JPH042039U - - Google Patents
Info
- Publication number
- JPH042039U JPH042039U JP1990041817U JP4181790U JPH042039U JP H042039 U JPH042039 U JP H042039U JP 1990041817 U JP1990041817 U JP 1990041817U JP 4181790 U JP4181790 U JP 4181790U JP H042039 U JPH042039 U JP H042039U
- Authority
- JP
- Japan
- Prior art keywords
- wafer case
- semi
- edges
- lid
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図ａは、本考案の一実施例のウエハーケー
スの内部斜視図である。第１図ｂは、第１図ａウ
エハーケースの内部斜視図をＹ方向に切つた場合
の断面図である。第２図は、従来のウエハーケー
スの外観概略図である。第３図ａは、従来のウエ
ハーケースの内部斜視図である。第３図ｂは第３
図ａの従来のウエハーケースの内部斜視図をＹ方
向に切つた場合の断面図である。
ａ……ウエハー、ｂ……仕切り板、ｃ……ｙ方
向、ｄ……ｘ方向、ａ′……蓋、ｂ′……ウエハ
ー、ｃ′……レール状の仕切り、ｄ′……ｙ方向
、ｃ′……ｘ方向。
FIG. 1a is an internal perspective view of a wafer case according to an embodiment of the present invention. FIG. 1b is a cross-sectional view of the internal perspective view of the wafer case of FIG. 1a taken in the Y direction. FIG. 2 is a schematic external view of a conventional wafer case. FIG. 3a is an internal perspective view of a conventional wafer case. Figure 3b is the third
FIG. 3 is a cross-sectional view of the internal perspective view of the conventional wafer case shown in FIG. a taken in the Y direction. a...Wafer, b...Partition plate, c...Y direction, d...X direction, a'...Lid, b'...Wafer, c'...Rail-shaped partition, d'...Y direction , c′...x direction.
Claims (1)
状で、上面に蓋を有するウエハーケースにおいて
、前記ウエハーケース内部に半円状の板の両面の
上辺を除く縁に凸部を持つた複数の仕切り板を設
けた事を特徴とするウエハーケース。 In a semi-cylindrical wafer case used for carrying and storing wafers and having a lid on the top surface, a plurality of partition plates each having convex portions on the edges of both sides of the semi-circular plate except for the upper edges are installed inside the wafer case. A wafer case characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990041817U JPH042039U (en) | 1990-04-19 | 1990-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990041817U JPH042039U (en) | 1990-04-19 | 1990-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH042039U true JPH042039U (en) | 1992-01-09 |
Family
ID=31552813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990041817U Pending JPH042039U (en) | 1990-04-19 | 1990-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042039U (en) |
-
1990
- 1990-04-19 JP JP1990041817U patent/JPH042039U/ja active Pending
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