JPH0421609B2 - - Google Patents
Info
- Publication number
- JPH0421609B2 JPH0421609B2 JP25691085A JP25691085A JPH0421609B2 JP H0421609 B2 JPH0421609 B2 JP H0421609B2 JP 25691085 A JP25691085 A JP 25691085A JP 25691085 A JP25691085 A JP 25691085A JP H0421609 B2 JPH0421609 B2 JP H0421609B2
- Authority
- JP
- Japan
- Prior art keywords
- molding
- optical glass
- press
- mold
- platinum group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000465 moulding Methods 0.000 claims description 44
- 239000005304 optical glass Substances 0.000 claims description 37
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 24
- 229910045601 alloy Inorganic materials 0.000 claims description 22
- 239000000956 alloy Substances 0.000 claims description 22
- 150000004767 nitrides Chemical class 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- 239000011651 chromium Substances 0.000 claims description 6
- 239000010955 niobium Substances 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 3
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 3
- 239000011521 glass Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 230000003746 surface roughness Effects 0.000 description 6
- 229910052788 barium Inorganic materials 0.000 description 5
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 5
- 239000005388 borosilicate glass Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 229910052746 lanthanum Inorganic materials 0.000 description 4
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 4
- -1 Nitrogen ions Chemical class 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 1
- 229910001105 martensitic stainless steel Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/26—Mixtures of materials covered by more than one of the groups C03B2215/16 - C03B2215/24, e.g. C-SiC, Cr-Cr2O3, SIALON
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Description
産業上の利用分野
本発明はレンズやプリズム等の光学ガラス素子
の製造において、プレス成形後の研磨工程を必要
としない高精度光学ガラス素子の成形方法に関す
るものである。
従来の技術
近年、光学ガラスレンズは光学機器のレンズ構
成の簡略化とレンズ部分の軽量化の両方を同時に
達成しうる非球面化の方向にある。この非球面レ
ンズの製造にあたつては、従来の光学レンズの製
造方法である研磨法では、加工および量産化が困
難であり、直接プレス成形法が有望視されてい
る。
この直接プレス成形法というのは、予め所望の
面品質および面精度に仕上げた非球面形状のモー
ルド上で、光学ガラスの塊状物を加熱加圧成形す
るか、あるいは予め加熱した光学ガラスの塊状物
を加熱加圧成形を行ない、それ以後の研磨工程を
必要としないで光学ガラスレンズを製造する方法
である。（例えば、特公昭54−38126号公報）
発明が解決しようとする問題点
しかしながら、上記の光学ガラスレンズの製造
において、プレス成形によつて得られた光学ガラ
スレンズの像形成性能が優れている必要があり、
特に非球面レンズの場合、非常に高い面精度であ
ることが要求される。したがつて、光学ガラス素
子の成形用型として、高温下で光学ガラスに対す
る化学作用が最小であること、型のプレス面に引
つかき傷やすり傷の損傷を受けにくいこと、プレ
ス成形によつて高い面精度が変化しないことなど
の性質を有している必要がある。
この目的のために種々の材料が検討されている
が、従来の型材料は光学ガラスとの難反応性、耐
酸化性、高温高強度等の必要条件を十分に満足し
ていない。光学ガラスに対する難反応性、耐酸化
性の優れた型材料として、白金族合金をコーテイ
ングした型が有望視されている。
白金族元素は光学ガラスに対する難反応性、耐
酸化性の点から、他の金属材料、セラミツクス等
よりすぐれているが、白金族元素の硬度は低い方
の部類に属する。白金族元素同志で合金化すれ
ば、白金族元素単独の場合よりも硬度は大きくな
る。しかしながら、例えばホウケイ酸バリウムガ
ラスのように軟化点が700℃を超える光学ガラス
を多数回プレス成形したならば、白金族合金で被
覆した成形用型でさえ、若干ではあるが、その表
面状態が変化する。すなわち、プレス成形面であ
る白金族合金薄膜の高精度な面精度および面粗度
が変化する。軟化点が700℃を超える光学ガラス
を高精度にプレス成形するためには、プレス成形
用型は高温でも、高硬度である、光学ガラスと反
応しない、耐酸化性が優れている等の性質を備え
ていなければならない。
問題点を解決するための手段
本発明は前記問題点を解決するために、光学ガ
ラスを加熱加圧して精密成形する方法において、
白金族合金にチタン（Ti），クロム（Cr），タン
タル（Ta），ニオブ（Nb），シリコン（Si），ホ
ウ素（Ｂ），アルミニウム（Al），ハフニウム
（Hf），ジルコニウム（Zr），またはバナジウム
（Ｖ）との窒化物を少なくとも１種類0.01〜10重
量％分散させた薄膜で被覆したプレス成形用型を
用いた光学ガラス素子の成形方法を提供するもの
である。
作 用
発明者らは、研究の結果、光学ガラスを加熱加
圧して精密成形する方法において、白金族合金に
チタン（Ti），クロム（Cr），タンタル（Ta），
ニオブ（Nb），シリコン（Si），ホウ素（Ｂ），ア
ルミニウム（Al），ハフニウム（Hf），ジルコニ
ウム（Zr），またはバナジウム（Ｖ）との窒化物
の中から選ばれた少なくとも１種類を0.01〜10重
量％分散させた薄膜で被覆したプレス成形用型を
用いることに、ホウケイ酸ガラス、ホウケイ酸バ
リウムガラス，ランタンガラスのように軟化点が
700℃を超える光学ガラスのプレス成形が可能に
なる。
窒化物は共有結合性化合物であるため、高温に
おいても安定であり、高強度の化合物である。こ
の窒化物を白金族合金中に分散させることによ
り、白金族合金薄膜の粒界を強化して、高温にお
いても高強度，高硬度であるため、プレス成形面
の高精度な表面形状が維持される。また、白金族
合金中に窒化物を分散させることにより、白金族
合金薄膜の構成粒子を微細化、緻密化し、プレス
成形面の面粗度をさらに小さくする効果もある。
なお、本発明で白金族合金中に分散させた窒化
量を0.01〜10重量％に規定したのは、0.01重量％
よりも少なければ上記効果が小さくなるからであ
り、10重量％より多ければ光学ガラスと薄膜とが
反応しやすくなつたり、光学ガラスが失透しやす
くなるからである。また、本発明では成形用型の
母材を特に規定していないが、母材としては耐酸
化性、耐熱性、加工性、高温強度の優れた材料で
あればよく、例えばマルテンサイトステンレス
鋼，オーステナイト鋼，タングステン合金，超硬
合金，サーメツト，モリブデン，ガラス状炭素，
ジルコニア，炭化ケイ素などを用いることができ
る。
実施例
以下実施例を示す。
（実施例 １）
第１図は、本発明に用いたプレス成形用型の上
型１および下型２の斜視図である。上下両型１お
よび２ともに、オーステナイト鋼（たとえば
SUS310）の円柱状素材を用い、上型１には曲率
半径が46mmの凹型の成形面４とその周縁にＶ形切
欠き３を複数個設け、下型２には曲率半径が200
mmの凹型の成形面５をそれぞれ成形した。これら
の成形面４および５を超微細なダイヤモンドの紛
末を用いてラツピングし、約２時間で表面の最大
粗さ（Rmax）が100Åの鏡面にした。鏡面とな
つた成形面４および５の表面に、第１表に示す各
種組成の白金族合金に各種金属を添加した膜厚
800Åの薄膜をスパツタ法により形成した。この
薄膜に加速電圧50KVで1014イオン／cm2で窒素イ
オン（N2 +）を注入して、添加した金属を窒化物
に変化させた。このような方法により光学ガラス
素子の成形用上型１および下型２を得た。
第２図は、上述のガラスプレス成形用型１およ
び２の外径面にそれぞれ加熱器６および７を巻き
つけ、プレスの上下のプランジヤ８および９に取
りつけた一部破断面である。同図において、シリ
カ（SiO2）30重量パーセント、酸化バリウム
（BaO）50重量パーセント、ホウ酸（B2O3）15重
量パーセント、残部が微量成分からなるホウケイ
酸バリウムガラス塊１０は、原料供給治具１１で
把持されて、予備加熱炉１２により780℃に加熱
されたのち、温度730℃に昇温されたガラスプレ
ス成形用型１および２の間で、プレス圧力40Kg／
cm2でプレス成形される。そのまま温度400℃まで
上下の型とともに冷却された成形レンズは上部プ
ランジヤ８を戻した後、取り出し口１３から取り
出した。
このような工程によつて、第１表に示す諸種の
薄膜をコーテイングした成形用型を用いて、100
回のガラスプレス成形を行なつた後、型の成形面
４および５の表面粗さ（Rmax）および微小ビツ
カース硬度（Hv）と成形されたレンズの表面状
態の観察した結果を第１表に示した。
第１表から明らかなように、白金族合金に窒化
物を分散させた薄膜をオーステナイト鋼にコーテ
イングした成形用型は、100回ホウケイ酸バリウ
ムガラスをプレス成形した後においてもその成形
面は面荒れを起こしていなかつた。また、成形用
型の微小ビツカース硬度は800前後と非常に高硬
度を示しており、微細なキズも発生していなかつ
た。成形した光学ガラスレンズの面精度は変化し
ておらず、その光学性能は極めて優れていた。
窒化物を含まない白金族合金薄膜の場合、比較
例から明らかなように、成形用型の成形面が極め
てわずかであるが荒れており、成形した光学ガラ
スレンズの光学性能も若干低下していた。
INDUSTRIAL APPLICATION FIELD The present invention relates to a method for molding high-precision optical glass elements that does not require a polishing step after press molding in the manufacture of optical glass elements such as lenses and prisms. BACKGROUND OF THE INVENTION In recent years, optical glass lenses have been trending toward aspheric surfaces that can simultaneously simplify the lens structure of optical equipment and reduce the weight of the lens portion. When manufacturing this aspherical lens, processing and mass production are difficult using the polishing method, which is a conventional method for manufacturing optical lenses, and direct press molding is viewed as promising. This direct press molding method involves heating and press-molding a lump of optical glass on an aspherical mold that has been finished with the desired surface quality and surface precision in advance, or molding a lump of optical glass that has been heated in advance. This is a method of manufacturing optical glass lenses by performing heating and pressure molding without requiring a subsequent polishing process. (For example, Japanese Patent Publication No. 54-38126) Problems to be Solved by the Invention However, in manufacturing the above-mentioned optical glass lenses, it is necessary that the optical glass lenses obtained by press molding have excellent image forming performance. There is,
Especially in the case of an aspherical lens, extremely high surface precision is required. Therefore, as a mold for molding optical glass elements, it is recommended that the chemical action on the optical glass be minimal at high temperatures, that it will not be easily damaged by scratches or abrasions due to sticking to the pressing surface of the mold, and that it will be suitable for press molding. It must have properties such as high surface accuracy and no change. Various materials have been studied for this purpose, but conventional mold materials do not sufficiently satisfy the requirements such as low reactivity with optical glass, oxidation resistance, and high strength at high temperatures. Molds coated with platinum group alloys are considered promising as mold materials with excellent reactivity and oxidation resistance for optical glass. Platinum group elements are superior to other metal materials, ceramics, etc. in terms of low reactivity with optical glass and oxidation resistance, but the hardness of platinum group elements is in the low category. If platinum group elements are alloyed together, the hardness will be greater than in the case of platinum group elements alone. However, if an optical glass with a softening point exceeding 700°C, such as barium borosilicate glass, is press-molded many times, even a mold coated with a platinum group alloy will change its surface condition, albeit slightly. do. That is, the highly accurate surface accuracy and surface roughness of the platinum group alloy thin film, which is the press-molded surface, changes. In order to press-form optical glass with a softening point of over 700°C with high precision, the press-molding mold must have properties such as high hardness, no reaction with optical glass, and excellent oxidation resistance even at high temperatures. Must be prepared. Means for Solving the Problems In order to solve the above problems, the present invention provides a method for precisely molding optical glass by heating and pressurizing it.
Platinum group alloys include titanium (Ti), chromium (Cr), tantalum (Ta), niobium (Nb), silicon (Si), boron (B), aluminum (Al), hafnium (Hf), zirconium (Zr), or The present invention provides a method for molding an optical glass element using a press molding die coated with a thin film in which at least one type of nitride of vanadium (V) is dispersed in an amount of 0.01 to 10% by weight. Function As a result of research, the inventors discovered that titanium (Ti), chromium (Cr), tantalum (Ta),
At least one nitride selected from niobium (Nb), silicon (Si), boron (B), aluminum (Al), hafnium (Hf), zirconium (Zr), or vanadium (V) at 0.01 By using a press-molding mold coated with a thin film containing ~10% by weight, it is possible to reduce the softening point of glass such as borosilicate glass, barium borosilicate glass, and lanthanum glass.
It becomes possible to press-form optical glass at temperatures exceeding 700℃. Since nitride is a covalent compound, it is stable even at high temperatures and is a high-strength compound. By dispersing this nitride in the platinum group alloy, the grain boundaries of the platinum group alloy thin film are strengthened, resulting in high strength and high hardness even at high temperatures, so the highly accurate surface shape of the press forming surface is maintained. Ru. Further, by dispersing nitrides in the platinum group alloy, the constituent particles of the platinum group alloy thin film are made finer and denser, and the surface roughness of the press-formed surface is further reduced. In addition, in the present invention, the amount of nitridation dispersed in the platinum group alloy is defined as 0.01 to 10% by weight, which is 0.01% by weight.
This is because if the amount is less than 10% by weight, the above effect will be reduced, and if it is more than 10% by weight, the optical glass and the thin film will tend to react or the optical glass will tend to devitrify. Further, the present invention does not particularly specify the base material of the mold, but the base material may be any material that has excellent oxidation resistance, heat resistance, workability, and high temperature strength, such as martensitic stainless steel, Austenitic steel, tungsten alloy, cemented carbide, cermet, molybdenum, glassy carbon,
Zirconia, silicon carbide, etc. can be used. Examples Examples will be shown below. (Example 1) FIG. 1 is a perspective view of an upper die 1 and a lower die 2 of a press molding die used in the present invention. Both types 1 and 2 are made of austenitic steel (e.g.
Using a cylindrical material of SUS310), the upper mold 1 has a concave molding surface 4 with a radius of curvature of 46 mm and a plurality of V-shaped notches 3 around its periphery, and the lower mold 2 has a radius of curvature of 200 mm.
A concave molding surface 5 of mm was molded. These molded surfaces 4 and 5 were lapped using ultrafine diamond powder to give mirror surfaces with a maximum surface roughness (Rmax) of 100 Å in about 2 hours. Film thicknesses of platinum group alloys with various compositions shown in Table 1 with various metals added to the surfaces of molded surfaces 4 and 5, which have become mirror surfaces, are
A thin film of 800 Å was formed by sputtering. Nitrogen ions (N 2 + ) were implanted into this thin film at an acceleration voltage of 50 KV at a rate of 10 14 ions/cm 2 to convert the added metal into nitride. An upper mold 1 and a lower mold 2 for molding an optical glass element were obtained by such a method. FIG. 2 shows a partially broken surface of the above-described glass press molding molds 1 and 2, with heaters 6 and 7 wound around the outer diameter surfaces, respectively, and attached to upper and lower plungers 8 and 9 of the press. In the figure, a barium borosilicate glass lump 10 consisting of 30% by weight of silica (SiO 2 ), 50% by weight of barium oxide (BaO), 15% by weight of boric acid (B 2 O 3 ), and the remainder being trace components, is supplied as a raw material. After being gripped by the jig 11 and heated to 780°C in the preheating furnace 12, a press pressure of 40 kg/
Press molded in cm2 . The molded lens, which had been cooled to a temperature of 400° C. together with the upper and lower molds, was taken out from the take-out port 13 after returning the upper plunger 8. Through this process, using molds coated with the various thin films shown in Table 1, 100
Table 1 shows the observation results of the surface roughness (Rmax) and minute Vickers hardness (Hv) of the molding surfaces 4 and 5 of the mold after glass press molding was performed, as well as the surface condition of the molded lens. Ta. As is clear from Table 1, a molding die in which austenitic steel is coated with a thin film of nitride dispersed in a platinum group alloy has a roughened molding surface even after press-molding barium borosilicate glass 100 times. I hadn't woken up. Furthermore, the mold had a very high microscopic Vickers hardness of around 800, and no minute scratches were observed. The surface precision of the molded optical glass lens did not change, and its optical performance was extremely excellent. In the case of a platinum group alloy thin film that does not contain nitrides, as is clear from the comparative example, the molding surface of the mold was extremely slightly rough, and the optical performance of the molded optical glass lens was slightly degraded. .
【表】【table】
【表】
（実施例 ２）
超硬合金（WC）を実施例１と同様の形状に加
工し、成形面４および５を超微細なダイヤモンド
紛末でラツピングし、約１時間で表面の最大粗さ
（Rmax）が約100Åの鏡面にした。第２表に示す
各種組成の白金族合金に各種金属を添加した膜厚
約800Åの薄膜をスパツタ法により形成した。こ
の薄膜に加速電圧50KVで1014イオン／cm2で窒素
イオン（N2 +）を注入して、添加した金属を窒化
物にした。このような方法で光学ガラス素子の成
形用上型１および下型２を得た。
実施例１と同様の方法で、シリカ（SiO2）10
重量パーセント、酸化バリウム（BaO）25重量
パーセント、ホウ酸（B2O3）30重量パーセント、
酸化ランタン（La2O3）20重量パーセント、残部
が微量成分からなるランタン系光学ガラスを、予
備加熱温度750℃、成形温度710℃、プレス圧力40
Kg／cm2、プレス時間２分間の条件でプレス成形を
行ない、成形レンズを400℃で取り出した。
第２表に示す諸種の薄膜をコーテイングした成
形用型を用いて、100回のガラスプレス成形を行
なつた後、型の成形面４および５の最面粗さ
（Rmax）および微小ビツカース硬度（Hv）と成
形されたガラスレンズの表面状態の観察結果を第
２表に示した。
第２表から明らかなように、白金族合金に窒化
物を分散させた薄膜を超硬合金にコーテイングし
た成形用型は、100回ランタン系光学ガラスをプ
レス成形した後においても、その成形面は面荒れ
を起こしていなかつた。また、成形用型の微小ビ
ツカース硬度は約800と非常に高い硬度を示して
おり、成形面に微細なキズは発生していなかつ
た。成形した光学ガラスレンズは成形用型の高精
度な面形状を転写されたものであり、光学性能の
極めて優れたものであつた。
これに対して、窒化物を含まない白金族合金薄
膜をコーテイングした場合、第２表の比較例から
明らかなように、成形用型の成形面が極めてわず
かではあるが荒れており、成形した光学ガラスレ
ンズの光学性能も若干低下していた。
なお、白金族合金組成は、本発明の実施例１お
よび２で用いた合金組成に限定されるものではな
く、その他の合金組成の場合でも同様の結果が得
られた。
実施例１および２で、１ないし４種類の窒化物
を白金族合金に分散させた場合を示したが、５種
類以上の窒化物を分散させた場合も同様の効果が
得られた。本実施例では、白金族合金に添加した
金属に窒素イオンをイオン注入することにより窒
化物を作製したが、白金族合金ターゲツトおよび
窒化物ターゲツトをスパツトすることによつても
本発明と同様の成形用型を作製することが可能で
ある。[Table] (Example 2) Cemented carbide (WC) was processed into the same shape as in Example 1, and the molded surfaces 4 and 5 were wrapped with ultrafine diamond powder, and the maximum surface roughness was achieved in about 1 hour. A mirror surface with an Rmax of approximately 100 Å was used. Thin films with a thickness of about 800 Å were formed by adding various metals to platinum group alloys having various compositions shown in Table 2 by sputtering. Nitrogen ions (N 2 + ) were implanted into this thin film at an acceleration voltage of 50 KV at a rate of 10 14 ions/cm 2 to convert the added metal into nitride. In this manner, an upper mold 1 and a lower mold 2 for molding an optical glass element were obtained. Silica (SiO 2 ) 10
Weight percent, barium oxide (BaO) 25 weight percent, boric acid (B 2 O 3 ) 30 weight percent,
Lanthanum-based optical glass consisting of 20% by weight of lanthanum oxide (La 2 O 3 ) and the remainder being trace components was heated at a preheating temperature of 750°C, a molding temperature of 710°C, and a press pressure of 40°C.
Press molding was carried out under the conditions of Kg/cm 2 and press time of 2 minutes, and the molded lens was taken out at 400°C. After performing glass press molding 100 times using molds coated with various thin films shown in Table 2, the maximum surface roughness (Rmax) of molding surfaces 4 and 5 of the mold and the micro-Vickers hardness ( Table 2 shows the observation results of Hv) and the surface condition of the molded glass lens. As is clear from Table 2, even after press-molding lanthanum-based optical glass 100 times, the molding surface of a mold in which cemented carbide is coated with a thin film of nitride dispersed in platinum group alloy remains unchanged. I didn't get irritated. Furthermore, the mold had a very high microscopic Vickers hardness of about 800, and there were no minute scratches on the molding surface. The molded optical glass lens had a highly accurate surface shape transferred from the mold, and had extremely excellent optical performance. On the other hand, when coating a platinum group alloy thin film that does not contain nitrides, as is clear from the comparative example in Table 2, the molding surface of the molding die was extremely slightly rough, and the molded optical The optical performance of the glass lens was also slightly degraded. Note that the platinum group alloy composition is not limited to the alloy compositions used in Examples 1 and 2 of the present invention, and similar results were obtained with other alloy compositions. In Examples 1 and 2, cases where one to four types of nitrides were dispersed in a platinum group alloy were shown, but similar effects were obtained when five or more types of nitrides were dispersed. In this example, a nitride was produced by ion-implanting nitrogen ions into a metal added to a platinum group alloy, but the same method as in the present invention can also be achieved by sputtering a platinum group alloy target and a nitride target. It is possible to make a mold.
【表】【table】
【表】【table】
【表】
発明の効果
以上説明したように、本発明によれば、従来の
光学ガラス素子の成形方法に比べて、ホウケイ酸
バリウム光学ガラスあるいはランタン系光学ガラ
ス等の軟化点が700℃を超える光学ガラスを非常
に高精度にプレス成形できる。
100回のプレス成形が可能な長寿命な成形用型
により、型の交換回数が大幅に減り、高精度な光
学ガラス素子の大量生産を可能にし、生産性の向
上と製造コストの低減に著しい効果がある。[Table] Effects of the Invention As explained above, according to the present invention, compared to the conventional molding method for optical glass elements, it is possible to mold optical glass elements such as barium borosilicate optical glass or lanthanum-based optical glass whose softening point exceeds 700°C. Glass can be press-molded with extremely high precision. The long-life mold that can be press-molded 100 times significantly reduces the number of mold replacements, making it possible to mass-produce high-precision optical glass elements, and significantly improving productivity and reducing manufacturing costs. There is.
第１図は本発明に用いたガラスプレス成形用型
の斜視図、第２図は第１図の成形用型を取り付け
たプレス装置のプランジヤ部の一部破断面であ
る。
１……上型、２……下型、３……切欠き、４，
５……成形面、６，７……加熱器、８，９……プ
ランジヤ、１０……光学ガラス塊、１１……原料
供給治具、１２……予備加熱炉、１３……取出し
口。
FIG. 1 is a perspective view of a glass press molding die used in the present invention, and FIG. 2 is a partially broken cross section of the plunger portion of a press device to which the molding die of FIG. 1 is attached. 1... Upper mold, 2... Lower mold, 3... Notch, 4,
5... Molding surface, 6, 7... Heater, 8, 9... Plunger, 10... Optical glass lump, 11... Raw material supply jig, 12... Preheating furnace, 13... Takeout port.
Claims (1)
0.01〜10重量％分散させた薄膜で被覆したプレス
成形用型を用いて光学ガラス素子を加熱加圧して
精密成形することを特徴とする光学ガラス素子の
成形方法。 ２ 窒化物が、チタン（Ti），クロム（Cr），タ
ンタル（Ta），ニオブ（Nb），シリコン（Si），
ホウ素（Ｂ）アルミニウム（Al），ハフニウム，
（Hf），ジルコニウム（Zr），またはバナジウム
（Ｖ）との窒化物であることを特徴とする特許請
求の範囲第１項記載の光学ガラス素子の成形方
法。[Claims] 1. Platinum group alloy containing at least one type of nitride
A method for molding an optical glass element, which comprises precision molding an optical glass element by heating and pressurizing it using a press molding mold coated with a thin film containing 0.01 to 10% by weight of the dispersed material. 2 Nitride is titanium (Ti), chromium (Cr), tantalum (Ta), niobium (Nb), silicon (Si),
Boron (B) Aluminum (Al), Hafnium,
2. The method for molding an optical glass element according to claim 1, wherein the nitride is a nitride of (Hf), zirconium (Zr), or vanadium (V).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60256910A JPS62119128A (en) | 1985-11-15 | 1985-11-15 | Forming of optical glass element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60256910A JPS62119128A (en) | 1985-11-15 | 1985-11-15 | Forming of optical glass element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62119128A JPS62119128A (en) | 1987-05-30 |
| JPH0421609B2 true JPH0421609B2 (en) | 1992-04-13 |
Family
ID=17299083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60256910A Granted JPS62119128A (en) | 1985-11-15 | 1985-11-15 | Forming of optical glass element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62119128A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI240704B (en) | 2003-12-26 | 2005-10-01 | Asia Optical Co Inc | Molding die for molding glass |
| JP5709238B2 (en) * | 2010-01-28 | 2015-04-30 | 独立行政法人産業技術総合研究所 | Mold with release film |
-
1985
- 1985-11-15 JP JP60256910A patent/JPS62119128A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62119128A (en) | 1987-05-30 |
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