JPH0420741B2 - - Google Patents
Info
- Publication number
- JPH0420741B2 JPH0420741B2 JP59113716A JP11371684A JPH0420741B2 JP H0420741 B2 JPH0420741 B2 JP H0420741B2 JP 59113716 A JP59113716 A JP 59113716A JP 11371684 A JP11371684 A JP 11371684A JP H0420741 B2 JPH0420741 B2 JP H0420741B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- grindstone
- rotating shaft
- axis
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Description
【発明の詳細な説明】
イ 発明の目的
産業上の利用分野
本発明は定圧研磨装置に関するものであり、更
に詳しくは工作機械の主軸に装着された研磨工具
本体、殊にその砥石回転軸を研磨工具本体の軸心
と直交する方向(X軸、Y軸方向)および研磨工
具本体の軸心方向(Z軸方向)に変位自在に支承
し、該砥石回転軸と研磨工具の本体との間に自動
原点復帰機構を形成せしめた定圧研磨装置に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION A. Object of the Invention Industrial Application Field The present invention relates to a constant pressure polishing device, and more specifically, it is used for polishing a polishing tool body mounted on the main shaft of a machine tool, particularly a grindstone rotating shaft thereof. Supported so as to be freely displaceable in directions perpendicular to the axis of the tool body (X-axis, Y-axis direction) and in the axis direction of the polishing tool body (Z-axis direction), and between the grindstone rotating shaft and the body of the polishing tool. The present invention relates to a constant pressure polishing device that has an automatic origin return mechanism.
従来の技術
自由曲面を有するワークの加工、例えば金型の
製作に際しては、普通まず倣いフライス盤もしく
はマシニングセンタ等の工作機械により荒仕上げ
を施し、この後ハンドグラインター等の手動工具
により平滑化加工、所謂、表面研磨加工を施す。
荒仕上げに際しては高度に自由化された工作機械
を使用するため、極めて能率の高い自動加工が可
能である。反面、表面研磨加工に於いては作業者
の手仕上げに依存しているのが実状であり、表面
研磨加工工程を自動化し、作業能率と製品の寸法
的な精度を向上させようとする強い要望があつ
た。当然、斯かる表面研磨加工工程の自由化の要
請に対して種々の方策が提案されている。その一
例として数値制御工作機械の主軸に研磨工具を装
着し、主軸の回転によりワーク、例えば前記金型
の表面に研磨加工を施す方法が挙げられる。Conventional technology When processing a workpiece with a free-form surface, for example, when manufacturing a mold, a rough finish is first performed using a machine tool such as a copy milling machine or a machining center, and then a smoothing process is performed using a manual tool such as a hand grinder. , surface polishing is applied.
Since highly liberalized machine tools are used for rough finishing, extremely efficient automatic processing is possible. On the other hand, the reality is that surface polishing relies on manual finishing by workers, and there is a strong desire to automate the surface polishing process to improve work efficiency and product dimensional accuracy. It was hot. Naturally, various measures have been proposed in response to the request for liberalization of the surface polishing process. One example is a method in which a polishing tool is attached to the main shaft of a numerically controlled machine tool, and the surface of a workpiece, for example, the mold, is polished by rotation of the main shaft.
発明が解決しようとする問題
上記数値制御工作機械を利用するワーク表面の
研磨加工に於いては、研磨工具の砥石回転軸の移
動指令は、該ワークの加工プログラムに予めイン
プツトされているが、以下に詳述する理由により
砥石回転軸を加工プログラムの指示通りに移動さ
せただけでは実用上満足し得る寸法精度を有する
研磨加工仕上げ面が得られない。まず、砥石は一
般に切削工具に比較して剛性が低く、且つ、砥石
の摩耗速度は汎用の切削工具の摩耗速度よりも桁
違いに大きい。このため、研磨工具に切削工具と
同一の移動軌跡を与えても摩耗による砥石形状の
経時変化により、実質上空研磨状態になつてしま
う場合が少なくない。また、砥石を使用する研磨
機構に於いては、砥石の表面とワークの表面の間
に接触圧を与えながらワークの表面に対し砥石を
相対移動させることにより初めて切粉の排出機能
が保証される。このため、理想的には砥石とワー
クの間に常に一定の接触圧が作用するように研磨
条件を調整することが望ましいが、前記の如く砥
石自身が可成りの弾性を有し、しかも摩耗の進行
による砥石形状の変化が不規則であるため、前記
接触圧を一定に維持することは実際問題として殆
ど不可能である。Problem to be Solved by the Invention In polishing the surface of a workpiece using the numerically controlled machine tool mentioned above, the movement command for the grinding wheel rotation axis of the polishing tool is input in advance into the machining program of the workpiece. For the reasons explained in detail in Section 1, it is not possible to obtain a polished surface with practically satisfactory dimensional accuracy simply by moving the grindstone rotation axis as instructed by the machining program. First, grindstones generally have lower rigidity than cutting tools, and the wear rate of grindstones is orders of magnitude higher than the wear rate of general-purpose cutting tools. For this reason, even if the polishing tool is given the same movement locus as the cutting tool, the shape of the grindstone changes over time due to wear, often resulting in a substantially empty polishing state. In addition, in a polishing mechanism that uses a grindstone, the chip discharge function is only guaranteed by moving the grindstone relative to the surface of the workpiece while applying contact pressure between the surface of the grindstone and the surface of the workpiece. . Therefore, ideally, it is desirable to adjust the polishing conditions so that a constant contact pressure always acts between the grinding wheel and the workpiece, but as mentioned above, the grinding wheel itself has considerable elasticity, and it also prevents wear. Since the shape of the grindstone changes irregularly as it progresses, it is practically impossible to maintain the contact pressure constant.
本発明の主要の目的は、ワークと砥石の間に付
与される接触圧を常に一定の水準に維持し、前加
工工程で得られたワークの寸法精度をでき得る限
り低下せしめることなく定圧研磨する新規な研磨
装置を提供することにある。 The main purpose of the present invention is to always maintain the contact pressure applied between the workpiece and the grindstone at a constant level, and perform constant pressure polishing without reducing the dimensional accuracy of the workpiece obtained in the pre-processing process as much as possible. The object of the present invention is to provide a new polishing device.
ロ 発明の構成
問題点を解決するための手段
本発明は、工作機械の主軸に装着された研磨工
具本体1と、上記研磨工具本体1内に、研磨工具
本体1の軸心方向に移動可能で、かつ、先端方向
に常時弾圧付勢されて装着されたホルダー7と、
上記ホルダー7に装着された砥石回転軸2とから
なり、上記砥石回転軸2の胴部に該砥石回転軸2
の軸線に対して直交する方向に延びる円板状のフ
ランジ5を形成すると共に、該フランジ5の砥石
側の側面に前記砥石回転軸2と軸心を一致させて
円錐状のボール受け面8を連接し、上記フランジ
5の両側面を鋼球8b,8aによつてホルダー7
の軸心に対して直交する方向に移動可能に保持す
ると共に、上記円錐状のボール受け面6にバネ付
勢された3個以上、等間隔に配置された鋼球9を
当接させた定圧研磨装置を要旨とするものであ
る。B. Means for Solving Problems in the Structure of the Invention The present invention includes a polishing tool body 1 mounted on the main shaft of a machine tool, and a polishing tool body 1 that is movable in the axial direction of the polishing tool body 1. , and a holder 7 attached with constant pressure biased in the direction of the tip;
It consists of a whetstone rotating shaft 2 mounted on the holder 7, and the whetstone rotating shaft 2 is attached to the body of the whetstone rotating shaft 2.
A disk-shaped flange 5 extending in a direction perpendicular to the axis of the flange 5 is formed, and a conical ball receiving surface 8 is provided on the side surface of the flange 5 on the grinding wheel side with its axis aligned with the grinding wheel rotating shaft 2. A holder 7 is attached to both sides of the flange 5 by steel balls 8b and 8a.
The ball is held movably in a direction perpendicular to the axis of the ball and at least three spring-loaded steel balls 9 arranged at equal intervals are brought into contact with the conical ball receiving surface 6 at a constant pressure. This article focuses on polishing equipment.
実施例
第1図は本発明に係る定圧研磨装置の部分縦断
面図であり、第2図は円形砥石によるワーク表面
の研磨状態の模式的な説明図である。第1図に於
いて参照番号1は研磨工具の本体を表示し、図示
しはないツールシヤンク部を工作機械、例えばマ
シニングセンタの主軸に形成されたツール嵌着孔
の形状に合せることにより該工作機械の主軸に装
着することができる。例示する砥石回転軸2は中
空円筒状の筒体4′と、筒体4′内に回転可能に指
示された先端に砥石4を有する回転軸4″とで構
成されており、筒体4′の内部に回転軸4″を駆動
するための駆動機構が内蔵されており、筒体4′
の基端部に圧縮空気の導入口3を開口させてい
る。圧縮空気の導入口3から筒体4′内に導入さ
れた圧縮空気は、先端に砥石4を固着してある回
転軸4″を高速回転させる。この型式の駆動機構
を採用することによつて砥石4は10000RPM以上
の高速で駆動され、図示しないワークの自由曲面
に研磨負荷を伝達する。砥石回転軸2を構成する
筒体4′の胴部には、該砥石回転軸の軸線に対し
て直交する方向に延びる円板状のフランジ5が形
成されており、また該フランジの砥石側の側面上
には、前記砥石回転軸2と軸心を一致せしめて円
錐状のボール受け面6が連接されている。而して
前記フランジ5の前面14および後面15は、ホ
ルダー7内に遊合支持された状態で同一円周上に
略等間隔で配置された複数個の鋼球8bと、フラ
ンジ5を挾み込むように前記鋼球8bに対向配置
された鋼球8aによつて支持され、砥石回転軸2
に、研磨工具本体1の軸心と直交するXY平面内
での自由な移動を許容している。Embodiment FIG. 1 is a partial vertical cross-sectional view of a constant pressure polishing apparatus according to the present invention, and FIG. 2 is a schematic explanatory diagram of a state in which a workpiece surface is polished by a circular grindstone. In FIG. 1, reference number 1 indicates the main body of the polishing tool, and the tool shank portion (not shown) is fitted to the shape of a tool fitting hole formed in the main shaft of a machine tool, for example, a machining center. Can be attached to the main shaft. The illustrated grindstone rotating shaft 2 is composed of a hollow cylindrical body 4', and a rotating shaft 4'' having a whetstone 4 at its tip rotatably positioned inside the cylinder 4'. A drive mechanism for driving the rotating shaft 4'' is built into the cylindrical body 4'.
A compressed air inlet 3 is opened at the proximal end of the cylinder. The compressed air introduced into the cylinder 4' from the compressed air inlet 3 causes the rotating shaft 4'', which has a grinding wheel 4 fixed to its tip, to rotate at high speed.By adopting this type of drive mechanism, The grindstone 4 is driven at a high speed of 10,000 RPM or higher, and transmits the polishing load to the free-form surface of the workpiece (not shown). A disk-shaped flange 5 is formed extending in a perpendicular direction, and a conical ball receiving surface 6 is connected to the grindstone-side side surface of the flange with its axis aligned with the grindstone rotating shaft 2. The front surface 14 and rear surface 15 of the flange 5 are fitted with a plurality of steel balls 8b, which are loosely supported in the holder 7 and arranged at approximately equal intervals on the same circumference, and the flange 5. The grindstone rotating shaft 2
In addition, it allows free movement within the XY plane orthogonal to the axis of the polishing tool body 1.
一方、円錐状のボール受け面6上には、同一円
周上に略等間隔を保つて3個以上の複数の鋼球9
が配置されている。これらの鋼球9は、ホルダー
7に対して摺動自在に装着されたリテーナ10お
よび該リテーナ内に嵌装されたコイルスプリング
11の圧縮反力により常時フランジ5のボール受
け面6に押圧されている。以上の説明から理解し
得る如く、砥石回転軸2は、ボール受け面6上に
働く鋼球9の押圧力により、力学的な安定点(ゼ
ロ点)に自動的に位置決めされる。従つて、研磨
加工に際し砥石4にワーク表面との接触に起因す
る圧縮反力が作用すると、砥石回転軸2の円錐状
受け面6は研磨工具本体1の軸心と直交するXY
平面内で移動しようとし、該移動方向に応じ鋼球
9およびリテーナ10内に嵌装されたコイルスプ
リング11は圧縮あるいは拡張される。即ち、こ
の時点で砥石回転軸2には、受け面6の傾斜角お
よびコイルスプリング11の圧縮反力に対応した
移動抵抗が発生する。またホルダー7は、ボール
スライド等の直線案内要素12により研磨工具本
体1の軸心と平行する方向即ち、Z軸方向に直線
運動し得るように構成されており、コイルスプリ
ング13により常時研磨工具本体1の先端方向に
押圧されている。従つて、砥石4に研磨工具本体
1の後端方向へ向かう接触反力が発生した場合に
は、砥石回転軸2全体が前記直線案内要素12に
案内されて砥石工具本体1内でZ軸方向に後退す
る。 On the other hand, on the conical ball receiving surface 6, three or more steel balls 9 are arranged on the same circumference at approximately equal intervals.
is located. These steel balls 9 are constantly pressed against the ball receiving surface 6 of the flange 5 by the compressive reaction force of a retainer 10 that is slidably mounted on the holder 7 and a coil spring 11 fitted within the retainer. There is. As can be understood from the above explanation, the grindstone rotating shaft 2 is automatically positioned at a dynamically stable point (zero point) by the pressing force of the steel balls 9 acting on the ball receiving surface 6. Therefore, when a compressive reaction force due to contact with the workpiece surface acts on the grinding wheel 4 during polishing, the conical receiving surface 6 of the grinding wheel rotating shaft 2 will move in the XY direction perpendicular to the axis of the polishing tool body 1.
The coil spring 11 fitted in the steel balls 9 and the retainer 10 is compressed or expanded depending on the direction of movement in a plane. That is, at this point, a movement resistance corresponding to the inclination angle of the receiving surface 6 and the compression reaction force of the coil spring 11 is generated on the grindstone rotating shaft 2. Further, the holder 7 is configured to be able to move linearly in a direction parallel to the axis of the polishing tool body 1, that is, in the Z-axis direction, by means of a linear guide element 12 such as a ball slide, and is constantly moved by a coil spring 13. 1 is pressed in the direction of the tip. Therefore, when a contact reaction force is generated on the grindstone 4 toward the rear end of the polishing tool body 1, the entire grindstone rotating shaft 2 is guided by the linear guide element 12 and rotates in the Z-axis direction within the grindstone tool body 1. retreat to.
なお、砥石回転軸2は、ホルダー7の側面に植
設したピン16と、フランジ5の側面に設けた、
前記ピン16を挿入するための、前記ピン16よ
り若干大径の孔17とからなる機構によつて廻り
止めされている。また、ホルダー7と砥石工具本
体1との間にも同様の、廻り止め機構を設ける。 Note that the grindstone rotating shaft 2 includes a pin 16 installed on the side surface of the holder 7 and a pin 16 installed on the side surface of the flange 5.
Rotation is prevented by a mechanism consisting of a hole 17 with a slightly larger diameter than the pin 16, into which the pin 16 is inserted. Further, a similar rotation prevention mechanism is provided between the holder 7 and the grindstone tool main body 1.
以上の説明で明らかな如く、砥石回転軸2に
は、ワークの研磨時に常にゼロ位置に復帰しよう
とする自己復元力が作用し、しかも該砥石回転軸
は、砥石4に与えられる抵抗の方向および大きさ
に応じてXYZの任意の方向に移動し得るように
構成されている。 As is clear from the above explanation, a self-restoring force that always tries to return to the zero position acts on the grindstone rotating shaft 2 when polishing a workpiece, and the grinding wheel rotating shaft is It is configured to be able to move in any direction of XYZ depending on its size.
また、コイルスプリング11,13には、該コ
イルスプリングの撓み量に比例した反力が発生す
るので、研磨条件の如何に拘らず砥石4に与えら
れる負荷と砥石回転軸2の変位量との間には直線
的な関係が成立している。 In addition, since a reaction force proportional to the amount of deflection of the coil springs 11 and 13 is generated, there is a difference between the load applied to the grinding wheel 4 and the displacement of the grinding wheel rotating shaft 2, regardless of the polishing conditions. A linear relationship is established.
以下、実際の研磨例について説明する。尚、本
発明の理解を容易にするため、以下の記述に於い
ては円筒形砥石の円筒面による研磨例を説明す
る。第2図に於いて参照符号Sは前工程のボール
エンドミル等の切削工具により仕上げられたワー
クの表面である。該ワークの表面Sに対して砥石
4が法線方向に該砥石4の半径rに相当する量だ
けオフセツトした状態で軌跡L0に沿つて回転し
ながら移動するものと仮定すると、該砥石4とワ
ークとの間に働く接触圧は殆どゼロとなり正常な
研磨は実行されない。つまり、砥石の半径rから
接触圧を発生せしめるたのオフセツト量(Δr)
を差し引いた(r−Δr)を研磨工具本体1のオ
フセツト量とし、該オフセツト量によつて規定さ
れる軌跡Lに沿つて砥石回転軸2を移動させるこ
とによつて初めて研磨が実行される。砥石回転軸
2の弾性変形のバネ定数をkとすると、研磨時の
接触圧Pは、
P=k・Δr ……(1)
なる一般式で表示される。砥石回転軸2の中心O
もしくはO′をLに沿つて移動させながらワーク
の表面Sを研磨する場合、接触圧を付加するため
のオフセツト量(Δr)の設定と、砥石の経時的
研磨が問題になる。ここに於いて、最適な接触圧
が実験的に前以て把握されていたとしても、実際
に接触圧を付与するのはオフセツト量(Δr)で
あるから、一般式(1)により研磨時の接触圧Pに換
算する必要がある。ところが砥石4は汎用の切削
工具に比較して剛性の低い弾性体であり、またバ
ネ定数kは、個々の砥石間で大きくバラ付いてい
るから、Δrを一律に設定することは論理上不合
理である。一方、砥石4が摩耗すると該砥石の半
径が減少するから、接触圧Pは低下する。更に該
砥石4の摩耗形態は全周に亘つて一様でなく、ワ
ークの形状により種々変化する。 An actual polishing example will be explained below. In order to facilitate understanding of the present invention, in the following description, an example of polishing using a cylindrical surface of a cylindrical grindstone will be explained. In FIG. 2, reference numeral S indicates the surface of the workpiece finished by a cutting tool such as a ball end mill in the previous process. Assuming that the grindstone 4 rotates along the locus L 0 with an offset in the normal direction to the surface S of the workpiece by an amount corresponding to the radius r of the grindstone 4, the grindstone 4 and The contact pressure acting between the workpiece and the workpiece becomes almost zero, and normal polishing is not performed. In other words, the amount of offset (Δr) required to generate contact pressure from the radius r of the grinding wheel
(r-.DELTA.r) is defined as the offset amount of the polishing tool main body 1, and polishing is performed only by moving the grindstone rotating shaft 2 along a locus L defined by the offset amount. When the spring constant of the elastic deformation of the grindstone rotating shaft 2 is k, the contact pressure P during polishing is expressed by the following general formula: P=k·Δr (1). Center O of grindstone rotation axis 2
Alternatively, when polishing the surface S of the workpiece while moving O' along L, problems arise in setting the offset amount (Δr) for applying contact pressure and polishing the grindstone over time. Here, even if the optimal contact pressure is known experimentally in advance, it is the offset amount (Δr) that actually applies the contact pressure, so the general formula (1) is used to calculate the It is necessary to convert it into contact pressure P. However, the grinding wheel 4 is an elastic body with low rigidity compared to general-purpose cutting tools, and the spring constant k varies widely between individual grinding wheels, so it is logically unreasonable to set Δr uniformly. It is. On the other hand, when the grindstone 4 wears out, the radius of the grindstone decreases, so the contact pressure P decreases. Furthermore, the wear pattern of the grindstone 4 is not uniform over the entire circumference, and varies depending on the shape of the workpiece.
本発明装置に於いては、砥石回転軸2に自由な
弾性変位を許容することにより上記接触圧を付加
するためのオフセツト量(Δr)を大まかに設定
することができるから、接触圧が設定値を上廻つ
た場合にも砥石回転軸2のゼロ位置への自己復帰
性により接触圧を自動的に所定の設定値に修正す
ることができる。また、砥石4の摩耗に対しても
予め摩耗量に相当する分だけ大きめに切込み量を
設定しておくことにより良好に対処することがで
きる。なお、以上の説明は、円筒形砥石の円筒面
でワークの表面を加工した場合であるが、第1図
に示す砥石4の先端の球形部をワークに直角に押
しつけて研磨加工する場合は、ホルダー7がZ軸
方向に変位することにより研磨加工が行なわれ
る。また、砥石4の球面部をワークの傾斜面ある
いは曲面に押しつけ場合は、上記X、Y、Z軸方
向の変位の合成作用により、同様研磨加工が行な
われる。 In the device of the present invention, the offset amount (Δr) for applying the above-mentioned contact pressure can be roughly set by allowing free elastic displacement of the grinding wheel rotating shaft 2, so that the contact pressure can be adjusted to the set value. Even when the contact pressure exceeds the above value, the contact pressure can be automatically corrected to a predetermined set value due to the self-returning property of the grindstone rotating shaft 2 to the zero position. Furthermore, wear of the grindstone 4 can be effectively counteracted by setting the depth of cut larger in advance by an amount corresponding to the amount of wear. The above explanation is for the case where the surface of the workpiece is processed with the cylindrical surface of the cylindrical grindstone, but when grinding is performed by pressing the spherical part at the tip of the grindstone 4 at right angles to the workpiece as shown in FIG. Polishing is performed by displacing the holder 7 in the Z-axis direction. Further, when the spherical portion of the grindstone 4 is pressed against the inclined or curved surface of the workpiece, the same polishing process is performed by the combined action of the displacements in the X, Y, and Z axis directions.
ハ 発明の効果
本発明によれば、砥石とワークの研磨表面との
間に接触圧を発生せしめるためのオフセツト量を
極めて容易に設定することができる。C. Effects of the Invention According to the present invention, it is possible to extremely easily set the amount of offset for generating contact pressure between the grindstone and the polished surface of the workpiece.
従つて、砥石の中心の移動軌跡、砥石の摩耗、
あるいはワークの形状変化に対応し得るように砥
石回転軸の自己復帰性の弾性変位を利用して砥石
とワークの研磨表面との間に略一定の接触圧を常
時発生せしめることができる。斯くして本発明に
係る定圧研磨装置を使用することにより、ワーク
表面の研磨精度が大幅に向上し、また研磨工程の
自由化が可能となつた。 Therefore, the movement trajectory of the center of the grinding wheel, the wear of the grinding wheel,
Alternatively, a substantially constant contact pressure can be constantly generated between the grindstone and the polishing surface of the workpiece by utilizing the self-returning elastic displacement of the grindstone rotating shaft in order to respond to changes in the shape of the workpiece. Thus, by using the constant pressure polishing apparatus according to the present invention, the polishing accuracy of the work surface can be greatly improved, and the polishing process can be liberalized.
第1図は本発明に係る定圧研磨装置の部分縦断
面図であり、第2図は円形砥石によるワーク表面
の研磨状態の模式的な説明図である。
1……研磨工具本体、2……砥石回転軸、4…
…砥石、5……フランジ、6……円錐状のボール
受け面、9……バネ付勢された鋼球。
FIG. 1 is a partial vertical cross-sectional view of a constant pressure polishing apparatus according to the present invention, and FIG. 2 is a schematic explanatory diagram of a state in which a workpiece surface is polished by a circular grindstone. 1... Polishing tool body, 2... Grindstone rotating shaft, 4...
... Grindstone, 5 ... Flange, 6 ... Conical ball receiving surface, 9 ... Spring-biased steel ball.
Claims (1)
と、上記研磨工具本体内に、研磨工具本体の軸心
方向に移動可能で、かつ、先端方向に常時弾圧付
勢されて装着されたホルダーと、上記ホルダーに
装着された砥石回転軸とからなり、上記砥石回転
軸の胴部に該砥石回転軸の軸線に対して直交する
方向に延びる円板状のフランジを形成すると共
に、該フランジの砥石側の側面に前記砥石回転軸
と軸心を一致させて円錐状のボール受け面を連接
し、上記フランジの両側面を鋼球によつてホルダ
ーの軸心に対して直交する方向に移動可能に保持
すると共に、上記円錐状のボール受け面にバネ付
勢された3個以上、等間隔に配置された鋼球を当
接させたことを特徴とする定圧研磨装置。1. A polishing tool body mounted on the main shaft of a machine tool; a holder movable in the axial direction of the polishing tool body and mounted in the polishing tool body so as to be constantly biased toward the tip; a whetstone rotating shaft attached to the holder, a disc-shaped flange extending in a direction perpendicular to the axis of the whetstone rotating shaft is formed on the body of the whetstone rotating shaft, and the whetstone side of the flange A conical ball receiving surface is connected to the side surface of the flange with its axis aligned with the grinding wheel rotation axis, and both sides of the flange are held movably in a direction perpendicular to the axis of the holder by steel balls. A constant pressure polishing device characterized in that three or more spring-biased steel balls arranged at equal intervals are brought into contact with the conical ball receiving surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11371684A JPS60259374A (en) | 1984-06-01 | 1984-06-01 | Low pressure polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11371684A JPS60259374A (en) | 1984-06-01 | 1984-06-01 | Low pressure polishing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60259374A JPS60259374A (en) | 1985-12-21 |
| JPH0420741B2 true JPH0420741B2 (en) | 1992-04-06 |
Family
ID=14619334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11371684A Granted JPS60259374A (en) | 1984-06-01 | 1984-06-01 | Low pressure polishing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60259374A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100942303B1 (en) * | 2007-12-20 | 2010-02-16 | 주식회사 에이디피엔지니어링 | Chuck support |
| CN105751054B (en) * | 2016-03-09 | 2018-11-27 | 应达利电子股份有限公司 | A kind of quartz wafer processing technology |
| TWI656938B (en) * | 2017-12-11 | 2019-04-21 | 住華科技股份有限公司 | Cutting apparatus and cutting method using the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5481590A (en) * | 1977-12-12 | 1979-06-29 | Hitachi Ltd | Profile-grinder |
-
1984
- 1984-06-01 JP JP11371684A patent/JPS60259374A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60259374A (en) | 1985-12-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4928435A (en) | Apparatus for working curved surfaces on a workpiece | |
| CA1255105A (en) | Method and apparatus for high speed profile grinding of rotation symmetrical workpieces | |
| US20070234564A1 (en) | Method and apparatus for producing blades | |
| JP3331545B2 (en) | Grinder | |
| WO2011013710A1 (en) | Grinding machine and measurement device | |
| KR102375422B1 (en) | Grinding apparatus for roll type work | |
| JP5300939B2 (en) | Machining method using finishing tools | |
| JPH0420741B2 (en) | ||
| JPH0617856U (en) | Needle tip polishing machine | |
| KR101101838B1 (en) | Spindle Taper Grinding Device for Machine Tools | |
| JPS61146471A (en) | Dressing device | |
| JP2020185660A (en) | Grinding and polishing grindstone with outer diameter increase/decrease control and grinding/polishing/honing method by grinding and polishing grindstone with outer diameter increase/decrease control | |
| JP4712586B2 (en) | NC machine tool | |
| JP7800240B2 (en) | Contact dynamic stiffness calculation system and machining system | |
| JPH04183569A (en) | Self profiling polishing equipment | |
| JP7775391B1 (en) | polishing tools | |
| JPH10118843A (en) | Screw grinding method and screw grinding attachment | |
| JPS60263662A (en) | Surface polishing method and device | |
| JPH012863A (en) | Grindstone forming method and device | |
| JPH06226606A (en) | Offline rolling roll grinding machine | |
| JPS5939268B2 (en) | Grindstone shaping device | |
| JPH0314286Y2 (en) | ||
| JPH0248157A (en) | Curved surface forming method | |
| JP3074580B2 (en) | Deburring grinding device | |
| JP2025104710A (en) | Workpiece rotation runout analysis system and machining system |