JPH0421839Y2 - - Google Patents

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Publication number
JPH0421839Y2
JPH0421839Y2 JP12964186U JP12964186U JPH0421839Y2 JP H0421839 Y2 JPH0421839 Y2 JP H0421839Y2 JP 12964186 U JP12964186 U JP 12964186U JP 12964186 U JP12964186 U JP 12964186U JP H0421839 Y2 JPH0421839 Y2 JP H0421839Y2
Authority
JP
Japan
Prior art keywords
reaction chamber
diethylzinc
gas
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12964186U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339200U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12964186U priority Critical patent/JPH0421839Y2/ja
Publication of JPS6339200U publication Critical patent/JPS6339200U/ja
Application granted granted Critical
Publication of JPH0421839Y2 publication Critical patent/JPH0421839Y2/ja
Expired legal-status Critical Current

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  • Paper (AREA)
JP12964186U 1986-08-26 1986-08-26 Expired JPH0421839Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12964186U JPH0421839Y2 (2) 1986-08-26 1986-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12964186U JPH0421839Y2 (2) 1986-08-26 1986-08-26

Publications (2)

Publication Number Publication Date
JPS6339200U JPS6339200U (2) 1988-03-14
JPH0421839Y2 true JPH0421839Y2 (2) 1992-05-19

Family

ID=31026391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12964186U Expired JPH0421839Y2 (2) 1986-08-26 1986-08-26

Country Status (1)

Country Link
JP (1) JPH0421839Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61145099U (2) * 1985-02-28 1986-09-06

Also Published As

Publication number Publication date
JPS6339200U (2) 1988-03-14

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