS58209855A (en) 1983-12-06
JPH041990B2 true JPH041990B2 (en) 1992-01-16

Family

ID=14088688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57093665A Granted JPS58209855A (en) 1982-05-31 1982-05-31 High-mass-range double-focused mass spectrometer

Country Status (1)

Country Link
JP (1) JPS58209855A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60254549A (en) * 1984-05-31 1985-12-16 Shimadzu Corp double convergence mass spectrometer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0016561A1 (en) * 1979-03-15 1980-10-01 University Of Manchester Institute Of Science And Technology Mass spectrometers
JPS5719950A (en) * 1980-05-31 1982-02-02 Shimadzu Corp Double focus type mass spectrometer

Also Published As

Publication number Publication date
JPS58209855A (en) 1983-12-06

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