JPH0420229U - - Google Patents
Info
- Publication number
- JPH0420229U JPH0420229U JP6205190U JP6205190U JPH0420229U JP H0420229 U JPH0420229 U JP H0420229U JP 6205190 U JP6205190 U JP 6205190U JP 6205190 U JP6205190 U JP 6205190U JP H0420229 U JPH0420229 U JP H0420229U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- cleaning device
- processing tank
- tank
- blocking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
第１図は本考案の洗浄装置の処理槽部の一実施
例を示す主要断面図。第２図は従来の洗浄装置の
処理槽部を示す主要断面図。 １……処理槽、２……フタ、３……フタ、４…
…外槽、５……局所排気口、６……搬送ロボツト
。
例を示す主要断面図。第２図は従来の洗浄装置の
処理槽部を示す主要断面図。 １……処理槽、２……フタ、３……フタ、４…
…外槽、５……局所排気口、６……搬送ロボツト
。
Claims (1)
- 洗浄装置の処理槽において、外槽の開口部に処
理槽のフタと連動した蓋を設けることにより、局
所排気装置の排気量を少なくし、薬液の雰囲気を
遮断することを特徴とする洗浄装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6205190U JPH0420229U (ja) | 1990-06-12 | 1990-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6205190U JPH0420229U (ja) | 1990-06-12 | 1990-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0420229U true JPH0420229U (ja) | 1992-02-20 |
Family
ID=31590851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6205190U Pending JPH0420229U (ja) | 1990-06-12 | 1990-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420229U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |
-
1990
- 1990-06-12 JP JP6205190U patent/JPH0420229U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |