JPH04202064A - Ceramic member-metal member joined body - Google Patents

Ceramic member-metal member joined body

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Publication number
JPH04202064A
JPH04202064A JP33628190A JP33628190A JPH04202064A JP H04202064 A JPH04202064 A JP H04202064A JP 33628190 A JP33628190 A JP 33628190A JP 33628190 A JP33628190 A JP 33628190A JP H04202064 A JPH04202064 A JP H04202064A
Authority
JP
Japan
Prior art keywords
ceramic member
value
surface roughness
ceramic
joined body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33628190A
Other languages
Japanese (ja)
Other versions
JP2936351B2 (en
Inventor
Minoru Suzuki
実 鈴木
Tomoji Ashiura
智士 芦浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
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Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP33628190A priority Critical patent/JP2936351B2/en
Publication of JPH04202064A publication Critical patent/JPH04202064A/en
Application granted granted Critical
Publication of JP2936351B2 publication Critical patent/JP2936351B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To obtain a ceramic member-metal member joined body having high reliability by regulating the surface of a ceramic member to be joined to a metal member to prescribed roughness and carrying out brazing. CONSTITUTION:When a ceramic member 1 is brazed to a metal member 2 to form a joined body, the surface of the ceramic member 1 including the joining start point 3 is ground and polished so as to obtain >=100mum surface roughness (average interval Sm between peaks of the surface roughness curve) and <=70% contact ratio TP in the case of 50% cutting level P of the surface roughness curve. The surface roughness curve is made rough by increasing the Sm value and the gradient of the valleys is reduced by reducing the TP value.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はセラミック部材と金属部材とをろう接した接合
体に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a joined body in which a ceramic member and a metal member are brazed together.

1従来の技(IIj ] 近年、各種の産業機械装置において高荷重かつ高温雰囲
気下で使用される機構部品として、耐熱性、耐食性及び
耐摩耗性に優れ、軽量なセラミ・ツク部材と高強度で加
工性に優れた金属部材とを組み合わせた複合構造体が注
目され、種々のセラミック部材と金属部材の接合体が提
案されている。
1 Conventional technology (IIj) In recent years, as mechanical parts used in various industrial machinery under high loads and high temperature atmospheres, lightweight ceramic materials with excellent heat resistance, corrosion resistance and abrasion resistance, and high strength Composite structures that combine metal members with excellent workability have attracted attention, and various joined bodies of ceramic members and metal members have been proposed.

従来、セラミック部材と金属部材との接合体としては、
研磨加工して平面もしくは凸部を形成したセラミック部
材の接合部にメタライズ処理を施し、該接合部を切削加
工した金属部材の平面もしくは凹部に密着もしくは嵌挿
してろう接し、または嵌合焼き嵌めした接合体が多く採
用されていた。
Conventionally, as a joined body of a ceramic member and a metal member,
A metallization treatment is applied to the joint of a ceramic member that has been polished to form a flat or convex portion, and the joint is closely fitted or inserted into the flat or concave portion of the cut metal member for brazing or shrink-fitting. Many zygotes were used.

とりわけ、セラミック部材と金属部材とを軸継手とする
場合には、両部材の同軸度が厳しく要求されることから
、セラミック部材の金属部材と接合すべき部分の焼成面
をダイヤモンド砥石で研磨仕上げをするのが一般的であ
った(特開昭60−155578号公報参照)。
In particular, when a shaft joint is made of a ceramic member and a metal member, coaxiality of both members is strictly required. Therefore, the fired surface of the part of the ceramic member that is to be joined to the metal member is polished with a diamond grindstone. It was common to do so (see Japanese Patent Application Laid-open No. 155578/1983).

[発明が解決しようとする課題] しかしながら、近年の産業界においては高温度下で耐久
性に優れたセラミック部材と金属部材の複合構造体に対
する要求が年々高まり、従来のダイヤモンド砥石で研磨
仕上げしたセラミック部材を使用した金属部材との接合
体にあっては、その要求を満足することが困難であった
[Problem to be solved by the invention] However, in recent years in the industrial world, the demand for composite structures of ceramic and metal members that have excellent durability under high temperatures has increased year by year, and ceramics polished with a conventional diamond grinding wheel have become increasingly popular. It has been difficult to satisfy this requirement for a joined body using a metal member.

即ち、前記接合体ではセラミック部材と金属部材との同
軸度は比較的高精度に制御できるものの、セラミック部
材と金属部材との接合において、セラミック部材の強度
劣化に及ぼす影響が大きく、接合体としての強度は極め
て不安定で信頬性に乏しいものであった。
In other words, although the coaxiality between the ceramic member and the metal member can be controlled with relatively high accuracy in the above-mentioned joined body, the joining of the ceramic member and the metal member has a large effect on the strength deterioration of the ceramic member, making it difficult to assemble the joined body. The strength was extremely unstable and lacked credibility.

とりわけ、セラミック部材と金属部材との接合において
、セラミック部材の強度は、セラミック部材の表面粗さ
及び表面性状の影響が極めて大であり、本来ならば前記
表面粗さは粗く、かつ表面性状は研磨面より焼成面の方
が望ましいことから、前記両部材の同軸度を得るととも
にセラミック部材の高い強度を保持せんがために、比較
的粗い規格番手のダイヤモンド砥粒を金属や樹脂で固定
したダイヤモンド砥石で研削した後、更に、400番以
上の細かい規格番手の前記同様のダイヤモンド砥石で研
磨仕上げを施していた。
In particular, when joining a ceramic member and a metal member, the strength of the ceramic member is extremely influenced by the surface roughness and surface texture of the ceramic member. Originally, the surface roughness is rough, and the surface texture is polished. Since the fired surface is more desirable than the surface, in order to achieve coaxiality of both components and maintain the high strength of the ceramic component, a diamond abrasive wheel with comparatively coarse standard diamond abrasive grains fixed with metal or resin is used. After grinding, a polishing finish was further performed using the same diamond grindstone as described above with a fine standard grit of No. 400 or higher.

しかしながら、前記研磨仕上げでは、多数の微細な研削
条痕が残留し、未だ接合時にセラミック部材にかかる金
属部材の応力集中を一様に軽減することができず、ひい
ては安定した高い強度が得られないという課題があった
However, with the polishing described above, many fine grinding marks remain, and it is still not possible to uniformly reduce the stress concentration of the metal member applied to the ceramic member during bonding, and as a result, stable high strength cannot be obtained. There was a problem.

(課題を解決するための手段j 本発明のセラミック部材と金属部材の接合体は、セラミ
ック部材と金属部材をろう接してなる接合体において、
セラミ・7り部材の金属部材と接合すべき部分を含む近
辺、即ち、少なくともセラミック部材と金属部材との接
合部及び非接合部の境界である接合起点部を含むセラミ
ック部材の表面粗さが、表面粗さ曲線の平均歯間隔Sm
値(以下、Sm値という)で100 l1m以上、かつ
表面粗さ曲線の切断レベルP値(以下、P値という)が
50%の時の接触比TP値(以下、TP値という)で7
0%以下であることを特徴とするものである。
(Means for Solving the Problems j) A joined body of a ceramic member and a metal member of the present invention is a joined body formed by brazing a ceramic member and a metal member.
The surface roughness of the ceramic member including the vicinity of the part of the ceramic member to be joined to the metal member, that is, at least the joining starting point which is the boundary between the joining part and the non-joining part between the ceramic member and the metal member, Average tooth spacing Sm of surface roughness curve
The contact ratio TP value (hereinafter referred to as TP value) when the value (hereinafter referred to as Sm value) is 100 l1m or more and the cutting level P value (hereinafter referred to as P value) of the surface roughness curve is 50% is 7.
It is characterized by being 0% or less.

[実施例1 以下、本発明の詳細な説明する。[Example 1 The present invention will be explained in detail below.

第1図は本発明に係るセラミック部材と金属部材の接合
体を示す一部破断面図であり、第2図は本発明の接合体
をラジアル型ローターに適用した 3 一 実施例を示す一部破断面図であろう 第1図及び第2図において、Llaは金属部材2゜2a
に設けた四部4にろう接したセラミック部材で、3はセ
ラミック部材1,1aと金属部材2,2aとの接合部5
及び非接合部6の境界である接合起点部である。
FIG. 1 is a partially cutaway cross-sectional view showing a joined body of a ceramic member and a metal member according to the present invention, and FIG. 2 is a partially cutaway view showing an embodiment in which the joined body of the present invention is applied to a radial rotor. In FIGS. 1 and 2, which are probably fractured cross-sectional views, Lla is the metal member 2° 2a.
3 is a ceramic member soldered to four parts 4 provided at the joint part 5 between the ceramic member 1, 1a and the metal member 2, 2a.
and a joining starting point which is the boundary of the non-joining part 6.

上記の如きセラミック部材1,1aと金属部材2,2a
の接合体は、両部材の同軸度を確保するとともに、安定
した高い強度を得るために、セラミック部材1.laの
金属部材2,2aと接合すべき部分を含む近辺、即ち、
少なくともセラミック部材1.1aと金属部材2,2a
との接合部5及び非接合部6の境界である接合起点部3
を含むセラミック部材1.laの表面粗さが、表面粗さ
曲線のSm値で100μm以上、かつP値が50%の時
のTP値を70%以下となるように研磨仕上げしたもの
である。
Ceramic members 1, 1a and metal members 2, 2a as described above
In order to ensure the coaxiality of both members and to obtain stable and high strength, the joined body is made of ceramic member 1. The vicinity including the part to be joined with the metal members 2 and 2a of la, that is,
At least the ceramic member 1.1a and the metal members 2, 2a
The joining starting point 3 is the boundary between the joining part 5 and the non-joining part 6.
Ceramic member including 1. The surface roughness of la is polished so that the Sm value of the surface roughness curve is 100 μm or more, and the TP value when the P value is 50% is 70% or less.

ここでSm値は、表面粗さ計にて測定した少なくともセ
ラミック部材1,1aの前記接合起点部3を含む表面の
表面粗さ曲線から算出した、ある測定長さしく以下、L
という)の範囲内の表面粗さ曲線の平均線が横切る、山
から谷へ向がう点がら、次の山から谷へ向かう横断点ま
での各間隔の平均値である。
Here, the Sm value is calculated from the surface roughness curve of the surface including at least the bonding starting point 3 of the ceramic members 1, 1a measured with a surface roughness meter, and is calculated from the surface roughness curve of the surface including the bonding starting point 3 of the ceramic members 1, 1a.
It is the average value of each interval between the point where the average line of the surface roughness curve intersects within the range (from the peak to the valley) and the point where the average line crosses the surface roughness curve from the next peak to the valley.

従って、Sm値が大きい程、表面粗さの曲線は粗である
ことを示し、それだけ山と谷の起伏数が少ないことを意
味する。また、Sm値が小さい程、表面粗さ曲線は密で
あることを示し、山と谷の起伏数が極めて多いことを意
味する。
Therefore, the larger the Sm value, the rougher the surface roughness curve, which means that the number of peaks and valleys is smaller. Furthermore, the smaller the Sm value, the denser the surface roughness curve, which means that the number of undulations of peaks and valleys is extremely large.

また、TP値は前記表面粗さ曲線のLにおける一番高い
山から一番深い谷までの深さを100%とし、一番高い
山からの各位置、即ちP%において、表面粗さ曲線の冬
山を横切る長さの合計とLとの比を百分率で表示したも
のである。
In addition, the TP value is defined as the depth from the highest peak to the deepest valley in L of the surface roughness curve as 100%, and at each position from the highest peak, that is, P%, of the surface roughness curve. The ratio between the total length of crossing the winter mountain and L is expressed as a percentage.

即ち、あるP値におけるTP値が小さい程、谷の勾配が
小さく、TP値が大きい程、谷の勾配が極めて大きいこ
とを意味している。
That is, the smaller the TP value at a certain P value, the smaller the slope of the valley, and the larger the TP value, the more extremely large the slope of the valley.

以上の結果、Sm値が大で、がっTP値が小であること
は、セラミック部材の表面の研磨条痕の形態が、山と谷
の起伏数が少なく、かつ谷の勾配が小さいこと、即ち、
それだけセラミック部材の破壊−8〜 の起点となり得る切り欠き部が少なくなり、前述のよう
な応力集中が発生し難くなる。
As a result of the above, the reason why the Sm value is large and the GaTP value is small is that the form of the polishing streaks on the surface of the ceramic member has a small number of undulating peaks and valleys, and a small gradient of the valleys. That is,
Accordingly, the number of notches that can become a starting point for fracture of the ceramic member is reduced, and stress concentration as described above is less likely to occur.

故に、Sm値は100μm以上で、かつP値が50%の
時のTP値が70%以下であること、またSm値が15
0μm以上で、かつP値が50%の時のTP値が50%
以下であればより好ましい。
Therefore, when the Sm value is 100 μm or more and the TP value is 70% or less when the P value is 50%, and the Sm value is 15
TP value is 50% when it is 0μm or more and P value is 50%
It is more preferable if it is below.

次に、本発明に係るセラミック部材と金属部材の接合体
を、第1図及び第2図に示す実施例により具体的に詳述
する。
Next, a joined body of a ceramic member and a metal member according to the present invention will be specifically described in detail with reference to an embodiment shown in FIGS. 1 and 2.

(実施例1 ) 窒化珪素(5i3N4)を主成分とし、焼結助剤として
イツトリア(Y2O3) 、酸化タングステン(tJO
,)等から成り、窒素雰囲気中で焼成された窒化珪素質
焼結体を、先づ、600番規格相当より粗粒のダイヤモ
ンド砥粒を金属等で結合したダイヤモンド砥石を使用し
、万能研削盤により前記焼結体の外周を研削する。
(Example 1) The main component is silicon nitride (5i3N4), and itria (Y2O3) and tungsten oxide (tJO) are used as sintering aids.
, ), etc., fired in a nitrogen atmosphere, is first ground using a universal grinder using a diamond whetstone in which diamond abrasive grains coarser than No. 600 are bonded with metal, etc. The outer periphery of the sintered body is ground.

次に、400番規格相当より粗粒の砥粒を弾性を有する
材料で結合した砥石で研磨条件を種々に変化させて研磨
仕上げし、直径13mm、長さ50mmの第1図に示す
ような円柱状のセラミック部材1を得た。
Next, polishing was carried out using a whetstone made of abrasive grains coarser than the No. 400 standard combined with an elastic material under various polishing conditions to form a circle with a diameter of 13 mm and a length of 50 mm as shown in Figure 1. A columnar ceramic member 1 was obtained.

一方、金属部材として38%Ni、15%Co、残部F
eから成るニッケル系合金材を使用し、内径がセラミッ
ク部材1の外径とのクリアランスを10〜100μmと
なるように、また凹部4のセラミック部材1との接合部
長さが約6mmとなるように現物合わせしながら切削加
工して外径16mm、長さ50n+mの金属部材2を得
た。
On the other hand, as a metal member, 38% Ni, 15% Co, and the balance F
A nickel-based alloy material consisting of e is used, and the inner diameter is set so that the clearance with the outer diameter of the ceramic member 1 is 10 to 100 μm, and the joint length of the recess 4 with the ceramic member 1 is about 6 mm. A metal member 2 having an outer diameter of 16 mm and a length of 50 n+m was obtained by cutting while matching the actual parts.

次いで、セラミック部材1を金属部材2に嵌挿した後、
接合部をBAg−8規格の銀ろうを使用し、加熱処理し
てろう接し、評価用の接合体を得た。
Next, after inserting the ceramic member 1 into the metal member 2,
The joint portion was heat-treated and soldered using BAg-8 standard silver solder to obtain a joined body for evaluation.

かくして得られた評価用のセラミック部材と金属部材の
接合体について、該接合体の金属部材2を試験機のチャ
ックに把持して、突出せるセラミック部材1の先端を上
部より加圧し、破断した時の荷重から算出した片持抗折
強度値を接合体の必要強度σ。の倍数として表示し、常
温の片持抗折強度σを評価した。
When the thus obtained joined body of the ceramic member and metal member for evaluation was held, the metal member 2 of the joined body was held in the chuck of the testing machine, and the protruding tip of the ceramic member 1 was pressurized from above to break. The cantilever bending strength value calculated from the load is the required strength σ of the joint. The cantilever bending strength σ at room temperature was evaluated.

また、セラミンク部材1の表面粗さは、接合前のセラミ
ック部材1の表面を金属部材2との接合起点部3を含む
ように表面粗さ計で測定し、得られた表面粗さ曲線から
Sm値及びP値が50%の時のTP値を算出した。
The surface roughness of the ceramic member 1 is determined by measuring the surface of the ceramic member 1 before joining with a surface roughness meter so as to include the joining starting point 3 with the metal member 2, and from the obtained surface roughness curve Sm The TP value when the value and P value were 50% was calculated.

本発明に係る接合体で、代表的なセラミック部材の表面
粗さ曲線を第3図に、P値とTP値の関係図を第4図に
示す。
FIG. 3 shows a surface roughness curve of a typical ceramic member of the joined body according to the present invention, and FIG. 4 shows a relationship between the P value and the TP value.

尚、前記と同様にして、400番規格相当のダイヤモン
ド砥粒を金属等で結合したダイヤモンド砥石により研磨
仕上げしたセラミック部材を用いた接合体を比較例とし
た。本比較例のセラミック部材の表面粗さ曲線を第5図
に、P値とTP値の関係を第6図に示す。
In the same manner as described above, a bonded body using a ceramic member polished with a diamond grindstone in which diamond abrasive grains equivalent to the No. 400 standard were bonded with metal or the like was used as a comparative example. FIG. 5 shows the surface roughness curve of the ceramic member of this comparative example, and FIG. 6 shows the relationship between the P value and the TP value.

以上の結果を第1表に示す。The above results are shown in Table 1.

(以下余白) 第1表 −I  O− 第1表より明らかなように、比較例及びSm値またはT
P値のいづれか一方のみ満足する試料番号のものでは、
いづれも片持抗折強度が接合体の必要強度σ。を下回り
、セラミック部材の強度が不安定であるのに対して、本
発明のセラミック部材と金属部材の接合体では、いづれ
も片持抗折強度は接合体の必要強度σ0を上回り、極め
て安定した接合が得られていることを確認した。
(Left below) Table 1 -I O- As is clear from Table 1, comparative examples and Sm values or T
For sample numbers that satisfy only one of the P values,
In both cases, the cantilever bending strength is the required strength σ of the joined body. , the strength of the ceramic member is unstable, whereas the cantilever bending strength of the joined body of the ceramic member and metal member of the present invention exceeds the required strength σ0 of the joined body, and is extremely stable. It was confirmed that bonding was achieved.

尚、表面粗さ計で測定した前記それぞれの表面粗さ曲線
から、中心線平均粗さRa及び最大高さRmaxを求め
、片持抗折強度と比較検討したところ、相関関係がなく
、片持抗折強度値が大きくバラツクごとを確認した。
In addition, when the center line average roughness Ra and the maximum height Rmax were determined from each of the above-mentioned surface roughness curves measured with a surface roughness meter and compared with the cantilever bending strength, there was no correlation. Large variations in bending strength values were confirmed.

(実施例2) 窒化珪素質焼結体より成る第2図に示す様なセラミック
部材1aであるラジアル型ロークーの凸部7を、金属製
の回転軸8に接合した前記同様のニッケル系合金材−か
ら成る金属部材2aの凹部4に嵌挿した後、BAg−8
規格相当の銀ろうを使用してろう接する。
(Example 2) A nickel-based alloy material similar to the above, in which a radial-type low-coupled convex portion 7, which is a ceramic member 1a as shown in FIG. 2 made of a silicon nitride sintered body, is joined to a metal rotating shaft 8. - After fitting into the recess 4 of the metal member 2a consisting of BAg-8
Solder using silver solder equivalent to the standard.

次いで、金属製回転軸8と一体化したセラミックターボ
ローターをバランス修正した後、高温での高速回転試験
を行い、必要回転数N。でのラジアル型ローターの破壊
の有無を確認し、破壊したものは必要回転数N0の倍数
で表示し、高速回転の評価をした。
Next, after correcting the balance of the ceramic turbo rotor integrated with the metal rotating shaft 8, a high-speed rotation test at high temperature was conducted to determine the required rotation speed N. The presence or absence of damage to the radial rotor was confirmed, and the damaged rotors were expressed as a multiple of the required rotational speed N0 to evaluate high-speed rotation.

また、接合前のラジアル型ローターの凸部7の表面を、
実施例1と同様にして表面粗さを測定し、Sm値とTP
値を求めた。
In addition, the surface of the convex part 7 of the radial type rotor before joining is
The surface roughness was measured in the same manner as in Example 1, and the Sm value and TP
I found the value.

尚、実施例1と同様にして研磨仕上げしたセラミックラ
ジアル型ローターを金属製回転軸に接合したものを比較
例とした。
As a comparative example, a ceramic radial type rotor polished in the same manner as in Example 1 was joined to a metal rotating shaft.

以上の結果を第2表に示す。The above results are shown in Table 2.

(以下余白) = 11− 第2表 本字 北fii例 −12= 尚、実施例1及び2では、セラミック部材の接合部にメ
タライズ金属層を形成せずに金属部材とろう接したが、
メタライズ金属層を形成してろう接した接合体であって
も、実施例1及び2と同様な結果が得られることを確認
している。
(Margins below) = 11- Table 2 main character Kita fii example - 12 = In Examples 1 and 2, the ceramic members were brazed to the metal members without forming a metallized metal layer at the joint portion, but
It has been confirmed that the same results as in Examples 1 and 2 can be obtained even with a bonded body in which a metallized metal layer is formed and soldered.

[発明の効果] 以上、詳細に説明したように、本発明のセラミック部材
と金属部材の接合体によれば、セラミック部材の少なく
とも金属部材との接合起点部を含む表面粗さが、表面粗
さ曲線のSm値で100μm以上、かつP値が50%の
時のTP値で70%以下であることから、セラミック部
材表面の研磨条痕の形態とあいまって、該セラミック部
材は繰り返し応力や熱応力に対しても、高い強度を安定
して確保することができる他、セラミック部材と金属部
材の同軸度も高い精度で得ることができ、軸継手とした
回転体ではバランス修正が極めて容易にできる等、信顧
性の高いセラミック部材と金属部材の接合体を得ること
ができる。
[Effects of the Invention] As described above in detail, according to the joined body of a ceramic member and a metal member of the present invention, the surface roughness of the ceramic member including at least the joining starting point with the metal member is equal to the surface roughness. Since the Sm value of the curve is 100 μm or more and the TP value is 70% or less when the P value is 50%, combined with the form of the polishing marks on the surface of the ceramic member, the ceramic member is susceptible to repeated stress and thermal stress. In addition to stably securing high strength, it is also possible to achieve highly accurate coaxiality between the ceramic member and the metal member, and it is extremely easy to correct the balance of a rotating body used as a shaft coupling. , a highly reliable joined body of a ceramic member and a metal member can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係るセラミック部材と金属部材の接合
体を示す一部破断面図、第2図は本発明のセラミック部
材と金属部材の接合体をラジアル型ローターに適用した
実施例を示す一部破断面図、第3図は本発明に係る接合
体の代表的なセラミンク部材の表面粗さ曲線を示す図、
第4図は第3図の表面粗さ曲線から求めたP値とTP値
の関係を示す図、第5図は比較例のセラミック部材の表
面粗さ曲線を示す図、第6図は第5図の表面粗さ曲線か
ら求めたP値とTP値の関係を示す図である。 1.1a ・・・  セラミック部材 2.2a ・・・  金属部材 3  ・・・  接合起点部
FIG. 1 is a partially broken sectional view showing a joined body of a ceramic member and a metal member according to the present invention, and FIG. 2 shows an example in which the joined body of a ceramic member and a metal member of the present invention is applied to a radial rotor. A partially broken cross-sectional view, FIG. 3 is a diagram showing a surface roughness curve of a typical ceramic member of the joined body according to the present invention,
FIG. 4 is a diagram showing the relationship between the P value and TP value obtained from the surface roughness curve in FIG. 3, FIG. 5 is a diagram showing the surface roughness curve of a ceramic member of a comparative example, and FIG. It is a figure which shows the relationship between the P value and TP value calculated|required from the surface roughness curve of a figure. 1.1a...Ceramic member 2.2a...Metal member 3...Joining starting point

Claims (1)

【特許請求の範囲】[Claims] セラミック部材と金属部材をろう接してなる接合体にお
いて、前記セラミック部材は少なくとも金属部材との接
合起点部を含む表面が、表面粗さ曲線の平均山間隔Sm
値で100μm以上、かつ前記表面粗さ曲線の切断レベ
ルP値が50%である時の接触比TP値で70%以下の
表面粗さを有することを特徴とするセラミック部材と金
属部材の接合体。
In a joined body formed by brazing a ceramic member and a metal member, the surface of the ceramic member including at least the joining starting point with the metal member has an average pitch Sm of a surface roughness curve.
A joined body of a ceramic member and a metal member, characterized by having a surface roughness of 100 μm or more in terms of value and a contact ratio TP value of 70% or less when the cutting level P value of the surface roughness curve is 50%. .
JP33628190A 1990-11-29 1990-11-29 Joint of ceramic member and metal member Expired - Lifetime JP2936351B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33628190A JP2936351B2 (en) 1990-11-29 1990-11-29 Joint of ceramic member and metal member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33628190A JP2936351B2 (en) 1990-11-29 1990-11-29 Joint of ceramic member and metal member

Publications (2)

Publication Number Publication Date
JPH04202064A true JPH04202064A (en) 1992-07-22
JP2936351B2 JP2936351B2 (en) 1999-08-23

Family

ID=18297491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33628190A Expired - Lifetime JP2936351B2 (en) 1990-11-29 1990-11-29 Joint of ceramic member and metal member

Country Status (1)

Country Link
JP (1) JP2936351B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5643483A (en) * 1994-04-11 1997-07-01 Shin-Etsu Chemical Co., Ltd. Ceramic heater made of fused silica glass having roughened surface
JP2017178665A (en) * 2016-03-30 2017-10-05 京セラ株式会社 Porous ceramic, gas dispersion sheet and member for absorption

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5643483A (en) * 1994-04-11 1997-07-01 Shin-Etsu Chemical Co., Ltd. Ceramic heater made of fused silica glass having roughened surface
JP2017178665A (en) * 2016-03-30 2017-10-05 京セラ株式会社 Porous ceramic, gas dispersion sheet and member for absorption

Also Published As

Publication number Publication date
JP2936351B2 (en) 1999-08-23

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